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New Dopants for Creation of Next Generation Functional Silicon Devices

Research Project

Project/Area Number 24246017
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionNational Institute for Materials Science

Principal Investigator

MIKI Kazushi  国立研究開発法人物質・材料研究機構, 高分子材料ユニット, グループリーダー (30354335)

Co-Investigator(Kenkyū-buntansha) FUKATSU Susumu  東京大学, 総合文化研究科, 教授 (60199164)
Project Period (FY) 2012-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥44,850,000 (Direct Cost: ¥34,500,000、Indirect Cost: ¥10,350,000)
Fiscal Year 2014: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
Fiscal Year 2013: ¥27,170,000 (Direct Cost: ¥20,900,000、Indirect Cost: ¥6,270,000)
Fiscal Year 2012: ¥11,700,000 (Direct Cost: ¥9,000,000、Indirect Cost: ¥2,700,000)
Keywordsドーパント / エピタキシャル成長 / ナノ構造 / EXAFS / レーザアニール / シリコン / アニール
Outline of Final Research Achievements

In the Si LSI technology, substitutional structures of the dopant atoms into the silicon crystal as ionized local electronic states have been used to be carrier sources. For development of quantum information processing devices and spintronics devices which become now popular topics, substitutional structures of the heavy metal atoms into the silicon crystal as ionized or not ionized local electronic states should be a need to be spin sources.
By utilizing the specificity of heavy metal nanostructures, the research and development of high concentration of spin source impurities δ doping was carried out. High concentration in the spin source impurities δ -doped was achieved for bismuth and manganese elements. The results of this study, the high concentration impurity δ doping technique of bismuth and manganese, is expected to be seeds for creating a new silicon-based spintronic devices.

Report

(4 results)
  • 2015 Final Research Report ( PDF )
  • 2014 Annual Research Report
  • 2013 Annual Research Report
  • 2012 Annual Research Report
  • Research Products

    (38 results)

All 2016 2015 2014 2013 2012 Other

All Int'l Joint Research (1 results) Journal Article (4 results) (of which Peer Reviewed: 4 results) Presentation (31 results) (of which Int'l Joint Research: 3 results,  Invited: 5 results) Remarks (2 results)

  • [Int'l Joint Research] ユニバーシティ カレッジ ロンドン(英国)

    • Related Report
      2014 Annual Research Report
  • [Journal Article] Mn Silicide Nanowires on the Si(001)-2×1 Surface Having Anisotropic Strain Fields with Bi Nanolines2013

    • Author(s)
      Kazushi Miki, Hongjun Liu and James H. G. Owen
    • Journal Title

      ECS Trans

      Volume: 50(6) Issue: 6 Pages: 17-23

    • DOI

      10.1149/05006.0017ecst

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Degenerate electronic structure of reconstructed MnSi1.7 nanowires on Si(001)2012

    • Author(s)
      H.J. Liu, J.H.G. Owen, K. Miki
    • Journal Title

      Journal of Physics: Condensed Matter

      Volume: 24 Issue: 9 Pages: 095005-095005

    • DOI

      10.1088/0953-8984/24/9/095005

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of highly concentrated Bi donors wire-σ-doped in Si2012

    • Author(s)
      Koichi Murata, P'eter Lajos Neumann, Tamotsu Koyano, Yuhsuke Yasutake, Kohichi Nittoh, Kunihiro Sakamoto, Susumu Fukatsu, and Kazushi Miki.
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51 Issue: 11S Pages: 11PE05-11PE05

    • DOI

      10.1143/jjap.51.11pe05

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Thermoelectric Properties in Transparent-Conductive Cerium-Doped In2O3 Films2012

    • Author(s)
      Natsuki Mori, Jun-ichi Ueno, Yusuke Uesugi, Kazushi Miki
    • Journal Title

      e-Journal of Surface Science and Nanotechnology

      Volume: 10 Pages: 471-475

    • NAID

      130004438830

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Presentation] Fluorescence XAFS investigation on Bi wire-delta-doping into Si crystal2016

    • Author(s)
      Kazushi Miki, Koichi Murata, Kiyofumi Nitta, Tomoya Uruga, and Yasuko Terada
    • Organizer
      Symposium on Surface and Nano Science 2016 (SSNS’16)
    • Place of Presentation
      富良野市
    • Year and Date
      2016-01-15
    • Related Report
      2014 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 222.Bi wire-delta-doping into Si crystal,investigated with wavelength dispersive fuorescence XAFS2015

    • Author(s)
      Kazushi Miki, Koichi Murata, Kiyofumi Nitta, Tomoya Uruga, and Yasuko Terada
    • Organizer
      Atomic Level Characterization symposium 2015 (ALC'15)
    • Place of Presentation
      島根市
    • Year and Date
      2015-11-28
    • Related Report
      2014 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Electronic structure of Si(110)-(16×2) Surface2015

    • Author(s)
      Kazushi Miki, and Martin Setvin
    • Organizer
      1st Asia-Pacific Symposium on Solid Surfaces (APSSS-1)
    • Place of Presentation
      ウラジオストック、ロシア
    • Year and Date
      2015-09-30
    • Related Report
      2014 Annual Research Report
    • Int'l Joint Research
  • [Presentation] IV族半導体へのMnδドーピング : 界面ナノ構造の利用2015

    • Author(s)
      村田 晃一,三木一司,新田 清文, 金澤 孝, 坪松 悟史, 日塔 光一, 坂田 修身, 寺田 靖子,宇留賀 朋哉
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      平塚市
    • Year and Date
      2015-03-13
    • Related Report
      2014 Annual Research Report
  • [Presentation] Bi 原子細線をドーパント源とするSi 結晶中のBi δドーピング法:キャリア輸送特性評価2015

    • Author(s)
      三木 一司,金澤 孝,村田 晃一, 日塔 光一
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      平塚市
    • Year and Date
      2015-03-13
    • Related Report
      2014 Annual Research Report
  • [Presentation] STM Observation on Si(110)-(16×2) Surface2015

    • Author(s)
      Kazushi Miki, and Martin Setvin
    • Organizer
      Symposium on Surface and Nano Science 2015 (SSNS’15)
    • Place of Presentation
      富良野市
    • Year and Date
      2015-01-17
    • Related Report
      2014 Annual Research Report
  • [Presentation] ビスマス原子細線の3Dイメージング:Si(001)表面構造から Si 結晶中ドーパント源としての埋め込み構造まで2014

    • Author(s)
      三木 一司
    • Organizer
      第一回「3D活性サイト科学」公開ワークショップ(主催:新学術領域研究「3D活性サイト科学」、SPring-8ユーザー協同体表面界面研究会、同薄膜ナノ構造研究会、同原子分解能ホログラフィー研究会等)
    • Place of Presentation
      大阪府
    • Year and Date
      2014-11-21
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] ナノスケールの光を使った機能性材料2014

    • Author(s)
      三木 一司
    • Organizer
      防衛大学校機能材料工学科4年生向け課外講演
    • Place of Presentation
      横須賀市
    • Year and Date
      2014-10-21
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 界面ナノ構造を利用したIV族半導体へのMn δドーピング2014

    • Author(s)
      三木一司,村田 晃一,新田 清文, 坪松 悟史, 金澤 孝, 坂田 修身, 寺田 靖子,宇留賀 朋哉
    • Organizer
      応用物理学会2014秋季講演会
    • Place of Presentation
      札幌市
    • Year and Date
      2014-09-20
    • Related Report
      2014 Annual Research Report
  • [Presentation] Bi 原子細線をドーパント源とするSi 結晶中のBiδドーピング法:アニール温度の再考2014

    • Author(s)
      金澤 孝,村田 晃一, 日塔 光一, 三木 一司
    • Organizer
      応用物理学会2014秋季講演会
    • Place of Presentation
      札幌市
    • Year and Date
      2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] Bi 原子細線をドーパント源とするSi 結晶中のBiδドーピング法: EXAFSによるドーピング機構解明2014

    • Author(s)
      村田晃一,新田清文, 宇留賀朋哉, 寺田靖子, 日塔光一, 坂田修身, 三木一司
    • Organizer
      応用物理学会2014秋季講演会
    • Place of Presentation
      札幌市
    • Year and Date
      2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] STMを用いたSrTiO3表面の平坦性と還元条件の評価2014

    • Author(s)
      藤牧拓郎、渡辺達也、三木一司、白木一郎
    • Organizer
      日本物理学会第69回年次大会
    • Place of Presentation
      平塚市
    • Year and Date
      2014-03-28
    • Related Report
      2013 Annual Research Report
  • [Presentation] Si(001)表面上へのMn 鎖及びMn シリサイド細線の形成2014

    • Author(s)
      三木一司
    • Organizer
      第23回シリサイド系半導体研究会
    • Place of Presentation
      東京
    • Year and Date
      2014-03-21
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] EXAFS 法によるSi 結晶中のBi δドーピング層形成過程の研究3:埋め込みBi 原子細線構造2014

    • Author(s)
      村田晃一、新田清文、宇留賀朋哉、寺田靖子、矢代航、日塔光一、坂田修身、三木一司
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      相模原市
    • Year and Date
      2014-03-19
    • Related Report
      2013 Annual Research Report
  • [Presentation] Si 結晶中へのMn δドーピング: キャリア輸送特性評価2014

    • Author(s)
      村田晃一、坪松悟史、金澤孝、古谷野有、日塔光一、三木一司
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      相模原市
    • Year and Date
      2014-03-18
    • Related Report
      2013 Annual Research Report
  • [Presentation] Molecular ordering on one-dimensional Si(110)- and Ge(110)-16×2 surfaces2013

    • Author(s)
      Y. Yamada, K. Miki1, T. Ishizu and M. Sasaki
    • Organizer
      12th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-12)/21th International colloquium on Scanning Probe Microscopy (ICSPM21)
    • Place of Presentation
      つくば市
    • Year and Date
      2013-11-07
    • Related Report
      2013 Annual Research Report
  • [Presentation] EXAFS study on local structures around Bi atoms in Bi wire-delta-doped Si crystal2013

    • Author(s)
      K. Murata, K. Nitta, Y. Terada, T. Uruga, K. Nittoh, O. Sakata, and K. Miki
    • Organizer
      12th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-12)/21th International colloquium on Scanning Probe Microscopy (ICSPM21)
    • Place of Presentation
      つくば市
    • Year and Date
      2013-11-06
    • Related Report
      2013 Annual Research Report
  • [Presentation] EXAFS法によるSi結晶中のMnドーピング層形成過程の研究‐シリサイド化の検出‐2013

    • Author(s)
      三木 一司、村田晃一、新田清文、宇留賀朋哉, 寺田靖子, 日塔光一, 坂田修身
    • Organizer
      応用物理学会2013秋季講演会
    • Place of Presentation
      京都市
    • Year and Date
      2013-09-18
    • Related Report
      2013 Annual Research Report
  • [Presentation] Mn Doping into Si2013

    • Author(s)
      Takashi Kanazawa, Koichi Murata,Satoshi Tsubomatsu and Kazushi Miki
    • Organizer
      The international workshop on Science and Patents (IWP)
    • Place of Presentation
      つくば市
    • Year and Date
      2013-09-06
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Activation of Highly Concentrated Bi Donors in Wire--doped Si by Laser Annealing

    • Author(s)
      K. Murata, Y. Yasutake, K. Nittoh, K. Sakamoto, S. Fukatsu, and K. Miki
    • Organizer
      The 2012 Materials Research Society (MRS) Spring Meeting
    • Place of Presentation
      San Francisco, California, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Bi wire-d-doping on Si (211) for XSTM observation

    • Author(s)
      K. Murata, Y. Yasutake, K. Nittoh, K. Sakamoto, S. Fukatsu, and K. Miki
    • Organizer
      The 17th International Conference on Molecular Beam Epitaxy (MBE2012)
    • Place of Presentation
      Nara
    • Related Report
      2012 Annual Research Report
  • [Presentation] Mn silicide nanowires on the Si(001)-2×1 surface having anisotropic strain fields with Bi nanolines

    • Author(s)
      Kazushi Miki and Hongjun Liu, and James H. G. Owen
    • Organizer
      the 222nd ECS Meeting
    • Place of Presentation
      Honolulu, Hawaii,, USA
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Si(110)2×16表面構造の局所電子構造3:ペンタゴン構造の位置

    • Author(s)
      三木一司,M. Setvín, V. Brázdová, D. R. Bowler,富松宏太、中辻寛、小森文夫
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      松山、愛媛
    • Related Report
      2012 Annual Research Report
  • [Presentation] Si結晶中への多元素重畳δドーピング:多元素ドーパント源の形成

    • Author(s)
      三木一司, J.H.G. Owen
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      松山、愛媛
    • Related Report
      2012 Annual Research Report
  • [Presentation] Si(211) 基板上へのBi ドーピング層成長

    • Author(s)
      村田晃一,安武裕輔, 日塔光一, 坂本邦博, 深津晋, 三木一司
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      松山、愛媛
    • Related Report
      2012 Annual Research Report
  • [Presentation] Si 結晶中のBi & Er 重畳δドーピング層のハイブリッドレーザアニール活性化2

    • Author(s)
      村田晃一,安武裕輔, 日塔光一, 坂本邦博, 深津晋, 三木一司
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      松山、愛媛
    • Related Report
      2012 Annual Research Report
  • [Presentation] EXAFS 法によるSi 結晶中のBiドーピング層形成過程の研究2: 埋め込みBi 原子細線構造中のBi-Si 隣接局所構造

    • Author(s)
      村田晃一, 新田清文, 宇留賀朋哉, 寺田靖子, 矢代航, 日塔光一, 坂田修身, 三木一司
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      松山、愛媛
    • Related Report
      2012 Annual Research Report
  • [Presentation] X線多波回折現象を利用した位相計測とその応用― 放射光照射効果のその場観察

    • Author(s)
      矢代航, 依田芳卓, 三木一司、高橋敏男
    • Organizer
      第32回表面科学学術講演会
    • Place of Presentation
      仙台、宮城
    • Related Report
      2012 Annual Research Report
  • [Presentation] X線多波回折現象を利用した位相計測― 放射光照射効果のその場観察

    • Author(s)
      矢代航, 依田芳卓, 三木一司、高橋敏男
    • Organizer
      第26回放射光学会
    • Place of Presentation
      名古屋、愛知
    • Related Report
      2012 Annual Research Report
  • [Presentation] Bi 原子細線構造を利用したSi 中へのMnドーピング

    • Author(s)
      坪松悟史、村田晃一、古谷野有、日塔光一、三木一司
    • Organizer
      2013年春季 第60回 応用物理学関係連合講演会
    • Place of Presentation
      神奈川
    • Related Report
      2012 Annual Research Report
  • [Presentation] 高濃度G-center導入Siの蛍光の動的挙動

    • Author(s)
      大村史倫、村田晃一、安武裕輔、三木一司、深津晋
    • Organizer
      2013年春季 第60回 応用物理学関係連合講演会
    • Place of Presentation
      神奈川
    • Related Report
      2012 Annual Research Report
  • [Remarks] 国立研究開発法人物質・材料研究機構 半導体ナノ界面グループ ホームページ

    • URL

      http://www.nims.go.jp/nanoarchi_gr/

    • Related Report
      2014 Annual Research Report
  • [Remarks] NIMS界面機能グループ

    • URL

      http://www.nims.go.jp/nanoarchi_gr/

    • Related Report
      2012 Annual Research Report

URL: 

Published: 2013-05-15   Modified: 2019-07-29  

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