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Silicon Slicing for UltrathinKerf Loss

Research Project

Project/Area Number 23760116
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Production engineering/Processing studies
Research InstitutionUniversity of Miyazaki (2012)
Kyushu University (2011)

Principal Investigator

OHNISHI Osamu  宮崎大学, 工学部, 准教授 (50315107)

Project Period (FY) 2011 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2012: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2011: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Keywordsシリコンスライシング / カーフロス / 炭素繊維 / ワイヤ放電加工 / ワイヤ放電スライシング / ワイヤソースライシング
Research Abstract

Revelation of characteristics for various electric discharge machining parameters in slicing of silicon was tackled, and theguideline for good slicing of silicon was shown. Then, the prototypic wire electric discharge machine for using carbon fiber as electrode was developed. Further, processing conditions suitable for using carbon fiber as electrode were investigated. The way for realization of ultrathin kerf loss which was useless parts removed as chip by wire electric discharge machine with carbon fiber electrode was paved.

Report

(3 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Research-status Report
  • Research Products

    (6 results)

All 2013 2012 2011 Other

All Presentation (6 results)

  • [Presentation] 炭素繊維電極を用いたシリコンのワイヤ放電加工に関する基礎的研究2013

    • Author(s)
      大西修、稲尾卓哉、佐島隆夫、黒河周平、土肥俊郎
    • Organizer
      日本機械学会九州支部第66 期総会・講 演 会
    • Place of Presentation
      九州産業大学(福岡)
    • Year and Date
      2013-03-13
    • Related Report
      2012 Final Research Report
  • [Presentation] シリコンのワイヤ放電加工特性2012

    • Author(s)
      稲尾卓哉、大西修、土肥俊郎、黒河周平、畝田道雄、佐島隆生、水江宏
    • Organizer
      日本機械学会九州支部第65 期総会・講演会
    • Place of Presentation
      佐賀大学(佐賀)
    • Year and Date
      2012-03-16
    • Related Report
      2012 Final Research Report
  • [Presentation] シリコンのワイヤ放電加工特性2012

    • Author(s)
      稲尾卓哉,大西修,土肥俊郎,黒河周平,畝田道雄,佐島隆生,水江宏
    • Organizer
      日本機械学会九州支部 第65期総会講演会
    • Place of Presentation
      佐賀大学
    • Related Report
      2011 Research-status Report
  • [Presentation] RC回路を用いたシリコンの放電加工特性2011

    • Author(s)
      稲尾卓哉、大西修、土肥俊郎、黒河周平、佐島隆生、畝田道雄
    • Organizer
      2011 年度精密工学会九州支部大分地方講演会
    • Place of Presentation
      大分大学(大分)
    • Year and Date
      2011-12-10
    • Related Report
      2012 Final Research Report
  • [Presentation] RC回路を用いたシリコンの放電加工特性2011

    • Author(s)
      稲尾卓哉,大西修,土肥俊郎,黒河周平,佐島隆生,畝田道雄
    • Organizer
      2011年度精密工学会九州支部大分地方講演会
    • Place of Presentation
      大分大学
    • Related Report
      2011 Research-status Report
  • [Presentation] 炭素繊維電極を用いたシリコンのワイヤ放電加工に関する基礎的研究

    • Author(s)
      大西修,稲尾卓哉,佐島隆夫,黒河周平,土肥俊郎
    • Organizer
      日本機械学会九州支部 第66期総会講演会
    • Place of Presentation
      九州産業大学
    • Related Report
      2012 Annual Research Report

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Published: 2011-08-05   Modified: 2019-07-29  

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