Integrated Gas System Based on Molecular Flow in Ultra-Fine Silicon Structures

• Project/Area Number: 23760145
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Fluid engineering
• Research Institution: The University of Tokyo
• Principal Investigator: KUBOTA Masanori 東京大学, 工学(系)研究科(研究院), 助教 (80447424)
• Project Period (FY): 2011 – 2012
• Project Status: Completed (Fiscal Year 2013)
• Budget Amount: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2012: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000); Fiscal Year 2011: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
• Keywords: 熱伝導圧力センサ / 極微細高アスペクト比トレンチ / 集積化ガスシステム / 超臨界流体製膜 / 集積化MEMS / ステルスダイシング / MEMSプローブ / 熱マイクロフォン / ピラニーゲージ / 高アスペクト比トレンチ / MEMS

Research Abstract

The author developed elemental technologies for Integrated micro gas system which consists of gas pump, pressure gauge, gas sensor and control LSI etc. for toxic gas monitoring in atmosphere. Ultra-fine trenches having less than 100 nm in width and several micron in depth play important role to actuate/measure molecules on such a small chip at atmospheric pressure. A trench fabrication method by successive process of silicon deep etching and supercritical fluid deposition was developed. A novel Thermal conductive pressure sensor was developed by utilizing the method.

Research Products

• [Presentation] High precision measurement of on-wafer LED device by CMOS-MEMS probe card with electrical contact sensing function (2014)
  • Author(s): Kota Hosaka, Masanori Kubota, Yu-Tang Chen, and Yoshio Mita
  • Organizer: 第30回「センサ・マイクロマシンと応用システム」シンポジウム
  • Place of Presentation: 仙台国際センター(宮城)
  • Year and Date: 2014-11-05
• [Presentation] A test structure of bypass diodes for on-chip high-voltage silicon photovoltaic cell array (2014)
  • Author(s): Isao Mori, Masanori Kubota, and Yoshio Mita
  • Organizer: 2014 IEEE Conference on Microelectronic Test Structures
  • Place of Presentation: ウーディネ(イタリア)
• [Presentation] 非接触MEMS駆動を目指したマイクロ電磁界共鳴電力伝送回路に関する研究 (2014)
  • Author(s): 坂本直之 , 塩見英久 , 久保田雅則 , 岡村康行 , 三田吉郎
  • Organizer: 電子情報通信学会集積回路研究会
  • Place of Presentation: 京都大学時計台記念館(京都)
• [Presentation] MEMS技術を用いた音波の熱的な検知に関する研究 (2013)
  • Author(s): 施英漢,久保田雅則,三田吉郎
  • Organizer: 電気学会マイクロマシンセンサシステム研究会
  • Place of Presentation: 東京工科大学(東京)
  • Year and Date: 2013-08-08
• [Presentation] Evaluation of Silicon Fracture Strength Dependence on Stealth Dicing Layers for"Cleave-before-Use"MEMS Freestanding Cantilever Probes (2013)
  • Author(s): Masanori Kubota, Kota Hosaka, Masakazu Sugiyama, and Yoshio Mita
  • Organizer: The 17^<th> International Conference on Solid-State Sensors, Actuators and Microsystems
  • Place of Presentation: バルセロナ(スペイン)
  • Year and Date: 2013-06-16
• [Presentation] An Integrated CMOS-MEMS Probe having Two-Tips per Cantilever for Individual Contact Sensing and Kelvin Measurement with Two Cantilevers (2013)
  • Author(s): Kota Hosaka, Satoshi Morishita, Isao Mori, Masanori Kubota, and Yoshio Mita
  • Organizer: 2013 IEEE International Conference on Microelectronic Test Structures
  • Place of Presentation: 大阪大学(大阪)
  • Year and Date: 2013-03-25
• [Presentation] High precision measurement of on-wafer LED devices by CMOS-MEMS probe card with electrical contact sensing function (2013)
  • Author(s): Kota Hosaka, Masanori Kubota, Yu-Tang Chen, and Yoshio Mita
  • Organizer: 第30回「センサ・マイクロマシンと応用システム」シンポジウム
  • Place of Presentation: 仙台国際センター(宮城)
• [Presentation] Evaluation of Silicon Fracture Strength Dependence on Stealth Dicing ayers for "Cleave-before-Use" MEMS Freestanding Cantilever Probes (2013)
  • Author(s): Masanori Kubota, Kota Hosaka, Masakazu Sugiyama, and Yoshio Mita
  • Organizer: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
  • Place of Presentation: バルセロナ(スペイン)
• [Presentation] Experimental Evaluation of High Voltage Hold-Off Capability of Post-Process Mesa-Isolated Series Standard CMOS Transistors (2013)
  • Author(s): Atsushi Hirakawa, Satoshi Morishita, Isao Mori, Masanori Kubota, and Yoshio Mita
  • Organizer: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
  • Place of Presentation: バルセロナ(スペイン)
• [Presentation] An Integrated CMOS-MEMS Probe having Two-Tips per Cantilever for Individual Contact Sensing and Kelvin Measurement with Two Cantilevers (2013)
  • Author(s): Kota Hosaka and Satoshi Morishita and Isao Mori and Masanori Kubota and Yoshio Mita
  • Organizer: 2013 IEEE International Conference on Microelectronic Test Structures
  • Place of Presentation: 大阪（大阪大学 中之島センター）
• [Presentation] Evaluation of Silicon Fracture Strength Dependence on Stealth Dicing Layers for “Cleave-before-Use” MEMS Freestanding Cantilever Probes (2013)
  • Author(s): M. Kubota, K. Hosaka, M. Sugiyama, and Y. Mita
  • Organizer: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
  • Place of Presentation: バルセロナ（スペイン）
• [Presentation] EXPERIMENTAL EVALUATION OF HIGH VOLTAGE HOLD-OFF CAPABILITY OF POST-PROCESS MESA-ISOLATED SERIES STANDARD CMOS TRANSISTORS (2013)
  • Author(s): A. Hirakawa, S. Morishita, I. Mori, M. Kubota, and Y. Mita
  • Organizer: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
  • Place of Presentation: バルセロナ（スペイン）
• [Presentation] ステルスダイシングを利用した埋め込み式予約素子分離法 (2012)
  • Author(s): 木原泰樹,久保田雅則,森下賢志,百瀬健,近藤愛子,霜垣幸浩,三田吉郎
  • Organizer: 電気学会マイクロマシンセンサシステム研究会
  • Place of Presentation: 京都大学(京都)
  • Year and Date: 2012-06-10
• [Presentation] 高アスペクト比垂直ナノギャップを用いた高圧対応MEMSピラニーゲージ (2012)
  • Author(s): 久保田雅則,三田吉郎,百瀬健,近藤愛子,霜垣幸浩,中野義昭,杉山正和
  • Organizer: 第59回応用物理学関係連合講演会
  • Place of Presentation: 早稲田大学(東京)
  • Year and Date: 2012-03-16
• [Presentation] A 50 nm-Wide 5μm-Deep Copper Vertical Gap Formation Method by A Gap-Narrowing Post-Process with Supercritical Fluid Deposition for Pirani Gauge Operating over Atmospheric Pressure (2012)
  • Author(s): Masanori Kubota, Yoshio Mita, Takeshi Momose, Aiko Kondo, Yoshihiro Shimogaki, Yoshiaki Nakano, Masakazu Sugiyama
  • Organizer: The 25th International Conference on Micro Electro Mechanical Systems
  • Place of Presentation: パリ(フランス)
  • Year and Date: 2012-02-02
• [Presentation] ステルスダイシングを利用した埋め込み式予約素子分離法 (2012)
  • Author(s): 木原泰樹，久保田雅則，森下賢志，百瀬健，近藤愛子，霜垣幸浩，三田吉郎
  • Organizer: マイクロマシン・センサシステム研究会
  • Place of Presentation: 京都（京都大学 百周年時計台記念館）
• [Presentation] 環境にばらまくセンサネットワーク素子実現に関する一考察 (2012)
  • Author(s): 森 功，久保田 雅則，三田 吉郎
  • Organizer: マイクロマシン・センサシステム研究会
  • Place of Presentation: 京都（京都大学 百周年時計台記念館）
• [Presentation] A 50 nm-Wide 5 μm-Deep Copper Vertical Gap Formation Method by A Gap-Narrowing Post-Process with Supercritical Fluid Deposition for Pirani Gauge Operating over Atmospheric Pressure (2012)
  • Author(s): 久保田 雅則
  • Organizer: The 25th International Conference on Micro Electro Mechanical Systems (MEMS 2012)
  • Place of Presentation: パリ(フランス)
• [Presentation] 高アスペクト比垂直ナノギャップを用いた高圧対応 MEMS ピラニーゲージ (2012)
  • Author(s): 久保田 雅則
  • Organizer: 第59回応用物理学関係連合講演会
  • Place of Presentation: 早稲田大学(東京)
• [Remarks] 久保田 雅則,"Thermal Conductivity Pressure Sensors on the Basis of Ultra-Fine Silicon Structures"(超微細シリコン立体構造を用いた熱伝導圧力センサ),東京大学博士学位論文, 2012.