A study of power generator from environment energy using MEMSresonators

• Project/Area Number: 23860022
• Research Category: Grant-in-Aid for Research Activity Start-up
• Allocation Type: Single-year Grants
• Research Field: Electron device/Electronic equipment
• Research Institution: The University of Electro-Communications
• Principal Investigator: ISHIBASHI Koichiro 電気通信大学, 情報理工学研究科, 教授 (50614038)
• Project Period (FY): 2011 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000); Fiscal Year 2012: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2011: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
• Keywords: MEMS / エネルギーハーベスティング / マイクロマシン / 電子デバイス / 低消費電力

Research Abstract

A MEMS resonator to harvest energy from environmental radio waves has been investigated. An ultra-low power LSI can operate with the energy. A cantilever and torus type MEMS resonators have been investigated. It is clear that torus resonator store larger energy of 8.2E-10[J] than a cantilever does 5.7E-11[J]. A torus resonator was fabricated and we 996KHz resonant frequency is observed which is almost same frequency of the analysis.

Research Products

• [Presentation] カンチレバー型MEMS共振器の設計 (2013)
  • Author(s): 日下部圭佑, 井上雄策, 長谷川翔一, 石橋孝一郎
  • Organizer: 2013年電子情報通信学会総合大会
  • Place of Presentation: 岐阜大学
• [Presentation] カンチレバー型MEMS 共振器の設計 (2013)
  • Author(s): 日下部 圭佑、井上 雄策、長谷川 翔一、 （石橋 孝一郎）
  • Organizer: 2013 年 電子情報通信学会総合大会
  • Place of Presentation: 岐阜大学
• [Remarks]
  • URL: http://mtm.es.uec.ac.jp
• [Remarks] 電気通信大学 石橋研究室
  • URL: http://mtm.es.uec.ac.jp/index.html
• [Remarks]
  • URL: http://mitm.es.uec.ac.jp/index.html