Characterization and Application of Thin-Film PZT/PZT Bimorph
| Project/Area Number |
23760233
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | University of Hyogo |
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Principal Investigator |
KANDA Kensuke 兵庫県立大学, 大学院・工学研究科, 助教 (20446735)
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| Project Period (FY) |
2011 – 2012
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| Project Status |
Completed (Fiscal Year 2012)
|
| Budget Amount *help |
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2012: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2011: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
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| Keywords | マイクロ / ナノメカトロニクス / 圧電薄膜 / MEMS / PZT / バイモルフ / アクチュエータ / センサ |
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| Research Abstract |
Double layer Pb[Zr,Ti]O_3(PZT, Lead Zirconate Titanate) thin films was realized for MEMS applications. The total thickness of the bimorph PZT/PZT structure is 5.4 μm, which is much thicker conventionally reported ones (typically 1 μm). In addition, the electric and piezoelectric characteristics for top and bottom PZT layers were consistent with each other. By fabricating MEMS mirror with four PZT/PZT bimorph beams, the applicability of the PZT/PZT bimorph to MEMS fabrication process was confirmed. The bimorph beams doubled the deflection of the MEMS mirror compared with unimorph actuations.These results demonstrate that the PZT/PZT bimorph is effective to MEMS actuators.
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Report
(3 results)
Research Products
(22 results)
