| Budget Amount *help |
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2013: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2012: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Fiscal Year 2011: ¥520,000 (Direct Cost: ¥400,000、Indirect Cost: ¥120,000)
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| Research Abstract |
In this study, a finite element (FE) analysis using hierarchal decompositions for the interaction of structural, fluidic and electrostatic fields is applied for vibration analyses of a MEMS structural component. The interaction is partitioned into the electrostatic field and the fluid-structure interaction (FSI) using the block Gauss-Seidel method. The FSI is split into the pressure and velocity fields using a projection method. The developed FE analysis is applied for a micro cantilever beam actuated by the step electrostatic force in vacuum and air. It was demonstrated from the comparisons among the numerical and experimental results that the proposed analyses provide the results consistent with the experimental results. It follows from the present results that the numerical analyses taking into account the interaction of the structural, fluidic and electrostatic fields are required for the accurate predictions of the vibration characteristics of the MEMS structural components.
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