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Formation of high flux X-ray nanobeam and its application to scanning X-ray fluorescence microscopy

Research Project

Project/Area Number 23710128
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Nanomaterials/Nanobioscience
Research InstitutionOsaka University

Principal Investigator

MATSUYAMA Satoshi  大阪大学, 大学院・工学研究科, 助教 (10423196)

Project Period (FY) 2011 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2012: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2011: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywordsナノ計測 / X 線顕微鏡 / X線ミラー / イオンビーム加工 / X線集光 / X線顕微鏡 / 細胞内元素分布
Research Abstract

Toward formation of a high flux X-ray nanobeam, the basic techniques to fabricate X-ray focusing mirrors with high demagnification were researched. A simulator that can calculate an intensity profile based on the Fresnel- Kirchhoff integral was developed to investigate acceptable figure errors and alignment errors. Also, an ion beam figuring system specialized for fabricating X-ray mirrors was developed. As a result of a performance test for the system, an elliptical mirror with a 2 nm (peak-to-valley) figure error could be successfully fabricated.

Report

(3 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Research-status Report
  • Research Products

    (43 results)

All 2013 2012 2011 Other

All Journal Article (12 results) (of which Peer Reviewed: 8 results) Presentation (27 results) Book (1 results) Remarks (3 results)

  • [Journal Article] Scanning Protein Analysis of Electrofocusing Gels using X-ray Fluorescence2013

    • Author(s)
      S. Matsuyama, A. Matsunaga, S. Sakamoto, Y. Iida, Y. Suzuki, Y. Ishizaka, K. Yamauchi, T. Ishikawa, and M. Shimura
    • Journal Title

      Metallomics

      Volume: 5 Pages: 492-500

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Scanning Protein Analysis of Electrofocusing Gels using X-ray Fluorescence2013

    • Author(s)
      Satoshi Matsuyama
    • Journal Title

      Metallomics

      Volume: on line Issue: 5 Pages: 492-492

    • DOI

      10.1039/c3mt20266f

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Hard-X-ray imaging optics based on four aspherical mirrors with 50 nm resolution2012

    • Author(s)
      S. Matsuyama, N. Kidani, H. Mimura, Y.Sano, Y. Kohmura, K. Tamasaku, M.Yabashi, T. Ishikawa, K. Yamauchi
    • Journal Title

      Optics Express

      Volume: 20 Pages: 10310-10319

    • Related Report
      2012 Final Research Report 2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] Wavefront measurement for a hard-X-ray nanobeam using single-grating interferometry2012

    • Author(s)
      S. Matsuyama, H. Yokoyama, R. Fukui, Y. Kohmura, K. Tamasaku, M. Yabashi, W. Yashiro, A. Momose, T. Ishikawa, and K. Yamauchi
    • Journal Title

      Optics Express

      Volume: 20 Pages: 24977-24986

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Development of piezoelectric deformable mirror for hard X-ray nanofocusing2012

    • Author(s)
      S. Matsuyama, T. Kimura, H. Nakamori, S. Imai, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi
    • Journal Title

      Proc. SPIE

      Volume: 8503 Pages: 850303-850303

    • Related Report
      2012 Final Research Report
  • [Journal Article] Improved reflectivity of platinum/carbon multilayers for X-ray mirrors by carbon doping into platinum layer2012

    • Author(s)
      J. Kim, H. Yokoyama, S. Matsuyama, Y. Sano, K. Yamauchi
    • Journal Title

      Current Applied Physics12

      Volume: 12

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Improvement of interface roughness in platinum/carbon multilayers for X-ray mirrors2012

    • Author(s)
      J. Kim, S. Matsuyama, Y. Sano, K. Yamauchi
    • Journal Title

      Key Engineering Materials

      Volume: 523-524 Pages: 1076-1079

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Development of piezoelectric deformable mirror for hard X-ray nanofocusing2012

    • Author(s)
      Satoshi Matsuyama
    • Journal Title

      Proc. SPIE

      Volume: 8503 Pages: 850303-850303

    • DOI

      10.1117/12.930276

    • Related Report
      2012 Annual Research Report
  • [Journal Article] Development of a one-dimensional Wolter mirror for achromatic full-field X-ray microscopy2011

    • Author(s)
      S. Matsuyama, N. Kidani, H. Mimura, J. Kim, Y. Sano, K. Tamasaku, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi
    • Journal Title

      Proc. SPIE

      Volume: 8139 Pages: 813905-813905

    • Related Report
      2012 Final Research Report 2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] Trace element mapping of a single cell using a hard X-ray nanobeam focused by a Kirkpatrick-Baez mirror system2011

    • Author(s)
      S. Matsuyama, K. Yamauchi
    • Journal Title

      SPring-8 Research Frontiers 2010

      Pages: 44-45

    • Related Report
      2012 Final Research Report
  • [Journal Article] Trace element mapping of a single cell using a hard X-ray nanobeam focused by a Kirkpatrick-Baez mirror system2011

    • Author(s)
      Satoshi Matsuyama, Kazuto Yamauchi
    • Journal Title

      SPring-8 Research Frontiers 2010

      Volume: 2011年 Pages: 44-45

    • Related Report
      2011 Research-status Report
  • [Journal Article] Development of achromatic full-field hard X-ray microscopy using four total-reflection mirrors

    • Author(s)
      S. Matsuyama, Y. Emi, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa and K. Yamauchi
    • Journal Title

      Journal of Physics: Conference Series

      Volume: (accepted)

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Presentation] Ion Beam Figuringを用いた高精度X線ミラーの作製2013

    • Author(s)
      松山 智至
    • Organizer
      2013年度精密工学会春季大会
    • Place of Presentation
      東京工業大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] Ion Beam Figuring を用いた高精度X 線ミラーの作製 第3 報 -シリコン表面に対する楕円形状の作製と評価-2012

    • Author(s)
      北村真一,松山智至,佐野泰久,山内和人
    • Organizer
      2012 年度精密工学会春季大会
    • Place of Presentation
      首都大学東京
    • Year and Date
      2012-03-15
    • Related Report
      2012 Final Research Report
  • [Presentation] PtC/C 多層膜を用いた硬 X 線集光用ミラーの反射率改善2012

    • Author(s)
      金章雨,横山光,松山智至,佐野泰久,山内和人
    • Organizer
      2012 年度精密工学会春季大会
    • Place of Presentation
      首都大学東京
    • Year and Date
      2012-03-15
    • Related Report
      2012 Final Research Report
  • [Presentation] Fabrication of ultraprecise X-ray mirrors by ion beam figuring system: Fabrication and evaluation of aspheric shape on silicon surface2012

    • Author(s)
      S. Kitamura, S. Matsuyama, Y. Sano and K. Yamauchi
    • Organizer
      5th International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka, Japan
    • Related Report
      2012 Final Research Report
  • [Presentation] Improvement of interface roughness in platinum/carbon multilayers for X-ray mirrors2012

    • Author(s)
      J. Kim, S. Matsuyama, Y. Sano, K. Yamauchi
    • Organizer
      14th International Conference on Precision Engineering
    • Place of Presentation
      Hyogo, Japan
    • Related Report
      2012 Final Research Report
  • [Presentation] Development of Achromatic Full-Field Hard X-ray Microscopy Using Four Total-Reflection Mirrors2012

    • Author(s)
      S. Matsuyama, Y. Emi, N. Kidani, Y.Kohmura, K. Tamasaku, T. Ishikawa, K.Yamauchi
    • Organizer
      11th International Conference on X-ray Microscopy
    • Place of Presentation
      Shanghai, China
    • Related Report
      2012 Annual Research Report 2012 Final Research Report
  • [Presentation] Fabrication of ultraprecise X-ray mirrors by ion beam figuring system: Fabrication and evaluation of aspheric shape on silicon surface2012

    • Author(s)
      Shinichi Kitamura
    • Organizer
      5th International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka University Nakanoshima Center, Osaka
    • Related Report
      2012 Annual Research Report
  • [Presentation] Improvement of interface roughness in platinum/carbon multilayers for X-ray mirrors2012

    • Author(s)
      Jangwoo Kim
    • Organizer
      14th International Conference on Precision Engineering (ICPE2012)
    • Place of Presentation
      Yumebutai International Conference Center, Hyogo
    • Related Report
      2012 Annual Research Report
  • [Presentation] Study of Pt/C multilayers for X-ray mirrors improvement of reflectivity2012

    • Author(s)
      Jangwoo Kim
    • Organizer
      5th International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka University Nakanoshima Center, Osaka
    • Related Report
      2012 Annual Research Report
  • [Presentation] Development of piezoelectric deformable mirror for hard X-ray nanofocusing2012

    • Author(s)
      Satoshi Matsuyama
    • Organizer
      SPIE Optics+Photonics
    • Place of Presentation
      SanDiego, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Development of a High-resolution Full-field Hard X-ray Imaging MicroscopeA Based On Four Aspherical Mirrors2012

    • Author(s)
      Youji Emi
    • Organizer
      5th International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka University Nakanoshima Center, Osaka
    • Related Report
      2012 Annual Research Report
  • [Presentation] Ion Beam Figuring を用いた高精度X線ミラーの作製2012

    • Author(s)
      北村 真一
    • Organizer
      2012年度精密工学会秋季大会
    • Place of Presentation
      九州工業大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] Advanced Kirkpatrick-Baezミラー結像光学系を用いた高分解能硬X線顕微鏡の開発2012

    • Author(s)
      松山 智至
    • Organizer
      2012年度精密工学会秋季大会学術講演会
    • Place of Presentation
      九州工業大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] Ion Beam Figuringを用いた高精度X線ミラーの作製 第3報 -シリコン表面に対する楕円形状の作製と評価-2012

    • Author(s)
      北村真一,松山智至,佐野泰久,山内和人
    • Organizer
      2012年度精密工学会春季大会
    • Place of Presentation
      首都大学東京
    • Related Report
      2011 Research-status Report
  • [Presentation] PtC/C多層膜を用いた硬X線集光用ミラーの反射率改善2012

    • Author(s)
      金章雨,横山光,松山智至,佐野泰久,山内和人
    • Organizer
      2012年度精密工学会春季大会
    • Place of Presentation
      首都大学東京
    • Related Report
      2011 Research-status Report
  • [Presentation] 硬X線集光用形状可変ミラーの開発 -SPring-8での集光特性-2012

    • Author(s)
      松山智至,中森紘基,今井将太,横山光,木村隆志,佐野泰久,香村芳樹,石川哲也,山内和人
    • Organizer
      2012年度精密工学会春季大会
    • Place of Presentation
      首都大学東京
    • Related Report
      2011 Research-status Report
  • [Presentation] PtC/C多層膜を用いたX線集光用ミラーの反射率改善2012

    • Author(s)
      金章雨,横山光,松山智至,佐野泰久,香村芳樹,玉作賢治,矢橋牧名,石川哲也,山内和人
    • Organizer
      第25回日本放射光学会年会・放射光科学合同シンポジウム
    • Place of Presentation
      鳥栖市民文化会館
    • Related Report
      2011 Research-status Report
  • [Presentation] 回折限界下で集光径可変なミラー集光光学系の開発2012

    • Author(s)
      松山智至, 木村隆志, 中森紘基, 今井将太, 香村芳樹, 玉作賢治, 矢橋牧名, 石川哲也, 西野吉則, 山内和人
    • Organizer
      第25回日本放射光学会年会・放射光科学合同シンポジウム
    • Place of Presentation
      鳥栖市民文化会館
    • Related Report
      2011 Research-status Report
  • [Presentation] Reflectivity improvement using PtC/C multilayers for X-ray mirrors2011

    • Author(s)
      J. Kim, H. Yokoyama, S. Matsuyama, Y.Sano, K. Yamauchi
    • Organizer
      4th International Symposium on Atomically ControlledFabrication Technology
    • Place of Presentation
      大阪大学
    • Year and Date
      2011-10-31
    • Related Report
      2012 Final Research Report
  • [Presentation] IBF(Ion Beam Figuring)を用いた高精度 X 線ミラーの作製 シリコン表面の加工特性とビームの安定性の評価-2011

    • Author(s)
      北村真一,松山智至,佐野泰久,山内和人
    • Organizer
      2011 年度精密工学会 秋季大会学術講演会
    • Place of Presentation
      金沢大学
    • Year and Date
      2011-09-22
    • Related Report
      2012 Final Research Report
  • [Presentation] Determination of Had X-ray Focusing Mirror Aberration using Phase Retrieval with Transverse Translation Diversity2011

    • Author(s)
      H. Yokoyama, T. Kimura, H. Mimura, S. Imai, S. Matsuyama, Y. Kohmura, T. Ishikawa, K. Yamauchi
    • Organizer
      4th International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      大阪大学
    • Related Report
      2011 Research-status Report
  • [Presentation] Development of Hard X-ray Imaging Optics for Achromatic Full-Field X-ray Microscopy2011

    • Author(s)
      Satoshi Matsuyama, Naotaka Kidani, Yoji Emi, Yasuhisa Sano, Yoshiki Kohmura, Tetsuya Ishikawa, and Kazuto Yamauchi
    • Organizer
      4th International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      大阪大学
    • Related Report
      2011 Research-status Report
  • [Presentation] Development of an ultra-precise deformable mirror for hard X-ray nanofocusing2011

    • Author(s)
      Hiroki Nakamori, Satoshi Matsuyama, Takashi Kimura, Shouta Imai, Yoshiki Kohmura, Tetsuya Ishikawa, Yoshinori Nishino, Kazuto Yamauchi
    • Organizer
      4th International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      大阪大学
    • Related Report
      2011 Research-status Report
  • [Presentation] Reflectivity improvement using PtC/C multilayers for X-ray mirrors2011

    • Author(s)
      Jangwoo Kim, Hikaru Yokoyama, Satoshi Matsuyama, Yasuhisa Sano, Kazuto Yamauchi
    • Organizer
      Jangwoo Kim, Hikaru Yokoyama, Satoshi Matsuyama, Yasuhisa Sano, Kazuto Yamauchi
    • Place of Presentation
      大阪大学
    • Related Report
      2011 Research-status Report
  • [Presentation] IBF(Ion Beam Figuring)を用いた高精度X線ミラーの作製 ―シリコン表面の加工特性とビームの安定性の評価―2011

    • Author(s)
      北村真一,松山智至,佐野泰久,山内和人
    • Organizer
      2011年度精密工学会 秋季大会学術講演会
    • Place of Presentation
      金沢大学
    • Related Report
      2011 Research-status Report
  • [Presentation] 硬X線集光用多層膜ミラーの開発2011

    • Author(s)
      金章雨,横山光,松山智至,三村秀和,佐野泰久,香村芳樹,石川哲也,山内和人
    • Organizer
      2011年度精密工学会 秋季大会学術講演会
    • Place of Presentation
      金沢大学
    • Related Report
      2011 Research-status Report
  • [Presentation] Development of hard x-ray imaging optics with four aspherical mirrors2011

    • Author(s)
      S. Matsuyama, N. Kidani, H. Mimura, Y. Sano, K. Tamasaku,
    • Organizer
      SPIE Optics+Photonics
    • Place of Presentation
      SanDiego, USA
    • Related Report
      2011 Research-status Report
  • [Book] 知識ベース,収束放射光を用いたナノ計測2012

    • Author(s)
      山内和人,三村秀和,松山智至
    • Publisher
      オーム社
    • Related Report
      2011 Research-status Report
  • [Remarks]

    • URL

      http://www-up.prec.eng.osaka-u.ac.jp/

    • Related Report
      2012 Final Research Report
  • [Remarks] 山内研究室

    • URL

      http://www-up.prec.eng.osaka-u.ac.jp/index.htm

    • Related Report
      2012 Annual Research Report
  • [Remarks] 研究者総覧

    • URL

      http://www.dma.jim.osaka-u.ac.jp/view?l=ja&u=4001

    • Related Report
      2012 Annual Research Report

URL: 

Published: 2011-08-05   Modified: 2019-07-29  

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