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Fabrication of epoxy-based molecular permeable membrane and analysis of membrane characteristics using coarse-grained molecular dynamics simulation

Research Project

Project/Area Number 23710148
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Microdevices/Nanodevices
Research InstitutionKyoto University

Principal Investigator

HIRAI Yoshikazu  京都大学, 先端医工学研究ユニット, 特定助教 (40452271)

Project Period (FY) 2011 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2012: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2011: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Keywordsリソグラフィ / 粗視化分子動力学 / 分子透過膜 / フォトレジスト / 弾性率 / マイクロ・ナノデバイス / 高分子構造・物性 / シミュレーション工学 / マイクロマシン / 先端機能デバイス / フィルタ
Research Abstract

Biocompatible permeable membranes integrated with a microfluidic system, which allow the diffusion of biological molecules with certain molecular weight, are desirable in biomedical applications. This study reports on a molecular level study of the molecules permeability of epoxy-based chemically-amplified photoresists by employing a coarse-grained molecular dynamics simulation. For analyzing mechanical property and diffusion coefficient of molecular in photoresists, Kremer-Grest model with an extended angle bending potential was employed. The simulation results show the same tendency with the experimental results, and which suggests photoresist membrane can be used as permeable membranes with controllable permeability by varying lithography parameters.

Report

(3 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Research-status Report
  • Research Products

    (21 results)

All 2013 2012 2011 Other

All Journal Article (4 results) (of which Peer Reviewed: 4 results) Presentation (17 results) (of which Invited: 1 results)

  • [Journal Article] Phenotypic and transcriptional modulation of human pluripotent stem cells induced by nano/microfabrication materials2013

    • Author(s)
      K. Kamei, Y. Hirai, Y. Makino, M. Yoshioka, Q. Yuan, M. Nakajima, Y. Chen, and O. Tabata
    • Journal Title

      Advanced Healthcare Materials

      Volume: 2(2) Issue: 2 Pages: 287-291

    • DOI

      10.1002/adhm.201200283

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] MEMSネガレジストの粗視化分子動力学シミュレーション2013

    • Author(s)
      平井義和, 柳生裕聖, 牧野圭秀, 上杉晃生, 菅野公二, 土屋智由, 田畑修
    • Journal Title

      電気学会論文誌E(センサ・マイクロマシン部門誌)

      Volume: 133

    • NAID

      10031189068

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Simulation of Mechanical Properties of Epoxy-Based Chemically Amplified Resist by Coarse-Grained Molecular Dynamics2012

    • Author(s)
      H. Yagyu、Y . Hirai、A. Uesugi、Y . Makino、K. Sugano 、T . Tsuchiya 、O. Tabata
    • Journal Title

      Polymer

      Volume: 53 Issue: 21 Pages: 4834-4842

    • DOI

      10.1016/j.polymer.2012.08.050

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] MEMSネガレジストの粗視化分子動力学シミュレーション

    • Author(s)
      平井義和、柳生裕聖、牧野圭秀、上杉晃生、菅野公二、土屋智由、田畑修
    • Journal Title

      電気学会論文誌E(センサ・マイクロマシン部門誌)

    • NAID

      10031189068

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Presentation] Material Characterizations of Negative Photoresist for Bio-MEMS Applications2012

    • Author(s)
      Y . Hirai
    • Organizer
      IEEE-NMDC 2012
    • Place of Presentation
      、Hyatt Regency Waikiki Beach Resort and Spa (Hawaii、USA)(招待講演)
    • Year and Date
      2012-10-18
    • Related Report
      2012 Final Research Report
  • [Presentation] Investigation of Molecular Diffusivity of Photoresist Membrane using Coarse-Grained Molecular Dynamics Simulation2012

    • Author(s)
      H. Yagyu 、Y . Hirai 、Y . Makino 、K.Sugano 、T . Tsuchiya 、O. Tabata
    • Organizer
      Eurosensors XXVI
    • Place of Presentation
      Krakow Opera (Krakow、Poland)
    • Year and Date
      2012-09-11
    • Related Report
      2012 Final Research Report
  • [Presentation] Investigation of Nonlinear Decrease of Autofluorescence in Negative Thick-Film Resist2012

    • Author(s)
      Daimon Matsui, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, and Osamu Tabata
    • Organizer
      The 6th IEEE Asia-Pacific Conferenc on Transducers and Micro-Nano Technology (APCOT2012)
    • Place of Presentation
      Jinling Hotel (Nanjing, China)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Investigation of Molecular Diffusivity of Photoresist Membrane using Coarse-Grained Molecular Dynamics Simulation2012

    • Author(s)
      Hiromasa Yagyu, Yoshikazu Hirai, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, and Osamu Tabata
    • Organizer
      The 26th European Conference on Solid-State Transducers (Eurosensors XXVI)
    • Place of Presentation
      Kraków Opera (Krakow, Poland)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Material Characterizations of Negative Photoresist for Bio-MEMS Applications2012

    • Author(s)
      Yoshikazu Hirai
    • Organizer
      The 2012 IEEE Nanotechnology Material and Devices Conference (IEEE-NMDC 2012)
    • Place of Presentation
      Hyatt Regency Waikiki Beach Resort and Spa (Hawaii, USA)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] 粗視化分子動力学シミュレーションによる架橋度制御ネガレジストの分子透過係数解析2012

    • Author(s)
      平井義和, 柳生裕聖, 牧野圭秀, 菅野公二, 土屋智由, 田畑修
    • Organizer
      第29回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      北九州国際会議場・西日本総合展示場(福岡県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Phenotypic Modulation of Pluripotent Stem Cells (PSCs) Induced by Microfabrication Materials2012

    • Author(s)
      Ken-Ichiro Kamei, Yoshikazu Hirai, Yoshihide Makino, Li Liu, Minako Nakajima, Qinghua Yuan, Yong Chen, Osamu Tabata
    • Organizer
      The 16th International Conference on. Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2012)
    • Place of Presentation
      Okinawa Convention Center (Ginowan, Japan)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Modeling and Elastic Property Simulation of Epoxy-Based Negative Photoresist using Coarse-Grained Molecular Dynamics2012

    • Author(s)
      Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    • Organizer
      7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012)
    • Place of Presentation
      Kyoto University (Kyoto, Japan)
    • Related Report
      2011 Research-status Report
  • [Presentation] Coarse-Grained Molecular Dynamics Simulation of Epoxy-Based Chemically-Amplified Resist for MEMS Application2011

    • Author(s)
      H. Yagyu、Y. Hirai、A. Uesugi、Y . Makino、K. Sugano 、T . Tsuchiya 、O. Tabata
    • Organizer
      2011 MRS Fall Meeting
    • Place of Presentation
      Hynes Convention Center (Boston、MA USA)
    • Year and Date
      2011-11-29
    • Related Report
      2012 Final Research Report
  • [Presentation] Mechanical Characterization of Negative Photoresist by Nano-Indentation for Nano-Filtration Membrane2011

    • Author(s)
      Y. Hirai、A. Uesugi、Y . Makino、H. Yagyu、K. Sugano 、T . Tsuchiya 、O. Tabata
    • Organizer
      HARMST2011
    • Place of Presentation
      Ambassador Hotel-Hsinchu Hotel (Hsinchu、Taiwan)
    • Year and Date
      2011-06-14
    • Related Report
      2012 Final Research Report
  • [Presentation] Negative-Photoresist Mechanical Property for Nano-Filtration Membrane Embedded in Microfluidics2011

    • Author(s)
      Y. Hirai、A. Uesugi、Y . Makino、H. Yagyu、K. Sugano 、T . Tsuchiya 、O. Tabata
    • Organizer
      Transducers'11
    • Place of Presentation
      China National Convention Center (Beijing、China)
    • Year and Date
      2011-06-08
    • Related Report
      2012 Final Research Report
  • [Presentation] Coarse-Grained Molecular Dynamics Simulation Approach for Mechanical Property of Epoxy-Based Chemically-Amplified Resist2011

    • Author(s)
      Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    • Organizer
      International Workshop on Micro-/Nano-Engineering
    • Place of Presentation
      Kyoto University (Kyoto, Japan)
    • Related Report
      2011 Research-status Report
  • [Presentation] Coarse-Grained Molecular Dynamics Simulation of Epoxy-Based Chemically-Amplified Resist for MEMS Application2011

    • Author(s)
      Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    • Organizer
      2011 MRS Fall Meeting
    • Place of Presentation
      Hynes Convention Center (Boston, MA USA)
    • Related Report
      2011 Research-status Report
  • [Presentation] MEMS厚膜ネガレジストの粗視化分子動力学モデル2011

    • Author(s)
      平井義和, 柳生裕聖, 上杉晃生, 牧野圭秀, 菅野公二, 土屋智由, 田畑修
    • Organizer
      第28回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      船堀タワーホール (東京)
    • Related Report
      2011 Research-status Report
  • [Presentation] エポキシ系ネガレジスト機械的特性の架橋度依存性2011

    • Author(s)
      上杉晃生, 牧野圭秀, 柳生裕聖, 平井義和, 菅野公二, 土屋智由, 田畑修
    • Organizer
      日本機械学会2011年度年次大会
    • Place of Presentation
      東京工業大学 (東京)
    • Related Report
      2011 Research-status Report
  • [Presentation] Mechanical Characterization of Negative Photoresist by Nano-Indentation for Nano-Filtration Membrane2011

    • Author(s)
      Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Hiromasa Yagyu, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    • Organizer
      9th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2011)
    • Place of Presentation
      Ambassador Hotel-Hsinchu Hotel (Hsinchu, Taiwan)
    • Related Report
      2011 Research-status Report
  • [Presentation] Negative-Photoresist Mechanical Property for Nano-Filtration Membrane Embedded in Microfluidics2011

    • Author(s)
      Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Hiromasa Yagyu, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
    • Organizer
      16th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers'11)
    • Place of Presentation
      China National Convention Center (Beijing, China)
    • Related Report
      2011 Research-status Report

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Published: 2011-08-05   Modified: 2019-07-29  

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