Solid-phase crystallization of oxide thin films on nanoscale-controlled substrates via post-annealing under uniaxial compression for exploring the novel functionalities

• Project/Area Number: 24360269
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Partial Multi-year Fund
• Section: 一般
• Research Field: Inorganic materials/Physical properties
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: Yoshimoto Mamoru 東京工業大学, 総合理工学研究科(研究院), 教授 (20174998)
• Co-Investigator(Kenkyū-buntansha): YODO Tokuo 大阪工業大学, 工学部, 教授 (70288752)
• Co-Investigator(Renkei-kenkyūsha): MATSUDA Akifumi 東京工業大学, 大学院総合理工学研究科, 講師 (80621698)
• Project Period (FY): 2012-04-01 – 2016-03-31
• Project Status: Completed (Fiscal Year 2015)
• Budget Amount: ¥14,950,000 (Direct Cost: ¥11,500,000、Indirect Cost: ¥3,450,000); Fiscal Year 2014: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000); Fiscal Year 2013: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000); Fiscal Year 2012: ¥8,190,000 (Direct Cost: ¥6,300,000、Indirect Cost: ¥1,890,000)
• Keywords: 結晶構造制御 / 一軸圧縮 / 酸化物薄膜 / 固相結晶化 / エピタキシャル成長 / 酸化バナジウム / 酸化モリブデン / 固相結晶成長 / 層状構造 / 酸化物 / 結晶構造 / 組織制御 / 超機能創出 / 表面ナノ修飾基板 / ナノインプリント

Outline of Final Research Achievements

In this study, the influence of thermal annealing under uniaxial compression on solid-state crystallization of electronic functional oxide thin films such as VOx or MoOx was investigated for exploring the novel functionalities. As a result, it was found that the epitaxial VO2 and epitaxial V2O3 thin films were obtained through annealing under uniaxial compression of 1 MPa and 10-30 MPa, respectively. Diffusion of oxygen atoms along the layered structure of VOx film under uniaxial compression was thought to have an important role for phase-selective solid state crystallization in this process.

Research Products

• [Journal Article] Atomic-scale Thermal Behavior of Nanoimprinted 0.3-nm-High Step Patterns on PMMA Polymer Sheets (2016)
  • Author(s): G. Tan, Y. Nozawa, T. Funabasama, K. Koyama, M. Mita, S. Kaneko, M. Komura, A. Matsuda and M. Yoshimoto
  • Journal Title: Polymer Journal Volume: 48 Pages: 225-227
  • DOI: 10.1038/pj.2015.99
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Subnano-scale nanoimprint fabrication of atomically stepped glassy substrates of silicate glass and acryl polymer (2015)
  • Author(s): Mamoru Yoshimoto
  • Journal Title: Physics A Volume: 121 Pages: 321-326
  • DOI: 10.1007/s00339-015-9247-4
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Atomic Step Patterning on Quartz Glass via Thermal Nanoimprinting (2015)
  • Author(s): Osamu Suga, Mamoru Yoshimoto, Chieko Okuyama, Akifumi Matsuda, Hiroshi Hiroshima, and Masaharu Takahashi
  • Journal Title: Japanese Journal of Applied Physics Volume: 54 Issue: 9 Pages: 098001-098001
  • DOI: 10.7567/jjap.54.098001
  • NAID: 210000145692
  • ISSN: 0021-4922, 1347-4065
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Formation of 0.3-nm-High Stepped Polymer Surface by Thermal Nanoimprinting (2014)
  • Author(s): Geng Tan, Naoya Inoue, Tomoyuki Funabasama, Masahiro Mita, Norimichi Okuda, Junichi Mori, Koji Koyama, Satoru Kaneko, Masaru Nakagawa, Akifumi Matsuda and Mamoru Yoshimoto
  • Journal Title: Appl. Phys. Express Volume: 7(5) Issue: 5 Pages: 055202-055202
  • DOI: 10.7567/apex.7.055202
  • NAID: 210000137094
  • ISSN: 1882-0778, 1882-0786
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Formation of 0.3-nm-High Stepped Polymer Surface by Thermal Nanoimprinting (2014)
  • Author(s): Geng Tan, Naoya Inoue, Tomoyuki Funabasama, Masahiro Mita, Norimichi Okuda, Junichi Mori, Koji Koyama, Satoru Kaneko, Masaru Nakagawa, Akifumi Matsuda and Mamoru Yoshimoto
  • Journal Title: Appl. Phys. Exp. Volume: 7
  • NAID: 210000137094
  • Peer Reviewed
• [Journal Article] Homoepitaxial growth of α-Al2O3 thin films on atomically stepped sapphire substrates by pulsed laser deposition at room-temperature (2013)
  • Author(s): Daishi Shiojiri, Ryosuke Yamauchi, Satoru Kaneko, Akifumi Matsuda, and Mamoru Yoshimoto
  • Journal Title: J. Ceram. Soc. Japan Volume: 121
  • NAID: 130004480132
  • Peer Reviewed
• [Journal Article] Influence of Momentary Annealing on Surface Morphology of Room Temperature Pulsed Laser Deposited NiO(111) Epitaxial Thin Film grown on Atomically Stepped Sapphire (0001) Substrates (2013)
  • Author(s): Ryosuke Yamauchi, Geng Tan, Daishi Shiojiri, Koji Koyama, Satoru Kaneko, Akifumi Matsuda, and Mamoru Yoshimoto
  • Journal Title: Mater. Res. Soc. Symp. Proc. Volume: 1507
  • Peer Reviewed
• [Journal Article] Room-temperature synthesis of epitaxial oxide thin films for development of unequilibrium structure and novel electronic functionalization (2013)
  • Author(s): Mamoru YOSHIMOTO, Ryosuke YAMAUCHI, Daishi SHIOJIRI, Geng TAN, Satoru KANEKO and Akifumi MATSUDA
  • Journal Title: J. Ceram. Soc. Japan Volume: 121
  • NAID: 130004950790
  • Peer Reviewed
• [Journal Article] Room-temperature synthesis of epitaxial oxide thin films for development of unequilibrium structure and novel electronic functionalization (2013)
  • Author(s): M. YOSHIMOTO, R. YAMAUCHI, D. SHIOJIRI, G. TAN, S. KANEKO and A. MATSUDA
  • Journal Title: J. Ceram. Soc. Japan, Volume: 121 Pages: 1-9
  • NAID: 130004950790
  • Peer Reviewed
• [Journal Article] Influence of Rapid Thermal Annealing and Substrate Terrace Width on Self-Organizing Formation of Periodic Straight Nanogroove Array on Ni0(111) Epitaxial Thin Film (2012)
  • Author(s): R. Yamauchi, G. Tan, D. Shiojiri, K. Koyama, S. Kaneko, A. Matsuda, and M. Yoshimoto
  • Journal Title: Jpn. J. Appl. Phys. Volume: 51
  • Peer Reviewed
• [Journal Article] Anisotropic magnetization of epitaxial Ni nanogroove-arrays prepared by reduction of self-organized oxides (2012)
  • Author(s): A. Matsuda, R. Yamauchi, G. Tan, H. Nakai, K. Koyama, K. Sunakawa, S. Kaneko and M. Yoshimoto
  • Journal Title: Appl. Sur￡Sci. Volume: 259 Pages: 208-212
  • Peer Reviewed
• [Presentation] 一軸加圧下熱処理による非晶質酸化モリブデン薄膜の固相結晶化 (2016)
  • Author(s): 難波 諒太郎, 野沢 靖久, 譚 ゴオン，土嶺信男, 金子 智，松田 晃史，吉本 護
  • Organizer: 応用物理学会 2016年春季年会
  • Place of Presentation: 東京工業大学
  • Year and Date: 2016-03-19
• [Presentation] Preparation of ultra-flat transparent conductive films on atomic step-and-terrace structured flexible polymer sheets (2015)
  • Author(s): Akifumi Matsuda, Goon Tan, Yasuhisa Nozawa, Daishi Shiojiri, Tatsuhiro Urakami, Satoru Kaneko, and Mamoru Yoshimoto
  • Organizer: MRS 2015 Fall Meeting
  • Place of Presentation: Boston, USA
  • Year and Date: 2015-11-29
  • Int'l Joint Research
• [Presentation] 一軸加圧下の熱処理による非晶質VOx 薄膜の相選択的エピタキシャル結晶化 (2015)
  • Author(s): 松田晃史、野沢靖久、難波諒太郎、吉本護、金子智
  • Organizer: 日本セラミックス協会2015年秋季年会
  • Place of Presentation: 富山大学
  • Year and Date: 2015-09-16
• [Presentation] 一軸加圧熱処理による非晶質VOx薄膜の相選択的固相結晶化と配向制御 (2015)
  • Author(s): 野沢 靖久, 難波 諒太郎, 譚 ゴオン，金子 智，松田 晃史，吉本 護
  • Organizer: 応用物理学会 秋季年会
  • Place of Presentation: 名古屋国際会議場
  • Year and Date: 2015-09-13
• [Presentation] Nanoimprint fabrication of atomic step-and-terrace structured polymer sheets towards developing the novel flexible substrates (2015)
  • Author(s): Goon Tan, Yasuhisa Nozawa, Tomoyuki Funabasama, Satoru Kaneko, Akifumi Matsuda and Mamoru Yoshimoto
  • Organizer: 57th Electronic Materials Conference (EMC)
  • Place of Presentation: The Ohio State University in Columbus, Ohio, USA
  • Year and Date: 2015-06-24
  • Int'l Joint Research
• [Presentation] 一軸圧縮下の熱処理による機能性酸化物薄膜の固相結晶挙動 (2015)
  • Author(s): 野沢 靖久，譚 ゴオン，船迫 友之，金子 智，松田 晃史，吉本 護
  • Organizer: 応用物理学会 春季年会
  • Place of Presentation: 東海大学湘南キャンパス
  • Year and Date: 2015-03-12 – 2015-03-13
• [Presentation] Nanoimprint Fabrication and Application of Subnano-Scale Surface-Patterned Glassy Substrates (2014)
  • Author(s): Geng Tan, Yasuhisa Nozawa, Tomoyuki Funabasama, Satoru Kaneko, Akifumi Matsuda and Mamoru Yoshimoto
  • Organizer: 13th International Conference on Nanoimprint and Nanoprint Technology (NNT 2014)
  • Place of Presentation: Kyoto ANACrown Plaza Hotel
  • Year and Date: 2014-10-23 – 2014-10-24
  • Invited
• [Presentation] 透明導電性酸化物薄膜の固相結晶化における熱処理中の一軸圧縮応力印加の影響 (2013)
  • Author(s): 譚ゴオン・井上直哉・松田晃史・吉本護・大井秀雄・三田正弘・奥田徳路
  • Organizer: 日本セラミックス協会春季年会
  • Place of Presentation: 東京工業大学
  • Year and Date: 2013-03-17
• [Presentation] Nanoimprinting of self-organized atomic scale patterns of minerals onto the oxide glass surface (2013)
  • Author(s): N. Inoue, A. Matsuda, and M. Yoshimoto
  • Organizer: 第26回マイクロプロセス・ナノテクノロジー国際会議（MNC 2013)
  • Place of Presentation: ロイトン札幌ホテル
• [Presentation] 室温レーザーMBE による酸化コバルト薄膜の相制御と評価 (2013)
  • Author(s): 松田晃史､吉本 護
  • Organizer: 第74回 応用物理学会 秋季学術講演会
  • Place of Presentation: 同志社大学 京田辺キャンパス
• [Presentation] 室温合成エピタキシャル酸化物薄膜の水素還元による磁気抵抗型積層薄膜の作製 (2013)
  • Author(s): 松田晃史､吉本 護
  • Organizer: 日本セラミックス協会 第26回秋季シンポジウム
  • Place of Presentation: 信州大学 長野キャンパス
• [Presentation] Solid-phase Crystallization of Transparent Conducting Oxide Thin Films Under Uniaxial Compression (2012)
  • Author(s): Geng Tan, Tsubasa Yamanoi, Hideo Oi, Masahiro Mita, Satoru Kaneko, Norimichi Okuda, Naoya Inoue, Noriko Kumagai, Ryosuke Yamauchi, Akifumi Matsuda, Mamoru Yoshimoto
  • Organizer: MRS Fall Meetin, Symp.F: Oxide Thin Films for Renewable Energy Applications,
  • Place of Presentation: Boston, USA
  • Year and Date: 2012-11-26
• [Presentation] Surface nanostructure control of indium tin oxide films on nanopatterne d glass substrates toward advanced thin film solar cells (2012)
  • Author(s): Geng Tan, Ryosuke Yamauchi, Satoru Kaneko, Akifumi Matsuda, Mamoru Yoshimoto
  • Organizer: European Material Research Society (E-MRS 2012) Spring Meeting, Symposium Y (Advanced materials and characterization techniques for solar cells)
  • Place of Presentation: the Congress Center in Strasbourg, France
  • Year and Date: 2012-05-14
• [Remarks]
  • URL: http://www.yoshimoto.iem.titech.ac.jp/