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Multiple surface modification for functional DLC films

Research Project

Project/Area Number 23760141
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Design engineering/Machine functional elements/Tribology
Research InstitutionTokyo Metropolitan Industrial Technology Research Institute

Principal Investigator

KAWAGUCHI Masahiro  地方独立行政法人東京都立産業技術研究センター, 高度S, 副主任研究員 (40463054)

Project Period (FY) 2011 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2012: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2011: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
KeywordsDLC / PBII&D / tribology / hydrogen contents / UBMS
Research Abstract

In this study, hydrogen ion implantations by using PBII&D are accomplished against the hydrogen free DLC films deposited by AIP method. The effects of hydrogen contents on the tribological properties of the films are also discussed in this study. The sp^3/sp^2 ratio of the implanted films is obtained from Raman spectroscopy, XPS and TEM-EELS. Although the ratio is gradually close to that of conventional hydrogenated DLC films, the values didn’t reach to that of the conventional films at the same contents. Friction and wear properties are slightly increase in the contents, however, the differential of the change is obviously smaller than that of the conventional films. The results are summarized that sliding phenomenon of the hydrogen free DLC in dry conditions are mainly dominated by the influence of end-groups (e.g. -OH) terminated on the film surface rather than the change in the structure of the films from amorphous to graphite. The initial sp^3 phases in hydrogen free DLC films will exist and won’t change the structure even if the hydrogen ions are implanted to the films.

Report

(3 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Research-status Report
  • Research Products

    (23 results)

All 2013 2012 2011 Other

All Journal Article (5 results) (of which Peer Reviewed: 5 results) Presentation (18 results) (of which Invited: 2 results)

  • [Journal Article] Effects of Pre-heat Treatment on Tribological Properties of DLC Film2013

    • Author(s)
      Y. Tokuta, M. Kawaguchi, A. Shimizu and S. Sasaki
    • Journal Title

      Tribol. Lett.

      Volume: 49 Pages: 341-349

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Mechanical properties and thermal stability of SiBCN films prepared by ion beam assisted sputter deposition2013

    • Author(s)
      J. Choi, N. Hayashi, T. Kato and M. Kawaguchi
    • Journal Title

      Dia. Relat. Mater.

      Volume: 34 Pages: 95-99

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Structural and environmental dependence of superlow friction in ion vapor-deposited a-C:H:Si films for solid lubrication application2013

    • Author(s)
      X. Chen, T. Kato, M. Kawaguchi, M. Nosaka and J. Choi
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: 46

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Mechanical properties and thermal stability of SiBCN films prepared by ion beam assisted sputter deposition2013

    • Author(s)
      崔 埈豪
    • Journal Title

      Diamond and Related Materials

      Volume: 34 Pages: 95-99

    • DOI

      10.1016/j.diamond.2013.02.010

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] ラマン分光法によるDLC膜の機械特性評価および予測(第1報)-トルエン原料ガスを用いたバイポーラPBII&D法により作成したDLC膜

    • Author(s)
      崔〓豪,石井啓資,加藤孝久,川口雅弘
    • Journal Title

      トライボロジスト

      Volume: (印刷中)

    • NAID

      10031189151

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Presentation] Al集電体へのリチウムイオン二次電池正極活物質の形成技術の開発2013

    • Author(s)
      松本拓人,川口雅弘,林英男,石崎貴裕
    • Organizer
      表面技術協会第127回講演大会
    • Place of Presentation
      日本工業大学
    • Year and Date
      2013-03-18
    • Related Report
      2012 Annual Research Report 2012 Final Research Report
  • [Presentation] DLC膜とその評価法-現状と展望-2013

    • Author(s)
      川口雅弘
    • Organizer
      表面技術協会ナノテク部会第48回研究会
    • Place of Presentation
      東京ビックサイト(招待講演)
    • Year and Date
      2013-01-31
    • Related Report
      2012 Final Research Report
  • [Presentation] 水素雰囲気下における複合DLC膜の超潤滑性の発現2012

    • Author(s)
      野坂正隆,草場亮太,崔〓豪,加藤孝久,川口雅弘
    • Organizer
      トライボロジー会議2012秋室蘭
    • Place of Presentation
      室蘭工業大学
    • Year and Date
      2012-09-18
    • Related Report
      2012 Final Research Report
  • [Presentation] 複合DLC膜の摺動特性におよぼす水素含有量の影響2012

    • Author(s)
      川口雅弘
    • Organizer
      トライボロジー会議2012秋室蘭
    • Place of Presentation
      室蘭工業大学
    • Year and Date
      2012-09-18
    • Related Report
      2012 Annual Research Report 2012 Final Research Report
  • [Presentation] イオン化蒸着法により作成したa-C:H:Si膜の低摩擦性2012

    • Author(s)
      陳新春,川口雅弘,崔〓豪,松本直浩,加藤孝久
    • Organizer
      トライボロジー会議2012秋室蘭
    • Place of Presentation
      室蘭工業大学
    • Year and Date
      2012-09-17
    • Related Report
      2012 Final Research Report
  • [Presentation] ラマンスペクトルを用いたDLC膜の構造および機械的特性評価2012

    • Author(s)
      日比貴之,崔〓豪,加藤孝久,川口雅弘
    • Organizer
      トライボロジー会議2012秋室蘭
    • Place of Presentation
      室蘭工業大学
    • Year and Date
      2012-09-17
    • Related Report
      2012 Final Research Report
  • [Presentation] PBII&D法により成膜したDLC膜の各種特性評価およびその事業化に向けた取り組み2012

    • Author(s)
      川口雅弘
    • Organizer
      東京大学地殻化学セミナー
    • Place of Presentation
      東大本郷キャンパス(招待講演)
    • Year and Date
      2012-05-18
    • Related Report
      2012 Final Research Report
  • [Presentation] 水素雰囲気下でのDLC膜の摩擦特性に関する研究2012

    • Author(s)
      大嶋健太,徳田祐樹,坪井涼,佐々木信也,川口雅弘
    • Organizer
      トライボロジー会議2012春東京
    • Place of Presentation
      代々木青少年オリンピックセンター
    • Year and Date
      2012-05-16
    • Related Report
      2012 Final Research Report
  • [Presentation] 水素環境下における複合DLC膜の超潤滑特性2012

    • Author(s)
      野坂正隆,椎葉崇,加藤孝久,川口雅弘
    • Organizer
      トライボロジー会議2012春東京
    • Place of Presentation
      代々木青少年オリンピックセンター
    • Year and Date
      2012-05-16
    • Related Report
      2012 Final Research Report
  • [Presentation] Properties of DLC film deposited by Plasma Based Ion Implan- tation and Deposition2011

    • Author(s)
      M. Kawaguchi
    • Organizer
      ITC Hiroshima 2011
    • Place of Presentation
      広島
    • Year and Date
      2011-11-03
    • Related Report
      2012 Final Research Report
  • [Presentation] Properties of DLC film deposited by Plasma Based Ion Implantation and Deposition2011

    • Author(s)
      M. Kawaguchi
    • Organizer
      International Tribology Conference (Japanese Society for Tribologist)
    • Place of Presentation
      Hiroshima
    • Related Report
      2011 Research-status Report
  • [Presentation] 水素環境下における複合DLC膜の超潤滑特性

    • Author(s)
      野坂正隆,椎葉崇,加藤孝久,川口雅弘
    • Organizer
      トライボロジー会議2012春東京
    • Place of Presentation
      代々木青少年オリンピックセンター
    • Related Report
      2012 Annual Research Report
  • [Presentation] 水素雰囲気下でのDLC膜の摩擦特性に関する研究

    • Author(s)
      大嶋健太,徳田祐樹,坪井涼,佐々木信也,川口雅弘
    • Organizer
      トライボロジー会議2012春東京
    • Place of Presentation
      代々木青少年オリンピックセンター
    • Related Report
      2012 Annual Research Report
  • [Presentation] PBII&D法により成膜したDLC膜の各種特性評価およびその事業化に向けた取り組み

    • Author(s)
      川口雅弘
    • Organizer
      東京大学地殻化学セミナー
    • Place of Presentation
      東京大学本郷キャンパス
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] ラマンスペクトルを用いたDLC膜の構造および機械的特性評価

    • Author(s)
      日比貴之,崔埈豪,加藤孝久,川口雅弘
    • Organizer
      トライボロジー会議2012秋室蘭
    • Place of Presentation
      室蘭工業大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] イオン化蒸着法により作成したa-C:H:Si膜の低摩擦性

    • Author(s)
      陳新春,川口雅弘,崔埈豪,松本直浩,加藤孝久
    • Organizer
      トライボロジー会議2012秋室蘭
    • Place of Presentation
      室蘭工業大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] 水素雰囲気下における複合DLC膜の超潤滑性の発現

    • Author(s)
      野坂正隆,草場亮太,崔埈豪,加藤孝久,川口雅弘
    • Organizer
      トライボロジー会議2012秋室蘭
    • Place of Presentation
      室蘭工業大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] DLC膜とその評価法 -現状と展望-

    • Author(s)
      川口雅弘
    • Organizer
      表面技術協会ナノテク部会第48回研究会
    • Place of Presentation
      東京ビックサイト
    • Related Report
      2012 Annual Research Report
    • Invited

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Published: 2011-08-05   Modified: 2019-07-29  

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