Characterization of Polishing elementary steps with Atomic-Force-Microscope nano machining

• Project/Area Number: 24560143
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: Chiba Institute of Technology
• Principal Investigator: MATSUI Shinsuke 千葉工業大学, 工学部, 教授 (50612769)
• Project Period (FY): 2012-04-01 – 2015-03-31
• Project Status: Completed (Fiscal Year 2014)
• Budget Amount: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000); Fiscal Year 2014: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000); Fiscal Year 2013: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000); Fiscal Year 2012: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
• Keywords: 研磨加工 / 原子間力顕微鏡 / メカのケミカル作用 / AFM / 加工変質層 / ダイヤモンド / 硬脆材料 / 研磨

Outline of Final Research Achievements

Nano-micro scratch machining on the optical fiber end-plane was conducted by Atomic force micro-scope. The machining was done with a AFM tip which can be assumed to a nano-shape cutting edge of an abrasive, and with the machining load which is controlled by the AFM cantilever system. Tip driving by AFM system is enabling to use a well-defined trajectory. This nano-micro machining is thought to reveals the elementary-step of the polishing whose mechanism has not been well-understood yet. The optical fiber for telecommunication used in our experiments is made of silica (SiO2) glass with high purity. Chemical aspects of polishing also can be investigated by the cutting edge material and the scratching atmosphere changing.

Research Products

• [Journal Article] 光ファイバ端面のAFMによるナノ・マイクロ加工 (2014)
  • Author(s): 松井伸介 梅村茂 佐藤天哉
  • Journal Title: 日本材料科学会誌“材料の科学と工学” Volume: 51 Pages: 28-32
  • NAID: 40020003957
  • Peer Reviewed
• [Journal Article] Development of Pin-type Vacuum Chuck for Advanced Polishing (2nd report) (2013)
  • Author(s): 松井伸介 宇根暢篤 鴨打輝正
  • Journal Title: Journal of the Japan Society for Precision Engineering Volume: 79 Issue: 12 Pages: 1246-1250
  • DOI: 10.2493/jjspe.79.1246
  • NAID: 130003384966
  • ISSN: 0912-0289, 1882-675X
  • Peer Reviewed
• [Journal Article] Development of micro milling tool made of single crystalline diamond for ceramic cutting (2013)
  • Author(s): Hirofumi Suzuki, Mutsumi Okada, Katsuji Fujii, Shinsuke Matsui, Yutaka Yamagata
  • Journal Title: CIRP Annals of Manufacturing Technology Volume: 62 Pages: 59-62
  • Peer Reviewed
• [Journal Article] Micro taper machining of optical fiber ends for on-site assembled connector (2^nd report) (2013)
  • Author(s): 松井伸介 阿部宜輝
  • Journal Title: Journal of the Japan Society for Abrasive Technology Volume: 57 Issue: 7 Pages: 459-464
  • DOI: 10.11420/jsat.57.459
  • NAID: 10031182909
  • ISSN: 0914-2703, 1880-7534
  • Peer Reviewed
• [Presentation] ECRスパッタ法による高硬度･極薄膜作成のための検討 (2015)
  • Author(s): 若井俊 上方翔平 松井伸介 梅村茂
  • Organizer: 2015年度精密工学会春季大会
  • Place of Presentation: 東洋大学（東京都文京区）
  • Year and Date: 2015-03-17 – 2015-03-19
• [Presentation] AFMスクラッチ加工の加工特性の評価 (2014)
  • Author(s): 佐藤天哉 松井伸介 梅村茂
  • Organizer: 2014年度精密工学会秋季大会
  • Place of Presentation: 鳥取大学（鳥取県鳥取市）
  • Year and Date: 2014-09-16 – 2014-09-18
• [Presentation] AFMによる光ファイバ端面のナノ･マイクロ加工 第3報－低ダメージ加工の検討－ (2014)
  • Author(s): 佐藤天哉 松井伸介 梅村茂
  • Organizer: 2014年度砥粒加工学会学術講演会
  • Place of Presentation: 岩手大学（岩手県盛岡市）
  • Year and Date: 2014-09-11 – 2014-09-13
• [Presentation] Subsurface Damaged Layer Reduction with Atomic Force Microscope Scratch Nano Machinig on Optical fiber End Plane (2014)
  • Author(s): S. Matsui, S. Umemura, T. Sato
  • Organizer: european society for precision engineering & nanotechnology
  • Place of Presentation: Dubrovnik, Croatia
• [Presentation] Characterization of Nano-micro machining made by Atomic Force Microscope Scratch on Optical-fiber End Plane (2013)
  • Author(s): Shinsuke Matsui, Shigeru Umemura
  • Organizer: ASPE 2013 Annual Meeting
  • Place of Presentation: St. Paul USA
• [Presentation] AFMによる光ファイバ端面のナノ･マイクロ加工第２報-液雰囲気の検討- (2013)
  • Author(s): 佐藤天哉 松井伸介 梅村茂
  • Organizer: 砥粒加工学会
  • Place of Presentation: 日本大学 東京
• [Presentation] AFMによる光ファイバ端面のナノ・マイクロ加工 (2012)
  • Author(s): 松井伸介
  • Organizer: 砥粒加工学会学術講演会（ABTEC2012）
  • Place of Presentation: 同志社大学（京都府）