Si integrated micro scale ultrasonic transducer using PZT thin films for an endoscope
| Project/Area Number |
23760311
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | Toyohashi University of Technology |
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Principal Investigator |
AKAI Daisuke 豊橋技術科学大学, エレクトロニクス先端融合研究所, 助教 (50378246)
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| Project Period (FY) |
2011 – 2012
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| Project Status |
Completed (Fiscal Year 2012)
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| Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2012: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2011: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
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| Keywords | 超音波 / トランスデューサ / PZT / A1203 / 圧電 / MEMS / 超音波振動子 / 強誘電体薄膜 / 圧電薄膜 / ダイアフラム |
|---|
| Research Abstract |
A micro size ultrasonic probe integrated with Si substrates and ferroelectric PZT thin films have been developed for endoscope applications. Ultrasonic transducers and their array have been successfully fabricated with 100 μm in diameter or less.
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Report
(3 results)
Research Products
(17 results)
