Development of High Performace Acoustic Wave Devices Using Single Crystalline Diamond
| Project/Area Number |
24360131
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Partial Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | Chiba University |
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Principal Investigator |
HASHIMOTO Ken-ya 千葉大学, 工学(系)研究科(研究院), 教授 (90134353)
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| Co-Investigator(Kenkyū-buntansha) |
SATOSHI Fujii 千葉大学, 事務局, 特任研究員 (30598933)
TATSUYA Omori 千葉大学, 大学院工学研究科, 助教 (60302527)
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| Project Period (FY) |
2012-04-01 – 2015-03-31
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| Project Status |
Completed (Fiscal Year 2014)
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| Budget Amount *help |
¥18,720,000 (Direct Cost: ¥14,400,000、Indirect Cost: ¥4,320,000)
Fiscal Year 2014: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Fiscal Year 2013: ¥7,150,000 (Direct Cost: ¥5,500,000、Indirect Cost: ¥1,650,000)
Fiscal Year 2012: ¥9,100,000 (Direct Cost: ¥7,000,000、Indirect Cost: ¥2,100,000)
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| Keywords | 弾性表面波 / 単結晶ダイヤモンド / AlN / Sc-AlN / 共振子 / 単結晶 / ダイヤモンド / SAWデバイス / ScAlN / 発振器 / スパッタ |
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| Outline of Final Research Achievements |
This project was aimed at developing surface acoustic wave (SAW) devices with excellent performances using single-crystalline diamond (SCD).
First, a high quality AlN film was deposited on the SCD, and a high performance SAW resonator with the Q factor of 5,700 at 5 GHz was realized. We showed that the surface roughness of SCD critically influence the achievable Q factor. Next, highly piezoelectric Sc-AlN films were also deposited on the SCD, and it was demonstrated that wideband and low loss SAW filters are realizable in the 3 GHz range, which is hard when conventional piezoelectric materials are applied.
We also revealed that on the piezoelectric film/non-piezoelectric substrate substrate structure, the effective electromechanical coupling can be enhanced by the mass-loading of electrodes.
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Report
(4 results)
Research Products
(45 results)
