• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Establishment of basic techniques about gallium oxide related semiconductor films

Research Project

Project/Area Number 23760009
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Applied materials science/Crystal engineering
Research InstitutionTokyo Institute of Technology

Principal Investigator

OSHIMA Takayoshi  東京工業大学, 大学院・理工学研究科, 助教 (60583151)

Project Period (FY) 2011 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2012: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Fiscal Year 2011: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Keywords酸化ガリウム / ワイドギャップ半導体 / バンドギャップエンジニアリング / ヘテロ接合 / 光電極 / 水分解 / 新材料探索 / 薄膜成長 / 酸化物半導体
Research Abstract

Ga2O3 related materials, which are relatively novel wide-band-gap semiconductors, were studied in this research. Especially, we focused on the most stable ・-phase. As for electrical application, we have succeeded control of conductivity and band-gap engineering. Photocatalytic activities of Ga2O3 were also investigated in detail for optical application. We also demonstrated epitaxial stabilization of meta-stable phases of ・and ・. Furthermore, we have achieved ZnGa2O4 single crystalline film with a single domain and characterized its physical properties.

Report

(3 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Research-status Report
  • Research Products

    (42 results)

All 2013 2012 2011 Other

All Journal Article (4 results) (of which Peer Reviewed: 4 results) Presentation (34 results) (of which Invited: 1 results) Patent(Industrial Property Rights) (4 results)

  • [Journal Article] Formation of Semi-Insulating Layers on Semiconducting β-Ga2O3 Single Crystals by Thermal Oxidation2013

    • Author(s)
      Takayoshi Oshima
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 52 Issue: 5R Pages: 051101-051101

    • DOI

      10.7567/jjap.52.051101

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Spontaneous atomic ordering and magnetism in epitaxially stabilized double perovskites2013

    • Author(s)
      Akira Ohtomo
    • Journal Title

      Journal of Materials Research

      Volume: 28 Pages: 689-695

    • DOI

      10.1557/opl.2012.923

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Epitaxial growth of γ-Ga2O3 films by mist chemical vapor deposition2012

    • Author(s)
      Takayoshi Oshima
    • Journal Title

      Journal of Crystal Growth

      Volume: 359 Pages: 60-63

    • DOI

      10.1016/j.jcrysgro.2012.08.025

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Epitaxial structures of band-gap-engineered α-(CrxFe1-x)2O3(0 ≤x≤1) films grown on c-plane sapphire2012

    • Author(s)
      Hisanori Mashiko
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51 Issue: 11S Pages: 11PG11-11PG11

    • DOI

      10.1143/jjap.51.11pg11

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Presentation] Gallium oxide related materials as novel wide-band-gap semiconductor2013

    • Author(s)
      Takayoshi Oshima
    • Organizer
      International Device Physics Young Scientist Symposium 2013
    • Place of Presentation
      Nara, Japan
    • Year and Date
      2013-03-04
    • Related Report
      2012 Final Research Report
  • [Presentation] Cathodoluminescence properties of β-Al_2xGa_2-2xO_32013

    • Author(s)
      Akira Mukai, Takayoshi Oshima, 他4名
    • Organizer
      The 40th International Symposium on Compound Semiconductors
    • Place of Presentation
      Kobe, Japan
    • Related Report
      2012 Final Research Report
  • [Presentation] Semi-insulation of conducting β-Ga_2O_3 single crystal surfaces by thermal oxidation2013

    • Author(s)
      Takayoshi Oshima, 他8名
    • Organizer
      The 40th International Symposium on Compound Semiconductors
    • Place of Presentation
      Kobe, Japan
    • Related Report
      2012 Final Research Report
  • [Presentation] 熱酸化によるβ-Ga_2O_3単結晶表面の半絶縁層形成2013

    • Author(s)
      大島孝仁, 他8名
    • Organizer
      2013年第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学
    • Related Report
      2012 Final Research Report
  • [Presentation] β-Ga_2O_3(-201)基板上の Al_2xGa_2-2xO_3 薄膜の成長制御2013

    • Author(s)
      向井章,大島孝仁,他5名
    • Organizer
      2013年第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学
    • Related Report
      2012 Final Research Report
  • [Presentation] Semi-insulation behavior in conducting β-Ga2O3 single crystal surfaces by thermal oxidation2013

    • Author(s)
      Takayoshi Oshima
    • Organizer
      32nd Electronic Material Symposium
    • Place of Presentation
      滋賀
    • Related Report
      2012 Annual Research Report
  • [Presentation] β-Al2xGa2-2xO3 thin films for β-Ga2O3 hetero-device applications2013

    • Author(s)
      Takayoshi Oshima
    • Organizer
      2013 JSAP-MRS Joint Symposia
    • Place of Presentation
      京都
    • Related Report
      2012 Annual Research Report
  • [Presentation] Cathodoluminescence properties of β-Al2xGa2-2xO3 film2013

    • Author(s)
      Akira Mukai
    • Organizer
      40th International Symposum on Compound Semicondutors
    • Place of Presentation
      神戸
    • Related Report
      2012 Annual Research Report
  • [Presentation] Semi-Insulation of Conducting β-Ga2O3 Single Crystal Surfaces by Thermal Oxidation2013

    • Author(s)
      Takayoshi Oshima
    • Organizer
      40th International Symposum on Compound Semicondutors
    • Place of Presentation
      神戸
    • Related Report
      2012 Annual Research Report
  • [Presentation] Band-gap Narrowing in α-Cr2O3-Fe2O3 Solid Solution Films2013

    • Author(s)
      Hisanori Mashiko
    • Organizer
      2013 Material Research Society Spring Meeting
    • Place of Presentation
      USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] α-(CrxFe1-x)2O3薄膜の半導体光電極評価2013

    • Author(s)
      増子尚徳
    • Organizer
      2013年第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川県
    • Related Report
      2012 Annual Research Report
  • [Presentation] 熱酸化によるβ-Ga2O3単結晶表面の半絶縁層形成2013

    • Author(s)
      大島孝仁
    • Organizer
      2013年第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川県
    • Related Report
      2012 Annual Research Report
  • [Presentation] β-Ga2O3 (-201)基板上のAl2xGa2-2xO3薄膜の成長制御2013

    • Author(s)
      向井章
    • Organizer
      2013年第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川県
    • Related Report
      2012 Annual Research Report
  • [Presentation] LiTi2O4薄膜における超伝導特性の膜厚依存性2013

    • Author(s)
      横山耕祐
    • Organizer
      2013年第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川県
    • Related Report
      2012 Annual Research Report
  • [Presentation] ダブルペロブスカイト型Sr2TiRuO6の薄膜成長と物性2013

    • Author(s)
      野上顕悟
    • Organizer
      2013年第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川県
    • Related Report
      2012 Annual Research Report
  • [Presentation] ワイドギャップ半導体酸化ガリウムの基本特性と応用2012

    • Author(s)
      藤田静雄,大島孝仁,他6名
    • Organizer
      透明酸化物光・電子材料第166委員会第55回研究会,アイビーホール青学会館
    • Place of Presentation
      東京都
    • Year and Date
      2012-04-27
    • Related Report
      2012 Final Research Report
  • [Presentation] 酸化ガリウム半導体の機能とデバイス応用2012

    • Author(s)
      藤田静雄,大島孝仁,他6名
    • Organizer
      日本学術振興会ワイドギャップ半導体光・電子デバイス第162委員会第78回研究会,主婦会館プラザエフ
    • Place of Presentation
      東京都
    • Year and Date
      2012-03-02
    • Related Report
      2012 Final Research Report
  • [Presentation] カソードル ミネッセンス法による Al_2xGa_2-2xO_3 薄膜の発光特性評価2012

    • Author(s)
      向井章, 大島孝仁, 大友明
    • Organizer
      2012年秋季第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学
    • Related Report
      2012 Final Research Report
  • [Presentation] Mist chemical vapor deposition of γ-phase Ga_2O_3 thin films2012

    • Author(s)
      Takayoshi Oshima, 他3名
    • Organizer
      39th International Symposium onCompound Semiconductors
    • Place of Presentation
      SantaBarbara, USA
    • Related Report
      2012 Final Research Report
  • [Presentation] Epitaxial stabilization of γ-phase Ga_2O_3 thin films by Mist CVD2012

    • Author(s)
      Takayoshi Oshima, 他3名
    • Organizer
      31st Electronic Materials Symposium,ラフォーレ修善寺
    • Place of Presentation
      静岡県
    • Related Report
      2012 Final Research Report
  • [Presentation] Ga_2O_3の結晶多形とヘテロエピ構造:β-Ga_2O_3/(0001) α-Al_2O_32012

    • Author(s)
      向井章,大島孝仁,他2名
    • Organizer
      2012年春季第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学
    • Related Report
      2012 Final Research Report
  • [Presentation] Mist chemical vapor deposition of γ-phase Ga2O3 thin films2012

    • Author(s)
      Takayoshi Oshima
    • Organizer
      39th International Symposium on Compound Semiconductors
    • Place of Presentation
      USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Spontaneous atomic ordering and magnetism in epitaxially stabilized double-perovskites2012

    • Author(s)
      Akira Ohtomo
    • Organizer
      2012 Materials Research Society Spring Meeting
    • Place of Presentation
      USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] パルスレーザ堆積法によるLiTi2O4 薄膜のエピタキシャル成長2012

    • Author(s)
      横山耕祐
    • Organizer
      2012年秋季第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛県
    • Related Report
      2012 Annual Research Report
  • [Presentation] カソードルミネッセンス法によるAl2xGa2-2xO3 薄膜の発光特性評価2012

    • Author(s)
      向井章
    • Organizer
      2012年秋季第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛県
    • Related Report
      2012 Annual Research Report
  • [Presentation] 遷移金属酸化物混晶におけるバンドギャップ狭帯化の起源2012

    • Author(s)
      増子尚徳
    • Organizer
      2012年秋季第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛県
    • Related Report
      2012 Annual Research Report
  • [Presentation] Epitaxial stabilization of γ-phase Ga2O3 thin films by Mist CVD2012

    • Author(s)
      Takayoshi Oshima
    • Organizer
      31st Electronic Materials Symposium
    • Place of Presentation
      静岡県
    • Related Report
      2012 Annual Research Report
  • [Presentation] 酸化ガリウム半導体の機能とデバイス応用2012

    • Author(s)
      藤田静雄, 東脇正高,佐々木公平,倉又朗人,増井建和,山腰茂伸,大島孝仁,大友明
    • Organizer
      日本学術振興会ワイドギャップ半導体光・電子デバイス第162 委員会第78 回研究会
    • Place of Presentation
      主婦会館プラザエフ
    • Related Report
      2011 Research-status Report
  • [Presentation] Ga2O3 の結晶多形とヘテロエピ構造:β-Ga2O3/(0001)α-Al2O32012

    • Author(s)
      向井章,中園敦巳,大島孝仁,大友明
    • Organizer
      2012 年春季第59 回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学
    • Related Report
      2011 Research-status Report
  • [Presentation] Growth, characterization, and device applications of various oxide semiconductors2011

    • Author(s)
      Shizuo Fujita, Takayoshi Oshima, 他4名
    • Organizer
      15th International Conference on II-VI Compounds
    • Place of Presentation
      Mayan Riviera, Mexico
    • Related Report
      2012 Final Research Report
  • [Presentation] PLD growth and optical characterization of composition-spread Al2xGa2-2xO3 films2011

    • Author(s)
      Akira Mukai, Takayoshi Oshima, andAkira Ohtomo
    • Organizer
      30th Electronic Materials Symposium
    • Place of Presentation
      ラフォーレ琵琶湖,滋賀県
    • Related Report
      2012 Final Research Report
  • [Presentation] PLD growth and opitcal characterization2011

    • Author(s)
      向井章,大島孝仁,大友明
    • Organizer
      第30 回電子材料シンポジウム
    • Place of Presentation
      ラフォーレ琵琶湖
    • Related Report
      2011 Research-status Report
  • [Presentation] Gallium oxide related materials as novel wide-band-gap semiconductor

    • Author(s)
      Takayoshi Oshima
    • Organizer
      International Device Physics Young Scientist Symposium 2013
    • Place of Presentation
      奈良県
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] ワイドギャップ半導体酸化ガリウムの基本特性と応用

    • Author(s)
      藤田静雄
    • Organizer
      透明酸化物光・電子材料第166委員会第55回研究会
    • Place of Presentation
      東京都
    • Related Report
      2012 Annual Research Report
  • [Patent(Industrial Property Rights)] 電気化学反応装置2013

    • Inventor(s)
      大友明, 大島孝仁, 佐々木公平
    • Industrial Property Rights Holder
      東京工業大学,タムラ製作所
    • Filing Date
      2013-04-26
    • Related Report
      2012 Final Research Report
  • [Patent(Industrial Property Rights)] 電気化学反応装置2013

    • Inventor(s)
      1. 大友明, 大島孝仁, 佐々木公平
    • Industrial Property Rights Holder
      東京工業大学,タムラ製作所
    • Industrial Property Rights Type
      特許
    • Filing Date
      2013-04-26
    • Related Report
      2012 Annual Research Report
  • [Patent(Industrial Property Rights)] 電気化学反応装置2011

    • Inventor(s)
      佐々木公平, 東脇正高, 藤田静雄, 大友明, 大島孝仁
    • Industrial Property Rights Holder
      東京工業大学,タムラ製作所,NICT,京都大学
    • Filing Date
      2011-09-08
    • Related Report
      2012 Final Research Report
  • [Patent(Industrial Property Rights)] Ga2O3 系HEMT2011

    • Inventor(s)
      佐々木公平, 東脇正高, 藤田静雄,大友明,大島孝仁
    • Industrial Property Rights Holder
      佐々木公平, 東脇正高, 藤田静雄,大友明,大島孝仁
    • Industrial Property Number
      2011-196436
    • Filing Date
      2011
    • Related Report
      2011 Research-status Report

URL: 

Published: 2011-08-05   Modified: 2019-07-29  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi