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Fast crystallization temperature of phase change materials in nano-second range and its application of multi-levels recording

Research Project

Project/Area Number 24360003
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionGunma University

Principal Investigator

HOSAKA Sumio  群馬大学, 大学院理工学府, 教授 (10334129)

Co-Investigator(Kenkyū-buntansha) KUWABARA Masashi  国立研究開発法人産業技術総合研究所, 電子光技術研究部門・メゾ構造制御グループ, 研究員 (60356954)
Project Period (FY) 2012-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥18,590,000 (Direct Cost: ¥14,300,000、Indirect Cost: ¥4,290,000)
Fiscal Year 2014: ¥7,020,000 (Direct Cost: ¥5,400,000、Indirect Cost: ¥1,620,000)
Fiscal Year 2013: ¥7,410,000 (Direct Cost: ¥5,700,000、Indirect Cost: ¥1,710,000)
Fiscal Year 2012: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Keywords相変化メモリ / 結晶化 / 結晶化温度 / 階段パルス / 結晶化温度時間特性 / 電流加熱シミュレーション / 多値記録 / 相変化 / 活性エネルギ / 温度抵抗特性 / 温度シミュレーション / ナノ秒領域 / 高速度結晶化
Outline of Final Research Achievements

Nano-second dynamic crystallization temperature of phase change material, Ge2Sb2Te5 and GeTe were investigated using experiments with step-wise pulse and FEM simulations. After melting, crystallization of the materials were measured with resistance to obtain the crystallization yields from the change. The crystallization temperatures were estimated by associating these data. While the pulse width of 300ns was required for complete crystallization of Ge2Sb2Te5, 40 ns was for the complete crystallization of GeTe. Furthermore, while the crystallization temperature of Ge2Sb2Te5 of about 320 C was estimated at 100ns-pulse width, the temperature of GeTe of about 180 C was estimated at 40 ns. The temperatures increased as the pulse widths were short. It is clear that GeTe has fast mobile atoms from amorphous to crystal state compared with Ge2Sb2Te5 We can estimate crystallization temperature in a range of nano second using this method.

Report

(4 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Annual Research Report
  • 2012 Annual Research Report
  • Research Products

    (45 results)

All 2014 2013 2012 Other

All Journal Article (21 results) (of which Peer Reviewed: 21 results,  Open Access: 1 results,  Acknowledgement Compliant: 4 results) Presentation (24 results)

  • [Journal Article] Effect of a separate heater structure for crystallisation to enable multilevel storage phase-change memory2014

    • Author(s)
      R. I. Alip, Z. Mohamad, Y. Yin, and S. Hosaka
    • Journal Title

      Int. J. of Nanotechnology

      Volume: 11 Issue: 5/6/7/8 Pages: 389-395

    • DOI

      10.1504/ijnt.2014.060556

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Recrystallization process controlled by staircase pulse in phase change memory2014

    • Author(s)
      Y. Yin, R. Kobayashi, S. Hosaka
    • Journal Title

      Microelectron. Eng,

      Volume: 113 Pages: 61-65

    • DOI

      10.1016/j.mee.2013.07.009

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Controlled crystallization process of phase-change memory device by a separate heater structure2014

    • Author(s)
      R. Alip, Z. Mohamad, Y. Yin, and S. Hosaka
    • Journal Title

      Key Engineering Materials

      Volume: 596 Pages: 107-110

    • DOI

      10.4028/www.scientific.net/kem.596.107

    • Related Report
      2014 Annual Research Report 2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Ultra-multilevel-storage phase‐change memory2014

    • Author(s)
      Y. Yin, S. Hosaka
    • Journal Title

      Advanced Materials Research

      Volume: 936 Pages: 599-602

    • DOI

      10.4028/www.scientific.net/amr.936.599

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Electron beam lithography for fabrication of nano phase-change memory2014

    • Author(s)
      Y. Yin, T. Itagawa, and S. Hosaka
    • Journal Title

      Applied Mechanics and Materials

      Volume: 481 Pages: 30-35

    • DOI

      10.4028/www.scientific.net/amm.481.30

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] TiSiN films by reactive RF magnetron co-sputtering for ultra-low-current phase-change memory2014

    • Author(s)
      Y. Yin, and S. Hosaka
    • Journal Title

      Applied Mechanics and Materials

      Volume: 392 Pages: 702-706

    • DOI

      10.4028/www.scientific.net/amm.392.702

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Electron beam lithography for fabrication of nano phase-change memory, Applied Mechanics and Materials2014

    • Author(s)
      Y. Yin, T. Itagawa, and S. Hosaka
    • Journal Title

      Applied Mechanics and Materials

      Volume: 481 Pages: 30-35

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] TiSiN films by reactive RF magnetron co-sputtering for ultra-low-current phase-change memory, Applied Mechanics and Materials2014

    • Author(s)
      Y. Yin, and S. Hosaka
    • Journal Title

      Applied Mechanics and Materials

      Volume: 392 Pages: 702-706

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Recrystallization process controlled by staircase pulse in phase change memory2014

    • Author(s)
      You Yin, Ryota Kobayashi, Sumio Hosaka
    • Journal Title

      Microelectronics Engineering

      Volume: 113 Pages: 61-65

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Current density enhancement nano-contact phase-change memory for lowwriting current2013

    • Author(s)
      You Yin, Sumio Hosaka, Woon Ik Park, Yeon Sik Jung, Keon Jae Lee, Byoung Kuk You, Yang Liu, and Qi Yu
    • Journal Title

      Appl. Phys. Lett.

      Volume: 103

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Emulating the paired-pulse facilitation of a biological synapse with a NiOx-based memristor2013

    • Author(s)
      S. G. Hu, Y. Liu, T. P. Chen, Z. Liu, Q. Yu, L. J. Deng, Y. Yin, and S. Hosaka
    • Journal Title

      Appl. Phys. Lett.

      Volume: 102 Pages: 1835101-4

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Spectroscopic ellipsometry measurements for liquid and solid InSb around its melting point2013

    • Author(s)
      Masashi Kuwahara, Rie Endo, Kouichi Tsutsumi, Fukuyoshi Morikasa, Michio Suzuki, Masahiro Susa, Tomoyoshi Endo, Toshiyasu Tadokoro, Sumio Hosaka
    • Journal Title

      APEX

      Volume: 6 Pages: 0825011-4

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Self-assembled incorporation of modulated block copolymer nanostructures in phase-change memory for switching power reduction2013

    • Author(s)
      W. I. Park, B. K. You, B. H. Mun, H. K. Seo, J. Y. Lee, S. Hosaka, Y. Yin, C. Ross, K. J. Lee, Y. S. Jung
    • Journal Title

      ACS NANO

      Volume: 7 Pages: 2651-2658

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Multi-level storage in lateral phase-change memory: from 3 to 16 resistance levels2013

    • Author(s)
      Y. Yin, R. I. Alip, Y. Zhang, R. Kobayashi, and S. Hosaka
    • Journal Title

      Key Engineering Materials

      Volume: 534 Pages: 131-135

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A novel phase-change memory with a separate heater characterized by constant resistance for multilevel storage2013

    • Author(s)
      R. I. Alip, R. Kobayashi, Y. Zhang, Z. Mohamad, Y. Yin, and S. Hosaka
    • Journal Title

      Key Engineering Materials

      Volume: 534 Pages: 136-140

    • Related Report
      2013 Annual Research Report 2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Multi-level storage in lateral phase-change memory : from 3 to 16 resistance levels2013

    • Author(s)
      Y. Yin, R. I. Alip, Y. Zhang, R. Kobayashi, and S. Hosaka
    • Journal Title

      Key Engineering Materials

      Volume: 534 Pages: 131-135

    • DOI

      10.4028/www.scientific.net/kem.534.131

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Self-assembled incorporation of modulated block copolymer nanostructures in phase-change memory for switching power reduction2013

    • Author(s)
      W. I. Park, B. K. You, B. H. Mun, H. K. Seo, J. Y. Lee, S. Hosaka, Y. Yin, C. Ross, K. J. Lee, Y. S. Jung
    • Journal Title

      ACS Nano

      Volume: 7 Issue: 3 Pages: 2651-2658

    • DOI

      10.1021/nn4000176

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Controllable crystallization in phase-change memory for low-power multilevel storage2012

    • Author(s)
      Y. Yin, and S. Hosaka
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 51 Issue: 6R Pages: 0641011-4

    • DOI

      10.1143/jjap.51.064101

    • NAID

      40019317143

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Low-reset current ring confined-chalcogenide phase-change memory2012

    • Author(s)
      Y. Yin and S. Hosaka
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 51 Issue: 10R Pages: 1042021-5

    • DOI

      10.1143/jjap.51.104202

    • NAID

      40019455840

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Material engineering for low power consumption and multi-level storage in lateral phase-change memory2012

    • Author(s)
      Y. Yin, R. I. Alip, Y. Zhang, and S. Hosaka
    • Journal Title

      Advanced Materials Research

      Volume: 490-495 Pages: 3286-3290

    • DOI

      10.4028/www.scientific.net/amr.490-495.3286

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Controlled promotion of crystallization for application to multilevel phase-change memory2012

    • Author(s)
      Y. Yin, and S. Hosaka
    • Journal Title

      Appl. Phys. Lett.

      Volume: 100 Issue: 25 Pages: 2535031-4

    • DOI

      10.1063/1.4730439

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Presentation] Ge1Sb2Te4-based N-doped Chalcogenide for Application to Multi-Level-Storage Phase-Change Memory2014

    • Author(s)
      Y. Yin, and S. Hosaka
    • Organizer
      1st International Symposium of Gunma University Medical Innovation (GUMI) and 6th International Conference on Advanced Micro-Device Engineering (AMDE)
    • Place of Presentation
      Kiryu City Performing Arts Center, Kiryu
    • Year and Date
      2014-12-05
    • Related Report
      2014 Annual Research Report
  • [Presentation] N-doped GeTe Chalcogenide Film for High-Performance Nonvolatile Phase-Change Memory2014

    • Author(s)
      Y. Yin, and S. Hosaka
    • Organizer
      1st International Symposium of Gunma University Medical Innovation (GUMI) and 6th International Conference on Advanced Micro-Device Engineering (AMDE)
    • Place of Presentation
      Kiryu City Performing Arts Center, Kiryu
    • Year and Date
      2014-12-05
    • Related Report
      2014 Annual Research Report
  • [Presentation] Ge1Sb4Te7 Ultra-Multi-Level Phase-Change Memory2014

    • Author(s)
      Y. Yin, S. Iwashita, and S. Hosaka
    • Organizer
      27th International Microprocesses and Nanotechnology Conference (MNC 2014)
    • Place of Presentation
      Hilton Fukuoka Sea Hawk, Hakata
    • Year and Date
      2014-11-04 – 2014-11-07
    • Related Report
      2014 Annual Research Report
  • [Presentation] Characterization of N-Doped GeTe Films and Their Applications to High-Performance Nano Phase-Change Memory2014

    • Author(s)
      Y. Yin, and S. Hosaka
    • Organizer
      27th International Microprocesses and Nanotechnology Conference (MNC 2014)
    • Place of Presentation
      Hilton Fukuoka Sea Hawk, Hakata
    • Year and Date
      2014-11-04 – 2014-11-07
    • Related Report
      2014 Annual Research Report
  • [Presentation] Ultrasmall-Volume-Change Chalcogenide for Performance Improvement of Phase-Change Memory2014

    • Author(s)
      Y. Yin, and S. Hosaka
    • Organizer
      2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology (ICSICT-2014)
    • Place of Presentation
      Guilin, China
    • Year and Date
      2014-10-28 – 2014-10-31
    • Related Report
      2014 Annual Research Report
  • [Presentation] Ultramultiple-level storage in Ge1Sb4Te7-based phase-change memory2014

    • Author(s)
      Y. Yin, S. Iwashita, and S. Hosaka
    • Organizer
      the 40th International Micro & Nano Engineering Conference (MNE 2014)
    • Place of Presentation
      Lausanne, Switzerland
    • Year and Date
      2014-09-22 – 2014-09-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] N-doped GeTe for High-Performance Phase-Change Memory2014

    • Author(s)
      Y. Yin, and S. Hosaka
    • Organizer
      the 23rd Australian Conference on Microscopy and Microanalysis (ACMM23) and the International Conference on Nanoscience and Nanotechnology (ICONN 2014)
    • Place of Presentation
      Adelaide (Australia)
    • Related Report
      2013 Annual Research Report
  • [Presentation] Reduction of Write Current in Phase-Change Memory by Incorporating Self-Assembled Nanostructures2014

    • Author(s)
      Y. Yin, and S. Hosaka
    • Organizer
      the 23rd Australian Conference on Microscopy and Microanalysis (ACMM23) and the International Conference on Nanoscience and Nanotechnology (ICONN 2014)
    • Place of Presentation
      Adelaide (Australia)
    • Related Report
      2013 Annual Research Report
  • [Presentation] Low-Volume-Change High-Crystallization-Temperature Phase-Change Material for High-Performance Phase-Change Memory by N-Doping into Ge Te2013

    • Author(s)
      Y. Yin, and S. Hosaka
    • Organizer
      2013 MRS Spring Meeting, San Francisco, California
    • Place of Presentation
      San Francisco, California, USA
    • Year and Date
      2013-04-02
    • Related Report
      2012 Annual Research Report
  • [Presentation] Fast Operation and Freely Achievable Multiple Resistance Levels 1n Ge Te-Based Lateral Phase Change Memory2013

    • Author(s)
      Y. Yin, Y. Zhang, and S. Hosaka
    • Organizer
      2013 MRS Spring Meeting, San Francisco, California
    • Place of Presentation
      San Francisco, California, USA
    • Year and Date
      2013-04-02
    • Related Report
      2012 Annual Research Report
  • [Presentation] Electron Beam Lithography for Fabrication of Nano Phase-Change Memory2013

    • Author(s)
      Y. Yin, T. Itagawa, and S. Hosaka
    • Organizer
      2nd International Symposium on Quantum, Nano and Micro Technologies (ISQNM 2013)
    • Place of Presentation
      Singapore
    • Related Report
      2013 Annual Research Report
  • [Presentation] Nano-contact for small power consumption in phase change memory2013

    • Author(s)
      S. Hosaka, H. Zhang, M. Huda, and Y. Yin
    • Organizer
      The 25th Symposium on Phase Change Oriented Science
    • Place of Presentation
      Sendai, Miyagi, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Ultralow-write-current Nano-contact Phase-change Memory2013

    • Author(s)
      Y. Yin, and S. Hosaka
    • Organizer
      26th International Microprocesses and Nanotechnology Conference (MNC 2013)
    • Place of Presentation
      Sapporo, Hokkaido, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Staircase pulse programming for recrystallization control in phase-change memory2013

    • Author(s)
      Y. Yin, R. Kobayashi, Y. Zhang, R. I. Alip, and S. Hosaka
    • Organizer
      the 39th International Micro & Nano Engineering Conference (MNE 2013)
    • Place of Presentation
      London, UK
    • Related Report
      2013 Annual Research Report
  • [Presentation] Nano-contact phase-change memory for ultralow writing reset current2013

    • Author(s)
      Y. Yin, and S. Hosaka
    • Organizer
      the 39th International Micro & Nano Engineering Conference (MNE 2013)
    • Place of Presentation
      London, UK
    • Related Report
      2013 Annual Research Report
  • [Presentation] Fast Operation and Freely Achievable Multiple Resistance Levels in GeTe-Based Lateral Phase Change Memory2013

    • Author(s)
      Y. Yin, Y. Zhang, and S. Hosaka
    • Organizer
      2013 MRS Spring Meeting
    • Place of Presentation
      San Francisco, California, USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] Low-Volume-Change High-Crystallization-Temperature Phase-Change Material for High-Performance Phase-Change Memory by N-Doping into GeTe2013

    • Author(s)
      Y. Yin, and S. Hosaka
    • Organizer
      2013 MRS Spring Meeting
    • Place of Presentation
      San Francisco, California, USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] Fast Operation and Resistance Control in GeTe Based Lateral Phase Change Memory2012

    • Author(s)
      Y. Yin, and S. Hosaka
    • Organizer
      4th International Conference on Advanced Micro-Device Engineering (AMDE)
    • Place of Presentation
      Gunma, Japan
    • Year and Date
      2012-12-07
    • Related Report
      2012 Annual Research Report
  • [Presentation] Controlled Crystallization Process of Phase-change Memory device by a Separate Heater Structure2012

    • Author(s)
      R. Alip, Z. Mohamad, Y. Yin, and S. Hosaka
    • Organizer
      4th International Conference on Advanced Micro-Device Engineering (AMDE)
    • Place of Presentation
      Gunma, Japan
    • Year and Date
      2012-12-07
    • Related Report
      2012 Annual Research Report
  • [Presentation] Current-driven crystallization promotion for multilevel storage in phase-change memory2012

    • Author(s)
      Y. Yin, R. I. Alip, and S. Hosaka
    • Organizer
      The 24th Symposium on Phase Change Oriented Science (PCOS 2012).
    • Place of Presentation
      Shizuoka, Japan
    • Year and Date
      2012-11-29
    • Related Report
      2012 Annual Research Report
  • [Presentation] Low-stress high-crystallization-temperature doped GeTe for improving performance of phase-change memory2012

    • Author(s)
      Y. Yin, and S. Hosaka
    • Organizer
      the 38th International Micro & Nano Engineering Conference (MNE 2012)
    • Place of Presentation
      Toulouse, France
    • Year and Date
      2012-09-19
    • Related Report
      2012 Annual Research Report
  • [Presentation] Controlled promotion of crystallization for multilevel phase-change memory2012

    • Author(s)
      Y. Yin, and S. Hosaka
    • Organizer
      the 38th International Micro & Nano Engineering Conference (MNE 2012)
    • Place of Presentation
      Toulouse, France
    • Year and Date
      2012-09-19
    • Related Report
      2012 Annual Research Report
  • [Presentation] Multi-Level Storage Phase-Change Memory2012

    • Author(s)
      Y. Yin, and S. Hosaka
    • Organizer
      20 12 International Conference Oil Mechatronics and Intelligent Materials
    • Place of Presentation
      Guilin, China(招待講演)
    • Year and Date
      2012-05-18
    • Related Report
      2012 Annual Research Report
  • [Presentation] Nano-contact phase-change memory

    • Author(s)
      Y. Yin, and S. Hosaka
    • Organizer
      5th International Conference on Advanced Micro-Device Engineering (AMDE)
    • Place of Presentation
      Gunma, Japan
    • Related Report
      2013 Annual Research Report

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Published: 2012-04-24   Modified: 2019-07-29  

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