Three-dimensional shape measurement by imaging ellipsometry
| Project/Area Number |
23760042
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Applied optics/Quantum optical engineering
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| Research Institution | Yamagata University (2012)
Tohoku University (2011) |
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Principal Investigator |
TSURU Toshihide 山形大学, 地域教育文化学部, 准教授 (30306526)
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| Project Period (FY) |
2011 – 2012
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| Project Status |
Completed (Fiscal Year 2012)
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| Budget Amount *help |
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2012: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2011: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
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| Keywords | 偏光 / エリプソメトリー / 形状計測 / 偏光計測 |
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| Research Abstract |
Ellipsometry is widely utilized for investigating surface and optical properties of thin films. We proposed a new concept for 3D shape measurement of specular objects by ellipsometry. For precise and fast measurement, imaging ellipsometer using a liquid crystal variable retarder was developed. A high precision achieved by our proposed method is expected for 3D shape measurement in various applications.
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Report
(3 results)
Research Products
(9 results)
