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Fabrication of metal circuit patterns on resins through soft lithography combined with direct metallization process

Research Project

Project/Area Number 23686107
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypeSingle-year Grants
Research Field Material processing/treatments
Research InstitutionKonan University

Principal Investigator

AKAMATSU Kensuke  甲南大学, フロンティアサイエンス学部, 教授 (60322202)

Project Period (FY) 2011-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥21,970,000 (Direct Cost: ¥16,900,000、Indirect Cost: ¥5,070,000)
Fiscal Year 2013: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Fiscal Year 2012: ¥8,710,000 (Direct Cost: ¥6,700,000、Indirect Cost: ¥2,010,000)
Fiscal Year 2011: ¥10,790,000 (Direct Cost: ¥8,300,000、Indirect Cost: ¥2,490,000)
Keywordsソフトリソグラフィー / めっき / ポリイミド / ダイレクトメタリゼーション / 電気めっき / 銅めっき / ダマシン / 表面改質
Research Abstract

We have succeeded development of fabrication process for polyimide films with embedded metal circuit patterns through combination of soft lithography and direct metallization process. The mechanism of direct metallization process, involving diffusion and reduction of doped metallic ions in polyimide precursors, has been elucidated, and the facile method for metallization of polymer resins by cost-effective, environmentally-friendly chemical process has been developed. In addition, novel processes for fabrication of polymer substrate containing metal nanoparticles and for metallization of polymer substrate through electrochemical constructive lithography have been also successfully developed.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Annual Research Report
  • 2011 Annual Research Report
  • Research Products

    (58 results)

All 2014 2013 2012 2011 Other

All Journal Article (14 results) (of which Peer Reviewed: 9 results) Presentation (38 results) (of which Invited: 8 results) Book (2 results) Remarks (2 results) Patent(Industrial Property Rights) (2 results) (of which Overseas: 1 results)

  • [Journal Article] In situ Synthesis of Metal/Polymer Nanocomposite Thin Films on Glass Substrates by using Highly Cross-linked Polymer Matrices with Tailorable Ion Exchange Capabilities2014

    • Author(s)
      Toda, T. Tsuruoka, J. Matsui, T. Murashima, H. Nawafune, K. Akamatsu
    • Journal Title

      RSC Advances

      Volume: 3 Pages: 16243-16246

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] In Situ Template Synthesis of One-dimensional Gold Nanoparticle Arrays in Organic Nanowires2014

    • Author(s)
      T. Matsushita, Y. Fukumoto, T. Kawakami, T. Tsuruoka, T. Murashima, T. Yanagishita, H. Masuda, H. Nawafune, K. Akamatsu
    • Journal Title

      RSC Advances,

      Volume: 3 Issue: 37 Pages: 16243-16246

    • DOI

      10.1039/c3ra42727g

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] In Situ Template Synthesis of One-dimensional Gold Nanoparticle Arrays in Organic Nanowires2013

    • Author(s)
      T. Matsushita, Y. Fukumoto, T. Kawakami, T. Tsuruoka, T. Murashima, T. Yanagishita, H. Masuda, H. Nawafune, K. Akamatsu
    • Journal Title

      RSC Advances

      Volume: 3 Pages: 16243-16246

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] 金属ナノ粒子分散層を利用した樹脂/金属間接合2013

    • Author(s)
      鶴岡孝章、縄舟秀美、赤松謙祐
    • Journal Title

      プラスチックスエージ

      Volume: 3 Pages: 55-60

    • Related Report
      2013 Final Research Report 2012 Annual Research Report
  • [Journal Article] 電気化学的手法によるポリイミド樹脂表面への金属パターン形成2013

    • Author(s)
      赤松謙祐、鶴岡孝章、縄舟秀美
    • Journal Title

      工業材料

      Volume: 5 Pages: 39-42

    • Related Report
      2013 Final Research Report 2012 Annual Research Report
  • [Journal Article] 透明ポリイミドフィルム上へのピール強度の優れた銅めっき被膜形成2013

    • Author(s)
      池田隠語、小林靖之、藤原裕、赤松謙祐、縄舟秀美
    • Journal Title

      工業材料

      Volume: 5 Pages: 47-50

    • Related Report
      2013 Final Research Report 2012 Annual Research Report
  • [Journal Article] 電気化学リソグラフィーによる樹脂表面への金属パターン形成2012

    • Author(s)
      赤松謙祐、福本ユリナ、鶴岡孝章、縄舟秀美、柳本博
    • Journal Title

      表面技術

      Volume: 63 Pages: 95-99

    • NAID

      10030476539

    • Related Report
      2013 Final Research Report 2012 Annual Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Mechanistic Study on Microstructural Tuning of Metal Nanoparticle/Polymer Composite Thin Layers : Hydrogenation and Decomposition of Polyimide Matrices Ctalyzed By Embedded Nickel Nanoparticls2012

    • Author(s)
      K. Akamatsu, M. Fujii, T. Tsuruoka, S. Nakano, T. Murashima, H. Nawafune
    • Journal Title

      J. Phys. Chem. C

      Volume: 116 Pages: 1794-17954

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] ポリイミド樹脂/金属間におけるナノ構造界面の構築と樹脂上への金属パターン形成2012

    • Author(s)
      福本ユリナ、谷山智紀、鶴岡孝章、縄舟秀美、赤松謙祐
    • Journal Title

      エレクトロニクス実装学会誌

      Volume: No.7

    • NAID

      10031080306

    • Related Report
      2013 Final Research Report 2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Mechanistic Study on Microstructural Tuning of Metal Nanoparticle/Polymer Composite Thin Layers: Hydrogenation and Decomposition of Polyimide Matrices Ctalyzed By Embedded Nickel Nanoparticles2012

    • Author(s)
      K. Akamatsu, M. Fujii, T. Tsuruoka, S. Nakano, T. Murashima, H. Nawafune
    • Journal Title

      J. Phys. Chem. C

      Volume: 116 Issue: 33 Pages: 17947-17954

    • DOI

      10.1021/jp304702b

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of Silver Patterns on Polyimide Films Based on Solid Phase Electrochemical Constructive Lithography using Ion-Exchangeable Precursor Layers2011

    • Author(s)
      K. Akamatsu, Y. Fukumoto, T. Taniyama, T. Tsuruoka, H. Yanagimoto, H. Nawafune
    • Journal Title

      Langmuir

      Volume: 27 Pages: 11761-11766

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of Silver Patterns on Polyimide Films Based on Solid-Phase Electrochemical Constructive Lithography Using Ion-Exchangeable Precursor Layers2011

    • Author(s)
      K.Akamatsu, Y.Fukumoto, T.Taniyama, T.Tsuruoka, H.Yanagimoto, H.Nawafune
    • Journal Title

      Langmuir

      Volume: 27 Issue: 19 Pages: 11761-11766

    • DOI

      10.1021/la2025318

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 樹脂/金属間におけるナノ構造界面の構築と樹脂上への金属パターン形成2011

    • Author(s)
      福本ユリナ、谷山智紀、鶴岡孝章、縄舟秀美、赤松謙祐
    • Journal Title

      第21回マイクロエレクトロニクスシンポジウム論文集

      Pages: 1-4

    • Related Report
      2011 Annual Research Report
  • [Journal Article] ダイレクトメタラリゼーション法により作製した透明ポリイミドフィルム上の銅めっき被膜の密着強度2011

    • Author(s)
      池田慎吾、小林靖之、藤原裕、赤松謙祐、縄舟秀美
    • Journal Title

      第21回マイクロエレクトロニクスシンポジウム論文集

      Pages: 65-68

    • Related Report
      2011 Annual Research Report
  • [Presentation] ポリイミド樹脂の表面改質と銅薄膜のメタライジング技術2013

    • Author(s)
      赤松謙祐
    • Organizer
      技術情報協会セミナー
    • Place of Presentation
      五反田
    • Year and Date
      2013-12-19
    • Related Report
      2013 Final Research Report
  • [Presentation] 樹脂のダイレクトメタライズと微細パターニング技術2013

    • Author(s)
      赤松謙祐
    • Organizer
      株式会社電子ジャーナル第1950回セミナー
    • Place of Presentation
      お茶の水連合会館
    • Year and Date
      2013-11-17
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
  • [Presentation] 電気化学的手法によるイオン交換膜のメタライズにおける薄膜成長過程2013

    • Author(s)
      清水亮、鶴岡孝章、縄舟秀美、柳本博、赤松謙祐
    • Organizer
      表面技術協会第128講演大会
    • Place of Presentation
      福岡工業大学
    • Year and Date
      2013-09-24
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
  • [Presentation] 凹凸構造を有する樹脂基板へのダイレクトメタライズ2013

    • Author(s)
      木村祐介、尾崎誠、鶴岡孝章、縄舟秀美、柳本博、赤松謙祐
    • Organizer
      表面技術協会第128講演大会
    • Place of Presentation
      福岡工業大学
    • Year and Date
      2013-09-24
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
  • [Presentation] ポリイミド樹脂のダイレクトメタライズプロセス2013

    • Author(s)
      赤松謙祐
    • Organizer
      公益財団法人神奈川科学技術アカデミー教育講座
    • Place of Presentation
      神奈川科学技術アカデミー
    • Year and Date
      2013-08-23
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
  • [Presentation] ポリイミド樹脂上への新規メタライズ技術2013

    • Author(s)
      赤松謙祐
    • Organizer
      日本溶射学会中部支部第8回溶射技術研究会
    • Year and Date
      2013-03-26
    • Related Report
      2013 Final Research Report
  • [Presentation] ナノ粒子を利用した樹脂・金属間接合:ダイレクトメタリゼーション法による界面微細構造制御2013

    • Author(s)
      赤松謙祐
    • Organizer
      ナノ材料応用技術セミナー
    • Place of Presentation
      京都府中小企業技術センター
    • Year and Date
      2013-03-22
    • Related Report
      2013 Final Research Report
  • [Presentation] In Situ Synthesis of Composite Spheres, Films, and Wires2013

    • Author(s)
      Kensuke Akamatsu
    • Organizer
      9th IUPAC International Conference on Novel Materials and Synthesis(NMS-VIII)
    • Place of Presentation
      Shanghai, China
    • Related Report
      2013 Final Research Report
  • [Presentation] Design, Structural Analysis and Properties of Metal Nanoparticle/Polymer Nanocomposites prepared by Ion-Doped Precursor Approach2013

    • Author(s)
      Kensuke Akamatsu
    • Organizer
      6th International Workshop on Polyumer/Metal Nanocomposites
    • Place of Presentation
      Toulouse, France
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
  • [Presentation] Metal Nanoparticle/Polymer Nanocomposites: In Situ Synthesis of Composite Spheres, Films, and Wires2013

    • Author(s)
      Kensuke Akamatsu
    • Organizer
      9th IUPAC International Conference on Novel Materials and Synthesis(NMS-VIII)
    • Place of Presentation
      Shanghai, China
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] ナノ粒子を利用した樹脂・金属間接合:ダイレクトメタリゼーション法による界面微細構造制御2013

    • Author(s)
      赤松謙祐
    • Organizer
      京都府中小企業技術センター ナノ材料応用技術セミナー
    • Place of Presentation
      京都府産業支援センター(京都)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] イオン交換可能なポリマーモールドを利用した金属微細規則構造の作製2013

    • Author(s)
      松村康史、榎本靖、鶴岡孝章、赤松謙祐、縄舟秀美
    • Organizer
      表面技術協会 第127講演大会
    • Place of Presentation
      日本工業大学(埼玉)
    • Related Report
      2012 Annual Research Report
  • [Presentation] ポリイミド樹脂上への新規メタライズ技術2013

    • Author(s)
      赤松謙祐
    • Organizer
      日本溶射学会中部支部 第8回溶射技術研究会
    • Place of Presentation
      ミッドランドスクエア(名古屋)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] 電気化学リソグラフィーを利用した樹脂のメタライズプロセス2012

    • Author(s)
      清水亮、福本ユリナ、森昭英、鶴岡孝章、縄舟秀美、柳本博、赤松謙祐
    • Organizer
      第14会関西表面技術フォーラム2
    • Place of Presentation
      京都大学
    • Year and Date
      2012-11-29
    • Related Report
      2013 Final Research Report
  • [Presentation] 金属微粒子/高分子ナノ複合体の精密合成と微細構造制御2012

    • Author(s)
      赤松謙祐
    • Organizer
      第25回アイオノマーシンポジウム
    • Place of Presentation
      山形大学東京サテライト
    • Year and Date
      2012-11-21
    • Related Report
      2013 Final Research Report
  • [Presentation] 電気化学的手法によるポリイミド樹脂のメタライゼーション2012

    • Author(s)
      赤松謙祐、福本ユリナ、鶴岡孝章、縄舟秀美
    • Organizer
      電気鍍金研究会9月例会
    • Place of Presentation
      大阪鍍金会館
    • Year and Date
      2012-09-08
    • Related Report
      2013 Final Research Report
  • [Presentation] Direct Chemical Depoisition of Metals on Polyimide Films using lon-Doped Precursors2012

    • Author(s)
      K. Akamatsu, Y Fukumoto, T. Tsuruoka, H. Nawafune
    • Organizer
      The 2012 International Conference on Flexible and Printed Electronics (ICFPE2012)
    • Place of Presentation
      The University of Tokyo
    • Year and Date
      2012-09-06
    • Related Report
      2013 Final Research Report
  • [Presentation] 金属イオン導入を利用した樹脂のメタライズ法の開発2012

    • Author(s)
      赤松謙祐
    • Organizer
      表面技術協会将来めっき技術検討部会講演会
    • Year and Date
      2012-05-17
    • Related Report
      2013 Final Research Report
  • [Presentation] Microstructural tuning of nickel nanoparticles/polyimide composite films2012

    • Author(s)
      K. Akamatsu
    • Organizer
      IUPAC 8th International Conference on Novel Materials and Synthesis(NMS-VIII)
    • Place of Presentation
      Xi'An, China
    • Related Report
      2013 Final Research Report
  • [Presentation] 金属イオン導入を利用した樹脂のメタライズ法の開発2012

    • Author(s)
      赤松謙祐
    • Organizer
      表面技術協会 将来めっき技術検討部会講演会
    • Place of Presentation
      産業技術総合研究所 臨海副都心センター(東京)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] 電気化学的手法によるポリイミド樹脂のメタライゼーション2012

    • Author(s)
      赤松謙祐、福本ユリナ、鶴岡孝章、縄舟秀美
    • Organizer
      電気鍍金研究会 9月例会
    • Place of Presentation
      大阪鍍金会館(大阪)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Microstructural tuning of nickel nanoparticles/polyimide composite films2012

    • Author(s)
      K. Akamatsu
    • Organizer
      IUPAC 8th International Conference on Novel Materials and Synthesis
    • Place of Presentation
      Xi'An University of Science & Technology(西安、中国)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] 金属微粒子/高分子ナノ複合体の精密合成と微細構造制御2012

    • Author(s)
      赤松謙祐
    • Organizer
      第25回アイオノマーシンポジウム
    • Place of Presentation
      山形大学東京サテライトキャンパスイノベーションセンター(東京)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Direct Chemical Depoisition of Metals on Polyimide Films using lon-Doped Precursors2012

    • Author(s)
      K. Akamatsu, Y Fukumoto, T. Tsuruoka, H. Nawafune
    • Organizer
      The 2012 International Conference on Flexible and Printed Electronics (ICFPE2012)
    • Place of Presentation
      東京大学(東京)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 電気化学リソグラフィーを利用した樹脂のメタライズプロセス2012

    • Author(s)
      清水亮、福本ユリナ、森昭英、鶴岡孝章、縄舟秀美、柳本 博、赤松謙祐
    • Organizer
      第14会関西表面技術フォーラム
    • Place of Presentation
      京都大学化学研究所(京都)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 電気化学リソグラフィーによるポリイミド基板上への金属ダイレクトパターニング2011

    • Author(s)
      福本ユリナ、鶴岡孝章、縄舟秀美、赤松謙祐、柳本博
    • Organizer
      第13回関西表面技術フォーラム
    • Year and Date
      2011-11-29
    • Related Report
      2013 Final Research Report 2011 Annual Research Report
  • [Presentation] ニッケルナノ粒子分散ポリイミドフィルムの微細構造変化過程の解析2011

    • Author(s)
      藤井麻希、鶴岡孝章、縄舟秀美、赤松謙祐
    • Organizer
      第13回関西表面技術フォーラム201
    • Place of Presentation
      京都大学
    • Year and Date
      2011-11-29
    • Related Report
      2013 Final Research Report
  • [Presentation] Site-Selective Direct Metallization of Polyimide based on Solid Phase Electrochemical Lithography2011

    • Author(s)
      Yurina Fukumoto, Takaaki Tsuruoka, Hiroshi Yanagimoto, Hidemi Nawafune, Kensuke Akamatsu
    • Organizer
      15th International Conference on Thin Films
    • Place of Presentation
      Tokyo Terrsa
    • Year and Date
      2011-11-08
    • Related Report
      2013 Final Research Report
  • [Presentation] Synthesis of Metallized Polyimide Films by Wet Chemical Process2011

    • Author(s)
      Kensuke Akamatsu
    • Organizer
      7th IUPAC International Symposium on Novel Materials and Their Synthesis (NMS-VII)
    • Place of Presentation
      Shanhai, China
    • Year and Date
      2011-10-15
    • Related Report
      2013 Final Research Report
  • [Presentation] 電気化学リソグラフィー法によるポリイミド上への銀ダイレクトパターニング2011

    • Author(s)
      福本ユリナ、鶴岡孝章、縄舟秀美、赤松謙祐、柳本博
    • Organizer
      表面技術協会第124回講演大会
    • Place of Presentation
      名古屋大学
    • Year and Date
      2011-09-21
    • Related Report
      2013 Final Research Report 2011 Annual Research Report
  • [Presentation] 樹脂/金属間におけるナノ構造界面の構築と樹脂上への金属パターン形成2011

    • Author(s)
      福本ユリナ、谷山智紀、鶴岡孝章、赤松謙祐、縄舟秀美
    • Organizer
      第21回マイクロエレクトロニクスシンポジウム
    • Place of Presentation
      関西大学
    • Year and Date
      2011-09-08
    • Related Report
      2013 Final Research Report
  • [Presentation] Synthesis of Metallized Polyimide Films by Wet Chemical Process2011

    • Author(s)
      K.Akamatsu
    • Organizer
      7th IUPAC International Symposium on Novel Materials and Their Synthesis (NMS-VII) & 21th International Symposium on Fine Chemistry and Functional Polymers (FCFP-XXI)
    • Place of Presentation
      Shanhai, China(招待講演)
    • Related Report
      2011 Annual Research Report
  • [Presentation] 異種金属をドープした高分子前駆体からのナノ粒子析出2011

    • Author(s)
      藤井麻希、田中雄也、鶴岡孝章、縄舟秀美、赤松謙祐
    • Organizer
      第63回コロイドおよび界面化学討論会
    • Place of Presentation
      京都大学
    • Related Report
      2011 Annual Research Report
  • [Presentation] 樹脂/金属間におけるナノ構造界面の構築と樹脂上への金属パターン形成2011

    • Author(s)
      福本ユリナ、谷山智紀、鶴岡孝章、赤松謙祐、縄舟秀美
    • Organizer
      第21回マイクロエレクトロニクスシンポジウムMES2011
    • Place of Presentation
      関西大学
    • Related Report
      2011 Annual Research Report
  • [Presentation] Site-Selective Direct Metallization of Polyimide based on Solid Phase Electrochemical Lithography2011

    • Author(s)
      Y.Fukumoto, T.Tsuruoka, H.Yanagimoto, H.Nawafune, K.Akamatsu
    • Organizer
      15th International Conference on Thin Films
    • Place of Presentation
      京都テルサ
    • Related Report
      2011 Annual Research Report
  • [Presentation] All-Wet Metallization Process for Transparent Polyimide Films2011

    • Author(s)
      S.Ikeda, Y.Kobayashi, Y.Fujiwara, K.Akamatsu, H.Nawafune
    • Organizer
      15th International Conference on Thin Films
    • Place of Presentation
      京都テルサ
    • Related Report
      2011 Annual Research Report
  • [Presentation] ニッケルナノ粒子分散ポリイミドフィルムの微細構造変化過程の解析2011

    • Author(s)
      藤井麻希、鶴岡孝章、縄舟秀美、赤松謙祐
    • Organizer
      第13回関西表面技術フォーラム
    • Place of Presentation
      キャンパスプラザ京都
    • Related Report
      2011 Annual Research Report
  • [Presentation] ポリイミド樹脂の表面改質と銅薄膜のメタライジング技術

    • Author(s)
      赤松謙祐
    • Organizer
      技術情報協会セミナー
    • Place of Presentation
      東京、五反田、技術情報協会ビル
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Book] 「樹脂の表面改質を利用した銅薄膜・パターン形成」in「精密加工と微細構造の形成技術」、第5章第2節2013

    • Author(s)
      赤松謙祐、鶴岡孝章、縄舟秀美
    • Publisher
      技術情報協会
    • Related Report
      2013 Final Research Report
  • [Book] 精密加工と微細構造の形成技術 第5章第2節2013

    • Author(s)
      赤松謙祐、鶴岡孝章、縄舟秀美
    • Total Pages
      956
    • Publisher
      技術情報協会
    • Related Report
      2013 Annual Research Report
  • [Remarks] ナノ材料科学研究室

    • URL

      http://www.pi.konan-u.ac.jp/nanomaterials/index.html

    • Related Report
      2013 Annual Research Report
  • [Remarks] ナノ材料科学研究室

    • URL

      http://www.pi.konan-u.ac.jp/nanomaterials/index.html

    • Related Report
      2012 Annual Research Report
  • [Patent(Industrial Property Rights)] 固体電解質を用いた金属膜析出方法2011

    • Inventor(s)
      柳本博、赤松謙祐,縄舟秀美
    • Industrial Property Rights Holder
      トヨタ自動車株式会社
    • Industrial Property Rights Type
      特許
    • Filing Date
      2011-04-13
    • Related Report
      2013 Final Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 固体電解質を用いた金属膜析出方法2011

    • Inventor(s)
      柳本博、赤松謙祐, 縄舟秀美
    • Industrial Property Rights Holder
      トヨタ自動車株式会社
    • Industrial Property Number
      2011-089317
    • Filing Date
      2011-04-13
    • Related Report
      2011 Annual Research Report

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Published: 2011-04-06   Modified: 2019-07-29  

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