Mold making process to reproduce nano-structures without lithography technology
| Project/Area Number |
24246027
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | The University of Tokyo |
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Principal Investigator |
NAKAO Masayuki 東京大学, 工学(系)研究科(研究院), 教授 (90242007)
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| Co-Investigator(Kenkyū-buntansha) |
NAGATO Keisuke 東京大学, 大学院工学系研究科, 講師 (50546231)
TSUCHIYA Kensuke 東京大学, 生産技術研究所, 准教授 (80345173)
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| Project Period (FY) |
2012-04-01 – 2015-03-31
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| Project Status |
Completed (Fiscal Year 2014)
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| Budget Amount *help |
¥46,540,000 (Direct Cost: ¥35,800,000、Indirect Cost: ¥10,740,000)
Fiscal Year 2014: ¥11,830,000 (Direct Cost: ¥9,100,000、Indirect Cost: ¥2,730,000)
Fiscal Year 2013: ¥11,700,000 (Direct Cost: ¥9,000,000、Indirect Cost: ¥2,700,000)
Fiscal Year 2012: ¥23,010,000 (Direct Cost: ¥17,700,000、Indirect Cost: ¥5,310,000)
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| Keywords | マイクロ・ナノデバイス / 機械工作・生産工学 / 結晶成長 / エネルギー効率化 / 燃料電池 |
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| Outline of Final Research Achievements |
This research project develops mold making processes to reproduce nano-structures with several ten nm to several μm in width or height without lithography technology.
Production technologies of nano-structures in the research are: (a)crystallization process of metal nano-wires to make a forest-like surface with needles with several hundred μm diameter of sub-wavelength of visible light, (b)deposition/etching process of the metal nano-wires to transform its shape from a needle to a cone, (c)anodization process with ion-through holes in diameter of sub-wavelength of visible light, (d)etching process to transform its hole's shape from a cylinder to a cone, (e)ball fixing process to make an iceberg-like surface in plating a metal thin film with metal or resin balls.
Molds were prototyped to reproduce the following film/surfaces: (1)DNA fixing film, (2)anti-reflecting film, (3)fuel pole film of SOFC, (4)high heat-flow boiling surface and (5)light extraction film.
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Report
(4 results)
Research Products
(35 results)
