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Study of Crystal Growth Mechanism in Nano Meter Scale on Supercritical Nano Plating

Research Project

Project/Area Number 23K21050
Project/Area Number (Other) 21H01668 (2021-2023)
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeMulti-year Fund (2024)
Single-year Grants (2021-2023)
Section一般
Review Section Basic Section 26050:Material processing and microstructure control-related
Research InstitutionInstitute of Science Tokyo

Principal Investigator

曽根 正人  東京工業大学, 科学技術創成研究院, 教授 (30323752)

Co-Investigator(Kenkyū-buntansha) 細田 秀樹  東京工業大学, 科学技術創成研究院, 教授 (10251620)
チャン ツォーフーマーク  東京工業大学, 科学技術創成研究院, 准教授 (10647069)
黒子 弘道  奈良女子大学, 工学系, 教授 (20221228)
Project Period (FY) 2021-04-01 – 2025-03-31
Project Status Granted (Fiscal Year 2024)
Budget Amount *help
¥17,290,000 (Direct Cost: ¥13,300,000、Indirect Cost: ¥3,990,000)
Fiscal Year 2024: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
Fiscal Year 2023: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
Fiscal Year 2022: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2021: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
Keywords電気化学反応 / 電気めっき / 超臨界流体 / 二酸化炭素 / 電析 / 超臨界二酸化炭素 / 回転電極 / 貴金属 / 高分子繊維 / 電気化学的特性 / めっき / ナノ空間 / 有機材料 / 無機材料
Outline of Research at the Start

本研究では、超臨界二酸化炭素と電解質溶液との乳濁状態を電気化学反応場とする超臨界ナノプレーティング(SNP)法を用いることにより、金属・無機・有機材料のナノ空間にナノメートルの無欠陥かつ均一な金属を被覆を実現するめっき金属成長制御の学理を構築することを目的とする。具体的には、超臨界電気化学反応用回転電極セルを創成することにより、電気化学及び流体工学的に反応解析し、その成果をもとに、金属成長機序を解明する。本研究により、新規超臨界電気化学反応用回転電極セルが作製され、電気化学反応の詳細が解明され、同時にナノレベルの金属被覆が実現した。

Outline of Annual Research Achievements

本提案では、 十ナノメートルの微細孔への無欠陥埋め込みめっきを可能とする超臨界ナノプレーティング(SNP)法を、超臨界電気化学反応用回転電極セルを創成することにより、電気化学及び流体工学的に反解析し金属成長機序を解明し、金属無機・有機材料のナノ空間にナノメートルレベルの無欠かつ均一な金属を被覆可能なめっき金属成長制御の学理を構築することを目的とする。
[1]2021年度までに、超臨界二酸化炭素電気化学反応用回転電極セルを設計・製造を実行し、超臨界二酸化炭素を用いた電気化学反応に関する素反応解析に成功した。2022年度に素反応解析の成果をJournal of The Electrochemical Society(J.Electrochem.Soc.)に二報発表した。この成果をナノ粒子分散のめっき液を用いた電解めっきに応用し、超臨界二酸化炭素分散相をソフト粒子、ナノ粒子をハード粒子とする電析機構モデルを提案できた。この成果をMaterials Chemistry and Physicsに発表した。2023年度は、めっきにおける添加剤の電析反応における役割について電気化学反応解析することに成功した。その成果をJ.Electrochem.Soc.で報告した。このように無機材料のナノ空間への金属析出に関する反応機構に関して研究計画に沿った研究実施ができた。
[2]超臨界二酸化炭素触媒化法による高分子繊維のナノ空間への金属触媒の析出機構に関して固体NMR法による解析に成功した。この研究により超臨界二酸化炭素の繊維のナノ構造への影響と、超臨界二酸化炭素触媒化法による結晶化を見出し、同時にポリマー鎖の分子運動の抑制を直接明らかにすることができた。この成果をThe Journal of Supercritical Fluidsで発表した。2023年度は繊維の撚り数を変えることにより、超臨界CO2法により単繊維(ヤーン)にめっきできることを見出した。

Current Status of Research Progress
Current Status of Research Progress

1: Research has progressed more than it was originally planned.

Reason

[1]2021年度までに、超臨界電気化学反応用回転電極セルを設計・製造を作成し、超臨界二酸化炭素を用いた電気化学反応に関する電気化学反応解析に成功した。
2022年度にその成果をJournal of The Electrochemical Society(J.Electrochem.Soc.)に二報発表できた。この成果をナノ粒子分散のめっき液を用いた電解めっきに応用し、超臨界二酸化炭素分散相をソフト粒子、ナノ粒子をハード粒子とする電析機構モデルを提案できた。この成果をMaterials Chemistryand Physicsに発表した。2023年度は、めっきにおける添加剤の電析反応における役割について電気化学反応解析することに成功し、J.Electrochem.Soc.で報告した。
[2]超臨界二酸化炭素触媒化法による高分子繊維のナノ空間への金属触媒の析出機構に関して固体NMR法による解析に成功した。この研究により超臨界二酸化炭素の繊維のナノ構造への影響と、超臨界二酸化炭素触媒化法による結晶化を見出し、同時にポリマー鎖の分子運動の抑制を直接明らかにすることができた。この成果をThe Journal of Supercritical Fluidsで発表した。2023年度は繊維の撚り数を変えることにより、超臨界CO2法により単繊維(ヤーン)にめっきできることを見出した。これは繊維の金属被覆におけるブレイクスルーであり、2024年度に国際学会発表と論文発表を行う予定である。
以上のように研究計画している課題に関して極めて順調に解明し、かつ主要学術雑誌で発表している。

Strategy for Future Research Activity

2023年度に、いままで極めて困難であったマクロフィラメント単体への金属被覆を試みる。繊維の撚り数を変えることにより、超臨界CO2法により単繊維(ヤーン)にめっきできることを見出した。繊維の撚り数が、繊維の金属被覆にどのように影響を与えるかを固体高分解能NMRで解析が進んでいる。本年は更に繊維の化学構造が、金属被覆にどのように影響を与えるかを明らかにする。

Report

(3 results)
  • 2023 Annual Research Report
  • 2022 Annual Research Report
  • 2021 Annual Research Report
  • Research Products

    (65 results)

All 2024 2023 2022 2021

All Journal Article (25 results) (of which Int'l Joint Research: 9 results,  Peer Reviewed: 25 results,  Open Access: 17 results) Presentation (38 results) (of which Int'l Joint Research: 36 results,  Invited: 2 results) Book (2 results)

  • [Journal Article] Warpage Study of Electrodeposited-Au Micro-Components with Ti/Au Multi-Layered Structures toward MEMS Applications2024

    • Author(s)
      Omura Taro、Kurioka Tomoyuki、Chen Chun-Yi、Chang Tso-Fu Mark、Onishi Akira、Chakraborty Parthojit、Machida Katsuyuki、Ito Hiroyuki、Miyake Yoshihiro、Sone Masato
    • Journal Title

      Journal of The Electrochemical Society

      Volume: 171 Issue: 3 Pages: 032501-032501

    • DOI

      10.1149/1945-7111/ad2ba9

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Dependence of Structural Design on Effective Young's Modulus of Ti/Au Multi-layered Micro-cantilevers2024

    • Author(s)
      Watanabe Shunkai、Kurioka Tomoyuki、Chen Chun-Yi、Chang Tso-Fu Mark、Onishi Akira、Chakraborty Parthojit、Machida Katsuyuki、Ito Hiroyuki、Miyake Yoshihiro、Sone Masato
    • Journal Title

      Micro and Nano Engineering

      Volume: 23 Pages: 100249-100249

    • DOI

      10.1016/j.mne.2024.100249

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Clarification of Geometric Effects on Long-term Structural Stability of Ti/Au Multi-layered Micro-cantilevers2024

    • Author(s)
      Miyai Ryosuke、Kurioka Tomoyuki、Chen Chun-Yi、Chang Tso-Fu Mark、Onishi Akira、Chakraborty Parthojit、Machida Katsuyuki、Ito Hiroyuki、Miyake Yoshihiro、Sone Masato
    • Journal Title

      Micro and Nano Engineering

      Volume: 23 Pages: 100244-100244

    • DOI

      10.1016/j.mne.2024.100244

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Gold/MnO2 particles decorated on electrodeposited polyaniline toward non-enzymatic electrochemical sensor for glucose2023

    • Author(s)
      Okamoto Keisuke、Kawakami Hiroki、Chien Yu-An、Kurioka Tomoyuki、Chiu Wan-Ting、Chakraborty Parthojit、Nakamoto Takamichi、Hsu Yung-Jung、Sone Masato、Chang Tso-Fu Mark
    • Journal Title

      Micro and Nano Engineering

      Volume: 18 Pages: 100175-100175

    • DOI

      10.1016/j.mne.2023.100175

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Correlation of sample geometry and grain size in micro-bending of electrodeposited polycrystalline gold2023

    • Author(s)
      Suzuki Kosuke、Jiang Yiming、Hori Ryohei、Hashigata Ken、Kurioka Tomoyuki、Chen Chun-Yi、Chang Tso-Fu Mark、Chakraborty Parthojit、Machida Katsuyuki、Ito Hiroyuki、Miyake Yoshihiro、Sone Masato
    • Journal Title

      Materials Today Communications

      Volume: 35 Pages: 106072-106072

    • DOI

      10.1016/j.mtcomm.2023.106072

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of supercritical carbon dioxide soft particles on incorporation of titanium dioxide nanoparticles into nickel matrix2023

    • Author(s)
      Chien Yu-An、Chen Chun-Yi、Kurioka Tomoyuki、Sone Masato、Chang Tso-Fu Mark
    • Journal Title

      Materials Chemistry and Physics

      Volume: 302 Pages: 127703-127703

    • DOI

      10.1016/j.matchemphys.2023.127703

    • Related Report
      2023 Annual Research Report 2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Supercritical carbon dioxide-assisted gold metallization of 3D-printed structure and the tensile strength2023

    • Author(s)
      Cheng Po-Wei、Kurioka Tomoyuki、Chen Chun-Yi、Chang Tso-Fu Mark、Chiu Wan-Ting、Hosoda Hideki、Takase Kei、Ishihata Hiroshi、Sone Masato
    • Journal Title

      MRS Communications

      Volume: 13 Issue: 3 Pages: 480-485

    • DOI

      10.1557/s43579-023-00373-y

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Specimen size effect on the strength of nickel-boron alloys2023

    • Author(s)
      Jiang Yiming、Chen Chun-Yi、Kurioka Tomoyuki、Luo Xun、Yamane Daisuke、Mizoguchi Masanori、Kudo Osamu、Maeda Ryu、Sone Masato、Chang Tso-Fu Mark
    • Journal Title

      Materials Letters

      Volume: 349 Pages: 134742-134742

    • DOI

      10.1016/j.matlet.2023.134742

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High strength Ni matrix TiO2 composites by supercritical CO2 assisted Co-electrodeposition with different sizes of TiO2 particle2023

    • Author(s)
      Chien Yu-An、Chen Chun-Yi、Kurioka Tomoyuki、Sone Masato、Chang Tso-Fu Mark
    • Journal Title

      Micro and Nano Engineering

      Volume: 20 Pages: 100219-100219

    • DOI

      10.1016/j.mne.2023.100219

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Effects of Bromide Ions in Anomalous Codeposition of Ni-Co Alloys with a Sulfamate Based Electrolyte2023

    • Author(s)
      Jiang Yiming、Chen Chun-Yi、Kurioka Tomoyuki、Luo Xun、Yamane Daisuke、Sone Masato、Chang Tso-Fu Mark
    • Journal Title

      Journal of The Electrochemical Society

      Volume: 170 Issue: 7 Pages: 072507-072507

    • DOI

      10.1149/1945-7111/ace47e

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Impurity Analysis of Electroplated Gold Components with Multi-Layered Structures by Thermal Desorption Spectrometry toward Application in Gold Micro Electro Mechanical System Capacitive Accelerometers2023

    • Author(s)
      Takumi Akiyama, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone
    • Journal Title

      Micro and Nano Engineering

      Volume: 21 Pages: 100226-100226

    • DOI

      10.1016/j.mne.2023.100226

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Au@Cu2O core@shell nanocrystals as sustainable catalysts for efficient hydrogen production from ammonia borane2023

    • Author(s)
      Fang Mei-Jing、Lin Yu-Chang、Jan Jen-Yu、Lai Ting-Hsuan、Hsieh Ping-Yen、Kuo Ming-Yu、Chiu Yi-Hsuan、Tsao Chun-Wen、Chen Yi-An、Wang Yu-Ting、Hong Yi-Jia、Wu Jhen-Yang、Wu Yew Chung Sermon、Lin Yan-Gu、Chang Tso-Fu Mark、Chen Chun-Yi、Sone Masato、Chang Sue-Min、Chang Chung-Liang、Hsu Yung-Jung
    • Journal Title

      Applied Catalysis B: Environmental

      Volume: 324 Pages: 122198-122198

    • DOI

      10.1016/j.apcatb.2022.122198

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Platinum Metallization of Polyethylene Terephthalate by Supercritical Carbon Dioxide Catalyzation and the Tensile Fracture Strength2023

    • Author(s)
      Po-Wei Cheng, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Wan-Ting Chiu, Hideki HOSODA, Kei Takase, Hiroshi Ishihata, Hiromichi Kurosu, Masato Sone
    • Journal Title

      Materials, MDPI

      Volume: 16 Issue: 6 Pages: 2377-2377

    • DOI

      10.3390/ma16062377

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Solid-state 13C NMR spectroscopic study of supercritical CO2 catalyzation treated polyethylene terephthalate textiles for platinum metallization2023

    • Author(s)
      Jinno Arisa、Ogasawara Yuna、Hashimoto Tomoko、Mitsumoto Masaki、Chang Tso-Fu Mark、Sone Masato、Kurosu Hiromichi
    • Journal Title

      The Journal of Supercritical Fluids

      Volume: 197 Pages: 105896-105896

    • DOI

      10.1016/j.supflu.2023.105896

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Effect of current density on micro-mechanical property of electrodeposited gold film evaluated by micro-compression2022

    • Author(s)
      Omura Taro、Chen Chun-Yi、Chang Tso-Fu Mark、Yamane Daisuke、Ito Hiroyuki、Machida Katsuyuki、Masu Kazuya、Sone Masato
    • Journal Title

      Surface and Coatings Technology

      Volume: 436 Pages: 128315-128315

    • DOI

      10.1016/j.surfcoat.2022.128315

    • Related Report
      2022 Annual Research Report 2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Supercritical Carbon Dioxide-Assisted Functionalization of Polyethylene Terephthalate (PET) toward Flexible Catalytic Electrodes2022

    • Author(s)
      Po-Wei Cheng, Chun-Yi Chen, Taku Ichibayashi, Tso-Fu Mark Chang, Masato Sone, Suzushi Nishimura
    • Journal Title

      The Journal of Supercritical Fluids

      Volume: 180 Pages: 105-455

    • DOI

      10.1016/j.supflu.2021.105455

    • Related Report
      2022 Annual Research Report 2021 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Electrodeposition and Micro-Mechanical Property Characterization of Nickel?Cobalt Alloys toward Design of MEMS Components2022

    • Author(s)
      Jiang Yiming、Chen Chun-Yi、Luo Xun、Yamane Daisuke、Mizoguchi Masanori、Kudo Osamu、Maeda Ryu、Sone Masato、Chang Tso-Fu Mark
    • Journal Title

      Electrochem

      Volume: 3 Issue: 2 Pages: 198-210

    • DOI

      10.3390/electrochem3020012

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Sample size effect in Ni-TiO2 composites fabricated by supercritical CO2 emulsified CO-electroplating for miniaturized device2022

    • Author(s)
      Chien Yu-An、Chen Chun-Yi、Sone Masato、Chang Tso-Fu Mark
    • Journal Title

      Micro and Nano Engineering

      Volume: 15 Pages: 100135-100135

    • DOI

      10.1016/j.mne.2022.100135

    • Related Report
      2022 Annual Research Report 2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Supercritical Carbon Dioxide-Assisted Platinum Metallization of PET Textile for Wearable Device2022

    • Author(s)
      Masaki Mitsumoto, Chun-Yi Chen, Wan-Ting Chiu, Tso-Fu Mark Chang, Yasushi Watanabe, Arisa Jinno, Hiromichi Kurosu, Masato Sone
    • Journal Title

      Micro and Nano Engineering

      Volume: 15 Pages: 100-132

    • DOI

      10.1016/j.mne.2022.100132

    • Related Report
      2022 Annual Research Report 2021 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Electronic Interactions and Charge-Transfer Dynamics for a Series of Yolk-Shell Nanocrystals: Implications for Photocatalysis2022

    • Author(s)
      Jhen-Yang Wu Jhen-Yang Wu Institute of Innovative Research (IIR), Tokyo InJhen-Yang Wu , Ting-Hsuan Lai, Mei-Jing Fang, Jui-Yuan Chen, Ming-Yu Kuo, Yi-Hsuan Chiu, Ping-Yen Hsieh, Chun-Wen Tsao, Huai-En Chang, Yu-Peng Chang, Chien-Yi Wang, Chun-Yi Chen, Masato Sone, Wen-Wei Wu, Tso-Fu Mark Chang, and Yung-Jung Hsu
    • Journal Title

      ACS Applied Nano Materials

      Volume: 5 Issue: 6 Pages: 8404-8416

    • DOI

      10.1021/acsanm.2c01529

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Electrodeposition of Ni-B Alloy Film: Effect of Current Density and Heat Treatment on Micro-Mechanical Property2022

    • Author(s)
      Jiang Yiming、Chen Chun-Yi、Kurioka Tomoyuki、Luo Xun、Yamane Daisuke、Mizoguchi Masanori、Kudo Osamu、Maeda Ryu、Sone Masato、Chang Tso-Fu Mark
    • Journal Title

      Journal of The Electrochemical Society

      Volume: 169 Issue: 11 Pages: 112504-112504

    • DOI

      10.1149/1945-7111/ac9dc2

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Electrode Kinetic Study of Cu Electrodeposition with Supercritical CO<sub>2</sub> by High Pressure Rotating Disk Electrode Method2022

    • Author(s)
      Higuchi Kazuhito、Chang Tso-Fu Mark、Sone Masato
    • Journal Title

      Journal of The Electrochemical Society

      Volume: 169 Issue: 2 Pages: 020558-020558

    • DOI

      10.1149/1945-7111/ac534a

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Supercritical carbon dioxide assisted co-electrodeposition of nickel-titanium dioxide composite film and the dispersity2022

    • Author(s)
      Chien Yu-An、Chen Chun-Yi、Sone Masato、Chang Tso-Fu Mark
    • Journal Title

      The Journal of Supercritical Fluids

      Volume: 181 Pages: 105495-105495

    • DOI

      10.1016/j.supflu.2021.105495

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of polypyrrole/nano-gold composite for non-enzymatic glucose sensors2022

    • Author(s)
      Kawakami Hiroki、Ito Yuki、Chien Yu-An、Chen Chun-Yi、Chiu Wan-Ting、Chakraborty Parthojit、Nakamoto Takamichi、Sone Masato、Chang Tso-Fu Mark
    • Journal Title

      Micro and Nano Engineering

      Volume: 14 Pages: 100109-100109

    • DOI

      10.1016/j.mne.2022.100109

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] The Structure and Micro-Mechanical Properties of Electrodeposited Cobalt Films by Micro-Compression Test2021

    • Author(s)
      Luo Xun、Chen Chun-Yi、Chang Tso-Fu Mark、Sone Masato、Zhang Qiong、Zhang Jinzhu
    • Journal Title

      Journal of The Electrochemical Society

      Volume: 168 Issue: 10 Pages: 102502-102502

    • DOI

      10.1149/1945-7111/ac2be9

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Presentation] Au Metallized Polyethylene Terephthalate (PET) by Supercritical CO2-assisted Metallization toward Flexible Electrochemical Biosensors2023

    • Author(s)
      Chun-Yi Chen, Po-Wei Cheng, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone
    • Organizer
      Euroanalysis XXI
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Electrodeposition of Nickel-Cobalt Alloys with additives and their Mechanical Properties2023

    • Author(s)
      Yiming Jiang, Tomoyuki Kurioka, Chun-Yi Chen, Xun Luo, Daisuke Yamane, Masato Sone, Tso-Fu Mark Chang
    • Organizer
      74th Annual Meeting of the International Society of Electrochemistry
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Strain Rate Dependency of Mechanical Property in Micro-Compression of Electrodeposited Gold toward Design of MEMS Components2023

    • Author(s)
      Syota Kanno, Taro Omura, Tomoyuki Kurioka, Chun-Yi Chen, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone, Tso-Fu Mark Chang
    • Organizer
      49th international conference on Micro and Nano Engineering (MNE2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers2023

    • Author(s)
      Syunkai Watanabe, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Akira Onishi, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone
    • Organizer
      49th international conference on Micro and Nano Engineering (MNE2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Comprehensive Evaluation of Geometric Effects on Long-Term Structure Stability of Ti/Au Multi-Layered Micro-Cantilevers toward Gold-MEMS Capacitive Accelerometer2023

    • Author(s)
      Ryosuke Miyai, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Akira Onishi, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone
    • Organizer
      49th international conference on Micro and Nano Engineering (MNE2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Metallization of UHMW-PE Fibers by Supercritical CO2 Catalyzation toward Weavable Devices2023

    • Author(s)
      Hikaru Kondo, Tomoyuki Kurioka, Wan-Ting Chiu, Chun-Yi Chen, Tso-Fu Mark Chang, Yamaguchi Machiko, Arisa Jinno, Hiromichi Kurosu, Masato Sone
    • Organizer
      49th international conference on Micro and Nano Engineering (MNE2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ni-P Electroless Plating of Polyethylene Terephthalate Fibers with Various Twist Number Utilizing Supercritical CO2-Assisted Catalyzation2023

    • Author(s)
      Hikaru Kondo, Tomoyuki Kurioka, Wan-Ting Chiu, Chun-Yi Chen, Tso-Fu Mark Chang, Roka Ueno, Arisa Jinno, Hiromichi Kurosu, Masato Sone
    • Organizer
      244th Electrochemical Society Meeting
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Mechanical Property Design of Multilayered Ti/Au Microcomponents by Electrodeposition Toward High-Sensitive MEMS Accelerometers2023

    • Author(s)
      Masato Sone, Tso-Fu Mark Chang, Tomoyuki Kurioka, Chun-yi Chen, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake.
    • Organizer
      244th Electrochemical Society Meeting
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Supercritical CO2 Assisted Ni-P Electroless Plating of PET Components with Complex 3D Structures2023

    • Author(s)
      Ami Iwasaki, Po-Wei Cheng, Tomoyuki Kurioka, Chun-Yi Chen, Kei Takase, Hiroshi Ishihata, Tso-Fu Mark Chang, Masato Sone
    • Organizer
      244th Electrochemical Society Meeting
    • Related Report
      2023 Annual Research Report
  • [Presentation] Preparation of polypyrrole film with various morphology using supercritical carbon dioxide assisted emulsified electrode2023

    • Author(s)
      Punvinai Vinaisuratern, Tomoyuki Kurioka, Chun-Yi Chen, Yoshishige Tsuchiya, Masato Sone, Tso-Fu Mark Chang
    • Organizer
      Taiwan Association for Coating and Thin Film Technology (TACT2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Supercritical CO2-Assisted Ni-P Electroless Plating of PEI 3D Components,2023

    • Author(s)
      Ami Iwasaki, Po-Wei Cheng, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Kei Takase, Hiroshi Ishihata, Masato Sone
    • Organizer
      Taiwan Association for Coating and Thin Film Technology (TACT2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Dispersity and Mechanical Strength Ni-TiO2 Composites Electrodeposited Via Supercritical CO2 Emulsified Electrolyte2022

    • Author(s)
      Yu-An Chien, Chun-Yi Chen, Masato Sone, Tso-Fu Mark Chang.
    • Organizer
      241st ECS Meeting
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Thermal Stability and Mechanical Property of Electrodeposited Ni-B Alloy2022

    • Author(s)
      Yiming Jiang, Chun-Yi Chen, Xun Luo, Daisuke Yamane, Masanori Mizoguchi, Osamu Kudo, Ryu Maeda, Masato Sone, Tso-Fu Mark Chang.
    • Organizer
      31st Topical Meeting of the International Society of Electrochemistry
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Tensile Strength of Pt Metallized Polyethylene terephthalate (PET) by Supercritical CO2-assisted Metallization for Design of Flexible Electronic Components2022

    • Author(s)
      Po-Wei Cheng, Tomoyuki Kurioka, Chun-Yi Chen, Yiming Jiang, Wan-Ting Chiu, Masaki Tahara, Hideki Hosoda, Taku Ichibayashi, Suzushi Nishimura, Masato Sone, Tso-Fu Mark Chang.
    • Organizer
      48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ultra-High Mechanical Strength and Thermal Stability of Electrodeposited Ni-B Alloys toward MEMS Micro-Components2022

    • Author(s)
      Yiming Jiang, Chun-Yi Chen, Tomoyuki Kurioka, Daisuke Yamane, Masanori Mizoguchi, Osamu Kudo, Ryu Maeda, Masato Sone, Tso-Fu Mark Chang.
    • Organizer
      48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Evaluation of Streucture Stability of Au-Based Micro Cantilevers Evidenced by Long-Term Vibration Tests2022

    • Author(s)
      Tomoyuki Kurioka, Koichiro Tachibana, Kyotaro Nitta, Chun-Yi Chen, Tso-Fu Mark Chang, Parthojit Chakraborty, Daisuke Yamane, Hiroyuki Ito, Katsuyuki. Machida, Yoshihiro Miyake, Masato Sone.
    • Organizer
      NEW METHODS OF DAMAGE AND FAILURE ANALYSES OF STRUCTURAL PARTS
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Micro-scale Mechanical Characterustic of Electrodeposited Ni-B Alloys Components Toward Design of MEMS Devices2022

    • Author(s)
      Yiming Jiang, Chun-Yi Chen, Tomoyuki Kurioka, Daisuke Yamane, Masanori Mizoguchi, Osamu Kudo, Ryu Maeda, Masato Sone, Tso-Fu Mark Chang.
    • Organizer
      NEW METHODS OF DAMAGE AND FAILURE ANALYSES OF STRUCTURAL PARTS
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] A Non-Distructive Resoneance Frequency Method to determine Effective young's Modulus of 3-Dimentional Multilayered Ti/Au Micro-cantilevers Toward Highly Sensitive MEMS Accerelometer2022

    • Author(s)
      Masato Sone, Hitomi Watanabe, Kyotaro Nitta, Hideaki Nakajima, Tomoyuki Kurioka, Chun-Yi Chen, Parthojit Chakraborty, Daisuke Yamane, Hiroyuki Ito, Katsuyuki. Machida, Yoshihiro Miyake, Tso-Fu Mark Chang.
    • Organizer
      NEW METHODS OF DAMAGE AND FAILURE ANALYSES OF STRUCTURAL PARTS
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] High Strength and High Corrosion Resistance Ni-TiO2 Composites by Supercritical CO2-Assisted Co-Electrodeposition toward MEMS Components2022

    • Author(s)
      Yu-An Chien, Chun-Yi Chen, Tomoyuki Kurioka, Masato Sone, Tso-Fu Mark Chang.
    • Organizer
      48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES)
    • Related Report
      2022 Annual Research Report
  • [Presentation] Electronic Interactions and Charge Transfer Dynamics of Yolk Shell Nanocrystals for Photocatalysis2022

    • Author(s)
      Jhen-Yang Wu, Ting-Hsuan Lai, Mei-Jing Fang, Jui-Yuan Chen, Ming-Yu Kuo, Yi-Hsuan Chiu, Ping-Yen Hsieh, Chun-Wen Tsao, Huai-En Chang, Yu-Peng Chang, Chien-Yi Wang, Tomoyuki Kurioka, Chun-Yi Chen, Masato Sone, Wen-Wei Wu, Yung-Jung Hsu, Tso-Fu Mark Chang.
    • Organizer
      48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Supercritical Carbon Dioxide Functionalization of Polyethylene Terephthalate (PET) for Flexible Biosensors2022

    • Author(s)
      Po-Wei Cheng, Tomoyuki Kurioka, Chun-Yi Chen, Masato Sone, Tso-Fu Mark Chang.
    • Organizer
      12th International Conference on Supercritical Fluids (Supergreen 2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Characterization of Ni-TiO2 Nanocomposite Coatings Electrodeposited with Supercritical CO2 Emulsified Electrolyte2022

    • Author(s)
      Yu-An Chien, Chun-Yi Chen, Tomoyuki Kurioka, Masato Sone, Tso-Fu Mark Chang.
    • Organizer
      7th International Conference on Multifunctional Hybrid and Nanomaterials
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Micro-compression and micro-hardness of electrodeposited Nickel-Cobalt alloys2022

    • Author(s)
      Yiming Jiang, Chun-Yi Chen, Xun Luo, Daisuke Yamane, Masanori Mizoguchi, Osamu Kudo, Ryu Maeda, Masato Sone, Tso-Fu Mark Chang.
    • Organizer
      3-day International Conference on Materials Science
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Co-Electrodeposition of TiO2 Nanoparticle Reinforced High Strength Ni Film Assisted by Supercritical Carbon Dioxide for Miniaturized Electronics2021

    • Author(s)
      Yu-An Chien , Chun-Yi Chen , Tso-Fu Mark Chang , Masato Sone
    • Organizer
      Micro and Nano Engineering Conference 2021 (MNE2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Micro-Mechanical Characterization of Electrodeposited Ni-Co Alloys toward Design of MEMS Components2021

    • Author(s)
      Yiming Jiang , Chun-Yi Chen , Tso-Fu Mark Chang , Xun Luo , Daisuke Yamane , Masanori Mizoguchi , Osamu Kudo , Ryu Maeda , Masato Sone
    • Organizer
      Micro and Nano Engineering Conference 2021 (MNE2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Mechanical Property of Gold Micro-Cantilevers for Application in Microelectronics and the Sample Geometry Effect2021

    • Author(s)
      Kazuya Fujita , Kosuke Suzuki , Chun-Yi Chen , Tso-Fu Mark Chang , Daisuke Yamane , Hiroyuki Ito , Katsuyuki Machida , Kazuya Masu , Masato Sone
    • Organizer
      Micro and Nano Engineering Conference 2021 (MNE2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of Polypyrrole/Gold Nanoparticle Composite Electrode for Electrochemical Sensor2021

    • Author(s)
      Hiroki Kawakami , Yuki Ito , Yu-An Chien , Wan-Ting Chiu , Parthojit Chakraborty , Chun-Yi Chen , Tso-Fu Mark Chang , Takamichi Nakamoto , Masato Sone
    • Organizer
      Micro and Nano Engineering Conference 2021 (MNE2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Pt/PET Composite Fiber Prepared by Supercritical CO2 Catalyzation for Wearable Device Applications2021

    • Author(s)
      Masaki Mitsumoto , Wan-Ting Chiu , Chun-Yi Chen , Tso-Fu Mark Chang , Arisa Jinno , Hiromichi Kurosu , Yasushi Watanabe , Masato Sone
    • Organizer
      Micro and Nano Engineering Conference 2021 (MNE2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effect of Current Density on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test2021

    • Author(s)
      Taro Omura , Chun-Yi Chen , Tso-Fu Mark Chang , Daisuke Yamane , Hiroyuki Ito , Katsuyuki Machida , Kazuya Masu , Masato Sone
    • Organizer
      Micro and Nano Engineering Conference 2021 (MNE2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Micro-Mechanical Property Evaluation of Gold-Nickel Alloys toward Design of MEMS Component2021

    • Author(s)
      Takumi Akiyama , Chun-Yi Chen , Tso-Fu Mark Chang , Daisuke Yamane , Hiroyuki Ito , Katsuyuki Machida , Kazuya Masu , Masato Sone
    • Organizer
      Micro and Nano Engineering Conference 2021 (MNE2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Supercritical Carbon Dioxide Assisted Metallization of 3D-Printed Polymer Structure as Functional Components in Electronic Devices2021

    • Author(s)
      Po-Wei Cheng , Chun-Yi Chen , Taku Ichibayashi , Tso-Fu Mark Chang , Masato Sone , Suzushi Nishimura
    • Organizer
      TACT2021 International Thin Films Conference
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effect of Current Density on Micro-Mechanical Characteristic of Electrodeposited Gold Evaluated from Cyanide Bath2021

    • Author(s)
      Taro Omura , Chun-Yi Chen , Tso-Fu Mark Chang , Daisuke Yamane , Hiroyuki Ito , Katsuyuki Machida , Kazuya Masu , Masato Sone
    • Organizer
      TACT2021 International Thin Films Conference
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Non-enzymatic Polypyrrole/Nano-Gold Composite Electrode for Glucose Oxidation2021

    • Author(s)
      Hiroki Kawakami , Yuki Ito , Yu-An Chien , Wan-Ting Chiu , Parthojit Chakraborty , Chun-Yi Chen , Tso-Fu Mark Chang , Takamichi Nakamoto , Masato Sone
    • Organizer
      TACT2021 International Thin Films Conference
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Electrodeposition of Nickel-Cobalt Alloy Films and their Micro-Mechanical Property2021

    • Author(s)
      Yiming Jiang , Chun-Yi Chen , Xun Luo , Daisuke Yamane , Masanori Mizoguchi , Osamu Kudo , Ryu Maeda , Masato Sone , Tso-Fu Mark Chang
    • Organizer
      TACT2021 International Thin Films Conference
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Micro-Mechanical Property of Single Crystal Gold for Applications in Microelectronics2021

    • Author(s)
      Kazuya Fujita , Kosuke Suzuki , Chun-Yi Chen , Tso-Fu Mark Chang , Hiroyuki Ito , Katsuyuki Machida , Kazuya Masu , Masato Sone
    • Organizer
      TACT2021 International Thin Films Conference
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Nanoparticle Reinforced High Strength Ni-TiO2 Composite Film Electroplated by Supercritical Carbon Dioxide Assisted Method2021

    • Author(s)
      Yu-An Chien , Chun-Yi Chen , Masato Sone , Tso-Fu Mark Chang
    • Organizer
      TACT2021 International Thin Films Conference
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Alloy Electrodeposition of Gold-Nickel Alloys and the Mechanical Property in Micro-Scale2021

    • Author(s)
      Takumi Akiyama , Chun-Yi Chen , Tso-Fu Mark Chang , Hiroyuki Ito , Katsuyuki Machida , Kazuya Masu , Masato Sone
    • Organizer
      TACT2021 International Thin Films Conference
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Study of Pt/PET Composite Fiber Prepared by Supercritical CO2 Catalyzation2021

    • Author(s)
      Masaki Mitsumoto , Wan-Ting Chiu , Chun-Yi Chen , Tso-Fu Mark Chang , Arisa Jinno , Hiromichi Kurosu , Yasushi Watanabe , Masato Sone
    • Organizer
      TACT2021 International Thin Films Conference
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Book] めっき技術の最新動向2021

    • Author(s)
      曽根正人 , Tso-Fu Mark Chang
    • Total Pages
      282
    • Publisher
      シーエムシー出版
    • ISBN
      9784781315997
    • Related Report
      2021 Annual Research Report
  • [Book] Advances in Microelectronics: Reviews, Vol. 32021

    • Author(s)
      Tso-Fu Mark Chang , Hideaki Nakajima , Chun-Yi Chen , Daisuke Yamane , Toshifumi Konishi , Hiroyuki Ito , Katsuyuki Machida , Kazuya Masu , Hiroshi Toshiyoshi , Masato Sone
    • Total Pages
      534
    • Publisher
      IFSA PUBLISHING, S.L.
    • Related Report
      2021 Annual Research Report

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Published: 2021-04-28   Modified: 2024-12-25  

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