Fabrication of anti - reflection structures on thermoelectric thin films

• Project/Area Number: 23760706
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Material processing/treatments
• Research Institution: National Institute of Advanced Industrial Science and Technology
• Principal Investigator: MIZOSHIRI Mizue 独立行政法人産業技術総合研究所, サステナブルマテリアル研究部門, 研究員 (70586594)
• Project Period (FY): 2011 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2012: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000); Fiscal Year 2011: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
• Keywords: 微細加工 / 熱電薄膜デバイス / 微細周期構造 / リソグラフィ / 反射率 / 反射防止構造 / 熱電発電 / 熱電薄膜

Research Abstract

In this study, anti-reflection structures were fabricated on thermoelectric thin films which have high reflection efficiency of solar light. The reflection efficiency of the thin films could be reduced. Furthermore, the anti-reflection structures were int

Research Products

• [Journal Article] P-type Sb_2Te_3 and n-type Bi_2Te_3 Films for Thermoelectric Modules deposited by Thermally-assisted Sputtering Method (2013)
  • Author(s): M. Mizoshiri, M. Mikami, K. Ozaki
  • Journal Title: Japanese Journal of Applied Physics Volume: (accepted)
  • Peer Reviewed
• [Journal Article] Thermal-photovoltaic Hybrid Solar Generator using Thin-film Thermoelectric Modules (2012)
  • Author(s): M. Mizoshiri, M. Mikami, K. Ozaki
  • Journal Title: Japanese Journal of Applied Physics Volume: Vol. 51
  • NAID: 210000140826
  • Peer Reviewed
• [Journal Article] Thin-Film Thermoelectric Modules for Power Generation Using Focused Solar Light (2012)
  • Author(s): M. Mizoshiri, M. Mikami, K. Ozaki, K. Kobayashi
  • Journal Title: Journal of Electronic Materials Volume: Vol. 41 Pages: 1713-1719
  • Peer Reviewed
• [Journal Article] ターゲット加熱型高速スパッタ成膜法による熱電厚膜の作製 (2012)
  • Author(s): 溝尻瑞枝
  • Journal Title: Proceedings of the 27th Sensor Symposium on Sensors, Micromachines and Applied System Pages: 379-383
  • Peer Reviewed
• [Journal Article] Flexible thin-film thermoelectric generator inserting Cr buffer layer (2012)
  • Author(s): Mizue Mizoshiri
  • Journal Title: Proceedings of Power MEMS 2012 Pages: 468-471
  • Peer Reviewed
• [Journal Article] P-type Sb2Te3 and n-type Bi2Te3 Films for Thermoelectric Modules deposited by Thermally-assisted Sputtering Method (2012)
  • Author(s): Mizue Mizoshiri
  • Journal Title: Japanese Journal of Applied Physics
  • Peer Reviewed
• [Journal Article] Flexible thin-film thermoelectric generator inserting Cr buffer layer
  • Author(s): M. Mizoshiri, Masashi Mikami, Kimihiro Ozaki
  • Journal Title: Proceedings of Power MEMS 2012 Pages: 468-471
• [Journal Article] ターゲット加熱型高速スパッタ成膜法による熱電厚膜の作製
  • Author(s): 溝尻瑞枝,三上祐史,尾崎公洋
  • Journal Title: Proceedings of the 27th Sensor Symposium on Sensors, Micromachines and Applied System Pages: 379-383
• [Presentation] 耐熱マスクを用いた熱電厚膜のリフト・オフパターニング (2013)
  • Author(s): 溝尻瑞枝,三上祐史,尾崎公洋
  • Organizer: 第60回応用物理学会春季学術講演会
  • Place of Presentation: 神奈川工科大学(厚木市)
  • Year and Date: 2013-03-29
• [Presentation] 耐熱マスクを用いた熱電厚膜のリフト･オフパターニング (2013)
  • Author(s): 溝尻 瑞枝
  • Organizer: 第60回応用物理学会春季学術講演会
  • Place of Presentation: 神奈川工科大学（厚木市）
• [Presentation] Flexible thin-film thermoelectric generator inserting Cr buffer layer (2012)
  • Author(s): M. Mizoshiri, M. Mikami, K. Ozaki
  • Organizer: Power MEMS2012
  • Place of Presentation: Atlanta (USA)
  • Year and Date: 2012-12-03
• [Presentation] P-type Sb_2Te_3 and n-type Bi_2Te_3 films for thermoelectric modules deposited by thermally -assisted sputtering method (2012)
  • Author(s): M. Mizoshiri, M. Mikami, K. Ozaki
  • Organizer: 25th International Microprocesses and Nanotechnology Conference (MNC2012)
  • Place of Presentation: 神戸コンベンションセンター(神戸市) .
  • Year and Date: 2012-11-01
• [Presentation] ターゲット加熱型高速スパッタ成膜法による熱電厚膜の作製 (2012)
  • Author(s): 溝尻瑞枝,三上祐史,尾崎公洋
  • Organizer: 第29回「センサ・マイクロマシンと応用システム」シンポジウム
  • Place of Presentation: 北九州国際会議場および西日本総合展示場(北九州市)
  • Year and Date: 2012-10-24
• [Presentation] ターゲット加熱型高速スパッタ成膜法による膜状熱電モジュールの作製 (2012)
  • Author(s): 溝尻瑞枝,三上祐史,尾崎公洋
  • Organizer: 第73回応用物理学会学術講演会
  • Place of Presentation: 愛媛大学(松山市)
  • Year and Date: 2012-09-12
• [Presentation] ターゲット加熱型スパッタ成膜法による熱電厚膜の高速作製 (2012)
  • Author(s): 溝尻瑞枝,三上祐史,尾崎公洋
  • Organizer: 第59回応用物理学関連連合講演会
  • Place of Presentation: 早稲田大学(東京)
  • Year and Date: 2012-03-17
• [Presentation] ターゲット加熱型高速スパッタ成膜法による膜状熱電モジュールの作製 (2012)
  • Author(s): 溝尻瑞枝
  • Organizer: 第73回応用物理学会学術講演会
  • Place of Presentation: 愛媛大学（松山市）
• [Presentation] ターゲット加熱型高速スパッタ成膜法による熱電厚膜の作製 (2012)
  • Author(s): 溝尻 瑞枝
  • Organizer: 第29回「センサ・マイクロマシンと応用システム」シンポジウム
  • Place of Presentation: 北九州国際会議場および西日本総合展示場（北九州市）
• [Presentation] P-type Sb2Te3 and n-type Bi2Te3 films for thermoelectric modules deposited by thermally-assisted sputtering method (2012)
  • Author(s): Mizue Mizoshiri
  • Organizer: 25th International Microprocesses and Nanotechnology Conference (MNC2012)
  • Place of Presentation: 神戸コンベンションセンター（神戸市）
• [Presentation] Flexible thin-film thermoelectric generator inserting Cr buffer layer (2012)
  • Author(s): Mizue Mizoshiri
  • Organizer: Power MEMS 2012
  • Place of Presentation: アトランタ（USA）
• [Presentation] ターゲット加熱型スパッタ成膜法による熱電厚膜の高速作製 (2012)
  • Author(s): 溝尻 瑞枝
  • Organizer: 第59回応用物理学関連連合講演会
  • Place of Presentation: 早稲田大学（東京）
• [Presentation] Thermal-photovoltaic Hybrid Solar Generator using Thin-film Thermoelectric Modules (2011)
  • Author(s): M. Mizoshiri, M. Mikami, K. Ozaki
  • Organizer: 24th International Microprocesses and Nanotechnology Conference
  • Place of Presentation: ANA Hotel Kyoto (Kyoto)
  • Year and Date: 2011-10-25
• [Presentation] 太陽光集光型薄膜熱電発電モジュールの作製と評価 (2011)
  • Author(s): 溝尻瑞枝,三上祐史,尾崎公洋
  • Organizer: 第72回応用物理学会学術講演会
  • Place of Presentation: 山形大学(山形)
  • Year and Date: 2011-08-30
• [Presentation] Thin-Film Thermoelectric ModulesforPowerGenerationUsingFocusedSolarLight,JournalofElectronicMaterials (2011)
  • Author(s): M. Mizoshiri, M. Mikami, K. Ozaki, K. Kobayashi
  • Organizer: The 30th International Conference on Thermoelectrics
  • Place of Presentation: Michigan (USA)
  • Year and Date: 2011-07-19
• [Presentation] Thin-film thermoelectric modules for power generation using focused solar light (2011)
  • Author(s): Mizue Mizoshiri
  • Organizer: The 30th International Conference on Thermoelectrics
  • Place of Presentation: Grand Traverse Resort and Spa, Traverse City, Michigan (USA)
• [Presentation] 太陽光集光型薄膜熱電発電モジュールの作製と評価 (2011)
  • Author(s): 溝尻 瑞枝
  • Organizer: 第72回応用物理学会学術講演会
  • Place of Presentation: 山形大学（山形）
• [Presentation] Thermal-photovoltaic Hybrid Solar Generator using Thin-film Thermoelectric Modules (2011)
  • Author(s): Mizue Mizoshiri
  • Organizer: 24th International Microprocesses and Nanotechnology Conference
  • Place of Presentation: ANA Hotel Kyoto, Kyoto (Japan)