Integrated Gas System Based on Molecular Flow in Ultra-Fine Silicon Structures
Project/Area Number |
23760145
|
Research Category |
Grant-in-Aid for Young Scientists (B)
|
Allocation Type | Multi-year Fund |
Research Field |
Fluid engineering
|
Research Institution | The University of Tokyo |
Principal Investigator |
KUBOTA Masanori 東京大学, 工学(系)研究科(研究院), 助教 (80447424)
|
Project Period (FY) |
2011 – 2012
|
Project Status |
Completed (Fiscal Year 2013)
|
Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2012: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2011: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
|
Keywords | 熱伝導圧力センサ / 極微細高アスペクト比トレンチ / 集積化ガスシステム / 超臨界流体製膜 / 集積化MEMS / ステルスダイシング / MEMSプローブ / 熱マイクロフォン / ピラニーゲージ / 高アスペクト比トレンチ / MEMS |
Research Abstract |
The author developed elemental technologies for Integrated micro gas system which consists of gas pump, pressure gauge, gas sensor and control LSI etc. for toxic gas monitoring in atmosphere. Ultra-fine trenches having less than 100 nm in width and several micron in depth play important role to actuate/measure molecules on such a small chip at atmospheric pressure. A trench fabrication method by successive process of silicon deep etching and supercritical fluid deposition was developed. A novel Thermal conductive pressure sensor was developed by utilizing the method.
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Report
(4 results)
Research Products
(20 results)