Fabrication of transparent ZnO films by solution process and challenge for fabricating transparent circuit

• Project/Area Number: 24360270
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Partial Multi-year Fund
• Section: 一般
• Research Field: Inorganic materials/Physical properties
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: Matsushita Nobuhiro 東京工業大学, 大学院理工学研究科, 准教授 (90229469)
• Co-Investigator(Kenkyū-buntansha): Wagata Hajime 明治大学, 理工学部応用化学科, 講師 (40633722) ; Katsumata Kenichi 東京理科大学, 光触媒国際研究センター, 准教授 (70550242)
• Project Period (FY): 2012-04-01 – 2016-03-31
• Project Status: Completed (Fiscal Year 2015)
• Budget Amount: ¥17,420,000 (Direct Cost: ¥13,400,000、Indirect Cost: ¥4,020,000); Fiscal Year 2014: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000); Fiscal Year 2013: ¥6,890,000 (Direct Cost: ¥5,300,000、Indirect Cost: ¥1,590,000); Fiscal Year 2012: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
• Keywords: 酸化亜鉛 / 溶液プロセス / 透明導電膜 / 紫外線 / 水素還元雰囲気 / 水溶液プロセス / 紫外線照射 / 酸化亜鉛膜 / 透明導電性 / 低環境負荷プロセス / イオンドープ

Outline of Final Research Achievements

The source solution containing Zn ion and the reaction solution containing NH3 and trisodiumcitrate were sprayed on heated substrate to deposit transparet ZnO film. The deposited film treated by hydrogen treatment prior to UV irradiation exhibited the lowest resistivity of 1.8×10-3 Ω・cm. The transparent conductive ZnO films were successfully fabricated even on plastic substrate(PES), The transparent circuit could be drawn in solution-processed ZnO films by irradiating UV only in restricted area. The utilization of ammine complex enbled to develop a novel solution process in which only one solution was used for depositing transparent conductive ZnO films.

Research Products

• [Journal Article] The Morphological Properties of Heterostructured Fe3O4 / ZnO Film by Aqueous Solution Process (2015)
  • Author(s): J. Hong, K. Katsumata, N. Matsushita
  • Journal Title: IEEE Transactions on Magnetics Volume: 52[5] Issue: 5 Pages: 2600105-2600105
  • DOI: 10.1109/tmag.2015.2513740
  • Peer Reviewed
• [Journal Article] Transparent ZnO Films Deposited by Aqueous Solution Process under Various pH Conditions (2015)
  • Author(s): JeongSoo Hong, Hajime Wagata, Ken-ichi Katsumata, Kiyoshi Okada, and Nobuhiro Matsushita
  • Journal Title: Journal of Electronic Materials Volume: vol Issue: 8 Pages: 2657-2662
  • DOI: 10.1007/s11664-015-3670-3
  • Peer Reviewed / Open Access
• [Journal Article] Nitrogen-doped ZnO Rods Synthesized from an Ammine-Hydroxo Zinc Complex (2015)
  • Author(s): Taiki Ihara, Ken-ichi Katsumata, Tomoaki Watanabe, Kiyoshi Okada and Nobuhiro Matsushita
  • Journal Title: Chemistry Letters Volume: vol.
  • NAID: 130005067956
  • Peer Reviewed / Open Access
• [Journal Article] Fabrication of Heterostructured α-Fe₂O₃/ZnO Film for Photoelectrode by Aqueous Solution Process (2014)
  • Author(s): JeongSoo Hong, Hajime Wagata, Ken-ichi Katsumata, Kiyoshi Okada, and Nobuhiro Matsushita
  • Journal Title: Journal of the Japan Society of Powder and Powder Metallurgy Volume: 61 Issue: S1 Pages: S324-S326
  • DOI: 10.2497/jjspm.61.S324
  • NAID: 130004482703
  • ISSN: 0532-8799, 1880-9014
  • Peer Reviewed / Open Access
• [Journal Article] Investigation of the Effects of Oxygen Gas on Properties of GAZO Thin Films Fabricated by Facing Targets Sputtering System (2014)
  • Author(s): JeongSoo Hong, Nobuhiro Matsushita, and KyungHwan Kim
  • Journal Title: Semiconductor Science Technology Volume: 29 Issue: 7 Pages: 075007-075007
  • DOI: 10.1088/0268-1242/29/7/075007
  • Peer Reviewed / Open Access
• [Journal Article] Template-free solvothermal preparation of ZnO hollow microspheres covered with c planes (2014)
  • Author(s): T. Ihara, H. Wagata, T. Kogure, K. Katsumata, K.Okada, N. Matsushita
  • Journal Title: RSC Advances Volume: 4[48] Issue: 48 Pages: 25148-25154
  • DOI: 10.1039/c4ra02877e
  • Peer Reviewed / Open Access
• [Journal Article] Effect of thermal treatment on crystallographic and electrical properties of transparent conductive ZnO films deposited by spin-spray method (2013)
  • Author(s): JeongSoo Hong, Hajime Wagata, Ken-ichi Katsumata, Kiyoshi Okada, Nobuhiro Matsushita
  • Journal Title: Japanese Journal of Applied Physics Volume: 52 Issue: 11R Pages: 110108-110108
  • DOI: 10.7567/jjap.52.110108
  • NAID: 210000143029
  • Peer Reviewed
• [Journal Article] オレイン酸被覆水熱成長法による機能性ナノ粒子の合成と両親媒性 (2013)
  • Author(s): 松下伸広, 谷口貴章
  • Journal Title: Ceramics Japan Volume: 47 [8] Pages: 584-590
  • NAID: 10031155586
  • Peer Reviewed
• [Journal Article] Enhanced and engineered d^0 ferromagnetism in molecularly-thin zinc oxide nanosheets (2013)
  • Author(s): Takaaki Taniguchi、Kazuhiro Yamaguchi (以下11名)
  • Journal Title: Advanced Functional Materials Volume: 23巻、25号 Issue: 25 Pages: 3140-3145
  • DOI: 10.1002/adfm.201202704
  • Peer Reviewed
• [Journal Article] Effect of dopants and thermal treatment on properties of Ga-AI-ZnOthin films fabricated by hetero targets sputtering system (2013)
  • Author(s): JeongSoo Hong, Nobuhiro Mats ushita, 他
  • Journal Title: Thin Solid Films Volume: 531 Pages: 238-242
  • DOI: 10.1016/j.tsf.2013.01.089
  • Peer Reviewed
• [Journal Article] An aqueous solution process and subsequent UV treatment for highly transparent conductive ZnO films (2012)
  • Author(s): Hajime Wagata
  • Journal Title: Journal of Materials Chemistry Volume: 22 Issue: 38 Pages: 20706-20712
  • DOI: 10.1039/c2jm33584k
  • Peer Reviewed
• [Journal Article] Effect of Illuminated Light Wavelength Oil Electric Resistance of Zinc Oxide Films Prepared by Spin-Spray Method (2012)
  • Author(s): Hajime WAGATA, Nobuhiro Matsushita, 他
  • Journal Title: Journal of Flux Growth Volume: 7 Pages: 55-59
  • Peer Reviewed
• [Presentation] 多様な構造を持つ酸化亜鉛膜の作製及び光分解特性の評価 (2015)
  • Author(s): 洪 正洙，勝又 健一，松下 伸広，中田 一弥，寺島 千晶，藤嶋 昭
  • Organizer: 第10回日本フラックス成長研究発表会
  • Place of Presentation: 長野県長野市
  • Year and Date: 2015-12-11
• [Presentation] 溶液プロセスを用いて作製した酸化亜鉛膜の光機能性の評価 (2015)
  • Author(s): 洪 正洙，勝又 健一，松下 伸広，中田 一弥，寺島 千晶，藤嶋 昭
  • Organizer: 第22回シンポジウム 光触媒反応の最近の展開
  • Place of Presentation: 千葉県野田市
  • Year and Date: 2015-12-04
• [Presentation] Highly Conductive Solution-Processed Al doped ZnO Film by Photocatalytic Activity (2015)
  • Author(s): Jeongsoo Hong, Hajime Wagata,Ken-ichi Katsumata, Nobuhiro Matsushita
  • Organizer: The 14th International Symposium on Microelectronics and Packaging (ISMP 2015)
  • Place of Presentation: Seoul, Korea
  • Year and Date: 2015-10-13
  • Int'l Joint Research
• [Presentation] Photocatalytic Activity of Solution-Processed ZnO Film (2015)
  • Author(s): Jeongsoo Hong, Hajime Wagata,Ken-ichi Katsumata, Nobuhiro Matsushita
  • Organizer: First International Symposium on Recent Progress of Energy and Environmental Photocatalysis
  • Place of Presentation: Chiba, Japan
  • Year and Date: 2015-09-03
  • Int'l Joint Research
• [Presentation] 水溶液プロセスで作製した酸化亜鉛膜の導電性に紫外線処理が及ぼす影響 (2015)
  • Author(s): 洪 正洙, 我田 元, 勝又健一, 岡田 清, 松下 伸広
  • Organizer: 日本セラミックス協会2015年年会
  • Place of Presentation: 岡山大学 岡山市
  • Year and Date: 2015-03-18 – 2015-03-20
• [Presentation] 亜鉛アンミン錯体を前駆体とした水熱法による窒素ドープZnOロッドの合成 (2015)
  • Author(s): 井原大貴、勝又健一、渡邉友亮、岡田清、松下伸広
  • Organizer: 日本セラミックス協会2015年年会
  • Place of Presentation: 岡山大学 岡山市
  • Year and Date: 2015-03-18 – 2015-03-20
• [Presentation] N-containing ZnO rods with tunable concentration synthesized by hydrothermal method (2014)
  • Author(s): Taiki Ihara, Ken-ichi Katsumata, Tomoaki Watanabe, Kiyoshi Okada and Nobuhiro Matsushita
  • Organizer: Pacific Rim Symposium on Surfaces, Coatings and Interfaces (PacSurf 2014)
  • Place of Presentation: Hapuna Beach Prince Hotel, Kohala Coast, Hawaii
  • Year and Date: 2014-12-07 – 2014-12-11
• [Presentation] NANOSTRUCURE DESIGN OF FUNCTIONAL CERAMICS BY SOLUTION PROCESSES (2014)
  • Author(s): Nobuhiro Matsushita, Ken-ichi Katsumata, Masahiro Yoshimura, Kiyoshi Okada
  • Organizer: MNC2014 (Symposium: Inorganic Nanomaterials)
  • Place of Presentation: Hilton Fukuoka Seahawk, Fukuoka
  • Year and Date: 2014-11-04 – 2014-11-07
  • Invited
• [Presentation] 溶液プロセスによる機能性酸化物材料の創成 (2014)
  • Author(s): 松下伸広
  • Organizer: 平成26年度鳥取県戦略産業雇用創造プロジェクト公開講座
  • Place of Presentation: 鳥取大学、鳥取県
  • Year and Date: 2014-10-31
  • Invited
• [Presentation] 水溶液プロセスを用いて作製した酸化亜鉛膜の特性 (2014)
  • Author(s): 洪 正洙、我田 元, 勝又 健一、岡田 清、松下 伸広
  • Organizer: セラ協第４回関東支部若手研究発表交流会
  • Place of Presentation: 東京工業大学 大岡山キャンパス
  • Year and Date: 2014-10-18
• [Presentation] N concentration controlled ZnO rods synthesized by hydrothermal method (2014)
  • Author(s): Taiki Ihara, Ken-ichi Katsumata, Tomoaki Watanabe, Kiyoshi Okada and Nobuhiro Matsushita
  • Organizer: E-MRS 2014 Fall Meeting
  • Place of Presentation: Warsaw University of Technology, Poland
  • Year and Date: 2014-09-15 – 2014-09-19
• [Presentation] Highly Conductive Transparent ZnO Films Prepared at Below 100℃ (2014)
  • Author(s): Nobuhiro Matsushita,J. S. Hong, H. Wagata, K. Katsumata, N. Ohashi, Kiyoshi Okada
  • Organizer: 6thPCGMR-NCKU Symposium
  • Place of Presentation: National Cheng Kung University, Tainan, Taiwan
  • Year and Date: 2014-09-02 – 2014-09-05
  • Invited
• [Presentation] N-containing ZnO rods synthesized by hydrothermal method using ammine-hydroxo zinc complex solution (2014)
  • Author(s): Taiki Ihara, Ken-ichi Katsumata, Tomoaki Watanabe, Kiyoshi Okada and Nobuhiro Matsushita
  • Organizer: 6thPCGMR-NCKU Symposium
  • Place of Presentation: National Cheng Kung University, Tainan, Taiwan
  • Year and Date: 2014-09-02 – 2014-09-05
• [Presentation] Comparative Study for Conductivity between Solution-Processed and Sputtered ZnO Film (2014)
  • Author(s): JeongSoo Hong, Hajime Wagata, Naoki Ohashi, Ken-ichi Katsumata, KyungHwan Kim, Kiyoshi Okada, Nobuhiro Matsushita
  • Organizer: IUMRS-ICA 2014
  • Place of Presentation: Fukuoka University, Fukuoka
  • Year and Date: 2014-08-24 – 2014-08-30
• [Presentation] Solution-Processed ZnO Film with Various Structures (2014)
  • Author(s): JeongSoo Hong, Naoki Sugimoto, Hajime Wagata, Naoki Ohashi, Ken-ichi Katsumata, Kiyoshi Okada, Nobuhiro Matsushita
  • Organizer: IUMRS-ICA 2014
  • Place of Presentation: Fukuoka University, Fukuoka
  • Year and Date: 2014-08-24 – 2014-08-30
• [Presentation] Solvothermal Synthesis of ZnO Spherical Particles with Tunable Size (2014)
  • Author(s): Taiki Ihara, Hajime Wagata, Kenichi Katsumata, Kiyoshi Okada and Nobuhiro Matsushita
  • Organizer: IUMRS-ICA 2014
  • Place of Presentation: Fukuoka University, Fukuoka
  • Year and Date: 2014-08-24 – 2014-08-30
• [Presentation] Template-Free Solvothermal Preparation of Carbon doped ZnO Hollow Microspheres (2014)
  • Author(s): Taiki Ihara, Hajime Wagata, Toshihiro Kogure, Kenichi Katsumata, Kiyoshi Okada and Nobuhiro Matsushita
  • Organizer: IUMRS-ICA 2014
  • Place of Presentation: Fukuoka University, Fukuoka
  • Year and Date: 2014-08-24 – 2014-08-30
• [Presentation] N-containing ZnO rods synthesized by hydrothermal method using ammine-hydroxo zinc complex solution (2014)
  • Author(s): Taiki Ihara, Ken-ichi Katsumata, Tomoaki Watanabe, Kiyoshi Okada and Nobuhiro Matsushita
  • Organizer: IUMRS-ICA 2014
  • Place of Presentation: Fukuoka University, Fukuoka
  • Year and Date: 2014-08-24 – 2014-08-30
• [Presentation] Effects of UV Illumination and Thermal Treatment in Hydrogen on Electrical Conductivity of Solution-Processed ZnO Film (2014)
  • Author(s): Hong Jeong-soo, Hajime Wagata, Naoki Ohashi, Ken-ichi Katsumata, Kiyoshi Okada, Nobuhiro Matsushita
  • Organizer: 2014 MRS Spring Meeting & Exhibit
  • Place of Presentation: Moscone West Convention Ctr., San Francisco, California
  • Year and Date: 2014-04-21 – 2014-04-25
• [Presentation] Template-Free Synthesis of ZnO Hollow Microspheres and Their Application to Dye Sensitized Solar Cells (2014)
  • Author(s): Taiki Ihara, Yi-Bing Cheng, Ken-ichi Katsumata, Kiyoshi Okada, Nobuhiro Matsushita
  • Organizer: 2014 MRS Spring Meeting & Exhibit
  • Place of Presentation: Moscone West Convention Ctr., San Francisco, California
  • Year and Date: 2014-04-21 – 2014-04-25
• [Presentation] Influence of thermal treatment on crystallographic and electrical properties of solution-processed ZnO films (2013)
  • Author(s): J. Hong, H. Wagata, N. Ohashi, K. Katsumata, K. Okada, N. Matsushita
  • Organizer: The 7th International Conference on the Science and Technology for Advanced Ceramics (STAC-7)
  • Place of Presentation: Yokohama
• [Presentation] Ga doping of spin-sprayed ZnO films for lower resistivity (2013)
  • Author(s): N. Sugimoto, J.-S. Hong, K. Katsumata, K. Okada, N. Matsushita
  • Organizer: The 7th International Conference on the Science and Technology for Advanced Ceramics (STAC-7)
  • Place of Presentation: Yokohama
• [Presentation] Fabrication of Heterostructured α-Fe2O3/ZnO film for Photoelectrode by Aqueous Solution Process (2013)
  • Author(s): J.S.Hong, T. Watanabe, H. Wagata, N. Ohashi, K. Katsumata, K. Okada and N. Matsushita
  • Organizer: The 11th International Conference on Ferrites (ICF 11)
  • Place of Presentation: Okinawa
• [Presentation] The Crystallographic Property of Fe3O4 layer Deposited Successively on ZnO layer by Spin-Spray Method (2013)
  • Author(s): J.S.Hong, H. Wagata, N. Ohashi, K. Katsumata, K. Okada and N. Matsushita
  • Organizer: The 11th International Conference on Ferrites (ICF 11)
  • Place of Presentation: Okinawa
• [Presentation] Fabrication of 1 dimension Ga doped ZnO film by Aqueous solution Process (2013)
  • Author(s): J.S.Hong, T. Watanabe, H. Wagata, K. Katsumata, N. Ohashi, K. Okada and N. Matsushita
  • Organizer: The 11th International Conference on Ferrites (ICF 11)
  • Place of Presentation: Okinawa
• [Presentation] Electrical, Optical and Structural Properties of Solution Processed ZnO Films with Various UV Illumination Condetions (2013)
  • Author(s): J.S.Hong, T. Watanabe, H. Wagata, N. Ohashi, K. Katsumata, K. Okada and N. Matsushita
  • Organizer: The 11th International Conference on Ferrites (ICF 11)
  • Place of Presentation: Okinawa
• [Presentation] 溶液プロセスを用いてフレキシブル基板上に作製した透明導電性酸化亜鉛膜 (2013)
  • Author(s): 洪 正洙、我田 元、勝又 健一、岡田 清、松下 伸広
  • Organizer: 粉体粉末冶金協会 平成25年度春季大会
  • Place of Presentation: 早稲田大学国際会議場
• [Presentation] スピンスプレー法による酸化亜鉛膜の配向制御と透過率・導電性の獲得 (2013)
  • Author(s): 杉本直樹、洪正洙、勝又健一、岡田清、松下伸広
  • Organizer: 第3回 CSJ化学フェスタ2013
  • Place of Presentation: タワーホール船堀
• [Presentation] 水溶液法によるシードフリー基板上への酸化亜鉛層の直接形成とその電気特性 (2012)
  • Author(s): 我田元、松下伸広, ほか
  • Organizer: 表面技術協会第126回講演大会
  • Place of Presentation: 北海道
  • Year and Date: 2012-09-27
• [Presentation] Transparent ZnO Films Fabricated by Solution Process "Spin-Spray" at Different pH (2012)
  • Author(s): Jeong Soo HONG, Nobuhiro Matsushita, et al.
  • Organizer: 2012 MRS Spring Meeting
  • Place of Presentation: San Francisco, USA
• [Presentation] Low-temperature Aqueous Synthesis and Post UV Treatment for Highly Conductive Transparent ZnO Films (2012)
  • Author(s): Hajime WAGATA, Nobuhiro Matsushita, et al.
  • Organizer: 2012 MRS Spring Meeting
  • Place of Presentation: San Francisco, USA
• [Presentation] 溶液プロセスによる鉄酸化物/ZnO積層膜の作製 (2012)
  • Author(s): 洪正洙、松下伸広, ほか
  • Organizer: 粉体粉末冶金協会平成24年度春季大会
  • Place of Presentation: 京都
• [Presentation] Comparison of Crystallographic and Electrical Properties of ZnO Films Fabricated by Dry and Wet Processes (2012)
  • Author(s): Jeong Soo HONG, Nobuhiro Matsushita, et al.
  • Organizer: 4th Int'l Congress 0n Ceramics
  • Place of Presentation: Chicago, USA
• [Presentation] Highly-Resistive Magnetic Films and Transparent Conductive Filoms F abricated Spin-Spray Method; International Conference on Tranditional and Advanced Ceramic (2012)
  • Author(s): Nobuhiro MATSUSHITA, et al.
  • Organizer: International Conference on Tranditional and Advanced Ceramics
  • Place of Presentation: Bangkok, Thailand(招待講演)
• [Presentation] 溶液プロセスによる透明ZnO膜の堆積と紫外線照射による導電性の変化 (2012)
  • Author(s): 洪正沫、松下伸広, ほか
  • Organizer: 日本セラミックス協会第25回秋季シンポジウム
  • Place of Presentation: 名古屋
• [Presentation] 低環境負荷水溶液プロセスによる透明導電性酸化亜鉛膜の作製 (2012)
  • Author(s): 我田元、松下伸広, ほか
  • Organizer: 日本セラミックス協会第25回秋季シンポジウム
  • Place of Presentation: 名古屋
• [Presentation] Al Doped ZnO F ilmsF abricated by Aqueous Solution Process (2012)
  • Author(s): Jeong Soo HONG, Nobuhiro Matsushita, et al.
  • Organizer: 2012 MRS Fall Meeting
  • Place of Presentation: Boston, USA
• [Remarks] 東京工業大学 応用セラミックス研究所 松下研究室
  • URL: http://www.msl.titech.ac.jp/~matsushita/index.html
• [Remarks] 東京工業大学 応用セラミックス研究所 松下伸広
  • URL: http://www.msl.titech.ac.jp/member/profile/matsushita.html
• [Remarks] 松下研究室 応用セラミックス研究所 東京工業大学
  • URL: http://www.msl.titech.ac.jp/~matsushita/#