| Budget Amount *help |
¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000)
Fiscal Year 2014: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2013: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2012: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
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| Outline of Final Research Achievements |
We aimed in this project at upgrading performance of our-developing x-ray circular multilayer zone plate (CMZP), and at about 25-nm focused beam size. In the first year, the fabrication procedure was optimized and the design parameters were determined based on optical performance calculation using coupled-wave theory. In the second and third year, the upgrade was carried out aiming at 30-nm and 25-nm focused beam size step by step. One CMZP aiming at 30-nm beam size obtained 30-nm beam size and the other CMZP aiming at 25-nm beam size obtained 24.2-nm beam size. As the results, the original goal was almost achieved.
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