Development of the thermal contact sensor for inspection of defects on wafer surface

• Project/Area Number: 23860005
• Research Category: Grant-in-Aid for Research Activity Start-up
• Allocation Type: Single-year Grants
• Research Field: Design engineering/Machine functional elements/Tribology
• Research Institution: Tohoku University
• Principal Investigator: SHIMIZU Yuki 東北大学, 大学院・工学研究科, 准教授 (70606384)
• Project Period (FY): 2011 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000); Fiscal Year 2012: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2011: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
• Keywords: 接触センサ / 摩擦熱 / デフェクト / ウエハ検査 / FEM

Research Abstract

A feasibility of newly-proposed concept for the detection of small defects on smoothly-finished surfaces has been investigated. An estimated temperature rise of the thermal element, which would detect small amount of frictional heat due to contact with a defect was analyzed based on FEM simulations. In addition, experiments were carried out with fabricated prototype of the thermal element to confirm the feasibility of the proposed concept.

Research Products

• [Journal Article] New Measurement Concept of Nanometer-LevelDefects on Si Wafer Surface by Using Micro Contact Sensor (2012)
  • Author(s): Wenjian Lu, Yuki Shimizu, Wei Gao
  • Journal Title: Advanced Material Research Volume: Vol. 497 Pages: 137-141
  • DOI: 10.4028/www.scientific.net/amr.497.137
  • Peer Reviewed
• [Journal Article] Design and Experiment of Thermal Contact Sensor Detecting Defects on Si Wafer Surface (2012)
  • Author(s): Wenjian Lu, Yuki Shimizu, Wei Gao
  • Journal Title: Key Engineering Materials Volume: Vols. 523-524 Pages: 826-831
  • DOI: 10.4028/www.scientific.net/kem.523-524.826
  • Peer Reviewed
• [Journal Article] New Measurement Concept of Nanometer-level Defects on Si Wafer Surface by using Micro Contact Sensor (2012)
  • Author(s): W.Lu, Y.Shimizu, W.Gao
  • Journal Title: Advanced Material Research Volume: (未定)(accepted)
  • Peer Reviewed
• [Journal Article] ウエハ表面のナノレベル欠陥検出向け接触型マイクロ熱検知センサの原理検討 (2012)
  • Author(s): 清水裕樹, 盧文剣, 東豊大, 高偉
  • Journal Title: 精密工学会春季大会論文集 Volume: (CD-R)
  • NAID: 130005031256
• [Journal Article] New Measurement Concept of Nanometer-level Defects on Si Wafer Surface by using Micro Contact Sensor (2011)
  • Author(s): W.Lu, Y.Shimizu, W.Gao
  • Journal Title: Proceedings of the 8th China-Japan International Coference on Ultra-precision machining (CJUPM 2011) Pages: 26-26
• [Journal Article] 熱検知型接触センサによる半導体ウエハ上の微小欠陥検出手法の提案 (2011)
  • Author(s): 清水裕樹, 盧文剣, 高偉
  • Journal Title: 2011年度精密工学会東北支部講演会論文集 Pages: 37-38
• [Presentation] 表面欠陥検出向け接触型熱検知素子の試作 (2013)
  • Author(s): 盧文剣，清水裕樹，大場裕太，高偉 （清水裕樹）
  • Organizer: 日本機械学会 東北支部第４８期総会・講演会
  • Place of Presentation: 宮城県仙台市
• [Presentation] Feasibility study on the concept of thermal contact sensor for nanometer-level defect inspections on smooth surfaces (2013)
  • Author(s): Yuki Shimizu, Wenjian Lu, Yuta Ohba, Wei Gao
  • Organizer: The 11th International Symposium of Measurement Technology and Intelligent Instruments (ISMTII2013)
  • Place of Presentation: Aachen and Braunschweig (Germany)
• [Presentation] Design and experiment of thermal contact sensor detecting defects on Si wafer surface (2012)
  • Author(s): Wenjian Lu, Yuki Shimizu, So Ito, Wei Gao
  • Organizer: The 14th International Conference on Precision Engineering (ICPE2012)
  • Place of Presentation: Awaji-shi (Hyogo)
  • Year and Date: 2012-11-08
• [Presentation] 接触型熱検知センサによる平滑面欠陥検出の実験的原理検討 (2012)
  • Author(s): 盧文剣,清水裕樹,大場裕太,高偉
  • Organizer: 日本機械学会 第9回生産加工・工作機械部門講演会
  • Place of Presentation: 秋田
  • Year and Date: 2012-10-27
• [Presentation] Design of a Micro-sized Thermal Contact Sensor for Inspection of Surface Defects (2012)
  • Author(s): Yuki Shimizu, Wenjian Lu, Wei Gao
  • Organizer: The 3rd International Conference on Nanomanufacturing (nanoMan2012)
  • Place of Presentation: Wako-shi (Saitama)
  • Year and Date: 2012-07-26
• [Presentation] ウエハ表面のナノレベル欠陥検出向け接触型マイクロ熱検知センサの原理検討 (2012)
  • Author(s): 清水裕樹,盧文剣,東豊大,高偉
  • Organizer: 精密工学会2012年度春季大会
  • Place of Presentation: 東京
  • Year and Date: 2012-03-14
• [Presentation] Design of a Micro-sized Thermal Contact Sensor for Inspection of Surface Defects (2012)
  • Author(s): Yuki Shimizu, Wenjian Lu, Wei Gao (Yuki Shimizu)
  • Organizer: The 3rd International Conference on Nanomanufacturing (nanoMan2012)
  • Place of Presentation: Wako-shi (Saitama, Japan)
  • Invited
• [Presentation] 接触型熱検知センサによる平滑面欠陥検出の実験的原理検討 (2012)
  • Author(s): 盧文剣，清水裕樹，大場裕太，高偉 （清水裕樹）
  • Organizer: 日本機械学会 第９回生産加工・工作機械部門講演会
  • Place of Presentation: 秋田県由利本荘市
• [Presentation] Design and experiment of thermal contact sensor detecting defects on Si wafer surface (2012)
  • Author(s): Wenjian Lu, Yuki Shimizu, So Ito, Wei Gao (Yuki Shimizu)
  • Organizer: The 14th International Conference on Precision Engineering
  • Place of Presentation: Awaji-shi (Hyogo, Japan)
• [Presentation] ヘッド組み込み型熱検知センサを用いた磁気ディスク表面のナノ微小欠陥検出技術 (2012)
  • Author(s): 清水裕樹，徐鈞国，小平英一 （清水裕樹）
  • Organizer: 日本トライボロジー学会 トライボロジー会議2012 春 東京
  • Place of Presentation: 東京都代々木区
  • Invited
• [Presentation] New Measurement Concept of Nanometer-level Defects on Si Wafer Surface by using Micro Contact Sensor (2011)
  • Author(s): W.Lu, Y.Shimizu, W.Gao
  • Organizer: The 8^<th> China-Japan International Conference on Ultra-Precision Machining
  • Place of Presentation: Hangzhou, China
  • Year and Date: 2011-11-20
• [Presentation] 熱検知型接触センサによる半導体ウエハ上の微小欠陥検出手法の提案 (2011)
  • Author(s): 盧文剣, 清水裕樹, 高偉
  • Organizer: 2011年度精密工学会東北支部講演会
  • Place of Presentation: 仙台
  • Year and Date: 2011-10-21
• [Remarks]
  • URL: http://www.nano.mech.tohoku.ac.jp
• [Remarks] 東北大学, 大学院 工学研究科, ナノメカニクス専攻 高・清水・伊東研究室
  • URL: http://www.nano.mech.tohoku.ac.jp/
• [Remarks]
  • URL: http://www.nano.mech.tohoku.ac.jp
• [Patent(Industrial Property Rights)] 平滑面検査装置 (2012)
  • Inventor(s): 清水裕樹,高偉,盧文剣
  • Industrial Property Rights Holder: 清水裕樹,高偉,盧文剣
  • Industrial Property Number: 2012-097818
  • Filing Date: 2012-04-23
• [Patent(Industrial Property Rights)] 平滑面検査装置 (2012)
  • Inventor(s): 清水裕樹，高偉，盧文剣
  • Industrial Property Rights Holder: 清水裕樹，高偉，盧文剣
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2012-097818
  • Filing Date: 2012-04-23
• [Patent(Industrial Property Rights)] ステージ機構およびその駆動方法 (2011)
  • Inventor(s): 清水裕樹,高偉,盧文剣
  • Industrial Property Rights Holder: 清水裕樹,高偉,盧文剣
  • Industrial Property Number: 2011-256202
  • Filing Date: 2011-11-24
• [Patent(Industrial Property Rights)] ステージ機構およびその駆動方法 (2011)
  • Inventor(s): 清水裕樹, 他
  • Industrial Property Rights Holder: 東北大学
  • Industrial Property Number: 2011-256202
  • Filing Date: 2011-11-24