An Energy-Autonomous Distributed Water Strider by High-Voltaged Standard VLSI and MEMS Integration
| Project/Area Number |
23686053
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| Research Category |
Grant-in-Aid for Young Scientists (A)
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| Allocation Type | Single-year Grants |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | The University of Tokyo |
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Principal Investigator |
MITA Yoshio 東京大学, 工学(系)研究科(研究院), 准教授 (40323472)
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| Project Period (FY) |
2011-04-01 – 2016-03-31
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| Project Status |
Completed (Fiscal Year 2015)
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| Budget Amount *help |
¥27,300,000 (Direct Cost: ¥21,000,000、Indirect Cost: ¥6,300,000)
Fiscal Year 2014: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000)
Fiscal Year 2013: ¥7,020,000 (Direct Cost: ¥5,400,000、Indirect Cost: ¥1,620,000)
Fiscal Year 2012: ¥6,890,000 (Direct Cost: ¥5,300,000、Indirect Cost: ¥1,590,000)
Fiscal Year 2011: ¥7,670,000 (Direct Cost: ¥5,900,000、Indirect Cost: ¥1,770,000)
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| Keywords | マイクロマシン / CMOS-MEMS / VLSI / ポストプロセス / オンチップ太陽電池 / 自律分散システム / ＣＭＯＳ－ＭＥＭＳ / ＶＬＳＩ / MEMS / 自律分散 / 太陽電池 |
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| Outline of Final Research Achievements |
In this research, the applicant attemped to realize an energy autonomous, which means that harvesting energy in nature to electricity, water striding microrobot. The research was inspired by water-striding tiny insects in nature, and attempted to realize cooperative functions by independent tiny agents. The new philosophical contribution by the research is the idea of autonomous distibuted system by self-moving micro agents. By means of such "top-down" research, a critical advancement in VLSI integrated MEMS technology was achieved. The device technology proven by this Kakenhi research includes a VLSI on-chip high-voltage generating solar cells, that produces high voltage which is beyond the physical limit of Silicon material, thanks to CMOS-MEMS post-process. A new energy and information transfer scheme was also demonstrated with CMOS integrated MEMS devices.
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Report
(5 results)
Research Products
(28 results)
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[Presentation] Microfabricated test structures for thermal resonant gas sensor2016
Author(s)
Matthieu Denoual, M. Pouliquen, Julien Grand, Hussein Awala, Sveltana Mintova, O. de Sagazan, Shu Inoue, Agnes Tixier-Mita, Yoshio Mita, and D. Robbes
Organizer
IEEE 2016 International Conference on Microelectronic Test Structures (ICMTS)
Place of Presentation
メルパルク横浜,神奈川県横浜市
Year and Date
2016-03-28
Related Report
Int'l Joint Research
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