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Characterization and Application of Thin-Film PZT/PZT Bimorph

Research Project

Project/Area Number 23760233
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionUniversity of Hyogo

Principal Investigator

KANDA Kensuke  兵庫県立大学, 大学院・工学研究科, 助教 (20446735)

Project Period (FY) 2011 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2012: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2011: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Keywordsマイクロ / ナノメカトロニクス / 圧電薄膜 / MEMS / PZT / バイモルフ / アクチュエータ / センサ
Research Abstract

Double layer Pb[Zr,Ti]O_3(PZT, Lead Zirconate Titanate) thin films was realized for MEMS applications. The total thickness of the bimorph PZT/PZT structure is 5.4 μm, which is much thicker conventionally reported ones (typically 1 μm). In addition, the electric and piezoelectric characteristics for top and bottom PZT layers were consistent with each other. By fabricating MEMS mirror with four PZT/PZT bimorph beams, the applicability of the PZT/PZT bimorph to MEMS fabrication process was confirmed. The bimorph beams doubled the deflection of the MEMS mirror compared with unimorph actuations.These results demonstrate that the PZT/PZT bimorph is effective to MEMS actuators.

Report

(3 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Research-status Report
  • Research Products

    (22 results)

All 2013 2012 2011

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (20 results) (of which Invited: 1 results)

  • [Journal Article] Fabrication and Characterization of Double Layer Pb(Zr,Ti)O3 Thin Films for Micro-Electromechanical Systems2012

    • Author(s)
      Kensuke Kanda
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51 Issue: 9S1 Pages: 09LD12-09LD12

    • DOI

      10.1143/jjap.51.09ld12

    • NAID

      210000141262

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Influence of Parasitic Capacitance on Output Voltage for Series-Connected Thin-Film Piezoelectric Devices2012

    • Author(s)
      Kensuke Kanda
    • Journal Title

      Sensors

      Volume: 12 Issue: 12 Pages: 16673-16684

    • DOI

      10.3390/s121216673

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Presentation] Fabrication and Evaluation of Bimorph Comprising of Double Pb[Zr,Ti]O_3 Thick Films2013

    • Author(s)
      J. Inoue, K. Kanda, T. Fujita, K. Maenaka
    • Organizer
      2013 IEEE Joint UFFC, EFTF, and PFM Symposium
    • Place of Presentation
      プラハ,チェコ共和国
    • Year and Date
      2013-07-25
    • Related Report
      2012 Final Research Report
  • [Presentation] MEMS デバイス向け厚膜 PZT/PZT バイモルフ構造2013

    • Author(s)
      井上純一,神田健介,藤田孝之,前中一介
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大(神奈川県)
    • Year and Date
      2013-03-29
    • Related Report
      2012 Final Research Report
  • [Presentation] PZT の微細加工とセンサへの応用2013

    • Author(s)
      神田健介
    • Organizer
      第67回次世代センサ協議会
    • Place of Presentation
      兵庫県立大学(兵庫県)
    • Year and Date
      2013-03-08
    • Related Report
      2012 Final Research Report
  • [Presentation] PZT の微細加工とセンサへの応用2013

    • Author(s)
      神田健介
    • Organizer
      マイクロシステム融合研究会
    • Place of Presentation
      東北大学(宮城県)
    • Year and Date
      2013-01-10
    • Related Report
      2012 Final Research Report
  • [Presentation] Fabrication and Evaluation of Bimorph Comprising of Double Pb[Zr,Ti]O3 Thick Films2013

    • Author(s)
      K. Kanda
    • Organizer
      2013 Joint UFFC, EFTF, and PFM Symposium
    • Place of Presentation
      Prague (Czech Republic)
    • Related Report
      2012 Annual Research Report
  • [Presentation] PZTの微細加工とセンサへの応用2013

    • Author(s)
      神田健介
    • Organizer
      マイクロシステム融合研究会
    • Place of Presentation
      東北大学(宮城県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] PZTの微細加工とセンサへの応用2013

    • Author(s)
      神田健介
    • Organizer
      第67回次世代センサ協議会
    • Place of Presentation
      兵庫県立大学(兵庫県)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] MEMSデバイス向け厚膜PZT/PZTバイモルフ構造2013

    • Author(s)
      神田健介
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学(神奈川県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Fabrication and Characterization of Lateral-Directional Actuator Using Pb(Zr,Ti)O_3 Thin Films2012

    • Author(s)
      K. Kanda, Y. Akashi, T. Fujita, K. Maenaka
    • Organizer
      2012 Fifth International Conference on Emerging Trends in Engineering and Technology
    • Place of Presentation
      イーグレ姫路(兵庫県)
    • Year and Date
      2012-11-05
    • Related Report
      2012 Final Research Report
  • [Presentation] Miniaturization of Vibratory Beam Accelerometer by using PZT2012

    • Author(s)
      K. Kanda, K. Nagata, T. Yamakawa, T. Fujita, K. Maenaka
    • Organizer
      26th European Conference on Solid-State Transducers
    • Place of Presentation
      クラクフ,ポーランド
    • Year and Date
      2012-09-12
    • Related Report
      2012 Final Research Report
  • [Presentation] MEMS のための薄膜 PZT/PZTバイモルフ2012

    • Author(s)
      神田健介,永田和幸,山川隆洋,藤田孝之,前中一介
    • Organizer
      第29回強誘電体応用会議
    • Place of Presentation
      コープイン京都(京都府)
    • Year and Date
      2012-05-24
    • Related Report
      2012 Final Research Report
  • [Presentation] 低アスペクト比構造体の PZT 薄膜による側面方向駆動2012

    • Author(s)
      神田健介,明石優,藤田孝之,前中一介
    • Organizer
      第59回春季応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京都)
    • Year and Date
      2012-03-15
    • Related Report
      2012 Final Research Report
  • [Presentation] Miniaturization of Vibratory Beam Accelerometer bu Using PZT2012

    • Author(s)
      K. Kanda
    • Organizer
      26th European Conference on Solid-State Transducers, Eurosensors 2012
    • Place of Presentation
      Krakow (Poland)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Fabrication and Characterization of Lateral-Directional Actuator Using Pb(Zr,Ti)O3 Thin Films2012

    • Author(s)
      K. Kanda
    • Organizer
      2012 fifth International Conference on Emerging Trends in Engineering and Technology
    • Place of Presentation
      イーグレ姫路(兵庫県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] MEMSのための薄膜PZT/PZTバイモルフ2012

    • Author(s)
      神田健介
    • Organizer
      第29回強誘電体応用会議
    • Place of Presentation
      コープイン京都(京都府)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 低アスペクト比構造体のPZT薄膜による側面方向駆動2012

    • Author(s)
      神田健介,明石優,藤田孝之,前中一介
    • Organizer
      2012年春季第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京都)
    • Related Report
      2011 Research-status Report
  • [Presentation] 構造上での演算機能を有する3軸加速度センサ2011

    • Author(s)
      齋藤誉司,神田健介,伊賀友樹,樋口行平,前中一介
    • Organizer
      第28回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      船堀タワーホール(東京都)
    • Year and Date
      2011-09-27
    • Related Report
      2012 Final Research Report
  • [Presentation] P(VDF/TrFE)薄膜を用いた柔軟な心拍・呼吸センサ2011

    • Author(s)
      塩野祥平,濱田浩幸,蒋永剛,樋口行平,神田健介,藤田孝之,前中一介
    • Organizer
      電気学会センサ・マイクロマシン部門総合研究会
    • Place of Presentation
      東京工業大学(東京都)
    • Year and Date
      2011-06-30
    • Related Report
      2012 Final Research Report
  • [Presentation] P(VDF/TrFE)薄膜を用いた柔軟な心拍・呼吸センサ2011

    • Author(s)
      塩野祥平,濱田浩幸,蒋永剛,樋口行平,神田健介,藤田孝之,前中一介
    • Organizer
      電気学会センサ・マイクロマシン部門総合研究会フィジカルセンサ研究会
    • Place of Presentation
      東京工業大学(東京都)
    • Related Report
      2011 Research-status Report
  • [Presentation] 構造体上での演算機能を有する3軸加速度センサ2011

    • Author(s)
      齋藤誉司,神田健介,伊賀友樹,樋口行平,前中一介
    • Organizer
      第28回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      船堀タワーホール(東京都)
    • Related Report
      2011 Research-status Report

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Published: 2011-08-05   Modified: 2019-07-29  

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