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Three-dimensional microstructuring using femtosecond laser nonlinear lithography and its application to microfluidic devices

Research Project

Project/Area Number 24360299
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Material processing/treatments
Research InstitutionYamagata University (2013-2014)
Hokkaido University (2012)

Principal Investigator

NISHIYAMA Hiroaki  山形大学, 理工学研究科, 准教授 (80403153)

Co-Investigator(Kenkyū-buntansha) 西井 準治  北海道大学, 電子科学研究所, 教授 (60357697)
Project Period (FY) 2012-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥17,420,000 (Direct Cost: ¥13,400,000、Indirect Cost: ¥4,020,000)
Fiscal Year 2014: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Fiscal Year 2013: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2012: ¥9,750,000 (Direct Cost: ¥7,500,000、Indirect Cost: ¥2,250,000)
Keywordsフェムト秒レーザ / 金属ナノ構造 / プラズモン / 表面プラズモン共鳴 / 光還元 / 非線形光学 / 立体的微細加工
Outline of Final Research Achievements

In this study, we investigated interaction between femtosecond laser pulses and materials including photoresists and metallic nanostructures. When highly-repetitive focused femtosecond laser pulses with low-NA lenses, specific channel propagation could be observed. We revealed that the origin of such propagation was heat accumulation effect. In addition, femtosecond laser pulses induced plasmonic modes on metallic nanostructures, resulting strong electromagnetic field on metal surfaces. Optical experiments and theoretical analysis show that such strong electromagnetic fields affect multi-photon reduction in AgNO3 solution.

Report

(4 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Annual Research Report
  • 2012 Annual Research Report
  • Research Products

    (23 results)

All 2015 2014 2013 2012

All Journal Article (6 results) (of which Peer Reviewed: 6 results,  Acknowledgement Compliant: 2 results) Presentation (17 results) (of which Invited: 1 results)

  • [Journal Article] Nanoplastic deformation on Ti-39 at.% Al single crystals for manipulation of every single lamella2014

    • Author(s)
      D.X. Wei, Y. Koizumi, H. Nishiyama, A. Yamanaka, M. Yoshino, S. Miyamoto, K. Yoshimi, A. Chiba
    • Journal Title

      Acta Materialia

      Volume: 76 Pages: 331-341

    • DOI

      10.1016/j.actamat.2014.05.031

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Tunable plasmonic filters using laser-polymerized 3D micro-springs2014

    • Author(s)
      H. Nishiyama, Y. Abe, T. Ichimura, Y. Ohzeki, Y. Saito
    • Journal Title

      Proc. JSME/ASME2014 International Conference on Materials and Processing 2014

      Volume: 1

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] フェムト秒レーザで作製した複合プラズモニック構造と高感度センシング2014

    • Author(s)
      西山宏昭,大関透典
    • Journal Title

      第6回マイクロナノ工学シンポジウムプロシーディングス

      Volume: 1

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Evaluation of demolding force for glass-imprint process2013

    • Author(s)
      H. Ikeda, H. Kasa, H. Nishiyama and J. Nishii
    • Journal Title

      Journal of Non-Crystalline Solids

      Volume: 383 Pages: 66-70

    • DOI

      10.1016/j.jnoncrysol.2013.04.055

    • NAID

      120005446627

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] ダイアフラム構造による可変プラズモニックグレーティングの作製2013

    • Author(s)
      西山宏昭,柴田千尋
    • Journal Title

      第30回センサマイクロマシンと応用システムシンポジウムプロシーディングス

      Volume: 1

    • NAID

      40020161736

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Carbon nanotube growth on a pointed bulk electrode using femtosecond laser nonlinear lithography2013

    • Author(s)
      H. Nishiyama, T. Iba, Y. Hirata
    • Journal Title

      Applied Physics A

      Volume: Feb

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Presentation] プラズモン援用フェムト秒レーザナノ還元の偏波依存性制御2015

    • Author(s)
      西山宏昭,大関透典
    • Organizer
      第62回春季応用物理学会学術講演会
    • Place of Presentation
      東海大学
    • Year and Date
      2015-03-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] Femtosecond laser fabrication of hybrid plasmonic nanostructures2014

    • Author(s)
      H. Nishiyama, Y. Ohzeki
    • Organizer
      27th International Micro processes and Nanotechnology Conference
    • Place of Presentation
      ヒルトン福岡シーホーク
    • Year and Date
      2014-11-07
    • Related Report
      2014 Annual Research Report
  • [Presentation] フェムト秒レーザで作製した複合プラズモニック構造と高感度センシング2014

    • Author(s)
      西山宏昭,大関透典
    • Organizer
      日本機械学会第6回マイクロナノ工学シンポジウム
    • Place of Presentation
      くびびきメッセ(松江市)
    • Year and Date
      2014-10-20 – 2014-10-22
    • Related Report
      2014 Annual Research Report
  • [Presentation] プラズモン援用フェムト秒レーザ多光子還元による複合金属構造の作製2014

    • Author(s)
      西山宏昭,大関透典
    • Organizer
      第75回秋季応用物理学会学術講演会
    • Place of Presentation
      北海道大学
    • Year and Date
      2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] Tunable plasmonic filters using laser-polymerized 3D micro-springs2014

    • Author(s)
      H. Nishiyama, Y. Ohzeki
    • Organizer
      JSME/ASME2014 International Conference on Materials and Processing 2014
    • Place of Presentation
      Cobo center (USA)
    • Year and Date
      2014-06-10
    • Related Report
      2014 Annual Research Report
  • [Presentation] プラズモニックナノ構造上での レーザ多光子還元挙動とセンシング2014

    • Author(s)
      西山宏昭,岡本晋太朗
    • Organizer
      第34回レーザー学会
    • Place of Presentation
      北九州国際会議場
    • Related Report
      2013 Annual Research Report
  • [Presentation] プラズモニックグレーティング上でのフェムト秒レーザ光還元挙動2013

    • Author(s)
      西山宏昭,岡本晋太朗,西井準治
    • Organizer
      春季第60回応用物理学会学術講演会
    • Place of Presentation
      神奈川工科、大学(厚木市)
    • Year and Date
      2013-03-30
    • Related Report
      2012 Annual Research Report
  • [Presentation] ダイアプラム構造によるプラズモニックグレーティングの光学特性制御2013

    • Author(s)
      西山宏昭,柴田千尋,西井準治
    • Organizer
      春季第60回応用物理学会学術講演会
    • Place of Presentation
      神奈川工科大学(厚木市)
    • Year and Date
      2013-03-29
    • Related Report
      2012 Annual Research Report
  • [Presentation] プラズモニック金属回折格子上でのフェムト秒レーザ多光子還元挙動2013

    • Author(s)
      西山宏昭,岡本晋太朗,西井準治
    • Organizer
      レーザー学会学術講演会第33回年次大会
    • Place of Presentation
      姫路商工会議所(姫路市)
    • Year and Date
      2013-01-30
    • Related Report
      2012 Annual Research Report
  • [Presentation] フェムト秒レーザによるプラズモニック構造上への銀ナノ粒子配置2013

    • Author(s)
      西山宏昭,岡本晋太朗
    • Organizer
      第74回秋季応用物理学会学術講演会
    • Place of Presentation
      同志社大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] 高感度センシングのためのプラズモニック構造上でのレーザ誘起ナノ粒子合成2013

    • Author(s)
      西山宏昭
    • Organizer
      第79回レーザ加工学会
    • Place of Presentation
      大阪大学
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] ダイアフラム構造による可変プラズモニックグレーティングの作製2013

    • Author(s)
      西山宏昭,柴田千尋
    • Organizer
      第30回センサマイクロマシンと応用システムシンポジウム
    • Place of Presentation
      仙台国際センター
    • Related Report
      2013 Annual Research Report
  • [Presentation] Fs laser induced nanoparticle precipitation using plasmonic enhancement effects2013

    • Author(s)
      Hiroaki Nishiyama, Shintaro Okamoto
    • Organizer
      The 6th International Congress on Laser Advanced Materials Processing
    • Place of Presentation
      toki messe, Niigata
    • Related Report
      2013 Annual Research Report
  • [Presentation] Femtosecond laser-induced metal precipitation on plasmoni gratings2012

    • Author(s)
      s. Okamoto, H.Nishiyama, J.Nishii
    • Organizer
      The 13th RIES-Hokudai International Symposium
    • Place of Presentation
      Chateraise Gateaux Kingdom Sapporo (sapporo)
    • Year and Date
      2012-12-13
    • Related Report
      2012 Annual Research Report
  • [Presentation] 金属構造がフェムト秒レーザ二光子還元に与える影響2012

    • Author(s)
      岡本晋太朗,西山宏昭,西井準治
    • Organizer
      2012秋季第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学・松山大学(松山市)
    • Year and Date
      2012-09-12
    • Related Report
      2012 Annual Research Report
  • [Presentation] Guiding mode generation in chemically amplified resists induced by femtosecond laser direct polymerization2012

    • Author(s)
      H. Nishiyama, M. Mizoshiri, J. Nishii
    • Organizer
      LPM2012
    • Place of Presentation
      The Catholic Univ. of America, Washington (USA)
    • Year and Date
      2012-06-13
    • Related Report
      2012 Annual Research Report
  • [Presentation] 非線形光リソグラフィによる立体的表面微細構造の形成とデバイス応用2012

    • Author(s)
      西山宏昭
    • Organizer
      第77回レーザ加工学会
    • Place of Presentation
      大阪大学 銀杏会館(吹田市)(招待講演)
    • Year and Date
      2012-05-25
    • Related Report
      2012 Annual Research Report

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Published: 2012-04-24   Modified: 2019-07-29  

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