Area-selective direct synthesis of carbon nanofibers on the plastic substrates
| Project/Area Number |
23710123
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Nanomaterials/Nanobioscience
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
MORI Shinsuke 東京工業大学, 大学院・理工学研究科, 准教授 (80345389)
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| Project Period (FY) |
2011 – 2012
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| Project Status |
Completed (Fiscal Year 2012)
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| Budget Amount *help |
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2012: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2011: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
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| Keywords | ナノ構造形成 / 制御 / カーボンナノファイバー / carbon nanofiber / plasma enhanced CVD / Area-selective growth / CVD / plasma / area selective / low temperature / photolithography |
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| Research Abstract |
The area-selective synthesis of carbon nanofibers were performed by plasma-enhanced chemical vapor deposition in a CO/O2/Ar DC discharge system and conventional photolithography process. We could successfully synthesize CNFs area-selectively on the plastic substrates and plastic substrate with thin metal layer.
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Report
(3 results)
Research Products
(12 results)
