Area-selective direct synthesis of carbon nanofibers on the plastic substrates

• Project/Area Number: 23710123
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Nanomaterials/Nanobioscience
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: MORI Shinsuke 東京工業大学, 大学院・理工学研究科, 准教授 (80345389)
• Project Period (FY): 2011 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000); Fiscal Year 2012: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000); Fiscal Year 2011: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
• Keywords: ナノ構造形成 / 制御 / カーボンナノファイバー / carbon nanofiber / plasma enhanced CVD / Area-selective growth / CVD / plasma / area selective / low temperature / photolithography

Research Abstract

The area-selective synthesis of carbon nanofibers were performed by plasma-enhanced chemical vapor deposition in a CO/O2/Ar DC discharge system and conventional photolithography process. We could successfully synthesize CNFs area-selectively on the plastic substrates and plastic substrate with thin metal layer.

Research Products

• [Journal Article] Modification of a-C:H film surface by atmospheric pressure plasma jet for liquid crystal alignment (2012)
  • Author(s): Alibi Baitukha, Shinsuke Mori, Masaaki Suzuki
  • Journal Title: Thin Solid Films Volume: Vol.523 Pages: 37-40
  • Peer Reviewed
• [Journal Article] Modification of a-C:H film surface by atmospheric pressure plasma jet for liquid crystal alignment (2012)
  • Author(s): Alibi Baitukha
  • Journal Title: Thin Solid Films Volume: 523 Pages: 37-40
  • DOI: 10.1016/j.tsf.2012.06.015
  • Peer Reviewed
• [Journal Article] Synthesis of carbon nanowalls by plasma-enhanced chemical vapor deposition in a CO/H2 microwave discharge system (2011)
  • Author(s): Shinsuke Mori, Takanori Ueno, Masaaki Suzuki
  • Journal Title: Diamond & Related Materials Volume: Vol.20 Pages: 1129-1132
  • Peer Reviewed
• [Presentation] マイクロ波プラズマCVD法によるカーボンナノウォー ルの合成と色素増感太陽電池対極性能に与える化学修飾の影響 (2013)
  • Author(s): 鐘田 匠
  • Organizer: 化学工学会第78年会
  • Place of Presentation: 大阪大学
• [Presentation] 酸素透過膜反応器を用いたプラズマCO2分解におよぼすフェロセン添加の影響 (2013)
  • Author(s): 臼井 航介
  • Organizer: 化学工学会第78年会
  • Place of Presentation: 大阪大学
• [Presentation] FTIR analysis of transparent carbon films deposited by low pressure PECVD and atmospheric pressure APPJ (2012)
  • Author(s): Alibi Baitukha, Shinsuke Mori, Masaaki Suzuki
  • Organizer: Abstracts of 11th Asia-Pacific Conference on Plasma Science and Technology (11thAPCPST)
  • Place of Presentation: Kyoto, JAPAN
  • Year and Date: 2012-10-25
• [Presentation] Fabrication of a-C:H thin film by Atmospheric Pressure Plasma Jet for Liquid Crystal Alignment (2012)
  • Author(s): Baitukha Alibi、森伸介、鈴木正昭
  • Organizer: 化学工学会第77年会
  • Place of Presentation: 工学院大学
• [Presentation] FTIR analysis of transparent carbon films deposited by low pressure PECVD and atmospheric pressure APPJ (2012)
  • Author(s): Alibi Baitukha
  • Organizer: 11th Asia-Pacific Conference on Plasma Science and Technology
  • Place of Presentation: 京都大学
• [Presentation] カーボンナノファイバーの無触媒低温プラズマCVDにおける基板形状の影響 (2011)
  • Author(s): 森伸介、山田悠介、鈴木正昭
  • Organizer: 化学工学会第43回秋季大会
  • Place of Presentation: 名古屋工業大学
• [Presentation] Optical and Langmuir probe diagnostics of an Argon plasma in an RF reactive magnetron sputtering system (2011)
  • Author(s): Shinsuke Mori, Houssam Fakhouri, Jerome Pulpytel, Farzaneh Arefi-Khonsari
  • Organizer: Proceedings of 20th International Symposium on Plasma Chemistry (ISPC20)
  • Place of Presentation: Philadelphia, USA
• [Presentation] Influence of CO/H2 gas mixture ratio on the structure of carbon thin films by PECVD (2011)
  • Author(s): Shinsuke Mori, Masaaki Suzuki
  • Organizer: 第24回プラズマ材料科学シンポジウム(SPSM-24)
  • Place of Presentation: 大阪大学
• [Presentation] Modification of a-C:H film surface byAtmospheric Pressure Plasma Jet for LiquidCrystal Alignment (2011)
  • Author(s): Alibi Baitukha, Shinsuke Mori, MasaakiSuzuki
  • Organizer: 第24回プラズマ材料科学シンポジウム(SPSM-24)
  • Place of Presentation: 大阪大学