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Researches of high temperature power switching devices on high quality semiconductor diamond

Research Project

Project/Area Number 24360113
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Power engineering/Power conversion/Electric machinery
Research InstitutionNational Institute of Advanced Industrial Science and Technology

Principal Investigator

Umezawa Hitoshi  国立研究開発法人産業技術総合研究所, 先進パワーエレクトロニクス研究センター, 主任研究員 (80329135)

Project Period (FY) 2012-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥18,590,000 (Direct Cost: ¥14,300,000、Indirect Cost: ¥4,290,000)
Fiscal Year 2015: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2014: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2013: ¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000)
Fiscal Year 2012: ¥6,500,000 (Direct Cost: ¥5,000,000、Indirect Cost: ¥1,500,000)
Keywordsダイヤモンド / パワーデバイス / FET / 高温動作 / 電界効果型トランジスタ / 低抵抗コンタクト / ディープディプレション型 / ブレークダウン電圧 / 寄生抵抗成分 / エピタキシャル成長 / 半導体デバイス / トランジスタ / 低損失
Outline of Final Research Achievements

In order to realize high temperature high power electronics, development on device fabrication technique has been carried out. Firstly, the operation characteristics was estimated using the analytical model with material parameters. The doping concentration and the thickness of drift layer for diamond switching devices were optimized which realizes constant drain current and transconductance in the temperature ranges from 200 to 300 degC. Fabricated planer MESFET shows breakdown voltages more than 1.5kV which was the best value in the world. To decrease the Ohmic contact resistances on source and drain, p+ contact layers were formed on p- drift layer of MESFET. The increase of the gate width more than 30mm was realized using interconnection of source contact.

Report

(5 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Annual Research Report
  • 2013 Annual Research Report
  • 2012 Annual Research Report
  • Research Products

    (29 results)

All 2016 2015 2014 2013 2012 Other

All Int'l Joint Research (1 results) Journal Article (6 results) (of which Acknowledgement Compliant: 4 results,  Peer Reviewed: 5 results,  Open Access: 3 results) Presentation (21 results) (of which Int'l Joint Research: 7 results,  Invited: 4 results) Remarks (1 results)

  • [Int'l Joint Research] Inst. Neel/CNRS(フランス)

    • Related Report
      2015 Annual Research Report
  • [Journal Article] ショットキーダイオードとMESFET2016

    • Author(s)
      梅沢 仁
    • Journal Title

      New Diamond

      Volume: 121 Pages: 10-12

    • Related Report
      2015 Annual Research Report
    • Acknowledgement Compliant
  • [Journal Article] Diamond metal-semiconductor field-effect transistor with breakdown voltage over 1.5 k2014

    • Author(s)
      H. Umezawa, T. Matsumoto, S. Shikata
    • Journal Title

      IEEE Electron Device Letters

      Volume: 35 Pages: 1112-1114

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Leakage current analysis of diamond Schottky barrier diodes operated at high temperature2014

    • Author(s)
      H. Umezawa, S. Shikata,
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 53

    • NAID

      210000143696

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Diamond Schottky barrier diode for high temperature, high power and fast switching applications2014

    • Author(s)
      H. Umezawa, S. Shikata, T. Funaki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 53

    • NAID

      210000143883

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Leakage current analysis of diamond Schottky barrier diodes by defect imaging2013

    • Author(s)
      H. Umezawa, N. Tatsumi, Y. Kato and S. Shikata
    • Journal Title

      Diamond and Related Materials

      Volume: 40 Pages: 56-59

    • DOI

      10.1016/j.diamond.2013.09.011

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 1 Ω On-Resistance Diamond Vertical-Schottky Barrier Diode Operated at 250°C2013

    • Author(s)
      H. Umezawa, et al.,
    • Journal Title

      Applied Physics Express

      Volume: 6 Issue: 1 Pages: 11302-11302

    • DOI

      10.7567/apex.6.011302

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Presentation] Diamond Unipolar Devices for Future Power Electronics2016

    • Author(s)
      H.Umezawa
    • Organizer
      2016 MRS Spring Meeting & Exhibit
    • Place of Presentation
      Phoenix Convention Center, Arizona, USA
    • Year and Date
      2016-03-29
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Relaxation of electrical field at the edge of diamond Schottky barrier diode using X-ray irradiated surface semi-insulating layer2016

    • Author(s)
      H. Umezawa, T. Matsumoto, M. Tsubota, J. Kaneko, Y, Mokuno
    • Organizer
      Hasselt Diamond Workshop 2016 - SBDD XXI
    • Place of Presentation
      cultuurcentrum Hasselt, Hasselt, Belgium
    • Year and Date
      2016-03-09
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Floating Metal-Fieldring Edge-Termination of diamond Schottky barrier diodes2016

    • Author(s)
      S. Rugen, H. Umezawa, N. Kaminski
    • Organizer
      Hasselt Diamond Workshop 2016 - SBDD XXI
    • Place of Presentation
      cultuurcentrum Hasselt, Hasselt, Belgium
    • Year and Date
      2016-03-09
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High Voltage Diamond MESFET with VBR > 1.5kV2015

    • Author(s)
      H. Umezawa, T. Matsumoto, S. Ohmagari, Y. Kato and Y. Mokuno
    • Organizer
      2015 International Conference on Solid State Device and Materials - SSDM2015
    • Place of Presentation
      International Conference Center, Sapporo, Japan
    • Year and Date
      2015-09-27
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Diamond MESFET with low resistive p+ contact layer for source and drain2015

    • Author(s)
      H. Umezawa, S. Ohmagari, Y. Kato, T. Matsumoto, Y. Mokuno
    • Organizer
      International Conference on Diamond and Carbon Materials 2015
    • Place of Presentation
      International Conference Center, Bad Homburg, Germany
    • Year and Date
      2015-09-06
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Optimized doping structure of drift layer on punch-through type diamond power devices2015

    • Author(s)
      H. Umezawa, J. Pernot, D. Eon, S. Shikata and E. Gheeraert
    • Organizer
      International Conference on Diamond and Carbon Materials 2015
    • Place of Presentation
      International Conference Center, Bad Homburg, Germany
    • Year and Date
      2015-09-06
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Local area characterization of self-standing single crystal diamond by Synchrotorn radiation X-ray topograpy and rocking curve measurement2015

    • Author(s)
      H. Umezawa, Y. Kato, Y. Mokuno, S. Shikata, Y. Takahashi, H. Sugiyama, K. Hirano
    • Organizer
      9th International Conference on New Diamond and Nano Carbons 2015 - NDNC2015
    • Place of Presentation
      International Conference Center, Shizuoka, Japan
    • Year and Date
      2015-05-24
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Diamond unipolar devices for high power and high temperature electronics2015

    • Author(s)
      H. Umezawa
    • Organizer
      SBDDXX
    • Place of Presentation
      Hasselt, Belguim
    • Year and Date
      2015-02-25
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] ダイヤモンドMESFETの高電圧ブレークダウン特性2014

    • Author(s)
      梅沢仁、松本猛、鹿田真一
    • Organizer
      第28回 ダイヤモンドシンポジウム
    • Place of Presentation
      北千住、東京
    • Year and Date
      2014-11-20
    • Related Report
      2014 Annual Research Report
  • [Presentation] Diamond Power Devices,SBDs and MESFETs2014

    • Author(s)
      梅沢仁
    • Organizer
      2nd Japan-France Workshop on Diamond Power Device
    • Place of Presentation
      九重, 大分
    • Year and Date
      2014-10-08
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 高温動作ダイヤモンドMESFETの試作と評価2014

    • Author(s)
      梅沢仁、松本猛、鹿田真一
    • Organizer
      第75回 応用物理学会秋季学術講演会
    • Place of Presentation
      札幌, 北海道
    • Year and Date
      2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] Major tasks toward Diamond power device and wafer2014

    • Author(s)
      S. Shikata, H. Umezawa et al.,
    • Organizer
      NDNC2014
    • Place of Presentation
      Chicago, USA
    • Year and Date
      2014-05-19
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Diamond VSBD with BVBD 1.8kV at 250oC operation temperature2014

    • Author(s)
      H. Umezawa, Y. Kato and S. Shikata
    • Organizer
      Hasselt Diamond Workshop 2014
    • Place of Presentation
      Hasselt, Belgium
    • Related Report
      2013 Annual Research Report
  • [Presentation] 単結晶および多結晶ダイヤモンドの分光エリプソメトリー法による膜厚評価2013

    • Author(s)
      梅沢仁,加藤有香子,鹿田真一
    • Organizer
      第27回ダイヤモンドシンポジウム
    • Place of Presentation
      埼玉県、日本工業大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] Diamond power devices for high temperature and high current applications2013

    • Author(s)
      H. Umezawa, Y. Kato and S. Shikata
    • Organizer
      2013 JSAP/MRS Joint Symposia
    • Place of Presentation
      京都府、同志社大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] Fabrication and Characterization of 1mm Size Diamond SBD2013

    • Author(s)
      H. Umezawa, S. Shikata and T. Funaki
    • Organizer
      2013 International Conference on Solid State Devices and Materials
    • Place of Presentation
      福岡県、ヒルトン福岡
    • Related Report
      2013 Annual Research Report
  • [Presentation] High Temperature Operation of Diamond SBDs2013

    • Author(s)
      H. Umezawa
    • Organizer
      1st French-Japanese Workshop on Diamond power devices
    • Place of Presentation
      Chamonix, France
    • Related Report
      2013 Annual Research Report
  • [Presentation] Leakage Current Analysis of Diamond SBDs Operated at High Temperature2013

    • Author(s)
      H.Umezawa and S.Shikata
    • Organizer
      2013 International Conference on Solid State Devices and Materials
    • Place of Presentation
      福岡県、ヒルトン福岡
    • Related Report
      2013 Annual Research Report
  • [Presentation] 5A動作ダイヤモンドSBDの高温動作特性評価2012

    • Author(s)
      梅沢仁
    • Organizer
      SiCおよび関連ワイドギャップ半導体研究会第21回研究会
    • Place of Presentation
      日本
    • Year and Date
      2012-11-19
    • Related Report
      2012 Annual Research Report
  • [Presentation] Diamond high-power and high-temperature SBDs2012

    • Author(s)
      梅沢仁
    • Organizer
      the 44th International Conference on Solid State Devices and Materials (SSDM 2012)
    • Place of Presentation
      日本
    • Year and Date
      2012-09-26
    • Related Report
      2012 Annual Research Report
  • [Presentation] High current operation of diamond vertical-SBDs at 250oC2012

    • Author(s)
      梅沢仁
    • Organizer
      IUMRS-Int'l Conf. on Electronic Materials (IUMRS-ICEM2012)
    • Place of Presentation
      日本
    • Year and Date
      2012-09-24
    • Related Report
      2012 Annual Research Report
  • [Remarks]

    • URL

      http://unit.aist.go.jp/drl/ci/

    • Related Report
      2012 Annual Research Report

URL: 

Published: 2012-04-24   Modified: 2019-07-29  

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