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Three-dimensional analysis of atomic arrangements in cubic SiC/Si interfaces by aberration-corrected TEM and ab initio calculations

Research Project

Project/Area Number 23760030
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionNagoya University

Principal Investigator

YAMASAKI Jun  名古屋大学, エコトピア科学研究所, 助教 (40335071)

Project Period (FY) 2011 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2012: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2011: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Keywords3C-SiC/Si(001)界面 / 界面構造解析 / 収差補正透過型電子顕微鏡 / 偽像処理 / 第一原理計算 / 積層欠陥 / ミスフィット転位 / 界面ステップ / 3C-SiC/Si界面 / 収差補正透過電子顕微鏡
Research Abstract

Three-dimensional atomistic structure of the 3C-SiC/Si(001) interface was clarified by utilizing aberration-corrected TEM and a newly-developed image processing method to eliminate artificial image contrast. We clarified also that the edge of a {111} stacking fault starting at the interface was a 30°Shockley partial dislocation. The lattice strain around the dislocation has been minimized by a neighboring interfacial step. It was also clarified that a lot of stacking faults had been generated in the initial stage of the growth, that is, during the carbonization process of the silicon surface. Based on the results, we succeeded in proposing a model for the generation mechanism of the stacking faults.

Report

(3 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Research-status Report
  • Research Products

    (24 results)

All 2013 2012 2011 Other

All Journal Article (4 results) (of which Peer Reviewed: 4 results) Presentation (19 results) Remarks (1 results)

  • [Journal Article] Atomistic structure analysis of stacking faults and misfit dislocations at 3C-SiC/Si(001) interface by aberration-corrected transmission electron microscopy2012

    • Author(s)
      J. Yamasaki, S. Inamoto, Y. Nomura, H. Tamaki, and N. Tanaka
    • Journal Title

      Journal of Physics D: Applied Physics

      Volume: 45 Issue: 49 Pages: 494002-494002

    • DOI

      10.1088/0022-3727/45/49/494002

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Polytype Transformation by Replication of Stacking Faults Formed by Two-Dimensional Nucleation on Spiral Steps during SiC Solution Growth2012

    • Author(s)
      S. Harada, Alexander, K. Seki, Y.Yamamoto, C. Zhu, Y. Yamamoto, S. Arai, J. Yamasaki, N. Tanaka, and T. Ujihara
    • Journal Title

      Crystal Growth & Design

      Volume: 12 Pages: 3209-3214

    • URL

      http://dx.doi.org/10.1021/cg300360h

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Atomic arrangement at the 3C-SiC/Si(001) interface revealed utilizing aberration-corrected transmission electron microscope2011

    • Author(s)
      S. Inamoto, J. Yamasaki, H. Tamaki, and N. Tanaka
    • Journal Title

      Philosophical Magazine Letters

      Volume: 91 Issue: 9 Pages: 632-639

    • DOI

      10.1080/09500839.2011.600730

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Atomic arrangement at the 3C-SiC/Si(001) interface revealed utilising aberration-corrected transmission electron microscope2011

    • Author(s)
      S. Inamoto, J. Yamasaki, H. Tamaki, and N. Tanaka
    • Journal Title

      Philosophical Magazine Letters

      Volume: 91 Pages: 632-639

    • Related Report
      2011 Research-status Report
    • Peer Reviewed
  • [Presentation] 3C-SiC/Si(001) 界面における積層欠陥の収差補正 TEM 解析2013

    • Author(s)
      山崎順、稲元伸、野村優貴、石田篤志、秋山賢輔、平林康男、田中信夫
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工大
    • Year and Date
      2013-03-30
    • Related Report
      2012 Final Research Report
  • [Presentation] 収差補正TEM 像による Si 基板上 high-k 絶縁膜の膜厚測定2013

    • Author(s)
      山崎順、稲元伸、田中信夫
    • Organizer
      日本顕微鏡学会第69回学術講演会
    • Place of Presentation
      大阪
    • Related Report
      2012 Final Research Report
  • [Presentation] 3C-SiC/Si(001)界面における積層欠陥の収差補正TEM解析2013

    • Author(s)
      山崎順、稲元伸、野村優貴、石田篤志、秋山賢輔、平林康男、田中信夫
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] Atomistic Structure Analysis of 3C-SiC/Si(001) Interface and Stacking Faults by Aberration-Corrected Transmission Electron Microscopy2012

    • Author(s)
      J. Yamasaki, S. Inamoto, Y. Nomura and N. Tanaka
    • Organizer
      icroscopy & Microanalysis 2012
    • Place of Presentation
      Phoenix, USA
    • Related Report
      2012 Final Research Report
  • [Presentation] 積層欠陥と 3C-SiC/Si(001)界面の接合部の収差補正 TEM 解析2012

    • Author(s)
      野村優貴、稲元伸、山崎順、田中信夫
    • Organizer
      日本顕微鏡学会第68回学術講演会
    • Place of Presentation
      つくば国際会議場
    • Related Report
      2012 Final Research Report
  • [Presentation] Atomistic interfacial structure of 3C-SiC/Si(001) and stacking faults studied by aberration-corrected transmission electron microscopy2012

    • Author(s)
      Y. Nomura, J. Yamasaki, S. Inamoto, K. Okazaki-Maeda, and N. Tanaka
    • Organizer
      The 3rd International Symposium on Advanced Microscopy and Theoretical Calculations (AMTC3)
    • Place of Presentation
      Gifu
    • Related Report
      2012 Final Research Report
  • [Presentation] Interface Atomistic structure of 3C-SiC/Si(001) Revealed by Aberration-Corrected Transmission Electron Microscopy and a New Image Processing Method2012

    • Author(s)
      J. Yamasaki, S. Inamoto, H. Tamaki, and N. Tanaka
    • Organizer
      International Symposium on Role of Electron Microscopy in Industry Toward Genuine Collaboration Between Academia and industry
    • Place of Presentation
      Nagoya
    • Related Report
      2012 Final Research Report
  • [Presentation] Atomistic interfacial structure of 3C-SiC/Si(001) and stacking faults studied by aberration-corrected transmission electron microscopy2012

    • Author(s)
      Y. Nomura, J. Yamasaki, S. Inamoto, K. Okazaki-Maeda, and N. Tanaka
    • Organizer
      The 3rd International Symposium on Advanced Microscopy and Theoretical Calculations (AMTC3)
    • Place of Presentation
      長良川国際会議場
    • Related Report
      2012 Annual Research Report
  • [Presentation] Atomistic Structure Analysis of 3C-SiC/Si(001) Interface and Stacking Faults by Aberration-Corrected Transmission Electron Microscopy2012

    • Author(s)
      J. Yamasaki, S. Inamoto, Y. Nomura and N. Tanaka
    • Organizer
      Microscopy & Microanalysis 2012
    • Place of Presentation
      Phoenix, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] 積層欠陥と3C-SiC/Si(001)界面の接合部の収差補正TEM解析2012

    • Author(s)
      野村優貴、稲元伸、山崎順、田中信夫
    • Organizer
      日本顕微鏡学会第68回学術講演会
    • Place of Presentation
      つくば国際会議場
    • Related Report
      2012 Annual Research Report
  • [Presentation] Interface Atomistic structure of 3C-SiC/Si(001) Revealed by Aberration-Corrected Transmission Electron Microscopy and a New Image Processing Method2012

    • Author(s)
      J. Yamasaki, S. Inamoto, H. Tamaki, and N. Tanaka
    • Organizer
      International Symposium on Role of Electron Microscopy in Industry Toward Genuine Collaboration Between Academia and industry
    • Place of Presentation
      名古屋大学
    • Related Report
      2011 Research-status Report
  • [Presentation] Analysis of Atomic Arrangement at 3C-SiC/Si(001) Interface by Aberration-Corrected Transmission Electron Microscopy and a New Image Processing Method2011

    • Author(s)
      J. Yamasaki, S. Inamoto, H. Tamaki, K.Okazaki-Maeda, and N. Tanaka
    • Organizer
      12th KIM-JIM symposium
    • Place of Presentation
      Okinawa
    • Year and Date
      2011-11-06
    • Related Report
      2012 Final Research Report
  • [Presentation] Atomic Arrangement at 3C-SiC/Si(001) Interface Revealed by Aberration-Corrected Transmission Electron Microscopy and a New Image Processing Method2011

    • Author(s)
      J. Yamasaki, S. Inamoto, H. Tamaki, and N. Tanaka
    • Organizer
      International Symposium on EcoTopia Science 2011
    • Place of Presentation
      Nagoya
    • Related Report
      2012 Final Research Report
  • [Presentation] Analysis of Atomic Arrangement at 3C-SiC/Si(001) Interface by Aberration-Corrected Transmission Electron Microscopy and a New Image Processing Method2011

    • Author(s)
      J. Yamasaki, S. Inamoto, H. Tamaki, K.Okazaki-Maeda, and N. Tanaka
    • Organizer
      15th International Conference on Thin Films (ICTF15)
    • Place of Presentation
      Kyoto
    • Related Report
      2012 Final Research Report
  • [Presentation] Analysis of Atomic Arrangement at 3C-SiC/Si(001) Interface by Aberration-Corrected Transmission Electron Microscopy2011

    • Author(s)
      J. Yamasaki, S. Inamoto, H. Tamaki, and N. Tanaka
    • Organizer
      2011 International Conference on Solid State Devices and Materials (SSDM 2011)
    • Place of Presentation
      Nagoya
    • Related Report
      2012 Final Research Report
  • [Presentation] Analysis of Atomic Arrangement at 3C-SiC/Si(001) Interface by Aberration-Corrected Transmission Electron Microscopy2011

    • Author(s)
      J. Yamasaki, S. Inamoto, H. Tamaki, and N. Tanaka
    • Organizer
      2011 International Conference on Solid State Devices and Materials (SSDM 2011)
    • Place of Presentation
      名古屋市
    • Related Report
      2011 Research-status Report
  • [Presentation] Analysis of Atomic Arrangement at 3C-SiC/Si(001) Interface by Aberration-Corrected Transmission Electron Microscopy and a New Image Processing Method2011

    • Author(s)
      J. Yamasaki, S. Inamoto, H. Tamaki, K. Okazaki-Maeda, and N. Tanaka
    • Organizer
      12th KIM-JIM symposium
    • Place of Presentation
      沖縄
    • Related Report
      2011 Research-status Report
  • [Presentation] Analysis of Atomic Arrangement at 3C-SiC/Si(001) Interface by Aberration-Corrected Transmission Electron Microscopy and a New Image Processing Method2011

    • Author(s)
      J. Yamasaki, S. Inamoto, H. Tamaki, K. Okazaki-Maeda, and N. Tanaka
    • Organizer
      15th International Conference on Thin Films (ICTF15)
    • Place of Presentation
      京都市
    • Related Report
      2011 Research-status Report
  • [Presentation] Atomic Arrangement at 3C-SiC/Si(001) Interface Revealed by Aberration-Corrected Transmission Electron Microscopy and a New Image Processing Method2011

    • Author(s)
      J. Yamasaki, S. Inamoto, H. Tamaki, and N. Tanaka
    • Organizer
      International Symposium on EcoTopia Science 2011
    • Place of Presentation
      名古屋大学
    • Related Report
      2011 Research-status Report
  • [Remarks] ホームページ情報

    • URL

      http://sirius.cirse.nagoya-u.ac.jp/~tanakalab/research/researches/SiC.html

    • Related Report
      2012 Final Research Report

URL: 

Published: 2011-08-05   Modified: 2019-07-29  

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