Research Project
Grant-in-Aid for Research Activity Start-up
A MEMS resonator to harvest energy from environmental radio waves has been investigated. An ultra-low power LSI can operate with the energy. A cantilever and torus type MEMS resonators have been investigated. It is clear that torus resonator store larger energy of 8.2E-10[J] than a cantilever does 5.7E-11[J]. A torus resonator was fabricated and we 996KHz resonant frequency is observed which is almost same frequency of the analysis.
All 2013 Other
All Presentation (2 results) Remarks (3 results)
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