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Research on the ultra-thin film mechanical resonator for high resolution wavelength detection

Research Project

Project/Area Number 23760025
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionThe University of Tokyo

Principal Investigator

KOMETANI Reo  東京大学, 工学(系)研究科(研究院), 講師 (90466780)

Project Period (FY) 2011 – 2013
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2013: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2012: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2011: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Keywordsナノメカニクス / プラズモニクス / 超薄膜 / 集束イオンビーム / ナノ機械振動子 / NEMS / 波長計測 / 光通信 / 光検出 / センシング / DLC振動子 / シリコン振動子 / フォトニック結晶 / DLC振動
Research Abstract

Aim of this study is development of a high resolution wavelength detector for a next generation large-capacity access network. Wavelength measurement had been researched using a nanomechanical resonator and plasmonic structure. In addition, Q factor improvement method had been researched in order to achieve the high resolution wavelength detection. As a result, strain applying method using clamp bending of a resonator was useful to obtain a high Q factor mechanical resonator. And, the wavelength detection with a resolution of 2.2 pm was demonstrated by a nanomechanical resonator with U-shaped cavities.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • 2011 Research-status Report
  • Research Products

    (55 results)

All 2014 2013 2012 2011 Other

All Journal Article (9 results) (of which Peer Reviewed: 9 results) Presentation (38 results) (of which Invited: 4 results) Book (1 results) Remarks (6 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] “Superconductivity in Tungsten-Carbide Nanowires Deposited from the Mixtures of W(CO)6 and C14H102013

    • Author(s)
      Jun Dai, Koji Onomitsu, Reo Kometani, Yoshiharu Krockenberger, Hiroshi Yamaguchi, Sunao Ishihara, Shin’ichi Warisawa
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 52 Issue: 7R Pages: 75001-75001

    • DOI

      10.7567/jjap.52.075001

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Growth of ultra-long horizontal free-space-nanowire by the real-time feedback control of the scanning speed on focused-ion-beam chemical vapor deposition2013

    • Author(s)
      D. Guo, R. Kometani, S. Warisawa, S. Ishihara
    • Journal Title

      Journal of Vacuum Science & Technology B

      Volume: 31 Pages: 61601-61601

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Growth of ultra-long horizontal free-space-nanowire by the real-time feedback control of the scanning speed on focused-ion-beam chemical vapor deposition2013

    • Author(s)
      Dengji Guo, Reo Kometani, Shin'ichi Warisawa, Sunao Ishihara
    • Journal Title

      Journal of Vacuum Science & Technology B

      Volume: 31 Issue: 6 Pages: 61601-61601

    • DOI

      10.1116/1.4824170

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Three-Dimensional Nanostructure Fabrication by Controlling Downward Growth on Focused-Ion-Beam Chemical Vapor Deposition2012

    • Author(s)
      D. Guo, R. Kometani, S. Warisawa, and S.Ishihara
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: 51 Issue: 6R Pages: 65001-65001

    • DOI

      10.1143/jjap.51.065001

    • NAID

      40019317176

    • Related Report
      2013 Final Research Report 2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Nanomechanical tuning forks fabricated using focused-ion-beam chemical vapor deposition2012

    • Author(s)
      Hiroki Ashiba
    • Journal Title

      Journal of Vacuum Science and Technology B

      Volume: 30 Issue: 6

    • DOI

      10.1116/1.4766315

    • Related Report
      2013 Final Research Report 2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] High Quality Factor Graphene Resonator Fabrication Using Resist Shrinkage-Induced Strain2012

    • Author(s)
      Y. Oshidari, T. Hatakeyama, R. Kometani, S.Warisawa, S. Ishihara
    • Journal Title

      Appl. Phys. Express

      Volume: 5 Issue: 11 Pages: 117201-117201

    • DOI

      10.1143/apex.5.117201

    • NAID

      10031126464

    • Related Report
      2013 Final Research Report 2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] A Nanomechanical Resonator from HSQ Fabricated by FIB/EB Dual Beam Lithography2012

    • Author(s)
      S. Warisawa, K. Kuroda, S. Chen, R. Kometani, S. Ishihara
    • Journal Title

      Journal of Photopolymer Science and Technology

      Volume: 25 Issue: 1 Pages: 37-42

    • DOI

      10.2494/photopolymer.25.37

    • NAID

      130004464942

    • ISSN
      0914-9244, 1349-6336
    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Dynamic characteristics control of DLC nano-resonator fabricated by focused-ion-beam chemical vapor depo- sition2011

    • Author(s)
      R. Kometani, S. Nishi, S. Warisawa, and S.Ishihara
    • Journal Title

      J. Vac. Sci. Technol. B

      Volume: 29 Issue: 6

    • DOI

      10.1116/1.3662493

    • Related Report
      2013 Final Research Report 2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] Carbon nano- mechanical resonator fabrication from PMMA by FIB/electron-beam dual-beam lithography2011

    • Author(s)
      R. Kometani, T. Hatakeyama, K. Kuroda, S.Warisawa, and S. Ishihara
    • Journal Title

      J. Vac. Sci. Technol. B

      Volume: 29 Issue: 6

    • DOI

      10.1116/1.3662083

    • Related Report
      2013 Final Research Report 2011 Research-status Report
    • Peer Reviewed
  • [Presentation] 走査電子顕微鏡を利用した微小機械振動子の動特性プロファイリング2014

    • Author(s)
      米谷 玲皇,中野 和洋,石原 直,割澤 伸一
    • Organizer
      2014年第34回応用物理学会春季田学術講演会
    • Place of Presentation
      青山学院大学,神奈川県
    • Year and Date
      2014-03-18
    • Related Report
      2013 Final Research Report
  • [Presentation] The growth height correction on the three-dimensional nanostructure fabrication using focused-ion-beam chemical vapor deposition2013

    • Author(s)
      R. Kometani, Y. Murao, S. Ishihara, S. Warisawa
    • Organizer
      26th International Microprocesses and Nanotechnology Conference (MNC2013)
    • Place of Presentation
      Oral, Royton Sapporo, Hokkaido, Japan
    • Year and Date
      2013-11-07
    • Related Report
      2013 Final Research Report
  • [Presentation] 荷電粒子ビーム技術とナノメカニクス研究2013

    • Author(s)
      米谷 玲皇
    • Organizer
      公益社団法人 新化学技術推進協会 電子情報技術部会MEMS分科会講演会
    • Place of Presentation
      新化学技術推進協,東京都
    • Year and Date
      2013-10-15
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] ナノメカニクスとその波長計測への応用2013

    • Author(s)
      米谷 玲皇
    • Organizer
      2013年第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学,京都府
    • Year and Date
      2013-09-16
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] FIB-CVDを用いた3 次元ナノ構造形成における構造形成高さの補正2013

    • Author(s)
      米谷 玲皇,村尾 裕規,石原 直,割澤 伸一
    • Organizer
      2013年度精密工学会秋季大会学術講演会
    • Place of Presentation
      関西大学,大阪府
    • Year and Date
      2013-09-13
    • Related Report
      2013 Final Research Report
  • [Presentation] Optomechanical resonator fabrication with the surface plasmon antenna for the wavelength detection2013

    • Author(s)
      Reo Kometani, Hui Liu, Shin'ichi Warisawa, Sunao Ishihara
    • Organizer
      The 57th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2013)
    • Place of Presentation
      Oral, Nashville, US
    • Year and Date
      2013-05-31
    • Related Report
      2013 Final Research Report
  • [Presentation] 光波長検出微小機械振動子の作製と特性評価2013

    • Author(s)
      米谷 玲皇,劉 琿,割澤 伸一,石原 直
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学,神奈川県
    • Year and Date
      2013-03-29
    • Related Report
      2013 Final Research Report
  • [Presentation] 光波長検出微小機械振動子の作製と特性評価2013

    • Author(s)
      米谷玲皇,劉 琿,割澤 伸一,石原 直
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学
    • Related Report
      2012 Research-status Report
  • [Presentation] Evaluation of Resonance Detection Properties on Vibration Measurement of the Mechanical Resonator using Scanning Probe Microscope2012

    • Author(s)
      R. Kometani, S. Mifune, S. Warisawa and S. Ishihara
    • Organizer
      25th International Microprocesses and Nanotechnology Conference (MNC2012)
    • Place of Presentation
      Oriental Hotel, Kobe, Japan
    • Year and Date
      2012-11-01
    • Related Report
      2013 Final Research Report
  • [Presentation] Strained-nanomechanical resonator fabrication from HSQ by FIB/EB dual-beam lithography and annealing treatment2012

    • Author(s)
      R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
    • Organizer
      38th International Micro & Nano Engineering Conference (MNE 2012)
    • Place of Presentation
      Toulouse, France(ポスター)
    • Year and Date
      2012-09-17
    • Related Report
      2013 Final Research Report
  • [Presentation] FIB/EB 複合リソグラフィーによるHSQ からの3 次元ナノ構造作製2012

    • Author(s)
      米谷 玲皇,黒田 耕平,割澤 伸一,石原 直
    • Organizer
      第73回秋季応用物理学関係連合講演会
    • Place of Presentation
      愛媛大学・松山大学,愛媛県
    • Year and Date
      2012-09-12
    • Related Report
      2013 Final Research Report
  • [Presentation] FIB/EB Dual-beam Lithography2012

    • Author(s)
      R. Kometani
    • Organizer
      Next Generation Lithogtaphy Workshop 2012 (NGL2012)
    • Place of Presentation
      東京工業大学,東京都
    • Year and Date
      2012-07-20
    • Related Report
      2013 Final Research Report
  • [Presentation] The three-dimensional nanostructure fabrication from HSQ by FIB/EB dual-beam lithography2012

    • Author(s)
      R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
    • Organizer
      The 56th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2012)
    • Place of Presentation
      Hawaii, USA(口頭)
    • Year and Date
      2012-05-31
    • Related Report
      2013 Final Research Report
  • [Presentation] FIB/EB 複合リソグラフィーによるカーボンナノ機械振動子の作製とその特性評価2012

    • Author(s)
      米谷 玲皇,畠山 大輝,黒田 耕平, 割澤 伸一,石原 直
    • Organizer
      2012年第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学,東京都
    • Year and Date
      2012-03-15
    • Related Report
      2013 Final Research Report
  • [Presentation] The three-dimentional nanostructure fabrication from HSQ by FIB/EB dual-beam lithography2012

    • Author(s)
      R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
    • Organizer
      The 56th EIPBN Conference
    • Place of Presentation
      Waikoloa, Hawaii
    • Related Report
      2012 Research-status Report
  • [Presentation] EB/FIB Dual-beam Lithography2012

    • Author(s)
      R. Kometani
    • Organizer
      Next Generation Lithography Workshop 2012 (NGL2012)
    • Place of Presentation
      東京工業大学
    • Related Report
      2012 Research-status Report
  • [Presentation] FIB/EB 複合リソグラフィーによるHSQ からの3次元ナノ構造作製2012

    • Author(s)
      米谷玲皇,黒田 耕平,割澤 伸一,石原 直
    • Organizer
      第73回秋季応用物理学関係連合講演会
    • Place of Presentation
      愛媛大学・松山大学
    • Related Report
      2012 Research-status Report
  • [Presentation] Strained-nanomechanical resonator fabrication from HSQ by FIB/EB dual-beam lithography and annealing treatment2012

    • Author(s)
      R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
    • Organizer
      38th International Micro & Nano Engineering Conference (MNE 2012)
    • Place of Presentation
      Toulouse-France
    • Related Report
      2012 Research-status Report
  • [Presentation] Evaluation of Resonance Detection Properties on Vibration Measurement of the Mechanical Resonator using Scanning Probe Microscope2012

    • Author(s)
      R. Kometani, S. Mifune, S. Warisawa and S. Ishihara
    • Organizer
      25th International Microprocesses and Nanotechnology Conference (MNC2012)
    • Place of Presentation
      Kobe, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] FIB/EB 複合リソグラフィーによるカーボンナノ機械振動子の作製とその特性評価2012

    • Author(s)
      米谷玲皇,畠山大輝,黒田耕平,割澤伸一,石原 直
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      東京
    • Related Report
      2011 Research-status Report
  • [Presentation] Q Factor Improvement of DLC Nanoresonator using a Fluorine Surface Coating2011

    • Author(s)
      R. Kometani, S. Warisawa, S. Ishihara
    • Organizer
      The 6th International Conference on Leading Edge Manufacturing in 21st Century (LEM21 2011)
    • Place of Presentation
      Omiya Sonic City, Saitama, Japan(口頭)
    • Year and Date
      2011-11-10
    • Related Report
      2013 Final Research Report
  • [Presentation] Strained Carbon Nanomechanical Resonator Fabrication from SU-8 by FIB/EB Dual-beam Lithography and Annealing Treatment2011

    • Author(s)
      R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
    • Organizer
      24th International Microprocesses and Nanotechnology Conference (MNC2011)
    • Place of Presentation
      ANA Hotel Kyoto, Kyoto, Japan(口頭)
    • Year and Date
      2011-10-27
    • Related Report
      2013 Final Research Report
  • [Presentation] FIB/EB デュアルビームリソグラフィーによるカーボンナノ機械振動子の作製2011

    • Author(s)
      米谷 玲皇,畠山 大輝,黒田 耕平, 割澤 伸一,石原 直
    • Organizer
      2011年第3回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      タワーホール船橋,東京都
    • Year and Date
      2011-09-26
    • Related Report
      2013 Final Research Report
  • [Presentation] Relationship between Q factor and the surface condition of the DLC nanoresonator fabricated by focused-ion-beam chemical vapor deposition2011

    • Author(s)
      R. Kometani, H. Shimizu, S. Warisawa, S. Ishihara
    • Organizer
      37th International Conference on Micro and Nano Engineering (MNE2011)
    • Place of Presentation
      Berlin, Germany(ポスター)
    • Year and Date
      2011-09-20
    • Related Report
      2013 Final Research Report
  • [Presentation] Carbon Nanomechanical Resonator Fabrication from PMMA by FIB/EB Dual-Beam Lithography2011

    • Author(s)
      R. Kometani, T. Hatakeyama, K. Kuroda, S. Warisawa, S. Ishihara
    • Organizer
      The 55th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2011)
    • Place of Presentation
      Las Vegas, Nevada, USA(口頭)
    • Year and Date
      2011-06-02
    • Related Report
      2013 Final Research Report
  • [Presentation] Dynamic Characteristics Control of DLC Nano-Resonator Fabricated by Focused-Ion-Beam Chemical Vapor Deposition2011

    • Author(s)
      R. Kometani, S. Nishi, S. Warisawa, S. Ishihara
    • Organizer
      The 55th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2011)
    • Place of Presentation
      Las Vegas, Nevada, USA(ポスター)
    • Year and Date
      2011-06-01
    • Related Report
      2013 Final Research Report
  • [Presentation] Carbon Nanomechanical Resonator Fabrication from PMMA by FIB/EB Dual-Beam Lithography2011

    • Author(s)
      R. Kometani, T. Hatakeyama, K. Kuroda, S. Warisawa, S. Ishihara
    • Organizer
      The 55th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2011)
    • Place of Presentation
      Las Vegas, Nevada, USA
    • Related Report
      2011 Research-status Report
  • [Presentation] Dynamic Characteristics Control of DLC Nano-Resonator Fabricated by Focused-Ion-Beam Chemical Vapor Deposition2011

    • Author(s)
      R. Kometani, S. Nishi, S. Warisawa, S. Ishihara
    • Organizer
      The 55th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2011)
    • Place of Presentation
      Las Vegas, Nevada, USA
    • Related Report
      2011 Research-status Report
  • [Presentation] Relationship between Q factor and the surface condition of the DLC nanoresonator fabricated by focused-ion-beam chemical vapor deposition2011

    • Author(s)
      R. Kometani, H. Shimizu, S. Warisawa, S. Ishihara
    • Organizer
      37th International Conference on Micro and Nano Engineering (MNE2011)
    • Place of Presentation
      Berlin, Germany
    • Related Report
      2011 Research-status Report
  • [Presentation] FIB/EBデュアルビームリソグラフィーによるカーボンナノ機械振動子の作製2011

    • Author(s)
      米谷 玲皇, 畠山 大輝, 黒田 耕平, 割澤伸一,石原 直
    • Organizer
      第3回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      東京
    • Related Report
      2011 Research-status Report
  • [Presentation] Strained Carbon Nanomechanical Resonator Fabrication from SU-8 by FIB/EB Dual-beam Lithography and Annealing Treatment2011

    • Author(s)
      R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
    • Organizer
      24th International Microprocesses and Nanotechnology Conference (MNC2011)
    • Place of Presentation
      京都
    • Related Report
      2011 Research-status Report
  • [Presentation] Q Factor Improvement of DLC Nanoresonator using a Fluorine Surface Coating2011

    • Author(s)
      R. Kometani, S. Warisawa, S. Ishihara
    • Organizer
      The 6th International Conference on Leading Edge Manufacturing in 21st Century (LEM21 2011)
    • Place of Presentation
      埼玉
    • Related Report
      2011 Research-status Report
  • [Presentation] Optomechanical resonator fabrication with the surface plasmon antenna for the wavelength detection

    • Author(s)
      Reo Kometani, Hui Liu, Shin'ichi Warisawa, Sunao Ishihara
    • Organizer
      The 57th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
    • Place of Presentation
      Gaylord Opryland Resort and Convention Center, Nashville, Tennesee, US
    • Related Report
      2013 Annual Research Report
  • [Presentation] FIB-CVD を用いた3次元ナノ構造形成における構造形成高さの補正

    • Author(s)
      米谷 玲皇,村尾 裕規,石原 直,割澤 伸一
    • Organizer
      2013年度精密工学会秋季大会学術講演会
    • Place of Presentation
      関西大学,大阪府
    • Related Report
      2013 Annual Research Report
  • [Presentation] ナノメカニクスとその波長計測への応用

    • Author(s)
      米谷 玲皇
    • Organizer
      2013年第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学,京都府
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] 荷電粒子ビーム技術とナノメカニクス研究

    • Author(s)
      米谷 玲皇
    • Organizer
      公益社団法人 新化学技術推進協会 電子情報技術部会 MEMS分科会 講演会
    • Place of Presentation
      新化学技術推進協会,東京都
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] The growth height correction on the three-dimensional nanostructure fabrication using focused-ion-beam chemical vapor deposition

    • Author(s)
      Reo Kometani, Yuuki Murao, Sunao Ishihara, Shin’ichi Warisawa
    • Organizer
      26th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      ロイトン札幌,北海道
    • Related Report
      2013 Annual Research Report
  • [Presentation] 走査電子顕微鏡を利用した微小機械振動子の動特性プロファイリング

    • Author(s)
      米谷 玲皇,中野 和洋,石原 直,割澤 伸一
    • Organizer
      2014年第34回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学,神奈川県
    • Related Report
      2013 Annual Research Report
  • [Book] ナノ・マイクロスケール機械工学(石原直, 加藤千幸, 光石衛, 渡邊聡[編])2014

    • Author(s)
      米谷玲皇
    • Publisher
      東京大学出版会
    • Related Report
      2013 Final Research Report
  • [Remarks] 東京大学大学院工学系研究科機械工学専攻 米谷研究室ホームページ

    • URL

      http://www.nanome.t.u-tokyo.ac.jp/

    • Related Report
      2013 Final Research Report
  • [Remarks] 東京大学大学院工学系研究科機械工学専攻 米谷研究室 ホームページ

    • URL

      http://www.nanome.t.u-tokyo.ac.jp/

    • Related Report
      2013 Annual Research Report
  • [Remarks] 東京大学大学院工学系研究科機械工学専攻 米谷研究室 ホームページ

    • URL

      http://www.nanome.t.u-tokyo.ac.jp/jp/

    • Related Report
      2012 Research-status Report
  • [Remarks] 東京大学大学院工学系研究科機械工学専攻 米谷研究室 研究成果リスト(論文・発表)

    • URL

      http://www.nanome.t.u-tokyo.ac.jp/jp/paper

    • Related Report
      2012 Research-status Report
  • [Remarks] 東京大学大学院工学系研究科機械工学専攻 米谷研究室 研究成果リスト(受賞)

    • URL

      http://www.nanome.t.u-tokyo.ac.jp/jp/award

    • Related Report
      2012 Research-status Report
  • [Remarks]

    • URL

      http://www.nanome.t.u-tokyo.ac.jp/jp/

    • Related Report
      2011 Research-status Report
  • [Patent(Industrial Property Rights)] 光検出振動子、光波長計測装置、光波長計測方法、および光検出振動子の作製方法2013

    • Inventor(s)
      米谷玲皇,石原直,割澤伸一,劉琿,守屋和樹,山口浩司,岡本創
    • Industrial Property Rights Holder
      東京大学,日本電信電話株式会社
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2013-171972
    • Filing Date
      2013-08-22
    • Related Report
      2013 Final Research Report

URL: 

Published: 2011-08-05   Modified: 2019-07-29  

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