Development of near-field fluorescence thermal sensing technique for nano-scale patterning

• Project/Area Number: 23686036
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Thermal engineering
• Research Institution: Keio University
• Principal Investigator: TAGUCHI Yoshihiro 慶應義塾大学, 理工学部, 准教授 (30433741)
• Project Period (FY): 2011-04-01 – 2015-03-31
• Project Status: Completed (Fiscal Year 2014)
• Budget Amount: ¥27,430,000 (Direct Cost: ¥21,100,000、Indirect Cost: ¥6,330,000); Fiscal Year 2014: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2013: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000); Fiscal Year 2012: ¥7,020,000 (Direct Cost: ¥5,400,000、Indirect Cost: ¥1,620,000); Fiscal Year 2011: ¥10,660,000 (Direct Cost: ¥8,200,000、Indirect Cost: ¥2,460,000)
• Keywords: 近接場光 / 自己組織化単分子膜 / 熱的脱離 / パターニング / 熱工学 / 熱物性 / ナノパターニング / ナノ熱工学 / 蛍光寿命 / 計測技術

Outline of Final Research Achievements

In this study, the high-sensitive near-field optics thermal sensing technique has been developed for the nano-scale patterning of the self-assembled monolayers using the near-field photothermal effect. The validity of the proposed method by using the high-efficient near-field optical fiber probe and the ultra-flat membrane has been analytically and experimentally confirmed for the first time.

Research Products

• [Journal Article] Micro optical diffusion sensor using a comb-driven micro Fresnel mirror (2015)
  • Author(s): Matoba, Y., Taguchi, Y., and Nagasaka, Y.
  • Journal Title: Optics Express Volume: 23 Issue: 1 Pages: 477-483
  • DOI: 10.1364/oe.23.000477
  • Peer Reviewed / Open Access / Acknowledgement Compliant
• [Journal Article] Numerical analysis of the temperature dependence of near-field polarization for nanoscale thermometry using a triple-tapered near-field optical fiber probe (2014)
  • Author(s): Nitta, J., Taguchi, Y., Saiki, T. and Nagasaka, Y.
  • Journal Title: Journal of Optics Volume: 16 Issue: 3 Pages: 035001-035001
  • DOI: 10.1088/2040-8978/16/3/035001
  • Peer Reviewed
• [Journal Article] FDTD法を用いた近接場フォトサーマル効果のナノスケール温度分布解析 (2013)
  • Author(s): 福山祥平, 田口良広
  • Journal Title: 日本機械学会論文集（B編） Volume: 79 Pages: 2254-2263
  • NAID: 130003386324
  • Peer Reviewed
• [Journal Article] Near-field fluorescence thermometry using highly efficient triple-tapered near-field optical fiber probe (2012)
  • Author(s): T. Fujii
  • Journal Title: Rev. Sci. Instrum Volume: 83 Issue: 12 Pages: 1-8
  • DOI: 10.1063/1.4769057
  • Peer Reviewed
• [Journal Article] Development of Interferometrical Excitation Device for Micro Optical Diffusion Sensor Using Laser-induced Dielectrophoresis (2012)
  • Author(s): T.Oka
  • Journal Title: Journal of Microelectromechanical Systems Volume: 21 Issue: 2 Pages: 324-330
  • DOI: 10.1109/jmems.2011.2176922
  • Peer Reviewed
• [Journal Article] Fusion-spliced Near-field Optical Fiber Probe Using Photonic Crystal Fiber for Nanoscale Thermometry Based on Fluorescence-Lifetime Measurement of Quantum Dots (2011)
  • Author(s): T.Fujii
  • Journal Title: Sensors Volume: 11 Issue: 9 Pages: 8358-8369
  • DOI: 10.3390/s110908358
  • Peer Reviewed
• [Journal Article] Study on Nanoscale Temperature Distribution for the Patterning of Self-Assembled Monolayers Using Near-Field Photothermal Desorption (2011)
  • Author(s): Y.Yamamoto
  • Journal Title: Journal of Thermal Science and Technology Volume: 6 Pages: 436-448
  • Peer Reviewed
• [Presentation] 高速かつ非接触なin situ測定を実現する光学式ハンドヘルド粘性センサーの開発 (2014)
  • Author(s): スウィセン賢，田口良広，長坂雄次
  • Organizer: 第35回日本熱物性シンポジウム
  • Place of Presentation: 東京工業大学 （東京都目黒区）
  • Year and Date: 2014-11-22 – 2014-11-24
• [Presentation] スパッタ成膜水素化アモルファスシリコンを用いた光学式小型拡散センサーの開発 (2014)
  • Author(s): 鎌田慎，山田幹，田口良広，長坂雄次
  • Organizer: 第35回日本熱物性シンポジウム
  • Place of Presentation: 東京工業大学 （東京都目黒区）
  • Year and Date: 2014-11-22 – 2014-11-24
• [Presentation] 新たな干渉励起方法を用いた光MEMS拡散センサーの開発 (2014)
  • Author(s): 深田一路，*田口良広，長坂雄次
  • Organizer: 第35回日本熱物性シンポジウム
  • Place of Presentation: 東京工業大学 （東京都目黒区）
  • Year and Date: 2014-11-22 – 2014-11-24
• [Presentation] 光学式マイクロ拡散センサの高感度化に関する研究 (2014)
  • Author(s): 高羽芳彰，鎌田慎，山田幹，田口良広，長坂雄次
  • Organizer: 日本機械学会熱工学コンファレンス2014
  • Place of Presentation: 芝浦工業大学 （東京都江東区）
  • Year and Date: 2014-11-08 – 2014-11-09
• [Presentation] Study on Temperature Dependence of Near-field Polarization on Nanostructure for Optical Nanoscale Thermometry (2014)
  • Author(s): Kishimoto, S., Taguchi, Y., Saiki, T., and Nagasaka, Y.
  • Organizer: The 20th European Conference on Thermophysical Properties
  • Place of Presentation: Porto (Portugal)
  • Year and Date: 2014-08-31 – 2014-09-04
• [Presentation] Development of Optical Hand-held Viscosity Sensor for in situ Measurement Utilizing Laser-induced Capillary Wave Method (2014)
  • Author(s): Swysen, K., Taguchi, Y., and Nagasaka, Y.
  • Organizer: The 20th European Conference on Thermophysical Properties
  • Place of Presentation: Porto (Portugal)
  • Year and Date: 2014-08-31 – 2014-09-04
• [Presentation] Development of nanoscale thermometry by fluorescence lifetime measurement in near-field using time correlated single photon counting (2014)
  • Author(s): Seto, D., Taguchi, Y., Saiki, T., and Nagasaka, Y.
  • Organizer: Optical MEMS and Nanophotonics Conference 2014
  • Place of Presentation: Glasgow (Scotland)
  • Year and Date: 2014-08-17 – 2014-08-21
• [Presentation] アンテナ型開口プローブを用いた近接場フォトサーマル効果による自己組織化単分子膜のナノスケールパターニング手法の開発 (2014)
  • Author(s): 神出真緒，福山祥平，田口良広
  • Organizer: 第51回日本伝熱シンポジウム
  • Place of Presentation: アクトシティ浜松 （静岡県浜松市）
  • Year and Date: 2014-05-21 – 2014-05-24
• [Presentation] 近接場蛍光寿命を用いたナノスケール温度分布イメージングシステムの開発 (2014)
  • Author(s): 瀬戸大地，日守錬，田口良広，斎木敏治，長坂雄次
  • Organizer: 第51回日本伝熱シンポジウム
  • Place of Presentation: アクトシティ浜松 （静岡県浜松市）
  • Year and Date: 2014-05-21 – 2014-05-24
• [Presentation] 偏光近接場光学熱顕微鏡を用いたナノスケール温度センシングに関する研究 ―近接場領域における偏光面回転の検出― (2013)
  • Author(s): 新田淳平，岸本祥，田口良広，斎木敏治，長坂雄次
  • Organizer: 第50回日本伝熱シンポジウム
  • Place of Presentation: 仙台
• [Presentation] 時間相関単一光子計数法を用いた近接場蛍光寿命測定によるナノスケール温度測定手法の開発 (2013)
  • Author(s): 瀬戸大地，田口良広，斎木敏治，長坂雄次
  • Organizer: 第50回日本伝熱シンポジウム
  • Place of Presentation: 仙台
• [Presentation] EXPERIMENTAL STUDY ON NANOSCALE TEMPERATURE MEASUREMENT METHOD USING ROTATION OF NEAR-FIELD POLARIZATION (2013)
  • Author(s): Nitta, J., Kishimoto, S., Taguchi, Y., Saiki, T. and Nagasaka, Y.
  • Organizer: Optical MEMS and Nanophotonics 2013
  • Place of Presentation: 金沢
• [Presentation] Analysis of Near-field Photothermal Heating for Nanoscale Patterning of SAM (2013)
  • Author(s): Fukuyama, S., Taguchi, Y. and Nagasaka, Y.
  • Organizer: The 10th Asian Thermophysical Properties Conference
  • Place of Presentation: Jeju, Korea
• [Presentation] Development of Local Temperature Measurement Technique Using Near-field Polarization (2013)
  • Author(s): Kishimoto, S., Nitta, J., Taguchi, Y. and Nagasaka, Y.
  • Organizer: The 4th International Symposium on Micro and Nano Technology
  • Place of Presentation: Shanghai, China
• [Presentation] Development of Nanoscale Temperature Measurement Method by Polarized Near-field Light under High Vacuum (2012)
  • Author(s): J. Nitta
  • Organizer: 18th Symposium on Thermophysical Properties
  • Place of Presentation: アメリカ コロラド州ボルダ―
• [Presentation] Development of Novel Near-field Optical Fiber Probe Using Photonic Crystal Fiber for Highly Sensitive Fluorescence Lifetime Measurement (2012)
  • Author(s): D. Seto
  • Organizer: The 2012 International Conference on Solid State Devices and Materials (SSDM2012)
  • Place of Presentation: 京都府京都市
• [Presentation] 近接場光熱脱離を利用した自己組織化単分子膜のナノスケールパターニングに関する研究 時間領域有限差分法を用いた近接場光加熱による微小領域温度分布の解析 (2012)
  • Author(s): 福山祥平
  • Organizer: 第33回日本熱物性シンポジウム
  • Place of Presentation: 大阪府大阪市
• [Presentation] 高温超伝導YBCO薄膜の熱伝導率と温度伝導率の測定-周期加熱サーモリフレクタンス法を用いた低温・強磁場環境下測定システムの構築- (2011)
  • Author(s): 池田達哉
  • Organizer: 第32回日本熱物性シンポジウム
  • Place of Presentation: 神奈川
  • Year and Date: 2011-11-21
• [Presentation] 光誘起誘電泳動を用いた小型拡散センサーに関する研究集積化に向けた光MEMSデバイスの開発 (2011)
  • Author(s): 岡哲大
  • Organizer: 第32回日本熱物性シンポジウム
  • Place of Presentation: 神奈川
  • Year and Date: 2011-11-21
• [Presentation] 垂直配向カーボンナノチューズ複合ポリマーの作製とフォトサーマル赤外検知法による熱伝導率評価-パリレンによるCNTの被膜- (2011)
  • Author(s): 佐藤翼
  • Organizer: 第32回日本熱物性シンポジウム
  • Place of Presentation: 神奈川
  • Year and Date: 2011-11-21
• [Presentation] 周期加熱サーモリフレクタンス法を用いたSiPデバイス内部における熱抵抗評価手法の開発(マイクロスケール試料の測定および理論モデルの改良) (2011)
  • Author(s): 大坪慶貴
  • Organizer: 第32回日本熱物性シンポジウム
  • Place of Presentation: 神奈川
  • Year and Date: 2011-11-21
• [Presentation] Study on Micro Optical Diffusion Sensor using Laser-induced Dielectrophoresis (2011)
  • Author(s): Y.Ishii
  • Organizer: 2011 International Conference on Solid State Devices and Materials
  • Place of Presentation: 名古屋
  • Year and Date: 2011-09-28
• [Presentation] Development of fluorescence near-field optics thermal nanoscopy using photonic crystal fiber for high sensitivity temperature measurement (2011)
  • Author(s): T.Fujii
  • Organizer: The 19^<th> European Conference on Thermophysical Properties
  • Place of Presentation: ギリシャ
  • Year and Date: 2011-08-26
• [Presentation] Development of Nanometer Scale Temperature Measurement Method with Polarized Near-field Light (2011)
  • Author(s): S.Hosaka
  • Organizer: IEEE-LEOS Optical MEMS and Nanophotonics 2011
  • Place of Presentation: トルコ
  • Year and Date: 2011-08-09
• [Presentation] Development of Optical Device for Novel Micro Optical Diffusion Sensor (2011)
  • Author(s): T.Oka
  • Organizer: IEEE-LEOS Optical MEMS and Nanophotonics 2011
  • Place of Presentation: トルコ
  • Year and Date: 2011-08-09
• [Presentation] 高温超伝導YBCO薄膜の熱伝導率と温度伝導率の同時測定フォトサーマル赤外検知法による厚み依存性の測定 (2011)
  • Author(s): 安藤哲
  • Organizer: 第48回日本伝熱シンポジウム
  • Place of Presentation: 岡山
  • Year and Date: 2011-06-02
• [Presentation] レーザー誘起誘電泳動を用いた新しい小型拡散センサーに関する研究第二報:オンチップ化か可能な信号光検知手法の提案 (2011)
  • Author(s): 猪谷直一
  • Organizer: 第48回日本伝熱シンポジウム
  • Place of Presentation: 岡山
  • Year and Date: 2011-06-02
• [Presentation] 近接場偏光を用いたナノスケール温度センシング手法の開発高感度な測定のための新たな距離制御方法と偏光検出システムの提案 (2011)
  • Author(s): 保坂俊輔
  • Organizer: 第48回日本伝熱シンポジウム
  • Place of Presentation: 岡山
  • Year and Date: 2011-06-01
• [Presentation] ナノ・マイクロ熱物性センシングとサーマルデザインプラットフォーム
  • Author(s): 田口良広
  • Organizer: 科学技術振興機構・研究開発戦略センター 革新的熱技術に関するワークショップ
  • Place of Presentation: 東京
  • Invited
• [Presentation] 近接場蛍光を用いたナノスケール温度センシング手法の開発 高感度温度計測を実現する新たな近接場プローブの検討
  • Author(s): 藤井拓郎
  • Organizer: 第49回日本伝熱シンポジウム
  • Place of Presentation: 富山県富山市
• [Book] ナノ・マイクロスケール熱物性ハンドブック (2014)
  • Author(s): 田口良広
  • Total Pages: 459
  • Publisher: 養賢堂
• [Remarks] 慶應義塾大学理工学部システムデザイン工学科 長坂・田口研究室
  • URL: http://www.naga.sd.keio.ac.jp/