Multiple surface modification for functional DLC films
Project/Area Number |
23760141
|
Research Category |
Grant-in-Aid for Young Scientists (B)
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Allocation Type | Multi-year Fund |
Research Field |
Design engineering/Machine functional elements/Tribology
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Research Institution | Tokyo Metropolitan Industrial Technology Research Institute |
Principal Investigator |
KAWAGUCHI Masahiro 地方独立行政法人東京都立産業技術研究センター, 高度S, 副主任研究員 (40463054)
|
Project Period (FY) |
2011 – 2012
|
Project Status |
Completed (Fiscal Year 2012)
|
Budget Amount *help |
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2012: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2011: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
|
Keywords | DLC / PBII&D / tribology / hydrogen contents / UBMS |
Research Abstract |
In this study, hydrogen ion implantations by using PBII&D are accomplished against the hydrogen free DLC films deposited by AIP method. The effects of hydrogen contents on the tribological properties of the films are also discussed in this study. The sp^3/sp^2 ratio of the implanted films is obtained from Raman spectroscopy, XPS and TEM-EELS. Although the ratio is gradually close to that of conventional hydrogenated DLC films, the values didn’t reach to that of the conventional films at the same contents. Friction and wear properties are slightly increase in the contents, however, the differential of the change is obviously smaller than that of the conventional films. The results are summarized that sliding phenomenon of the hydrogen free DLC in dry conditions are mainly dominated by the influence of end-groups (e.g. -OH) terminated on the film surface rather than the change in the structure of the films from amorphous to graphite. The initial sp^3 phases in hydrogen free DLC films will exist and won’t change the structure even if the hydrogen ions are implanted to the films.
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Report
(3 results)
Research Products
(23 results)