• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Evaluation of Mechanical Properties of Thin film Structure by UsingMEMS Technology

Research Project

Project/Area Number 23760103
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Materials/Mechanics of materials
Research InstitutionRitsumeikan University

Principal Investigator

ANDO Taeko  立命館大学, 理工学部, 准教授 (70335074)

Project Period (FY) 2011 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2012: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2011: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Keywordsマイクロマシン / マイクロ材料 / 破壊力学 / 半導体材料 / 単結晶シリコン / 機械的特性 / ヤング率 / 引張強度 / 不純物濃度 / マイクロ材料力学 / MEMS / 破壊特性 / 脆性延性遷移
Research Abstract

The objective of this study is to reveal the factor influencing the fracture property of single crystal silicon in micro- and nano-scale. We have developed the tensile testing device for dealing with microscale samples. Concentration of impurities (B and Ge) in three testing material were different from each other. Measured Young’s modulus and fracture strength decreased with increasing the impurities concentration.

Report

(3 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Research-status Report
  • Research Products

    (4 results)

All 2013 Other

All Presentation (4 results)

  • [Presentation] Dependence of Mechanical on Position in Silicon Ingot by Evaluating B and Ge Codoped Silicon2013

    • Author(s)
      T. Shirata
    • Organizer
      The 17th InternationalConference on Solid-State Sensors, Actuators and Microsystems
    • Place of Presentation
      バルセロナ(スペイン)
    • Year and Date
      2013-06-18
    • Related Report
      2012 Final Research Report
  • [Presentation] シリコンインゴットの部位における機械特性の依存性をボロンとゲルマニウムのコドープシリコンによる評価2013

    • Author(s)
      白田竜也
    • Organizer
      日本機械学会2013年度年次大会
    • Place of Presentation
      岡山大学(岡山県)
    • Related Report
      2012 Final Research Report
  • [Presentation] シリコンインゴットの部位における機械特性の依存性をボロンとゲルマニウムのコドープシリコンによる評価2013

    • Author(s)
      白田竜也
    • Organizer
      日本機械学会 2013年度年次大会
    • Place of Presentation
      岡山大学津島キャンパス(岡山県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Dependence of Mechanical on Position in Silicon Ingot by Evaluating B and Ge Codoped Silicon

    • Author(s)
      Tatsuya Shirata
    • Organizer
      The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
    • Place of Presentation
      Barcelona, Spain
    • Related Report
      2012 Annual Research Report

URL: 

Published: 2011-08-05   Modified: 2019-07-29  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi