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Novel etching process for graphene fabrication utilizing oxidation decomposition reaction

Research Project

Project/Area Number 23710137
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Nanomaterials/Nanobioscience
Research InstitutionNational Institute for Materials Science

Principal Investigator

ISHIDA Nobuyuki  独立行政法人物質・材料研究機構, ナノ材料科学環境拠点, NIMSポスドク研究員 (10451444)

Project Period (FY) 2011 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2012: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2011: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
Keywordsナノ構造形成・制御 / グラフェン / 酸化グラフェン / 酸化分解過程 / TOF-SIMS / 活性酸素 / 酸化分解 / 加工技術
Research Abstract

We show that graphene layers can be removed from graphite in a layer by layer manner using reactive oxygen species generated by plasma. However, Raman spectrum suggests that the surface of a fabricated graphene sheet by the etching is oxidized. Careful inspection of the oxidation decomposition process clarifies that oxidation occur only at the top most surface. These results indicate a possibility to establish a procedure that makes it possible to etch graphene layers from graphite with controlling the number of the layers. Our next step is to find a way to remove the top most oxidized graphene layer.

Report

(3 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Research-status Report
  • Research Products

    (8 results)

All 2012 2011 Other

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (6 results)

  • [Journal Article] Adsorption of Co-Phthalocyanine on the Rutile TiO2(110) Surface: A Scanning Tunneling Microscopy/Spectroscopy Study2012

    • Author(s)
      Nobuyuki Ishida and Daisuke Fujita
    • Journal Title

      Journal of Physical Chemistry C

      Volume: 116 Issue: 38 Pages: 20300-20300

    • DOI

      10.1021/jp303152c

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Superhydrophilic TiO2 surfaces generated by reactive oxygen treatment2012

    • Author(s)
      Nobuyuki Ishida and Daisuke Fujita
    • Journal Title

      Journal of Vacuum Science & Technology A

      Volume: 30 Issue: 5 Pages: 51402-51402

    • DOI

      10.1116/1.4736946

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Presentation] Adsorption of Co-phthalocyanine on the rutile TiO2(110) surface: An STM/STS study2012

    • Author(s)
      Nobuyuki Ishida and Daisuke Fujita
    • Organizer
      International Conference on Nanoscience and Technology 2012
    • Place of Presentation
      Paris
    • Related Report
      2012 Annual Research Report 2012 Final Research Report
  • [Presentation] Superhydrophilic TiO2 surfaces without UV irradiation processing2011

    • Author(s)
      Nobuyuki Ishida and Daisuke Fujita
    • Organizer
      The 6th International Symposium on Surface Science 2011
    • Place of Presentation
      Tokyo
    • Related Report
      2012 Final Research Report
  • [Presentation] STM observation of Co-phthalocyanine on the rutile TiO2(110) surface2011

    • Author(s)
      Nobuyuki Ishida and Daisuke Fujita
    • Organizer
      International Conference on Thin Film 2011
    • Place of Presentation
      Kyoto
    • Related Report
      2012 Final Research Report
  • [Presentation] ルチル型TiO2(110)表面に吸着したフタロシアニンのSTM観察

    • Author(s)
      石田暢之、藤田大介
    • Organizer
      応用物理学会学術講演会
    • Place of Presentation
      山形大学
    • Related Report
      2011 Research-status Report
  • [Presentation] STM observation of Co-phthalocyanine on the rutile TiO2(110) surface

    • Author(s)
      Nobuyuki Ishida, Daisuke Fujita
    • Organizer
      15th International Conference on Thin Films
    • Place of Presentation
      京都テルサ
    • Related Report
      2011 Research-status Report
  • [Presentation] Superhydrophilic TiO2 surfaces without UV irradiation processing

    • Author(s)
      Nobuyuki Ishida, Daisuke Fujita
    • Organizer
      International Symposium on Surface Science 6
    • Place of Presentation
      タワーホール船堀
    • Related Report
      2011 Research-status Report

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Published: 2011-08-05   Modified: 2019-07-29  

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