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Fabrication of piezoelectric-field enhanced excitonic devices operating at room-temperature with the use of oxynitride superlattices

Research Project

Project/Area Number 23760285
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Electronic materials/Electric materials
Research InstitutionKyushu University

Principal Investigator

ITAGAKI Naho  九州大学, システム情報科学研究院, 准教授 (60579100)

Project Period (FY) 2011 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2012: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2011: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Keywords薄膜・量子構造 / エキシトニクス / 酸窒化物半導体 / エキシトニックトランジスタ / ピエゾ電界 / スパッタリング / 量子井戸 / 酸化物半導体 / 結晶成長
Research Abstract

Excitonic transistor has attracted much attention because of its potential advantages such as high operation and interconnection speed, small dimensions, and low per consumption. The major challenges for excitonic devices are to increase the operating temperature. Here we have developed a novel semiconductor based on oxynitride and a novel device structure that uses piezoelectric field with the aim to obtain room-temperature operating excitonic devices.

Report

(3 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Research-status Report
  • Research Products

    (66 results)

All 2014 2013 2012 2011 Other

All Journal Article (10 results) (of which Peer Reviewed: 10 results) Presentation (46 results) (of which Invited: 5 results) Remarks (4 results) Patent(Industrial Property Rights) (6 results) (of which Overseas: 4 results)

  • [Journal Article] Characterization of the energy flux toward the substrate during magnetron sputter deposition of ZnO thin films2013

    • Author(s)
      S. Bornholdt, N. Itagaki, K. Kuwahara, H. Wulff, M. Shiratani and H. Kersten (S. Bornholdt)
    • Journal Title

      Plasma Sources Sci. Technol.

      Volume: 22 Issue: 2 Pages: 25019-25019

    • DOI

      10.1088/0963-0252/22/2/025019

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Effects of Hydrogen Dilution on ZnO Thin Films Fabricated via Nitrogen Mediated Crystallization2013

    • Author(s)
      I. Suhariadi, N. Itagaki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: Vol. 52 Issue: 1S Pages: 01AC08-01AC08

    • DOI

      10.7567/jjap.52.01ac08

    • NAID

      210000141756

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Sputter deposition of Epitaxial Zinc-Indium Oxynitride Films for Excitonic Transistors2012

    • Author(s)
      N. Itagaki, M. Shiratani
    • Journal Title

      Proceedings of International Symposium on Dry Process 2012

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] ZnO:Al Thin Films with Buffer Layers Fabricated via Nitrogen Mediated Crystallization: Effects of N2/Ar Gas Flow Rate Ratio2012

    • Author(s)
      I. Suhariadi, N. Itagaki
    • Journal Title

      Transactions of the Materials Research Society of Japan

      Volume: Vol. 37 Pages: 165-168

    • NAID

      130003399074

    • URL

      http://jglobal.jst.go.jp/detail.php?JGLOBAL_ID=201202205920945013

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] High quality epitaxial ZnO films grown on solid-phase crystallized buffer layers2012

    • Author(s)
      K. Kuwahara, N. Itagaki
    • Journal Title

      Thin Solid Films

      Volume: Vol. 520 Issue: 14 Pages: 4674-4674

    • DOI

      10.1016/j.tsf.2011.10.136

    • Related Report
      2012 Final Research Report 2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] Novel fabrication method for transparent conducting oxide films utilizing solid-phase crystallized seed layer2012

    • Author(s)
      N. Itagaki, K. Kuwahara, K. Nakahara
    • Journal Title

      AIP Conference Proceedings

      Volume: 1393 Pages: 23-26

    • DOI

      10.1063/1.3653599

    • Related Report
      2012 Final Research Report 2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] Novel fabrication method for ZnO films via nitrogen-mediated crystallization2012

    • Author(s)
      N. Itagaki, K. Kuwahara, K. Matsushima, K. Oshikawa
    • Journal Title

      Proceedings of SPIE - The International Society for Optical Engineering

      Volume: vol.8263 Pages: 826303-826303

    • DOI

      10.1117/12.911971

    • Related Report
      2012 Final Research Report 2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] ZnO:Al Thin Films with Buffer Layers Fabricated via Nitrogen Mediated Crystallization: Effects of N2/Ar Gas Flow Rate Ratio2012

    • Author(s)
      I. Suhariadi, N. Itagaki, K. Kuwahara, K. Oshikawa, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, K. Nakahara, M. Shiratani (I. Suhariadi)
    • Journal Title

      Transactions of the Materials Research Society of Japan

      Volume: 37 Pages: 165-168

    • NAID

      130003399074

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Novel fabrication method of ZnO films utilizing solid-phase crystallized seed layers2011

    • Author(s)
      N. Itagaki, K. Kuwahara
    • Journal Title

      Materials Research Society Symposium Proceedings

      Volume: 1315 Pages: 15-20

    • DOI

      10.1557/opl.2011.709

    • Related Report
      2012 Final Research Report 2011 Research-status Report
    • Peer Reviewed
  • [Journal Article] Epitaxial Growth of ZnInON Films for Piezo-Electric-Field Effect MQW Solar Cells

    • Author(s)
      K. Matsushima, N. Itagaki
    • Journal Title

      Japanese Journal of Applied Physics

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Presentation] ZnO based semiconductors fabricated by impurity mediated crystallization(Invited)2014

    • Author(s)
      N. Itagaki
    • Organizer
      SPIE(international society for optics and photonics) photonics west 2013
    • Place of Presentation
      San Francisco, USA
    • Year and Date
      2014-02-01
    • Related Report
      2012 Final Research Report
  • [Presentation] ZnO based semiconductors fabricated by impurity mediated crystallization (tentative)2014

    • Author(s)
      N. Itagaki (N. Itagaki)
    • Organizer
      SPIE Photonics West 2014
    • Place of Presentation
      San Francisco, California, United States
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Band-Gap Engineering of ZnO Based Semiconductors Deposited by Sputtering2013

    • Author(s)
      N. Itagaki
    • Organizer
      2013 JSAP-MRS Joint Symposia
    • Place of Presentation
      Doshisha University, Kyoto, Japan
    • Year and Date
      2013-09-16
    • Related Report
      2012 Final Research Report
  • [Presentation] Novel Approach to Sputtering Growth of Single Crystalline Oxide Semiconductors for Optoelectronic Applications (Invited)2013

    • Author(s)
      N. Itagaki
    • Organizer
      The 9th Asian-European International Conference on Plasma Surface Engineering
    • Place of Presentation
      Jeju, korea
    • Year and Date
      2013-08-25
    • Related Report
      2012 Final Research Report
  • [Presentation] Novel Application of Ar/N2 Discharges to Sputtering Growth of High Quality Oxide Semiconductors (Invited)2013

    • Author(s)
      N. Itagaki
    • Organizer
      The XXXI edition of the International Conference on Phenomena in Ionized Gases
    • Place of Presentation
      Granada, Spain
    • Year and Date
      2013-07-14
    • Related Report
      2012 Final Research Report
  • [Presentation] Sputter Deposition of Single Crystal ZnO Films on 18% Lattice mismatched c-Al2O3 Substrates via Nitrogen Mediated Crystallization2013

    • Author(s)
      N. Itagaki
    • Organizer
      International Symposium on Sputtering and Plasma Processes
    • Place of Presentation
      Kyoto Research Park, Kyoto, Japan
    • Year and Date
      2013-07-10
    • Related Report
      2012 Final Research Report
  • [Presentation] Sputter Deposition of Semiconductor-Grade ZnO Based Materials on Lattice Mismatched Substrates for Optoelectronic Applications2013

    • Author(s)
      N. Itagaki
    • Organizer
      The Collaborative Conference on Materials Research 2013
    • Place of Presentation
      Jeju, Korea
    • Year and Date
      2013-06-24
    • Related Report
      2012 Annual Research Report 2012 Final Research Report
  • [Presentation] スパッタ法による C 面サファイア基板上への原子平坦 ZnO 薄膜の作製2013

    • Author(s)
      板垣奈穂
    • Organizer
      2013年第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学
    • Year and Date
      2013-03-28
    • Related Report
      2012 Final Research Report
  • [Presentation] Sputter deposition of zinc-indium oxynitride semiconductors with narrow bandgap for excitonic transistors2013

    • Author(s)
      N. Itagaki
    • Organizer
      5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
    • Place of Presentation
      Nagoya University, Japan
    • Year and Date
      2013-02-01
    • Related Report
      2012 Final Research Report
  • [Presentation] Sputter Deposition of Atomically-Flat ZnO Films on Lattice Mismatched Substrates via Nitrogen Mediated Crystallization2013

    • Author(s)
      N. Itagaki
    • Organizer
      The Korea Japan Workshop and AJC Meeting
    • Place of Presentation
      Okazaki Conference Center, Japan
    • Year and Date
      2013-01-26
    • Related Report
      2012 Final Research Report
  • [Presentation] Sputter deposition of high quality ZnO based semiconductors in Ar/N2 atmosphere (tentative)2013

    • Author(s)
      N. Itagaki (N. Itagaki)
    • Organizer
      he 9th Asian-European International Conference on Plasma Surface Engineering
    • Place of Presentation
      Jeju, Korea
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Novel Application of Ar/N2 Discharges to Sputtering Growth of High Quality Oxide Semiconductors2013

    • Author(s)
      N. Itagaki (N. Itagaki)
    • Organizer
      The XXXI edition of the International Conference on Phenomena in Ionized Gases
    • Place of Presentation
      Granada, Spain
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Sputter Deposition of Single Crystal ZnO Films on 18% Lattice Mismatched c-Al2O3 Substrates via Nitrogen Mediated Crystallization2013

    • Author(s)
      N. Itagaki, K. Kuwahara, S. Iping, K. Oshikawa, K. Matsushima, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, and M. Shiratani (N. Itagaki)
    • Organizer
      International Symposium on Sputtering and Plasma Processes
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] スパッタリングにおけるZnNOx膜の初期成長制御とグリーンデバイスへの展開2013

    • Author(s)
      板垣奈穂 (板垣奈穂)
    • Organizer
      学振153、154、131合同研究会
    • Place of Presentation
      名古屋大学,愛知
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] 高効率太陽電池の実現に向けた新規酸窒化物半導体ZnInONのバンドギャップエンジニアリング2013

    • Author(s)
      板垣奈穂 (板垣奈穂)
    • Organizer
      第5回 革新的太陽光発電国際シンポジウム
    • Place of Presentation
      石川県立音楽堂,石川
    • Related Report
      2012 Annual Research Report
  • [Presentation] スパッタ法によるC面サファイア基板上への原子平坦ZnO薄膜の作製2013

    • Author(s)
      板垣奈穂, 桑原和成, 山下大輔, 徐鉉雄, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治 (板垣奈穂)
    • Organizer
      2013年第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学,神奈川
    • Related Report
      2012 Annual Research Report
  • [Presentation] Sputter deposition of zinc-indium oxynitride semiconductors with narrow bandgap for excitonic transistors2013

    • Author(s)
      N. Itagaki, K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani (N. Itagaki)
    • Organizer
      5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
    • Place of Presentation
      名古屋大学,愛知
    • Related Report
      2012 Annual Research Report
  • [Presentation] Sputter Deposition of Atomically-Flat ZnO Films on Lattice Mismatched Substrates via Nitrogen Mediated Crystallization2013

    • Author(s)
      N. Itagaki, K. Kuwahara, S. Iping, K. Oshikawa, K. Matsushima, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, and M. Shiratani (N. Itagaki)
    • Organizer
      The Korea Japan Workshop and AJC Meeting
    • Place of Presentation
      自然科学研究機構 岡崎コンファレンスセンター,愛知
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Epitaxial Growth of ZnO Based Semiconductors via Impurity-Additive Mediated2012

    • Author(s)
      N. Itagaki
    • Organizer
      2012 MRS Fall Meeting
    • Place of Presentation
      Hynes Convention Center, USA
    • Year and Date
      2012-11-26
    • Related Report
      2012 Final Research Report
  • [Presentation] Sputter deposition of Epitaxial Zinc-Indium Oxynitride Films for Excitonic Transistors2012

    • Author(s)
      N. Itagaki
    • Organizer
      The 34th International Symposium on Dry Process
    • Place of Presentation
      the University of Tokyo, Japan
    • Year and Date
      2012-11-16
    • Related Report
      2012 Final Research Report
  • [Presentation] Zinc-Indium Oxynitride Thin Films for Multiple-Quantum Well Solar Cells2012

    • Author(s)
      N. Itagaki
    • Organizer
      11th Asia-Pacific Conference on Plasma Science and Technology
    • Place of Presentation
      Kyoto University, Japan
    • Year and Date
      2012-10-03
    • Related Report
      2012 Final Research Report
  • [Presentation] Zinc-Indium Oxynitride Semiconductors for Piezo-Electric-Field Effect MQW Solar Cells2012

    • Author(s)
      N. Itagaki
    • Organizer
      IUMRS‐ICEM 2012
    • Place of Presentation
      Pacifico Yokohama, Japan
    • Year and Date
      2012-09-27
    • Related Report
      2012 Final Research Report
  • [Presentation] Crystallinity control of sputtered ZnO films by utilizing buffer layers fabricated via nitrogen mediated crystallization: Effects of nitrogen flow rate2012

    • Author(s)
      N. Itagaki
    • Organizer
      13th International Conference on Plasma Surface Engineering
    • Place of Presentation
      Garmisch-Partenkirchen, Germany
    • Year and Date
      2012-09-12
    • Related Report
      2012 Annual Research Report 2012 Final Research Report
  • [Presentation] 高効率量子井戸型太陽電池のための新規酸窒化物半導体薄膜の作製2012

    • Author(s)
      板垣奈穂
    • Organizer
      第9回「次世代の太陽光発電システム」シンポジウム
    • Place of Presentation
      京都テルサ
    • Year and Date
      2012-05-31
    • Related Report
      2012 Final Research Report
  • [Presentation] Piezo-electric-field effect MQW solar cells based on novel oxynitride semiconductors2012

    • Author(s)
      N. Itagaki
    • Organizer
      JST-PRESTO International Joint Symposium on Photo-Science Leading to a Sustainable Society: Environment, Energy, Functional Materials
    • Place of Presentation
      慶應義塾大学
    • Year and Date
      2012-03-27
    • Related Report
      2012 Final Research Report
  • [Presentation] 窒素添加結晶化バッファー層による ZnO:Al 薄膜の結晶性制御: 窒素供給量の影響2012

    • Author(s)
      板垣奈穂
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学
    • Year and Date
      2012-03-17
    • Related Report
      2012 Final Research Report
  • [Presentation] Novel fabrication method for ZnO films via nitrogen-mediated crystallization2012

    • Author(s)
      N. Itagaki
    • Organizer
      SPIE(international society for optics and photonics) photonics west 2012
    • Place of Presentation
      San Francisco, USA
    • Year and Date
      2012-01-22
    • Related Report
      2012 Final Research Report
  • [Presentation] Epitaxial Growth of ZnO Based Semiconductors via Impurity-Additive Mediated2012

    • Author(s)
      N. Itagaki, K. Kuwahara, K. Matsushima, T. Hirose, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani (N. Itagaki)
    • Organizer
      2012 MRS Fall Meeting
    • Place of Presentation
      Boston, United States
    • Related Report
      2012 Annual Research Report
  • [Presentation] Sputter deposition of Epitaxial Zinc-Indium Oxynitride Films for Excitonic Transistors2012

    • Author(s)
      N. Itagaki, K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani (N. Itagaki)
    • Organizer
      The 34th International Symposium on Dry Process
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] Zinc-Indium Oxynitride Thin Films for Multiple-Quantum–Well Solar Cells2012

    • Author(s)
      N. Itagaki, K. Matsushima, T. Hirose, K. Kuwahara, D. Yamashita, H. Seo, K. Kamataki, G. Uchida, K. Koga, M. Shiratani (N. Itagaki)
    • Organizer
      11th Asia-Pacific Conference on Plasma Science and Technology
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] Zinc-Indium Oxynitride Semiconductors for Piezo-Electric-Field Effect MQW Solar Cells2012

    • Author(s)
      N. Itagaki, K. Matsushima, K. Kuwahara, D. Yamashita, G. Uchida, K. Kamataki, H. Seo, K. Koga, M. Shiratani (N. Itagaki)
    • Organizer
      IUMRS‐ICEM 2012
    • Place of Presentation
      Yokohama, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] 高効率量子井戸型太陽電池のための新規酸窒化物半導体薄膜の作製2012

    • Author(s)
      板垣奈穂、松島宏一、桑原和成、押川晃一郎、Iping Suhariadi、山下大輔、徐鉉雄、鎌滝晋礼、内田儀一郎、古閑一憲、白谷正治 (板垣奈穂)
    • Organizer
      第9回「次世代の太陽光発電システム」シンポジウム
    • Place of Presentation
      京都テルサ, 京都
    • Related Report
      2012 Annual Research Report
  • [Presentation] Piezo-electric-field effect MQW solar cells based on novel oxynitride semiconductors2012

    • Author(s)
      N. Itagaki
    • Organizer
      JST-PRESTO International Joint Symposium on Photo-Science Leading to a Sustainable Society: Environment, Energy, Functional Materials
    • Place of Presentation
      慶應義塾大学、横浜
    • Related Report
      2011 Research-status Report
  • [Presentation] 板垣奈穂, Iping Suhariadi, 桑原和成, 山下大輔, 徐鉉雄, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治,窒素添加結晶化バッファー層によるZnO:Al 薄膜の結晶性制御: 窒素供給量の影響2012

    • Author(s)
      板垣奈穂, Iping Suhariadi, 桑原和成, 山下大輔, 徐鉉雄, 鎌滝晋礼, 内田儀一郎, 古閑一憲, 白谷正治
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学、東京
    • Related Report
      2011 Research-status Report
  • [Presentation] Novel fabrication method for ZnO films via nitrogen-mediated crystallization2012

    • Author(s)
      N. Itagaki, K. Kuwahara, K. Matsushima, K. Oshikawa
    • Organizer
      SPIE(international society for optics and photonics) photonics west 2012(招待講演)
    • Place of Presentation
      The Moscone Center, San Francisco, United States of America
    • Related Report
      2011 Research-status Report
  • [Presentation] 窒素添加結晶化法による高品質酸化亜鉛薄膜の作成とその応用2012

    • Author(s)
      板垣奈穂
    • Organizer
      次世代太陽電池研究会
    • Place of Presentation
      和多屋別荘、嬉野
    • Related Report
      2011 Research-status Report
  • [Presentation] Zinc oxide-based transparent conducting films with buffer layers fabricated via nitrogen-mediated crystallization2011

    • Author(s)
      N. Itagaki
    • Organizer
      21st International Photovoltaic Science and Engineering Conference
    • Place of Presentation
      Pacifico Yokohama, Japan
    • Year and Date
      2011-12-01
    • Related Report
      2012 Final Research Report
  • [Presentation] Ar/N2 マグネトロンスパッタによる低抵抗ZnO:Al膜の作製2011

    • Author(s)
      板垣奈穂
    • Organizer
      Plasma Conference 2011
    • Place of Presentation
      石川県立音楽堂
    • Year and Date
      2011-11-24
    • Related Report
      2012 Final Research Report
  • [Presentation] 窒素添加結晶化法による超均一・低抵抗酸化亜鉛薄膜の作製2011

    • Author(s)
      板垣奈穂
    • Organizer
      第27回九州・山口プラズマ研究会
    • Place of Presentation
      福岡
    • Year and Date
      2011-11-07
    • Related Report
      2012 Final Research Report
  • [Presentation] ZINC OXIDE-BASED TRANSPARENT CONDUCTING FILMS WITH BUFFER LAYERS FABRICATED VIA NITROGEN-MEDIATED CRYSTALLIZATION2011

    • Author(s)
      N. Itagaki, K. Kuwahara, D. Yamashita, G. Uchida, K. Kamataki, K. Koga, and M. Shiratani
    • Organizer
      21st International Photovoltaic Science and Engineering Conference
    • Place of Presentation
      シーホークホテル、福岡
    • Related Report
      2011 Research-status Report
  • [Presentation] Low resistive ZnO:Al films with ZnO buffer layers fabricated by Ar/N2 magnetron sputtering2011

    • Author(s)
      N. Itagaki, K. Kuwahara, K. Matsushima, K. Oshikawa
    • Organizer
      PLASMA2011 conference
    • Place of Presentation
      石川県立音楽堂、金沢
    • Related Report
      2011 Research-status Report
  • [Presentation] 窒素添加結晶化法による超均一・低抵抗酸化亜鉛薄膜の作製2011

    • Author(s)
      板垣奈穂,桑原和成,中原賢太,山下 大輔,鎌滝晋礼, 内田儀一郎,古閑一憲,白谷正治
    • Organizer
      第26回九州・山口プラズマ研究会
    • Place of Presentation
      柳川 かんぽの宿、柳川
    • Related Report
      2011 Research-status Report
  • [Presentation] Spatial distribution of resistivity of ZnO:Al thin films fabricated on solid-phase crystallized seed layers2011

    • Author(s)
      N. Itagaki, K. Kuwahara, D. Yamashita, K. Kamataki, G. Uchida, K. Koga, M. Shiratani
    • Organizer
      E-MRS 2011 Fall MEETING
    • Place of Presentation
      Warsaw University of Technology, Poland
    • Related Report
      2011 Research-status Report
  • [Presentation] ZnO:Al薄膜の抵抗率の面内均一性に対する固相結晶化シード層の効果2011

    • Author(s)
      板垣奈穂,桑原和成,中原賢太,山下 大輔,鎌滝晋礼, 内田儀一郎,古閑一憲,白谷正治
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学、山形市
    • Related Report
      2011 Research-status Report
  • [Presentation] Fabrication of highly conducting ZnO:Al films utilizing solid-phase crystallized seed layer2011

    • Author(s)
      N. Itagaki, K. Kuwahara, K. Nakahara, D. Yamashita, K. Kamataki, G. Uchida, K. Koga, M. Shiratani
    • Organizer
      E-MRS 2011 SPRING MEETING
    • Place of Presentation
      Congress Center, Nice, France
    • Related Report
      2011 Research-status Report
  • [Presentation] Fabrication of high quality ZnO films via nitrogen-mediated crystallization2011

    • Author(s)
      N. Itagaki, K. Kuwahara, D. Yamashita, K. Kamataki, G. Uchida, K. Koga, M. Shiratani
    • Organizer
      第24回プラズマ材料科学シンポジウム
    • Place of Presentation
      大阪大学、大阪
    • Related Report
      2011 Research-status Report
  • [Remarks]

    • URL

      http://hyoka.ofc.kyushu-u.ac.jp/search/details/K003622

    • Related Report
      2012 Final Research Report
  • [Remarks]

    • URL

      http://plasma.ed.kyushu-u.ac.jp/~itagaki_lab/index.html

    • Related Report
      2012 Final Research Report
  • [Remarks] 九州大学研究者情報

    • URL

      http://hyoka.ofc.kyushu-u.ac.jp/search/details/K003622/

    • Related Report
      2012 Annual Research Report
  • [Remarks]

    • URL

      http://hyoka.ofc.kyushu-u.ac.jp/search/details/K003622/research.html

    • Related Report
      2011 Research-status Report
  • [Patent(Industrial Property Rights)] 多重量子井戸型太陽電池および多重量子井戸型太陽電池の製造方法2013

    • Inventor(s)
      板垣奈穂,白谷正治,内田儀一郎
    • Industrial Property Rights Holder
      板垣奈穂,白谷正治,内田儀一郎
    • Filing Date
      2013-03-05
    • Related Report
      2012 Final Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 多重量子井戸型太陽電池および多重量子井戸型太陽電池の製造方法2013

    • Inventor(s)
      板垣奈穂,白谷正治,内田儀一郎
    • Industrial Property Rights Holder
      板垣奈穂,白谷正治,内田儀一郎
    • Industrial Property Rights Type
      特許
    • Filing Date
      2013-03-05
    • Related Report
      2012 Annual Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 多重量子井戸型太陽電池及び多重量子井戸型太陽電池の製造方法2012

    • Inventor(s)
      板垣奈穂,白谷正治,内田儀一郎
    • Industrial Property Rights Holder
      板垣奈穂,白谷正治,内田儀一郎
    • Filing Date
      2012-03-06
    • Related Report
      2012 Final Research Report
  • [Patent(Industrial Property Rights)] 多重量子井戸型太陽電池及び多重量子井戸型太陽電池の製造方法2012

    • Inventor(s)
      板垣奈穂、白谷正治、内田儀一郎
    • Industrial Property Rights Holder
      板垣奈穂、白谷正治、内田儀一郎
    • Industrial Property Number
      2012-049805
    • Filing Date
      2012
    • Related Report
      2011 Research-status Report
  • [Patent(Industrial Property Rights)] ZnO 膜の製造方法、透明導電膜の製造方法、ZnO 膜、及び透明導電膜2011

    • Inventor(s)
      板垣奈穂、白谷正治、古閑一憲、内田儀一郎、鎌滝晋礼
    • Industrial Property Rights Holder
      板垣奈穂、白谷正治、古閑一憲、内田儀一郎、鎌滝晋礼
    • Filing Date
      2011-08-26
    • Related Report
      2012 Final Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] ZnO膜の製造方法、透明導電膜の製造方法、ZnO膜、及び透明導電膜2011

    • Inventor(s)
      板垣奈穂、白谷正治、古閑一憲、内田儀一郎、鎌滝晋礼
    • Industrial Property Rights Holder
      板垣奈穂、白谷正治、古閑一憲、内田儀一郎、鎌滝晋礼
    • Filing Date
      2011
    • Related Report
      2011 Research-status Report
    • Overseas

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Published: 2011-08-05   Modified: 2019-07-29  

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