Fabrication of optical polymer waveguide switch using proton beam direct writing technique

• Project/Area Number: 24510119
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Quantum beam science
• Research Institution: Gunma University
• Principal Investigator: HANAIZUMU Osamu 群馬大学, 大学院理工学府, 教授 (80183911)
• Co-Investigator(Kenkyū-buntansha): MIURA Kenta 群馬大学, 大学院理工学府, 准教授 (40396651)
• Project Period (FY): 2012-04-01 – 2015-03-31
• Project Status: Completed (Fiscal Year 2014)
• Budget Amount: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000); Fiscal Year 2014: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2013: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2012: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
• Keywords: ポリマー光導波路 / 光スイッチ / プロトンビーム描画

Outline of Final Research Achievements

We demonstrated a PMMA-based thermo-optic switch consisting of a Mach-Zehnder (MZ) type waveguide drawn by proton beam writing (PBW) and working at a wavelength of 1.55 μm. The MZ waveguide was drawn by symmetrically coupling two Y junctions with a core width of 8 μm and a branching angle of 2 deg. A Ti thin-film heater and Al electrodes were formed on the surface of the MZ waveguide using conventional photolithography and wet-etching processes. An optical switching power of 44 mW were obtained from the sample.

Research Products

• [Journal Article] Development of embedded Mach-Zehnder optical waveguide ｓtructures in polydimethylsiloxane thin films by proton beam writing (2015)
  • Author(s): W. Kada, K. Miura, H. Kato, R. Saruya, A. Kubota, T. Satoh, M. Koka, Y. Ishii, T. Kamiya, H. Nishikawa, and O. Hanaizumi
  • Journal Title: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Volume: 348 Pages: 218-222
  • DOI: 10.1016/j.nimb.2014.12.041
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Demonstration of thermo-optic switch consisting of Mach-Zehnder polymer waveguide drawn using focused proton beam (2014)
  • Author(s): K. Miura, H. Kiryu, Y. Ozawa, A. Kubota, Y. Hiratani, O. Hanaizumi, T. Satoh, Y. Ishii, M. Kohka, K. Takano, T. Ohkubo, A. Yamazaki, W. Kada, A. Yokoyama, and T. Kamiya
  • Journal Title: Key Engineering Materials Volume: 596 Pages: 134-138
  • DOI: 10.4028/www.scientific.net/kem.596.134
  • Peer Reviewed
• [Journal Article] Observation of optical soliton-like propagation in dye-doped nematic liquid crystals with homogeneous alignment (2014)
  • Author(s): T. Sasaki, K. Miura, O. Hanaizumi, N. Kawatsuki, and H. Ono
  • Journal Title: Key Engineering Materials Volume: 596 Pages: 139-143
  • DOI: 10.4028/www.scientific.net/kem.596.139
  • Peer Reviewed
• [Journal Article] Visible-light emission properties of erbium-doped tantalum-oxide films produced by co-sputtering (2013)
  • Author(s): M. K. Singh, K. Miura, G. Fusegi, K. Kano, and O. Hanaizumi
  • Journal Title: Key Engineering Materials Volume: 534 Pages: 154-157
  • DOI: 10.4028/www.scientific.net/kem.534.154
  • Peer Reviewed
• [Journal Article] Fabrication of Mach-Zehnder polymer waveguides by a direct-drawing technique using a focused proton beam (2013)
  • Author(s): K. Miura, T. Satoh, Y. Ishii, H. Kiryu, Y. Ozawa, M. Kohka, K. Takano, T. Ohkubo, A. Yamazaki, W. Kada, A. Yokoyama, T. Kamiya, and O. Hanaizumi
  • Journal Title: Key Engineering Materials Volume: 534 Pages: 158-161
  • DOI: 10.4028/www.scientific.net/kem.534.158
  • Peer Reviewed
• [Journal Article] Design and analysis of taper structure for light coupling into photonic crystal waveguides fabricated by Si-ion implantation (2013)
  • Author(s): A. V. Umenyi, S. Kikuchi, T. Sasaki, K. Miura, and O. Hanaizumi
  • Journal Title: Key Engineering Materials Volume: 534 Pages: 162-166
  • DOI: 10.4028/www.scientific.net/kem.534.162
  • Peer Reviewed
• [Journal Article] Light-emission properties of europium-doped tantalum-oxide thin films deposited by radio-frequency magnetron sputtering (2012)
  • Author(s): K. Miura, Y. Arai, T. Osawa, and O. Hanaizumi
  • Journal Title: Journal of Light & Visual Environment Volume: 36 Pages: 64-67
  • NAID: 10030507397
  • Peer Reviewed
• [Presentation] 集束陽子ビーム加工によるPDMS薄膜内包型光スイッチング素子の開発 (2015)
  • Author(s): 川端駿介、猿谷良太、加藤聖、新木潤、三浦健太、加田渉、佐藤隆博、江夏昌志、石井保行、神谷富裕、西川宏之、花泉修
  • Organizer: 第62回応用物理学会春季学術講演会
  • Place of Presentation: 東海大学湘南キャンパス（神奈川県平塚市）
  • Year and Date: 2015-03-13
• [Presentation] Fabrication of Mach-Zehnder optical waveguide structures in PDMS thin films using proton beam writing (2014)
  • Author(s): K. Kano, R. Saruya, S. Kawabata, J. Araki, K. Noguchi, W. Kada, K. Miura, H. Kato, T. Satoh, M. Koka, Y. Ishii, T. Kamiya, H. Nishikawa, and O. Hanaizumi
  • Organizer: 6th International Conference on Advanced Micro-Device Engineering
  • Place of Presentation: Kiryu, Japan
  • Year and Date: 2014-12-05
• [Presentation] Development of Mach-Zehnder optical waveguide embedded in PDMS thin films by proton beam writing (2014)
  • Author(s): W. Kada, K. Miura, R. Saruya, H. Kato, A. Kubota, T. Satoh, M. Koka, Y. Ishii, T. Kamiya, H. Nishikawa, and O. Hanaizumi
  • Organizer: 4th International Symposium on Element Innovation
  • Place of Presentation: Kiryu, Japan
  • Year and Date: 2014-10-24
• [Presentation] Development of embedded Mach-Zehnder optical waveguide structures in PDMS thin films by proton beam writing (2014)
  • Author(s): W. Kada, R. Saruya, H. Kato, A. Kubota, K. Miura, T. Satoh, M. Koka, Y. Ishii, T. Kamiya, H. Nishikawa, and O. Hanaizumi
  • Organizer: 14th International Conference on Nuclear Microprobe Technology and Applications
  • Place of Presentation: Padova, Italy
  • Year and Date: 2014-07-10
• [Presentation] Prototype of thermo-optic switch consisting of Mach-Zehnder polymer waveguide drawn by focused proton beam
  • Author(s): K. Miura, T. Satoh, Y. Ishii, M. Koka, K. Takano, T. Ohkubo, A. Yamazaki, W. Kada, A. Yokoyama, T. Kamiya, H. Kiryu, Y. Ozawa, A. Kubota, and O. Hanaizumi
  • Organizer: 2013 Conference on Lasers and Electro-Optics Europe and the International Quantum Electronics Conference (CLEO/Europe-IQEC 2013)
  • Place of Presentation: Munich, Germany
• [Presentation] Visible photoluminescence properties of Eu-doped Ta2O5 sputtered thin films
  • Author(s): K. Miura, T. Suzuki, T. Osawa, and O. Hanaizumi
  • Organizer: Optics & Photonics Taiwan, International Conference (OPTIC 2013)
  • Place of Presentation: Zhongli, Taiwan
• [Presentation] Fabrication of microstructures embedded in SC-CVD diamond by focused ion microbeam
  • Author(s): W. Kada, Y. Kanbayashi, K. Miura, R. Saruya, A. Kubota,T. Satoh, M. Koka, T. Ohkubo, Y. Ishii, T. Kamiya, and O. Hanaizumi
  • Organizer: 5th International Conference on Advanced Micro-Device Engineering (AMDE 2013)
  • Place of Presentation: Kiryu, Japan
• [Presentation] Fabrication of Mach-Zehnder type optical waveguides in flexible acrylic sheets using proton beam writing
  • Author(s): A. Kubota, R. Saruya, K. Noguchi, W. Kada, K. Miura, O. Hanaizumi, T. Satoh, Y. Ishii, M. Koka, T. Ohkubo, A. Yokoyama, and T. Kamiya
  • Organizer: 5th International Conference on Advanced Micro-Device Engineering (AMDE 2013)
  • Place of Presentation: Kiryu, Japan
• [Presentation] Enhancement in optical transmittance of polymer dispersed liquid crystal film by surface rubbing
  • Author(s): I. Syazwani, W. Kada, K. Miura, and O. Hanaizumi
  • Organizer: 5th International Conference on Advanced Micro-Device Engineering (AMDE 2013)
  • Place of Presentation: Kiryu, Japan
• [Presentation] Visible-light emission properties of carbon-doped silica glasses after silicon-ion implantation
  • Author(s): A. Kawashima, K. Kano, K. Noguchi, W. Kada, K. Miura, S. Yamamoto, M. Yoshikawa, and O. Hanaizumi
  • Organizer: 5th International Conference on Advanced Micro-Device Engineering (AMDE 2013)
  • Place of Presentation: Kiryu, Japan
• [Presentation] Design and fabrication of mode-field expanded ZnO/HfO2 waveguides for SHG device applications
  • Author(s): H. Mizuguchi, R. Tanaka, K. Miura, and O. Hanaizumi
  • Organizer: 5th International Conference on Advanced Micro-Device Engineering (AMDE 2013)
  • Place of Presentation: Kiryu, Japan
• [Presentation] Photoluminescence properties of Ce, Er, and Eu doped TaOx films deposited by sputtering
  • Author(s): T. Osawa, Y. Yokota, H. Zobaer, K. Noguchi, W. Kada, K. Miura, and O. Hanaizumi
  • Organizer: 5th International Conference on Advanced Micro-Device Engineering (AMDE 2013)
  • Place of Presentation: Kiryu, Japan
• [Presentation] Fabrication of Al-doped ZnO/SiO2/p-Si photovoltaic cells by sputtering method
  • Author(s): N. Kanemoto, K. Kashimura, O. Matsumoto, K. Noguchi, W. Kada, K. Miura, and O. Hanaizumi
  • Organizer: 5th International Conference on Advanced Micro-Device Engineering (AMDE 2013)
  • Place of Presentation: Kiryu, Japan
• [Presentation] Improvement of conversion efficiencies of thin-film solar cells using periodic structures
  • Author(s): M. Wang, Y. Yokota, O. Matsumoto, Y. Sakurai , K. Noguchi, W. Kada, K. Miura, and O. Hanaizumi
  • Organizer: 5th International Conference on Advanced Micro-Device Engineering (AMDE 2013)
  • Place of Presentation: Kiryu, Japan
• [Presentation] Direct drawing of optical waveguides in silicon- or carbon-based materials utilizing focused proton beam
  • Author(s): K. Miura, W. Kada, and O. Hanaizumi
  • Organizer: 3rd International Symposium on Element Innovation
  • Place of Presentation: Kiryu, Japan
• [Presentation] PBW微細加工によるPDMSを基材としたフレキシブル光導波路の開発
  • Author(s): 猿谷良太，加藤聖，久保田篤志, 三浦健太，加田渉，佐藤隆博，江夏昌志，石井保行，神谷富裕，西川宏之，花泉修
  • Organizer: 第61回応用物理学会春季学術講演会
  • Place of Presentation: 相模原
• [Presentation] 薄膜CVDダイヤモンド検出器で起こる集束イオンビーム照射効果の連続測定
  • Author(s): 加田渉，岩本直也，Veljko Grilj，牧野高紘，佐藤隆博，小野田忍，Natko Skukan，大島武，Milko Jaksic，神谷富裕，花泉修
  • Organizer: 第61回応用物理学会春季学術講演会
  • Place of Presentation: 相模原
• [Presentation] プロトンビーム描画技術による単結晶CVDダイヤモンド内部への微細構造形成技術の開発
  • Author(s): 神林佑哉，加田渉，猿谷良太，久保田篤志，佐籐隆博，江夏昌志，石井保行，神谷富裕，三浦健太，花泉修
  • Organizer: 第61回応用物理学会春季学術講演会
  • Place of Presentation: 相模原
• [Presentation] プロトンビーム描画による導波路型光スイッチの試作
  • Author(s): 三浦健太，佐藤隆博，石井保行，江夏昌志，横山彰人，神谷富裕，平谷雄二，桐生弘武，小澤優介，加田渉，花泉修
  • Organizer: 電子情報通信学会光エレクトロニクス研究会
  • Place of Presentation: 京都
• [Presentation] Fabrication of polymer optical waveguides for the 1.5-μm band using proton beam writing
  • Author(s): K. Miura, T. Satoh, Y. Ishii, M. Kohka, K. Takano, T. Ohkubo, A. Yamazaki, W. Kada, A. Yokoyama, T. Kamiya, H. Kiryu, Y. Ozawa and O. Hanaizumi
  • Organizer: IUMRS-International Conference on Electronic Materials (IUMRS-ICEM2012)
  • Place of Presentation: Yokohama, Japan
• [Presentation] Demonstration of a Mach-Zehnder type thermo-optic switch produced by utilizing proton beam irradiation
  • Author(s): K. Miura, H. Kiryu, Y. Ozawa, A. Kubota, and O. Hanaizumi
  • Organizer: Pre ASiS-IV Symposium, 2nd International Symposium on Element Innovation, 8th International Symposium on Silicon Science, and 5th Symposium of Carbon Material Creative Association
  • Place of Presentation: Kiryu, Japan
• [Presentation] Mach-Zehnder type thermo-optic switch fabricated by proton beam writing
  • Author(s): Y. Ozawa, A. Kubota, K. Miura, O. Hanaizumi, K. Noguchi, T. Satoh, Y. Ishii, M. Kohka, K. Takano, T. Ohkubo, A. Yamazaki, W. Kada, A. Yokoyama and T. Kamiya
  • Organizer: 4th International Conference on Advanced Micro-Device Engineering (AMDE2012)
  • Place of Presentation: Kiryu, Japan
• [Presentation] Production conditions and optical characteristic of polymer dispersed liquid crystal
  • Author(s): Y. Hayakawa, T. Sasaki, K. Miura, and O. Hanaizumi
  • Organizer: 4th International Conference on Advanced Micro-Device Engineering (AMDE2012)
  • Place of Presentation: Kiryu, Japan
• [Presentation] Polarization-modulation photorefractive effect based on nematic liquid crystal system doped with dyes and fullerene
  • Author(s): S. Hajar, T. Sasaki, K. Miura, and O. Hanaizumi
  • Organizer: 4th International Conference on Advanced Micro-Device Engineering (AMDE2012)
  • Place of Presentation: Kiryu, Japan
• [Presentation] Photoluminescence properties of light-emitting SiO2 substrates implanted with Si and C ions
  • Author(s): K. Inada, A. Kawashima, K. Kanou, K. Noguchi, K. Miura, O. Hanaizumi, S. Yamamoto, K. Kawaguchi, and M. Yoshikawa
  • Organizer: 4th International Conference on Advanced Micro-Device Engineering (AMDE2012)
  • Place of Presentation: Kiryu, Japan
• [Presentation] Numerical analysis of optical wave guide switch with liquid crystal cladding
  • Author(s): R. Hayashi, T. Sasaki, K. Miura, and O. Hanaizumi
  • Organizer: 4th International Conference on Advanced Micro-Device Engineering (AMDE2012)
  • Place of Presentation: Kiryu, Japan
• [Presentation] Fabrication of second harmonic generation devices composed of zinc oxide thin films
  • Author(s): R. Tanaka, H. Mizuguchi, Y. Uno, K. Miura, and O. Hanaizumi
  • Organizer: 4th International Conference on Advanced Micro-Device Engineering (AMDE2012)
  • Place of Presentation: Kiryu, Japan
• [Presentation] Demonstration of photovoltaic devices consisting of Al-doped ZnO thin films deposited on Si substrates by sputtering in Ar and H2 gas
  • Author(s): Y. Takano, T. Suzuki, N. Kanemoto, R. Morita, K. Noguchi, K. Miura, and O. Hanaizumi
  • Organizer: 4th International Conference on Advanced Micro-Device Engineering (AMDE2012)
  • Place of Presentation: Kiryu, Japan
• [Presentation] Optical properties of rare-earth doped tantalum-oxide films deposited by sputtering
  • Author(s): T. Suzuki, Y. Takano, T. Osawa, Y. Yokota, K. Noguchi, K. Miura, and O. Hanaizumi
  • Organizer: 4th International Conference on Advanced Micro-Device Engineering (AMDE2012)
  • Place of Presentation: Kiryu, Japan
• [Presentation] Application of periodic structures to thin film solar cells for improvement of their conversion efficiencies
  • Author(s): J. Yokota, M. Wang, T. Suzuki, K. Noguchi, K. Miura, and O. Hanaizumi
  • Organizer: 4th International Conference on Advanced Micro-Device Engineering (AMDE2012)
  • Place of Presentation: Kiryu, Japan
• [Remarks] 群馬大学花泉研究室ホームページ
  • URL: http://www.el.gunma-u.ac.jp/~hana/
• [Remarks] 群馬大学花泉研究室ホームページ
  • URL: http://www.el.gunma-u.ac.jp/~hana/
• [Remarks] 花泉研究室
  • URL: http://www.el.gunma-u.ac.jp/~hana/