• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Mold making process to reproduce nano-structures without lithography technology

Research Project

Project/Area Number 24246027
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionThe University of Tokyo

Principal Investigator

NAKAO Masayuki  東京大学, 工学(系)研究科(研究院), 教授 (90242007)

Co-Investigator(Kenkyū-buntansha) NAGATO Keisuke  東京大学, 大学院工学系研究科, 講師 (50546231)
TSUCHIYA Kensuke  東京大学, 生産技術研究所, 准教授 (80345173)
Project Period (FY) 2012-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥46,540,000 (Direct Cost: ¥35,800,000、Indirect Cost: ¥10,740,000)
Fiscal Year 2014: ¥11,830,000 (Direct Cost: ¥9,100,000、Indirect Cost: ¥2,730,000)
Fiscal Year 2013: ¥11,700,000 (Direct Cost: ¥9,000,000、Indirect Cost: ¥2,700,000)
Fiscal Year 2012: ¥23,010,000 (Direct Cost: ¥17,700,000、Indirect Cost: ¥5,310,000)
Keywordsマイクロ・ナノデバイス / 機械工作・生産工学 / 結晶成長 / エネルギー効率化 / 燃料電池
Outline of Final Research Achievements

This research project develops mold making processes to reproduce nano-structures with several ten nm to several μm in width or height without lithography technology.
Production technologies of nano-structures in the research are: (a)crystallization process of metal nano-wires to make a forest-like surface with needles with several hundred μm diameter of sub-wavelength of visible light, (b)deposition/etching process of the metal nano-wires to transform its shape from a needle to a cone, (c)anodization process with ion-through holes in diameter of sub-wavelength of visible light, (d)etching process to transform its hole's shape from a cylinder to a cone, (e)ball fixing process to make an iceberg-like surface in plating a metal thin film with metal or resin balls.
Molds were prototyped to reproduce the following film/surfaces: (1)DNA fixing film, (2)anti-reflecting film, (3)fuel pole film of SOFC, (4)high heat-flow boiling surface and (5)light extraction film.

Report

(4 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Annual Research Report
  • 2012 Annual Research Report
  • Research Products

    (35 results)

All 2015 2014 2013 2012

All Journal Article (5 results) (of which Peer Reviewed: 5 results,  Open Access: 1 results,  Acknowledgement Compliant: 4 results) Presentation (30 results)

  • [Journal Article] Fabrication of through-hole membrane with anodic-alumina nanohole array2015

    • Author(s)
      L. Wang, K. Nagato, S. Iwasaki, T. Hamaguchi, M. Nakao
    • Journal Title

      Microelectron. Eng.

      Volume: 141 Pages: 62-67

    • DOI

      10.1016/j.mee.2015.01.037

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] High-Speed Replication of Light-Extraction Structure with Thermal roller Nanoimprinting2015

    • Author(s)
      K. Takahashi, K. Nagato, T. Hamaguchi, M. Nakao
    • Journal Title

      Microelectron. Eng.

      Volume: 印刷中 Pages: 285-288

    • DOI

      10.1016/j.mee.2015.03.069

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Injection compression molding of replica molds for nanoimprint lithography2014

    • Author(s)
      K. Nagato
    • Journal Title

      Polymers

      Volume: 6 Issue: 3 Pages: 604-612

    • DOI

      10.3390/polym6030604

    • Related Report
      2014 Annual Research Report 2013 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Laser-assisted replication of large-area nanostructures2014

    • Author(s)
      K. Nagato, K. Takahashi, T. Sato, J. Choi, T. Hamaguchi, M. Nakao
    • Journal Title

      J. Mater. Proc. Technol.

      Volume: 214 Issue: 11 Pages: 2444-2449

    • DOI

      10.1016/j.jmatprotec.2014.05.025

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Morphology control of nickel oxide nanowires2012

    • Author(s)
      K. Sekiya, K. Nagato, T. Hamaguchi, M. Nakao
    • Journal Title

      Microelectronic Engineering

      Volume: 98 Pages: 532-535

    • DOI

      10.1016/j.mee.2012.07.049

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Presentation] ロール熱ナノインプリントにおける成形状態のリアルタイム測定―第2報:回折格子形状の成形2015

    • Author(s)
      日紫喜賢太,長藤圭介,高橋賢,濱口哲也,中尾政之
    • Organizer
      精密工学会春季大会
    • Place of Presentation
      東洋大学,東京都
    • Year and Date
      2015-03-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] アルミニウム接着表面のアンカー効果を向上する陽極酸化構造2015

    • Author(s)
      山口拓夢,長藤圭介,三村達矢,長谷川真一,中尾政之,草加浩平
    • Organizer
      精密工学会春季大会
    • Place of Presentation
      東洋大学,東京都
    • Year and Date
      2015-03-17
    • Related Report
      2014 Annual Research Report
  • [Presentation] Laser-Assisted Replication of Large-Area Nanostructures and Antireflection Structure2014

    • Author(s)
      K. Nagato, K. Takahashi, M. Nakao
    • Organizer
      Asian Workshop on Polymer Processing (AWPP)
    • Place of Presentation
      Kenting, Taiwan
    • Year and Date
      2014-11-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] レーザアシストロールナノインプリントを用いた光取出しフィルムの製造2014

    • Author(s)
      長藤圭介,高橋賢,中尾政之
    • Organizer
      日本機械学会第10回生産加工・工作機械部門講演会
    • Place of Presentation
      徳島大学,徳島県
    • Year and Date
      2014-11-15
    • Related Report
      2014 Annual Research Report
  • [Presentation] Thermal Roller Nanoimprinting -Multilayered Structures, Laser-Assisted Replication-2014

    • Author(s)
      K. Nagato, K. Takahashi, M. Nakao
    • Organizer
      14th International Conference on Nanoimprint and Nanoprint Technology (NNT)
    • Place of Presentation
      Kyoto, Japan (ANA Crown Praza Kyoto)
    • Year and Date
      2014-10-23
    • Related Report
      2014 Annual Research Report
  • [Presentation] High-Speed Replication of Light-Extraction Structure with Thermal Roller Nanoimprinting2014

    • Author(s)
      K. Takahashi, K. Nagato, T. Hamaguchi, M. Nakao
    • Organizer
      40th Micro and Nano Engineering (MNE)
    • Place of Presentation
      Lausanne, Switzerland
    • Year and Date
      2014-09-23
    • Related Report
      2014 Annual Research Report
  • [Presentation] レーザアシストロールナノインプリントを用いた反射防止構造の製作2014

    • Author(s)
      長藤圭介,高橋賢,中尾政之
    • Organizer
      精密工学会秋季大会学術講演会
    • Place of Presentation
      鳥取大学,鳥取県
    • Year and Date
      2014-09-16
    • Related Report
      2014 Annual Research Report
  • [Presentation] Adhesively-Bonded Joint for Aluminum Pipe Frame Structures and Mechanical Properties2014

    • Author(s)
      K. Shintani, ○K. Nagato, R. Fukui, M. Nakao, K. Kusaka
    • Organizer
      5th World Congress on Adhesion and Related Phenomena (WCARP-V)
    • Place of Presentation
      Nara, Japan (Nara Prefectural New Public Hall)
    • Year and Date
      2014-09-08
    • Related Report
      2014 Annual Research Report
  • [Presentation] Real-Time Observation of Paste during Mico-Via Filling in Screen Printing2014

    • Author(s)
      K. Nagato, K. Mitamura, S. Shinagawa, and M. Nakao
    • Organizer
      The 5th International Conference on Nanomanufacturing (nanoMan2014)
    • Place of Presentation
      Bremen, Germany
    • Year and Date
      2014-07-08
    • Related Report
      2014 Annual Research Report
  • [Presentation] High-Speed and Low-Energy-Consumption Replication of Nanostructures with Laser-Assisted Roller Nanoimprinting2014

    • Author(s)
      K. Takahashi, K Nagato, J. Wang, T. Hamaguchi, and M. Nakao
    • Organizer
      58th international conference on electron, ion, and photon beam technology and nanofabrication (EIPBN)
    • Place of Presentation
      Washington DC, USA
    • Year and Date
      2014-05-30
    • Related Report
      2014 Annual Research Report
  • [Presentation] Morphology Control of Anodic Porous Alumina Using Nanoimprinting2014

    • Author(s)
      S. Iwasaki, K. Nagato, L. Wang, Y. Li, J.-J. Delaunay, and M. Nakao
    • Organizer
      58th international conference on electron, ion, and photon beam technology and nanofabrication (EIPBN)
    • Place of Presentation
      Washington DC, USA
    • Year and Date
      2014-05-28
    • Related Report
      2014 Annual Research Report
  • [Presentation] High-Heat-Transfer Boiling Surface with Micropattern Replicated by Nanoimprinting2014

    • Author(s)
      S. Miyazaki, K. Nagato, Y. Watanabe, K. Takahashi, N. Shikazono, and M. Nakao
    • Organizer
      58th international conference on electron, ion, and photon beam technology and nanofabrication (EIPBN)
    • Place of Presentation
      Washington DC, USA
    • Year and Date
      2014-05-28
    • Related Report
      2014 Annual Research Report
  • [Presentation] スクリーン印刷におけるペーストのマイクロ孔埋め現象の光学顕微鏡観察2014

    • Author(s)
      三田村圭,長藤圭介,品川俊太,濱口哲也,中尾政之
    • Organizer
      2014年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京大学,東京
    • Related Report
      2013 Annual Research Report
  • [Presentation] 熱ナノインプリントにおける断熱ロールを用いた熱流束一方向制御2014

    • Author(s)
      庄原理子,長藤圭介,高橋賢,濱口哲也,中尾政之
    • Organizer
      2014年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京大学,東京
    • Related Report
      2013 Annual Research Report
  • [Presentation] レーザ表面加熱を用いた微細構造のロール熱ナノインプリント技術の開発~第2報:パワー密度が転写性に与える影響2014

    • Author(s)
      高橋賢,長藤圭介,濱口哲也,中尾政之
    • Organizer
      2014年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京大学,東京
    • Related Report
      2013 Annual Research Report
  • [Presentation] ナノインプリントを用いた沸騰伝熱面の熱流束向上2014

    • Author(s)
      宮崎俊平,長藤圭介,渡辺康章,高橋賢,鹿園直毅,中尾政之
    • Organizer
      2014年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京大学,東京
    • Related Report
      2013 Annual Research Report
  • [Presentation] Laser-assisted roller imprinting of nanostructures with real-time monitoring of replication degree2013

    • Author(s)
      Ken Takahashi, Keisuke Nagato, Toshimi Sato, Daisuke Suehiro, Tetsuya Hamaguchi, Masayuki Nakao
    • Organizer
      American Society for Precision Engineering (ASPE) Annual Meeting
    • Place of Presentation
      St. Paul, Minnesota, USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] Continuous and fast manufacturing technique of ion-conducting ceramic compacts with oriented anisotropic particle2013

    • Author(s)
      Takuma Yamauchi, Shota Ikeshima, Keisuke Nagato, Tetsuya Hamaguchi, Masayuki Nakao
    • Organizer
      American Society for Precision Engineering (ASPE) Annual Meeting
    • Place of Presentation
      St. Paul, Minnesota, USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] Orientation-controlled microfabrication of anode of solid oxide fuel cells2013

    • Author(s)
      Shunta Shinagawa, Keisuke Nagato, Naoki Shikazono, Tetsuya Hamaguchi, Masayuki Nakao
    • Organizer
      American Society for Precision Engineering (ASPE) Annual Meeting
    • Place of Presentation
      St. Paul, Minnesota, USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] レーザ表面加熱を用いた微細構造のロール熱ナノインプリント技術の開発2013

    • Author(s)
      高橋賢,長藤圭介,矢鳴里奈,佐藤淑美,濱口哲也,中尾政之
    • Organizer
      精密工学会2013年度秋季大会
    • Place of Presentation
      関西大学,大阪
    • Related Report
      2013 Annual Research Report
  • [Presentation] ロール熱ナノインプリントにおける成形状態のリアルタイム測定2013

    • Author(s)
      高橋賢,長藤圭介,末弘大介,濱口哲也,中尾政之
    • Organizer
      精密工学会2013年度春季大会
    • Place of Presentation
      東京工業大学,東京
    • Related Report
      2012 Annual Research Report
  • [Presentation] Roller Replication of Nano/Microstructures of Polymers, Glasses, Metals, and Ceramics2012

    • Author(s)
      Keisuke Nagato, Daisuke Suehiro, Toshimi Sato, Shota Ikeshima, Yasuaki Watanabe, Masayuki Nakao
    • Organizer
      The 3rd International Conference on Nanomanufacturing (nanoMan2012)
    • Place of Presentation
      理化学研究所,埼玉
    • Related Report
      2012 Annual Research Report
  • [Presentation] Improvement of heat transfer coefficient of boiling surface on nanostructured metal using nanoimprinting2012

    • Author(s)
      Yasuaki Watanabe, Keisuke Nagato, Naoki Shikazono, Tetsuya Hamaguchi, Masayuki Nakao
    • Organizer
      26th American Society for Precision Engineering (ASPE) Annual Meeting
    • Place of Presentation
      San Diego, CA, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Orienattion control of anisotropic particle by shear force2012

    • Author(s)
      Shota Ikeshima, Keisuke Nagato, Tetsuya Hamaguchi, Masayuki Nakao
    • Organizer
      26th American Society for Precision Engineering (ASPE) Annual Meeting
    • Place of Presentation
      San Diego, CA, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Micromixer of multi-material slurry with rotation-split-combination cycle for ceramic components2012

    • Author(s)
      Takuma Yamauchi, Keisuke Nagato, Shota Ikeshima, Tetsuya Hamaguchi, Masayuki Nakao
    • Organizer
      26th American Society for Precision Engineering (ASPE) Annual Meeting
    • Place of Presentation
      San Diego, CA, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Enhancement of power efficiency of solid oxide fuel cells by aligninh microstructure path of ion/electron/gas in anode2012

    • Author(s)
      Shunta Shinagawa, Keisuke Nagato, Naoki Shikazono, Tetsuya Hamaguchi, Masayuki Nakao
    • Organizer
      26th American Society for Precision Engineering (ASPE) Annual Meeting
    • Place of Presentation
      San Diego, CA, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] High-speed shearing of multilayered light-waveguide2012

    • Author(s)
      Keisuke Nagato, Ryota Nakabayashi, Tetsuya Hamaguchi, Masayuki Nakao
    • Organizer
      38th International Conference on Micro and Nano Engineering (MNE)
    • Place of Presentation
      Toulouse, FRANCE
    • Related Report
      2012 Annual Research Report
  • [Presentation] Antireflection structure fabricated by changing Fe2O3 nanowires to Fe3O4 nanocones2012

    • Author(s)
      Keisuke Nagato, Ryunosuke Fujisawa, Daisuke Suehiro, M. Kikuta, Tetsuya Hamaguchi, Masayuki Nakao
    • Organizer
      38th International Conference on Micro and Nano Engineering (MNE)
    • Place of Presentation
      Toulouse, FRANCE
    • Related Report
      2012 Annual Research Report
  • [Presentation] SOFC燃料極内におけるNiとYSZの配列制御2012

    • Author(s)
      品川俊太,長藤圭介,鹿園直毅,関谷要,尺田将喜,濱口哲也,中尾政之
    • Organizer
      日本機械学会2012年度年次大会
    • Place of Presentation
      金沢大学,石川
    • Related Report
      2012 Annual Research Report
  • [Presentation] レーザアシスト成形によるナノ・マイクロ構造の高速転写2012

    • Author(s)
      長藤圭介,佐藤淑美,濱口哲也,中尾政之
    • Organizer
      第23回プラスチック成形加工学会年次大会
    • Place of Presentation
      タワーホール船堀,東京
    • Related Report
      2012 Annual Research Report

URL: 

Published: 2013-05-15   Modified: 2019-07-29  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi