Development of Digital Acoustic Emission Sensor

• Project/Area Number: 24560170
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Design engineering/Machine functional elements/Tribology
• Research Institution: Hachinohe Institute of Technology (2014); Toyohashi University of Technology (2012-2013)
• Principal Investigator: MUTO Kazuo 八戸工業大学, 工学(系)研究科(研究院), 准教授 (90530874)
• Co-Investigator(Kenkyū-buntansha): KAWASHIMA Takahiro 豊橋技術科学大学, 工学(系)研究科(研究院), 准教授 (50378270)
• Project Period (FY): 2012-04-01 – 2015-03-31
• Project Status: Completed (Fiscal Year 2014)
• Budget Amount: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000); Fiscal Year 2014: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000); Fiscal Year 2013: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000); Fiscal Year 2012: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
• Keywords: アコースティックエミッション / ディジタル検出 / カンチレバーアレイ / ピエゾ抵抗素子 / 集積化センサ / アコースティック・エミッション / MEMS / デジタル検出

Outline of Final Research Achievements

Detection of acoustic emission (AE), which is defined as transient elastic waves within a material caused by the rapid release of a strain is essential for applications in in-situ and nondestructive monitoring of various conditions in materials. The objective of this research is to develop a digital AE sensor composed of an array of piezoresistive cantilevers having different resonant frequencies for dividing AE signals into each frequency domain and characterizing the signals. This research reports fabrication of an array of Si cantilevers and integratation of piezoresistive elements based on a silicon-on-insulator substrate for the digital detection of AE waves.
It is expected for this brand new digitalis AE sensor to be useful for applications of in-situ and nondestructive measurement of material conditions such as monitoring of plastic deformation of various materials which are used as car components or estimation of remaining life time of bearing in CNC machine tools etc.

Research Products

• [Journal Article] デジタル式アコースティックエミッションセンサの開発 (2015)
  • Author(s): 武藤 一夫，川島 貴弘，永井 萌土，柴田 隆行
  • Journal Title: 八戸工業大学紀要 第 34 巻 Volume: 34 Pages: 1-6
  • NAID: 130005031530
  • Peer Reviewed / Open Access / Acknowledgement Compliant
• [Journal Article] デジタル式アコースティックエミッションセンサの開発（第2 報）̶ピエゾ抵抗素子一体型カンチレバーアレイの作製プロセスの検討̶ (2014)
  • Author(s): 武藤 一夫，川島 貴弘，永井 萌土，柴田 隆行
  • Journal Title: 精密工学会，2014年度精密工学会春季大会学術講演会論文集,(2014.3) Volume: 1 Pages: 1-2
• [Journal Article] Fabrication of Acoustic Emission Sensor Integrated with Cantilever Array for Detection of Signals Divided into Frequency Domain (2012)
  • Author(s): Takahiro Kawashima, Atsushi Matsui, Kazuo Muto, Moeto Nagai, Takayuki Shibata
  • Journal Title: Key Engineering Materials Volume: 523-524 Pages: 575-580
  • DOI: 10.4028/www.scientific.net/kem.523-524.575
  • Peer Reviewed
• [Presentation] Fabrication and Characterization of Piezoresistive Cantilever Arrayfor Digital Sensing of Acoustic Emission (2014)
  • Author(s): T. Kawashima, K. Muto, T. Yamakami, M. Nagai, T. Shibata
  • Organizer: The 9th International Conference on MicroManufacturing (ICOMM 2014)
  • Place of Presentation: Singapore
• [Presentation] デジタル式アコースティックエミッションセンサの開発（第3報） ―ピエゾ抵抗素子一体型カンチレバーアレイの作製と電気的特性評価― (2014)
  • Author(s): 川島貴弘，武藤一夫，山上貴広，永井萌土，柴田隆行
  • Organizer: 2014年度精密工学会春季大会学術講演会
  • Place of Presentation: 東京
• [Presentation] Fabrication of piezoresistive cantilever array for sensing of acoustic emission in frequency domain (2013)
  • Author(s): T. Kawashima, K. Muto, K. Takahashi, M. Nagai, T. Shibata
  • Organizer: The 39th International Conference on Micro and Nano Engineering 2013 (MNE 2013)
  • Place of Presentation: London, UK
• [Presentation] デジタル式アコースティックエミッションセンサの開発（第2報） －ピエゾ抵抗素子一体型カンチレバーアレイの作製プロセスの検討－ (2013)
  • Author(s): 松井淳，高橋賢也，川島貴弘，武藤一夫，永井萌土，柴田隆行
  • Organizer: 2013年度精密工学会春季大会学術講演会
  • Place of Presentation: 東京工業大学 大岡山キャンパス（東京）
• [Presentation] Fabrication of digital acoustic emission sensor integrated with cantilever array and piezoresistive elements (2012)
  • Author(s): Takahiro Kawashima, Atsushi Matsui, Moeto Nagai, Takayuki Shibata, Kazuo Muto
  • Organizer: The 38th International Conference on Micro and Nano Engineering (MNE2012)
  • Place of Presentation: Toulouse, France
• [Remarks] 武藤研究室 八戸工業大学 大学院工学研究科 機械・生物化学工学専攻 工学部 機械情報技術学科 准教授
  • URL: http://www.mech.hi-tech.ac.jp/lab/kmuto/performance.html
• [Patent(Industrial Property Rights)] デジタル式アコースティックエミッションセンサ (2014)
  • Inventor(s): 武藤一夫，川島貴弘，柴田隆行
  • Industrial Property Rights Holder: 武藤一夫，川島貴弘，柴田隆行
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2012-057883
  • Filing Date: 2014-12-05