| Budget Amount *help |
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2013: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2012: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2011: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
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| Research Abstract |
To investigate the gas-surface interaction on non-metal surfaces widely used in the micro-technology, a novel measurement system for the thermal accommodation coefficient, which represents energy transfer between gas and surface, was proposed. Even though there were some troubles on a molecular beam scattering experimental apparatus, numerical analyses by the molecular dynamics method gave a qualitative characteristics on the gas-surface interaction. By setting appropriate conditions obtained from the numerical results, the successive measurements will lead to the understanding on characteristics of the interaction.
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