Budget Amount *help |
¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2014: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2013: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2012: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
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Outline of Final Research Achievements |
In this research, a thin film pressure and oil film thickness sensor which can be measured without giving form change and a rigidity change of a sliding surface were developed.It aimed at the sliding surfacebehavior and measurement of oil film pressure (tension) from the positive pressure to negative pressure of oil-film in this research.Moreover, in order to measure the oil film in narrow place, double layer film was considered.In multiplexing of the sensor, in order to realize the sensor of a high insulating property, new film forming technology (ALD method)was experimented.Finally, test equipment was manufactured and oil-film tension wasexperimented.
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