Development of hard deformable focusing mirror for general-purpose hard X-ray optics.

• Project/Area Number: 23860001
• Research Category: Grant-in-Aid for Research Activity Start-up
• Allocation Type: Single-year Grants
• Research Field: Production engineering/Processing studies
• Research Institution: Hokkaido University
• Principal Investigator: KIMURA Takashi 北海道大学, 電子科学研究所, 助教 (50531472)
• Project Period (FY): 2011 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000); Fiscal Year 2012: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2011: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
• Keywords: X 線光学 / 超精密加工 / 超精密計測 / 計測工学 / X線集光 / X線ミラー / 補償光学 / 波面制御 / 収差補正 / 形状可変ミラー / 圧電素子

Research Abstract

In order to realize diffraction-limited focusing of hard X-rays with a size less than several hundreds of nanometers, a deformable mirror which can be bent into an aspherical shape with a depth of several micrometers and an accuracy better than a few nanometers was developed. The accuracy of the mirror surface shape was guaranteed and maintained by a feedback system with a Fizeau interferometer. Hard X-ray focusing performance of the mirror was tested at the BL29XUL of SPring-8. We confirmed that beam size was controllable in a range from micrometer to nanometer scale under diffraction-limited focusing condition.

Research Products

• [Journal Article] zoom condenser lens for diffractive and scanning microscopy (2013)
  • Author(s): Takashi Kimura、Satoshi Matsuyama、Kazuto Yamauchi、Yoshinori Nishino、Coherent x-ray
  • Journal Title: Optics Express Volume: 21巻 Issue: 8 Pages: 9267-9267
  • DOI: 10.1364/oe.21.009267
  • Peer Reviewed / Open Access
• [Journal Article] Experimental and simulation study of undesirable short-period deformation in piezoelectric deformable x-ray mirrors (2012)
  • Author(s): H. Nakamori, S. Matsuyama, S.Imai, T. Kimura, Y. Sano. Y. Komura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi
  • Journal Title: Review of Scientific Instruments Volume: 83 Issue: 5
  • DOI: 10.1063/1.4709499
  • Peer Reviewed
• [Journal Article] Development of an ultraprecise piezoelectric deformable mirror for adaptive X-ray optics (2012)
  • Author(s): H. Nakamori, S. Matsuyama, S.Imai, T. Kimura, Y. Sano. Y. Komura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi
  • Journal Title: Key Engineering Materials Volume: 523-524 Pages: 50-53
  • DOI: 10.4028/www.scientific.net/kem.523-524.50
  • Peer Reviewed
• [Journal Article] Single-nanometer focusing of hard x-rays by Kirkpatrick-Baez mirrors (2011)
  • Author(s): K.Yamauchi, et al.
  • Journal Title: J.Phys. : Condens.Matter Volume: 23 Issue: 39 Pages: 394206-394206
  • DOI: 10.1088/0953-8984/23/39/394206
  • Peer Reviewed
• [Journal Article] One-dimensional sub-10-nm hard X-ray focusing using laterally graded multilayer (2011)
  • Author(s): H.Mimura, et al.
  • Journal Title: Nucl.Instrum.Methods.A Volume: 635 Issue: 1 Pages: S16-S18
  • DOI: 10.1016/j.nima.2010.11.047
  • Peer Reviewed
• [Presentation] X線自由電子レーザーを用いた溶液中における試料構造解析法の開発 (2013)
  • Author(s): 木村 隆志
  • Organizer: 北海道大学電子科学研究所平成２４年度研究交流会
  • Place of Presentation: 北海道大学(札幌市)
• [Presentation] パルス状コヒーレントX線溶液散乱法による溶液中試料構造の解析 (2013)
  • Author(s): 木村 隆志
  • Organizer: 第26回日本放射光学会年会・放射光科学合同シンポジウム
  • Place of Presentation: 名古屋大学(名古屋市)
• [Presentation] Development of Structure Analysis Method for Non-crystallized Sample using Focused X-ray Free Electron Laser (2012)
  • Author(s): T. Kimura, S. Matsuyama, Y.Nishino, K. Yamauchi
  • Organizer: 13th RIES-Hokudai International Symposium
  • Place of Presentation: CHATERAISE Gateaux Kingdom Sapporo (札幌)
  • Year and Date: 2012-12-13
• [Presentation] Development of Deformable Mirror for Hard X-rays Diffraction Limited Focusing with Controllable Spot Size (2012)
  • Author(s): T. Kimura, S. Matsuyama, H.Mimura, H. Nakamori, S. Imai, H. Yokoyama, Y. Komura, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, K. Yamauchi
  • Organizer: 11th International Conference on Synchrotron Radiation
  • Place of Presentation: Lyon ConventionCentre (France)
  • Year and Date: 2012-07-09
• [Presentation] Development of wavefront characterization method for nearly diffraction-limited focused hard X-ray nanobeam (2012)
  • Author(s): T. Kimura, H. Mimura, H.Yumoto, S. Imai, S. Matsuyama, Y. Sano, K. Tamasaku, Y. Komura, Y. Nishino, M. Yabashi, T. Ishikawa, K. Yamauchi
  • Organizer: 4th international workshop on Metrology for X-ray Optics, Mirror Design, and Fabrication
  • Place of Presentation: Investigadors Residence Hall(Spain).
  • Year and Date: 2012-07-04
• [Presentation] Development of an ultra-precise deformable mirror for x-ray focusing (2012)
  • Author(s): H. Nakamori, S. Matsuyama, S.Imai, T. Kimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi
  • Organizer: 4th international workshop on Metrology for X-ray Optics, Mirror Design, and Fabrication
  • Place of Presentation: Investigadors Residence Hall(Spain).
  • Year and Date: 2012-07-04
• [Presentation] Computational Study of Novel X-ray Focusing Optics with Zooming Function for X-ray Diffraction Microscopy (2012)
  • Author(s): T. Kimura, S. Matsuyama, K.Yamauchi, Y. Nishino
  • Organizer: Coherence 2012
  • Place of Presentation: Hilton FukuokaSeahawk(福岡)
  • Year and Date: 2012-06-18
• [Presentation] Development of piezoelectric deformable mirrors forX-ray focusing (2012)
  • Author(s): H. Nakamori, S. Matsuyama, S.Imai, T. Kimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi
  • Organizer: Coherence 2012
  • Place of Presentation: Hilton Fukuoka Seahawk(福岡)
  • Year and Date: 2012-06-18
• [Presentation] Development of an ultraprecise piezoelectric deformable mirror for adaptive X-ray optics (2012)
  • Author(s): H. Nakamori, S. Matsuyama, S.Imai, T. Kimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi
  • Organizer: 14th International Conference on Precision Engineering (ICPE2012)
  • Place of Presentation: Awaji Yumebutai International Conference Center(兵庫)
• [Presentation] Development of an adaptive hard X-ray focusing system with deformable mirrors (2012)
  • Author(s): S. Imai, H. Nakamori, S.Matsuyama, T. Kimura, Y. Kohmura, T. Ishikawa, K. Yamauchi
  • Organizer: 5th International Symposium on Atomically Controlled Fabrication Technology
  • Place of Presentation: OsakaUniversity Nakanoshima Center (大阪)
• [Presentation] Development of ultraprecise piezoelectric deformable mirror for adaptive X-ray focusing (2012)
  • Author(s): H. Nakamori, S. Matsuyama, S.Imai, T. Kimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi
  • Organizer: 5th International Symposium on Atomically Controlled Fabrication Technology
  • Place of Presentation: Osaka University Nakanoshima Center (大阪)
• [Presentation] Development of piezoelectric deformable mirror for hard X-ray nanofocusing (2012)
  • Author(s): S. Matsuyama, T. Kimura, H.Nakamori, S. Imai, H. Yokoyama, J. Kim, R. Fukui, H. Mimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi
  • Organizer: SPIE Optics+Photonics
  • Place of Presentation: San DiegoConvention Center (USA)
• [Presentation] Computational Study of Novel X-ray Focusing Optics with Zooming Function for X-ray Diffraction Microscopy. (2012)
  • Author(s): Takashi Kimura
  • Organizer: Coherence 2012
  • Place of Presentation: Hilton Fukuoka Seahawk (福岡市)
• [Presentation] Development of wavefront characterization method for nearly diffraction-limited focused hard X-ray nanobeam. (2012)
  • Author(s): Takashi Kimura
  • Organizer: 4th international workshop on Metrology for X-ray Optics, Mirror Design, and Fabrication
  • Place of Presentation: Investigadors Residence Hall(Spain)
• [Presentation] Development of Deformable Mirror for Hard X-rays Diffraction Limited Focusing with Controllable Spot Size. (2012)
  • Author(s): Takashi Kimura
  • Organizer: 11th International Conference on Synchrotron Radiation
  • Place of Presentation: Lyon Convention Centre(France)
• [Presentation] Development of Structure Analysis Method for Non-crystallized Sample (2012)
  • Author(s): Takashi Kimura
  • Organizer: 13th RIES-Hokudai International Symposium
  • Place of Presentation: Gateaux Kingdom(札幌市)
• [Presentation] Development of an ultra-precise deformable mirror for hard X-ray nanofocusing (2011)
  • Author(s): H. Nakamori, S. Matsuyama, T.Kimura, S. Imai, Y. Kohmura, T. Ishikawa, Y. Nishino, K. Ymauchi
  • Organizer: 7th Handai Nanoscience and Nanotechnology International Symposium
  • Place of Presentation: Osaka University(大阪).
• [Presentation] Development of an Adaptive X-Ray Focusing Mirror with Large NA -Evaluation of Reproducibility of Deformable Mirror (2011)
  • Author(s): H. Nakamori, S. Matsuyama, S.Imai, H. Yokoyama, T. Kimura, H. Mimura, Y. Sano, Y. Kohmura, T. Ishikawa, K. Yamauchi
  • Organizer: 4th International Conferenceof Asian Society for Precision Engineering and Nanotechnology
  • Place of Presentation: Osaka University Nakanoshima Center (大阪).
• [Presentation] Development of an adaptive hard X-ray focusing system with adaptive mirrors (2011)
  • Author(s): S. Imai, S. Matsuyama, H.Nakamori, T. Kimura, H. Yokoyama, H. Mimura, Y. Sano, Y. Kohmura, T. Ishikawa, K. Yamauchi
  • Organizer: 4th International Conference of Asian Society for Precision Engineering and Nanotechnology
  • Place of Presentation: Osaka University Nakanoshima Center (大阪).
• [Presentation] Determination of Had X-ray Focusing Mirror Aberration using Phase Retrieval with Transverse Translation Diversity (2011)
  • Author(s): H. Yokoyama, T. Kimura, H.Mimura, S. Imai, S. Matsuyama, Y. Kohmura, T. Ishikawa, K. Yamauchi
  • Organizer: 4th International Conference of Asian Society for Precision Engineering and Nanotechnology
  • Place of Presentation: OsakaUniversity Nakanoshima Center (大阪)
• [Presentation] Single-nanometer focusing of hard x-rays using novel adaptive optical system (2011)
  • Author(s): K. Yamauchi, H. Mimura, T.Kimura, H. Yokoyama, H. Yumoto, S. Matsuyama, H. Nakamori, Y. Sano, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa
  • Organizer: ACTOP11
  • Place of Presentation: Diamond Light Source (UK).
• [Presentation] Development of ultraprecise piezoelectric deformable mirror for adaptive X-ray focusing (2011)
  • Author(s): H. Nakamori, S. Matsuyama, T.Kimura, S. Imai, H. Mimura, Y. Sano, K. Yamauchi
  • Organizer: ACTOP11
  • Place of Presentation: DiamondLight Source (UK).