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Laser micro-machining using photonic nanojets controlled by in-situ measurement

Research Project

Project/Area Number 24246028
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionOsaka University

Principal Investigator

Takaya Yasuhiro  大阪大学, 工学(系)研究科(研究院), 教授 (70243178)

Co-Investigator(Kenkyū-buntansha) Hayashi Terutake  大阪大学, 大学院工学研究科, 准教授 (00334011)
Michihata Masaki  大阪大学, 大学院工学研究科, 助教 (70588855)
Mzutani Yasuhiro  大阪大学, 大学院工学研究科, 准教授 (40374152)
Project Period (FY) 2012-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥47,190,000 (Direct Cost: ¥36,300,000、Indirect Cost: ¥10,890,000)
Fiscal Year 2015: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
Fiscal Year 2014: ¥7,540,000 (Direct Cost: ¥5,800,000、Indirect Cost: ¥1,740,000)
Fiscal Year 2013: ¥11,310,000 (Direct Cost: ¥8,700,000、Indirect Cost: ¥2,610,000)
Fiscal Year 2012: ¥24,960,000 (Direct Cost: ¥19,200,000、Indirect Cost: ¥5,760,000)
Keywordsフォトニック・ナノジェット / 超高アスペクト比微細加工 / 微粒子レンズ / 光放射圧 / フェムト秒パルスレーザー / 非熱的アブレーション加工 / 定在場スケール / 加工量計測
Outline of Final Research Achievements

A novel machining method using the photonic nanojet (PNJ) is proposed to fabricate a three dimensional mico-shape with nanometer scale. The femtosecond pulse PNJ machining system was developed using the tunable femtosecond Ti:Sapphire laser. The laser machining of the Si wafer with the material removal of sub-micrometer scale was achieved by employing the PNJ position control method using the microsphere stably attached to a micropipette. The chromatic confocal system is introduced to measure the position of the microsphere accurately. Using this technique, the interpolated PNJ standing wave scale enables to measure displacement with an accuracy of dozens of nananometers for the bases of in-process measurement. A novel scanning probe microscopy for imaging surface topography using the optically trapped microsphere is proposed. It was confirmed that the proposed method could resolve the surface topography with a sub-micron resolution by measuring the gratings with 1800 GPM.

Report

(5 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Annual Research Report
  • 2013 Annual Research Report
  • 2012 Annual Research Report
  • Research Products

    (24 results)

All 2016 2015 2014 2013 2012 Other

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (22 results) (of which Int'l Joint Research: 2 results,  Invited: 2 results)

  • [Journal Article] Wide-range Axial Position Measurement for Jumping Behavior of Optically Trapped Microsphere near Surface using Chromatic Confocal Sensor2015

    • Author(s)
      Shin-ichi Ueda, Masaki Michihata, Terutake Hayashi and Yasuhiro Takaya
    • Journal Title

      Int. J. of Optmechatronics

      Volume: 9 Issue: 2 Pages: 131-140

    • DOI

      10.1080/15599612.2015.1034901

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Dimensional measurement of microform with high aspect ratio using an opticaly controlled particle with standing wave scale sensing2012

    • Author(s)
      Yasuhiro Takaya, Michihata, Terutake Hayashi, Taisuke Washitani
    • Journal Title

      Annals of the CIRP

      Volume: Vol.61, Issue 1 Pages: 479-482

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Presentation] フォトニックナノジェットを利用した微細加工に関する研究 (第2報) ―ビームの位置制御による加工特性の解明―2016

    • Author(s)
      上野原 努,高谷裕浩,水谷康弘
    • Organizer
      2016年度精密工学会学術講演会春季大会
    • Place of Presentation
      東京理科大学 野田キャンパス(千葉県・野田市)
    • Year and Date
      2016-03-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] 光放射圧プローブを用いた表面微細形状の評価技術に関する研究(第2報) ―レーザトラッピングされたマイクロ球によるイメージング―2016

    • Author(s)
      金鐘剛,道畑正岐,高谷裕浩,水谷康弘
    • Organizer
      2016年度精密工学会学術講演会春季大会
    • Place of Presentation
      東京理科大学 野田キャンパス(千葉県・野田市)
    • Year and Date
      2016-03-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] 光放射圧プローブを用いた表面微細形状の評価技術に関する研究(第3報) ―レーザ捕捉微小球レンズの試料面近傍における位置制御―2016

    • Author(s)
      山口悠希,道畑正岐,水谷康弘,高谷裕浩
    • Organizer
      2016年度精密工学会学術講演会春季大会
    • Place of Presentation
      東京理科大学 野田キャンパス(千葉県・野田市)
    • Year and Date
      2016-03-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] フォトニックナノジェットを利用した微細加工に関する研究(第1報) ~ビームの位置制御技術の検討2015

    • Author(s)
      上野原努,高谷裕浩,水谷康弘
    • Organizer
      2015年度精密工学会学術講演会秋季大会
    • Place of Presentation
      東北大学(宮城県・仙台市)
    • Year and Date
      2015-09-04
    • Related Report
      2015 Annual Research Report
  • [Presentation] Optically trapped microprobe for nano-profile measurement based on interpolation method of standing wave scale using chromatic system2015

    • Author(s)
      Yasuhiro Takaya, Masaki Michihata, Shinichi Ueda
    • Organizer
      XXII MEKO World Congress
    • Place of Presentation
      Prague (Czech Republic)
    • Year and Date
      2015-08-30
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Experimental study on measurement the surface topography by laser trapping probe2015

    • Author(s)
      Jonggang Kim, Masaki Michihata, Yasuhiro Takaya
    • Organizer
      Asian Society for Precision Engineering and Nanotechnology
    • Place of Presentation
      Harbin (China)
    • Year and Date
      2015-08-15
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 光放射圧プローブによる表面微細形状計測に関する研究2015

    • Author(s)
      金 鐘剛,道畑正岐,高谷裕浩
    • Organizer
      精密工学会2015年度関西地方定期学術講演会
    • Place of Presentation
      京都工芸繊維大学(京都府・京都市)
    • Year and Date
      2015-06-23
    • Related Report
      2015 Annual Research Report
  • [Presentation] 表面テクスチャ観察に用いる光放射圧制御微小球レンズの運動解析2015

    • Author(s)
      山口悠希,道畑正岐,高谷裕浩
    • Organizer
      精密工学会2015年度関西地方定期学術講演会
    • Place of Presentation
      京都工芸繊維大学(京都府・京都市)
    • Year and Date
      2015-06-23
    • Related Report
      2015 Annual Research Report
  • [Presentation] 光放射圧プローブによる定在場スケールを用いた三次元形状 のスキャニング測定 (第5報) ―定在場スケール内挿によるスキャニング測定―2015

    • Author(s)
      上田真一,高谷裕浩,道畑正岐
    • Organizer
      2015年度精密工学会学術講演会春季大会
    • Place of Presentation
      東洋大学 (東京都)
    • Year and Date
      2015-03-17
    • Related Report
      2014 Annual Research Report
  • [Presentation] 表面テクスチャ観察に用いる微小球レンズの光放射圧運動制御に関する研究2015

    • Author(s)
      山口悠希,高谷裕浩,道畑正岐
    • Organizer
      2014年度日本機械学会関西学生会卒業研究発表講演会
    • Place of Presentation
      京都大学 (京都市)
    • Year and Date
      2015-03-14
    • Related Report
      2014 Annual Research Report
  • [Presentation] Measurement of axial position of a microsphere using chromatic confocal system for probe system based on the laser trapping with the standing wave scale2014

    • Author(s)
      Shin-ichi Ueda, Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya
    • Organizer
      International Symposium on Optomechatronic Technologies 2014
    • Place of Presentation
      University of Washington (Seattle, USA)
    • Year and Date
      2014-11-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] 光放射圧プローブによる定在場スケールを用いた三次元形状のスキャニング測定(第 4 報) ~マイクロ球光軸方向位置の共焦点計測~2014

    • Author(s)
      上野原努,道畑正岐,高谷裕浩,林 照剛
    • Organizer
      2014年度精密工学会学術講演会秋季大会
    • Place of Presentation
      鳥取大学 (鳥取市)
    • Year and Date
      2014-09-16
    • Related Report
      2014 Annual Research Report
  • [Presentation] フォトニックナノジェットを利用した表面微細加工に関する研究2014

    • Author(s)
      上野原努,道畑正岐,高谷裕浩,林 照剛
    • Organizer
      2014年度砥粒加工学会学術講演会 (ABTEC2014)
    • Place of Presentation
      岩手大学(岩手市)
    • Year and Date
      2014-09-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] 光放射圧プローブによる定在場スケールを用いた三次元形状のスキャニング測定(第3報)~スケールの内挿誤差の検討~2013

    • Author(s)
      上田真一,道畑正岐,林照剛,高谷裕浩
    • Organizer
      2013年度精密工学会秋季大会学術講演会
    • Place of Presentation
      関西大学 (吹田市)
    • Related Report
      2013 Annual Research Report
  • [Presentation] 光放射圧プローブによる定在場スケールを用いた三次元形状のスキャニング測定(第2報)―定在場中でのプローブ球の挙動解析―2013

    • Author(s)
      鷲谷泰佑,道畑正岐,林照剛,高谷裕浩
    • Organizer
      2013年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京工業大学(東京)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 表面微細構造を用いた光放射圧プローブスタイラスの捕捉(第2報)―基板材料と表面離脱性の関係―2013

    • Author(s)
      吉兼匡昭,道畑正岐,林照剛,高谷裕浩
    • Organizer
      2013年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京工業大学(東京)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Micro-probing system for coordinate metrology using a particle controlled by optical radiation pressure based on standing wave scale sensing method2013

    • Author(s)
      Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi
    • Organizer
      International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN) 2013
    • Place of Presentation
      Singapore
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Scanning measurement of step height and freeform surface by using optically trapped microsphere2012

    • Author(s)
      Masaki Michihata, Yasuhiro Takaya, Taisuke Washitani, Terutake Hayashi
    • Organizer
      The 12th euspen International Conference
    • Place of Presentation
      Stockholm (Sweden)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Mode selective probing method of micro trench structure using optically trapped probe2012

    • Author(s)
      Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi and Taisuke Washitani
    • Organizer
      ISOT’12 (International Symposium on Optomechatronic Technologies)
    • Place of Presentation
      Paris (France)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] New technique of single-beam gradient-force laser trapping in air condition2012

    • Author(s)
      Masaki MICHIHATA, Tadaaki YOSHIKANE, Terutake HAYASHI and Yasuhiro TAKAYA
    • Organizer
      ISOT’12 (International Symposium on Optomechatronic Technologies)
    • Place of Presentation
      Paris (France)
    • Related Report
      2012 Annual Research Report
  • [Presentation] フォトニック・ナノジェットの生成に関する研究 ―ベッセルビーム照明条件の検討―

    • Author(s)
      大島玄喜,高谷裕浩,林照剛,道畑正岐
    • Organizer
      2013年度精密工学会関西地方定期学術講演会
    • Place of Presentation
      大阪工業大学(大阪市)
    • Related Report
      2013 Annual Research Report
  • [Presentation] フォトニック・ナノジェットを利用した微細加工に関する基礎研究

    • Author(s)
      上野原 努,高谷裕浩,林照剛,道畑正岐
    • Organizer
      日本機械学会関西支部学生員卒業研究発表講演会
    • Place of Presentation
      大阪府立大学 (堺市)
    • Related Report
      2013 Annual Research Report

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Published: 2013-05-15   Modified: 2019-07-29  

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