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Development of multicolor uncooled infrared array sensor

Research Project

Project/Area Number 24510172
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Microdevices/Nanodevices
Research InstitutionRitsumeikan University

Principal Investigator

KIMATA Masafumi  立命館大学, 理工学部, 教授 (60388121)

Project Period (FY) 2012-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000)
Fiscal Year 2014: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2013: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2012: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Keywords赤外線センサ / MEMS / 多波長
Outline of Final Research Achievements

We developed a basic technology for integrating pixels with different spectral responses on an infrared array sensor chip. Two types, an interference infrared absorber and plasmonic infrared absorber, were studied, and we have reached a conclusion that the plasmonic infrared absorber is superior from the viewpoint of productivity and performance. A problem of out-of-band sensitivity in the plasmonic infrared sensor has been solved by introducing a differential system with a reference pixel. We also showed that polarization-selective sensing is possible with an asymmetric plasmonics infrared absorber.

Report

(4 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • 2012 Research-status Report
  • Research Products

    (46 results)

All 2014 2013 Other

All Journal Article (8 results) (of which Peer Reviewed: 7 results) Presentation (38 results) (of which Invited: 5 results)

  • [Journal Article] Optimization of Two-Dimensional Plasmonic Absorbers Based on a Metamaterial and Cylindrical Cavity Model Approach for High-Responsivity Wavelength-Selective Uncooled Infrared Sensors2014

    • Author(s)
      Kyohei Masuda, Shinpei Ogawa, Yousuke Takagawa, and Masafumi Kimata
    • Journal Title

      Sensors and Materials

      Volume: 26 Pages: 215-223

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development Status of Type II Superlattice Infrared Detector in JAXA2014

    • Author(s)
      Haruyoshi Katayama, Michito Sakai, Junpei Murooka,Masafumi Kimata, Takahiro Kitada, Toshiro Isu,Mikhail Patrashin, Iwao Hosako and Yasuhiro Iguchi
    • Journal Title

      Sensors and Materials

      Volume: 26 Pages: 225-234

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Mid-infrared Type-II InAs/GaSb Superlattice Photodiodes Fabricated on InP Substrates2014

    • Author(s)
      Kohei Miura, Yasuhiro Iguchi, Tsukuru Katsuyama, Yuichi Kawamura, Junpei Murooka, Haruyoshi Katayama, Shota Sugano, Tomoko Takekawa and Masafumi Kimata
    • Journal Title

      Sensors and Materials

      Volume: 26 Pages: 245-251

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Polarization-selective uncooled infrared sensor with asymmetric two-dimensional plasmonic absorber2014

    • Author(s)
      Shinpei Ogawa, Kyohei Masuda, Yousuke Takagawa, and Masafumi Kimata
    • Journal Title

      Optical Engineering

      Volume: 53 Issue: 10 Pages: 1071101-1071105

    • DOI

      10.1117/1.oe.53.10.107110

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of Type II Superlattice Infrared Detector2014

    • Author(s)
      Haruyoshi Katayama, Masafumi Kimata, et al.
    • Journal Title

      Sensors and Materials

      Volume: 印刷中

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Mid-infrared Type-II InAs/GaSb Superlattice Photodiodes Fabricated on InP Substrates2014

    • Author(s)
      Kohei Miura, Masafumi Kimata, et al.
    • Journal Title

      Sensors and Materials

      Volume: 印刷中

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Optimization of Two-dimensional Plasmonic Absorbers based on a Metamaterial and Cylindrical Cavity Model Approach for High Responsivity Wavelength Selective Uncooled Infrared Sensors2014

    • Author(s)
      Kyohei Masuda, Masafumi Kimata, et al.
    • Journal Title

      Sensors and Materials

      Volume: 印刷中

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] プラズモニクスによる波長選択型非冷却赤外センサ2013

    • Author(s)
      小川新平、木股雅章
    • Journal Title

      三菱電機技報

      Volume: 87 Pages: 353-356

    • Related Report
      2013 Research-status Report
  • [Presentation] 非冷却赤外線イメージセンサと自動車応用2014

    • Author(s)
      木股雅章
    • Organizer
      第30回ポリマー光部品(POC)研究会
    • Place of Presentation
      産業技術総合研究所関西センター(大阪府)
    • Year and Date
      2014-11-19
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 1 次元プラズモニックメタマテリアル吸収体による偏光検知非冷却赤外線センサ2014

    • Author(s)
      高川 陽輔,小川 新平, 増田 恭平, 宮下 晃一,木股 雅章
    • Organizer
      第75 回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学(北海道)
    • Year and Date
      2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] 高機能非冷却赤外線センサの高性能化I: 3 次元プラズモニックメタマテリアル吸収体の基礎検討2014

    • Author(s)
      小川 新平,藤澤 大介, 秦 久敏,植月 満治, 三崎 浩司,木股 雅章
    • Organizer
      第75 回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学(北海道)
    • Year and Date
      2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] 高機能非冷却赤外線センサの高性能化Ⅱ: 3 次元プラズモニックメタマテリアル吸収体の光学特性2014

    • Author(s)
      藤澤 大介,小川 新平, 秦 久敏,植月 満治, 三崎 浩司,木股 雅章
    • Organizer
      第75 回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学(北海道)
    • Year and Date
      2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] 窒素プラズマ処理によるInAs/GaSb 超格子の表面酸化抑制2014

    • Author(s)
      辻 幸洋,稲田 博史,町長 賢一,Sundararajan Balasekaran,三浦 広平,猪口 康博,勝山 造, 片山晴善, 木股雅章
    • Organizer
      第75 回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学(北海道)
    • Year and Date
      2014-09-17
    • Related Report
      2014 Annual Research Report
  • [Presentation] 高機能非冷却赤外線センサの高性能化III - ナノギャップ3 次元プラズモニックメタマテリアル吸収体の作製-2014

    • Author(s)
      植月 満治,秦 久敏,三崎 浩司,小川 新平,藤澤 大介, 木股 雅章
    • Organizer
      第75 回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学(北海道)
    • Year and Date
      2014-09-17
    • Related Report
      2014 Annual Research Report
  • [Presentation] 赤外線イメージングとその応用2014

    • Author(s)
      木股雅章
    • Organizer
      日本光学会光設計研究グループ 第54回研究会
    • Place of Presentation
      宇都宮大学(栃木県)
    • Year and Date
      2014-07-25
    • Related Report
      2014 Annual Research Report
  • [Presentation] 赤外線センサ2014

    • Author(s)
      木股雅章
    • Organizer
      半導体・集積回路技術第78回シンポジウム
    • Place of Presentation
      東京理科大学森戸記念館(東京都)
    • Year and Date
      2014-07-18
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Measurement of absorption/external quantum efficiency of InAs/GaSb Type II superlattice2014

    • Author(s)
      Haruyoshi Katayama, Tomoko Takekawa, Masafumi Kimata, Hiroshi Inada, and Yasuhiro Iguchi
    • Organizer
      Quantum Structure Infrared Photodetector international Conference
    • Place of Presentation
      Santa Fe (USA)
    • Year and Date
      2014-06-30
    • Related Report
      2014 Annual Research Report
  • [Presentation] Polarization selective uncooled infrared sensor using an asymmetric two-dimensional plasmonic absorber2014

    • Author(s)
      Shinpei Ogawa, Kyohei Masuda, Yousuke Takagawa, and Masafumi Kimata
    • Organizer
      SPIE DSS (Defense, Security and Sensing)
    • Place of Presentation
      Baltimore (USA)
    • Year and Date
      2014-05-07
    • Related Report
      2014 Annual Research Report
  • [Presentation] Pretreatment for surface leakage current reduction in type-II superlattice MWIR photodetectors2014

    • Author(s)
      Hiroshi Inada, Ken-ichi Machinaga, Sundararajan Balasekaran, Kouhei Miura, Masaki Migita, Yukihiro Tsuji, Yasuhiro Iguchi, Haruyoshi Katayama, and Masafumi Kimata
    • Organizer
      SPIE DSS (Defense, Security and Sensing)
    • Place of Presentation
      Baltimore (USA)
    • Year and Date
      2014-05-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] Dark current measurement of Type-II superlattice infrared focal plane array detector2014

    • Author(s)
      Michito Sakai, Haruyoshi Katayama, Junpei Murooka, Masafumi Kimata, and Yasuhiro Iguchi
    • Organizer
      SPIE DSS (Defense, Security and Sensing)
    • Place of Presentation
      Baltimore (USA)
    • Year and Date
      2014-05-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] Three-dimensional plasmonic absorber based on microdisk resonators for high performance wavelength selective uncooled infrared sensors2014

    • Author(s)
      S. Ogawa, D. Fujisawa, T. Maegawa, M. Ueno, and M. Kimata
    • Organizer
      SPIE DSS (Defense, Security and Sensing)
    • Place of Presentation
      Baltimore (USA)
    • Year and Date
      2014-05-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] Wavelength selective wideband uncooled infrared sensor by two-dimensional plasmonic absorber

    • Author(s)
      Shinpei Ogawa, Masafumi Kimata, et al.
    • Organizer
      SPIE Defense, Security, and Sensing 2013, Infrared Technology and Applications XXXIX
    • Place of Presentation
      ボルチモア(米国)
    • Related Report
      2013 Research-status Report
  • [Presentation] Development status of Type II superlattice infrared detector in JAXA

    • Author(s)
      H. Katayama, M. Kimata, et al.
    • Organizer
      SPIE Defense, Security, and Sensing 2013, Infrared Technology and Applications XXXIX
    • Place of Presentation
      ボルチモア(米国)
    • Related Report
      2013 Research-status Report
  • [Presentation] WAVELENGTH SELECTIVE UNCOOLED INFRARED SENSOR USING TRIANGULAR-LATTICE PLASMONIC ABSORBERS

    • Author(s)
      Shinpei Ogawa, Masafumi Kimata, et al.
    • Organizer
      IEEE Optical MEMS and Noanophotonics 2013
    • Place of Presentation
      金沢市文化ホール(石川県)
    • Related Report
      2013 Research-status Report
  • [Presentation] 非対称周期構造を導入したプラズモニックメタマテリアルによる多波長選択型非冷却赤外線センサ

    • Author(s)
      高川陽輔、木股雅章 他
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学京田辺キャンパス(京都府)
    • Related Report
      2013 Research-status Report
  • [Presentation] 非対称形状を導入したプラズモニックメタマテリアルによる偏光検知非冷却赤外線センサ

    • Author(s)
      増田 恭平、木股雅章 他
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学京田辺キャンパス(京都府)
    • Related Report
      2013 Research-status Report
  • [Presentation] 非冷却赤外線イメージセンサ

    • Author(s)
      木股雅章
    • Organizer
      日本電子高機能膜フォーラム
    • Place of Presentation
      東大武田先端知ビル(東京都)
    • Related Report
      2013 Research-status Report
  • [Presentation] TRENDS IN SMALL-FORMAT INFRARED ARRAY SENSORS

    • Author(s)
      Masafumi Kimata
    • Organizer
      IEEE Sensors 2013
    • Place of Presentation
      ボルチモア(米国)
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] 非冷却赤外線センサの最新動向

    • Author(s)
      木股雅章
    • Organizer
      センシング技術応用研究会第185回研究例会
    • Place of Presentation
      パナソニック株式会社(滋賀県)
    • Related Report
      2013 Research-status Report
  • [Presentation] 非冷却赤外線センサの最新開発動向

    • Author(s)
      木股雅章
    • Organizer
      オプトロニクス赤外線セミナー
    • Place of Presentation
      東京都立産業貿易センター(東京都)
    • Related Report
      2013 Research-status Report
  • [Presentation] 車載用赤外線イメージセンサ

    • Author(s)
      木股雅章
    • Organizer
      日本工業技術振興協会・映像情報メディア学会共催公開講演会「イメージセンサの最新技術とその応用」
    • Place of Presentation
      東京理科大学森戸記念館(東京都)
    • Related Report
      2013 Research-status Report
  • [Presentation] GaSb/InAs Type-II超格子赤外線センサの量子効率評価

    • Author(s)
      竹川智子、木股雅章 他
    • Organizer
      第11回赤外放射応用関連学会年会
    • Place of Presentation
      東京工科大学蒲田キャンパス(東京都)
    • Related Report
      2013 Research-status Report
  • [Presentation] 赤外線センサ技術の現状と今後の展開

    • Author(s)
      木股雅章
    • Organizer
      第61 回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンパス(神奈川県)
    • Related Report
      2013 Research-status Report
  • [Presentation] プラズモニックメタマテリアルによる非冷却赤外線センサの新機能 -非対称性による偏光検知-

    • Author(s)
      増田恭平、木股雅章 他
    • Organizer
      第62 回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンパス(神奈川県)
    • Related Report
      2013 Research-status Report
  • [Presentation] Development of type II superlattice detector for future space applications at JAXA

    • Author(s)
      Haruyoshi Katayama, Masafumi Kimata, et al.
    • Organizer
      SPIE Defense and Security, Conference on Infrared Technology and Applications XXXVIII
    • Place of Presentation
      米国 ボルチモア
    • Related Report
      2012 Research-status Report
  • [Presentation] 赤外線マイクロレンズアレイ製作におけるグレースケールリソグラフィプロセスの改善

    • Author(s)
      一色淳、山崎陵、木股雅章
    • Organizer
      センサ・マイクロマシン部門総合研究会(マイクロマシン・センサシステム研究会)学会
    • Place of Presentation
      京都府 京都大学
    • Related Report
      2012 Research-status Report
  • [Presentation] Development of type II superlattice detector for future space applications at JAXA

    • Author(s)
      Haruyoshi Katayama, Masafumi Kimata, et al.
    • Organizer
      Quantum Structure Infrared Photodetector International Conference (QSIP 2012)
    • Place of Presentation
      フランス カルジェーズ
    • Related Report
      2012 Research-status Report
  • [Presentation] 非冷却席赤外線センサ

    • Author(s)
      木股雅章
    • Organizer
      透明酸化物・電子材料第166委員会第56回研究会
    • Place of Presentation
      東京都 アイビーホール青学会館
    • Related Report
      2012 Research-status Report
  • [Presentation] IRFPA Development in Japan

    • Author(s)
      Masafumi Kimata
    • Organizer
      Infrared Optoelectronics: Material and Devices (MIOMD 2012)
    • Place of Presentation
      米国 シカゴ
    • Related Report
      2012 Research-status Report
    • Invited
  • [Presentation] Development of type-II superlattice detector for future space applications at JAXA

    • Author(s)
      Haruyoshi Katayama, Masafumi Kimata, et al.
    • Organizer
      Infrared Optoelectronics: Material and Devices (MIOMD 2012)
    • Place of Presentation
      米国 シカゴ
    • Related Report
      2012 Research-status Report
  • [Presentation] プラズモニック吸収体による中・遠赤外域多波長検知非冷却赤外線センサ

    • Author(s)
      菰田潤哉、増田恭平、福島直樹、 小川新平、木股雅章
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛県 愛媛大学
    • Related Report
      2012 Research-status Report
  • [Presentation] プラズモニック吸収体による波長選択型非冷却赤外線センサ‐表面構造の最適化‐

    • Author(s)
      増田恭平、菰田潤哉、福島直樹、小川新平、木股雅章
    • Organizer
      第73回応用物理学会学術講演
    • Place of Presentation
      愛媛県 愛媛大学
    • Related Report
      2012 Research-status Report
  • [Presentation] サーモパイル型赤外線センサ用増幅回路の設計

    • Author(s)
      北川真也、木股雅章
    • Organizer
      日本赤外線学会研究発表会
    • Place of Presentation
      大阪府 関西大学
    • Related Report
      2012 Research-status Report
  • [Presentation] MEMS-based Uncooled Infrared Sensors

    • Author(s)
      Masafumi Kimata
    • Organizer
      The 19th International Display Workshops in conjunction with Asia Display 2012
    • Place of Presentation
      京都府 京都国際会館
    • Related Report
      2012 Research-status Report
    • Invited
  • [Presentation] プラズモニクス吸収体による波長選択型赤外線センサ ー表面格子形状の検討ー

    • Author(s)
      高川陽輔、菰田潤哉、増田恭平、坂田浩太郎、小川新平、木股雅章
    • Organizer
      第60回応用物理学関係連合講演会
    • Place of Presentation
      神奈川県 神奈川工科大学
    • Related Report
      2012 Research-status Report
  • [Presentation] InP 基板上type-II InAs/GaSb 超格子を用いた中赤外センサ

    • Author(s)
      三浦広平,猪口康博,河村裕一,室岡純平,片山晴善,菅野翔太,竹川智子,木股雅章
    • Organizer
      第61回応用物理学関係連合講演会
    • Place of Presentation
      神奈川県 神奈川工科大学
    • Related Report
      2012 Research-status Report

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Published: 2013-05-31   Modified: 2019-07-29  

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