Construction of advanced observation system for semiconductor defect using scanning positron microbeam and electron beam induced current method

• Project/Area Number: 23760039
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: Japan Atomic Energy Agency
• Principal Investigator: MAEKAWA Masaki 独立行政法人日本原子力研究開発機構, 原子力科学研究部門 先端基礎研究センター, 研究副主幹 (10354945)
• Project Period (FY): 2011 – 2013
• Project Status: Completed (Fiscal Year 2013)
• Budget Amount: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000); Fiscal Year 2013: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000); Fiscal Year 2012: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2011: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
• Keywords: 陽電子マイクロビーム / 空孔型欠陥 / 空間分布 / ＥＢＩＣ測定 / 欠陥準位 / 再結合中心 / イオン照射 / EBIC測定 / イオン注入

Research Abstract

A complementary study of vacancy defects in Si substrates by using scanning positron microscope (SPM) and electron beam induced current (EBIC) method were demonstrated for the same samples and in the same chamber. Both the S parameter and EBIC contrast were found to be enhanced in the regions containing vacancy defects introduced by ion implantation. That is, the SPM provides a criterion if the spatially resolved carrier recombination centres by the EBIC method are originating from vacancy defects or not.

Research Products

• [Journal Article] (2014)
  • Author(s): M.Maekawa and A. Kawasuso
  • Journal Title: JAEA-Review
  • Peer Reviewed
• [Journal Article] (2013)
  • Author(s): M.Maekawa and A. Kawasuso
  • Journal Title: JAEA-Review Volume: 2013-059 Pages: 146-146
  • Peer Reviewed
• [Journal Article] (2013)
  • Author(s): M.Maekawa and A. Kawasuso
  • Journal Title: Journal of Physics : Conference Series Volume: vol. 443
• [Journal Article] Observation of spatial distribution of vacancy defects in semiconductor by positron microscope and electron beam induced current measurement (2013)
  • Author(s): M. Maekawa and A Kawasuso
  • Journal Title: J. Phys. Conf. Ser Volume: 443 Pages: 12041-12041
  • DOI: 10.1088/1742-6596/443/1/012041
  • Peer Reviewed
• [Journal Article] Complementary study of vacancy defects in Si substrates by using SPM and EBIC method (2013)
  • Author(s): M. Maekawa and A. Kawasuso
  • Journal Title: JAEA-Review Volume: 2013-059 Pages: 146-146
  • Peer Reviewed
• [Journal Article] Observation of spatial distribution of vacancy defects in semiconductor by positron microscope and electron beam induced current measurement (2013)
  • Author(s): M Maekawa and A Kawasuso
  • Journal Title: J. Phys. Conf. Ser Volume: 印刷中
  • Peer Reviewed
• [Journal Article] (2012)
  • Author(s): M.Maekawa and A. Kawasuso
  • Journal Title: JAEA-Review Volume: 2012-046 Pages: 140-140
  • Peer Reviewed
• [Presentation] (2013)
  • Author(s): 前川雅樹、河裾厚男
  • Organizer: 第8回高崎量子応用研究シンポジウム
  • Place of Presentation: 高崎シティギャラリー(群馬)
• [Presentation] (2012)
  • Author(s): M. Maekawa and A. Kawasuso
  • Organizer: 16th International Conference of Positron Annihilation
  • Place of Presentation: ブリストル大学(英国)
• [Presentation] (2012)
  • Author(s): 前川雅樹、河裾厚男
  • Organizer: 応用物理学会
  • Place of Presentation: 愛媛大学(愛媛)
• [Presentation] (2012)
  • Author(s): 前川雅樹、河裾厚男
  • Organizer: 第7回高崎量子応用研究シンポジウム
  • Place of Presentation: 高崎シティギャラリー(群馬)
• [Presentation] Observation of spatial distribution of vacancy defects in semiconductor by positron microscope and electron beam induced current measurement (2012)
  • Author(s): Masaki Maekawa
  • Organizer: 16th International Conference of Positron Annnihilation
  • Place of Presentation: Bristol (UK)
• [Presentation] 陽電子マイクロビームと電子線誘起電流法(EBIC)による結晶欠陥の観察 (2012)
  • Author(s): 前川雅樹
  • Organizer: 応用物理学会
  • Place of Presentation: 愛媛大学
• [Presentation] (2011)
  • Author(s): 前川雅樹、河裾厚男
  • Organizer: 第6回高崎量子応用研究シンポジウム
  • Place of Presentation: 高崎シティギャラリー(群馬)
• [Presentation] 陽電子マイクロビームを用いたイオン照射空孔分布挙動評価
  • Author(s): 前川雅樹、河裾厚男
  • Organizer: 第8 回高崎量子応用研究シンポジウム
  • Place of Presentation: 高崎シティギャラリー
• [Remarks]
  • URL: http://www.taka.jaea.go.jp/asrc/positron/index_j.html