Development of Non-contact Conveyance Method of Thin Plate by Using Non-resonance Multiple-Phase Airflow

• Project/Area Number: 24560171
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Design engineering/Machine functional elements/Tribology
• Research Institution: Toyota Technological Institute
• Principal Investigator: FURUTANI Katsushi 豊田工業大学, 工学部, 教授 (00238685)
• Project Period (FY): 2012-04-01 – 2015-03-31
• Project Status: Completed (Fiscal Year 2014)
• Budget Amount: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000); Fiscal Year 2014: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000); Fiscal Year 2013: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000); Fiscal Year 2012: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
• Keywords: 空気流 / 非接触 / 薄板 / 搬送 / 多相 / 空気圧 / 進行波

Outline of Final Research Achievements

Non-contact transfer methods are required for glass plates and semiconductor wafers while keeping them clean. In the proposed transfer method, a thin plate was slightly tilted by blowing and sucking air from orifice restrictors and airflow is blown against the lower side of the plate so that the driving force is generated. Two patterns were found experimentally. The plate was continuously carried by shifting the airflow pattern in accordance with the plate position. Forty eight slots to supply airflow were arranged with an interval of 15 mm. A stainless steel plate with dimensions of 90 mm ×100 mm ×2 mm and 139 g was transferred at an acceleration of 15 mm/s/s.

Research Products

• [Journal Article] 多相空気流や超音波浮揚による薄板の非接触搬送 (2019)
  • Author(s): 古谷克司
  • Journal Title: 超音波TECHNO Volume: 31 Issue: 6 Pages: 97-100
• [Journal Article] Conveyance Method of Thin Plate by Using Multiple-phase Air Flow (2018)
  • Author(s): Katsushi Furutani, Yusuke Nakamura, Akira Urita
  • Journal Title: Electronics and Communications in Japan Volume: 101 Issue: 2 Pages: 51-60
  • DOI: 10.1002/ecj.12044
  • NAID: 210000173287
  • Peer Reviewed
• [Journal Article] Conveyance Method of Thin Plate by Using Multiple-phase Air Flow (2017)
  • Author(s): 古谷克司, 中村祐介, 瓜田明
  • Journal Title: IEEJ Transactions on Electronics, Information and Systems Volume: 137 Issue: 9 Pages: 1145-1152
  • DOI: 10.1541/ieejeiss.137.1145
  • NAID: 130006038810
  • ISSN: 0385-4221, 1348-8155
  • Peer Reviewed
• [Journal Article] 超音波近接場浮揚を利用した2次元搬送法における駆動力の発生メカニズム (2015)
  • Author(s): 古谷克司, 小野政貴
  • Journal Title: 日本AEM学会誌 Volume: 23 Pages: 414-421
  • NAID: 130005098689
  • Peer Reviewed
• [Presentation] Non-contact transfer method of thin plate using multiphase air flow (2017)
  • Author(s): Katsushi Furutani, Yusuke Nakamura, Akira Urita
  • Organizer: euspen's 17th International Conference and Exhibition, Hannover, Germany
• [Presentation] 多相空気流を用いた薄板の非接触搬送法(第2報)双方向への搬送 (2017)
  • Author(s): 古谷克司, 中村祐介, 瓜田明
  • Organizer: 2017年度精密工学会春季大会学術講演会, 横浜市港北区
• [Presentation] 多相空気流を用いた薄板の非接触双方向搬送法 (2016)
  • Author(s): 古谷克司, 中村祐介, 瓜田明
  • Organizer: 第21回知能メカトロニクスワークショップ, 北海道, 函館市
• [Presentation] 多相空気流を用いた薄板の非接触搬送法の基本構想 (2015)
  • Author(s): 古谷克司，中村祐介
  • Organizer: 第27回「電磁力関連のダイナミクス」シンポジウム
  • Place of Presentation: 長崎県佐世保市・ハウステンボス
  • Year and Date: 2015-05-14 – 2015-05-15
• [Presentation] 多相空気流を用いた薄板の非接触搬送(第1報)基本構想 (2015)
  • Author(s): 古谷克司，中村祐介
  • Organizer: 2015年度精密工学会春季大会学術講演会
  • Place of Presentation: 東京都文京区・東洋大学
  • Year and Date: 2015-03-17 – 2015-03-19
• [Presentation] Development of Transfer Device with Damper for Suppression of Reflected Wave (2012)
  • Author(s): Katsushi Furutani
  • Organizer: 5th International Conference on Positioning Technology
  • Place of Presentation: Taiwan
• [Presentation] Mechanism of Driving Force Generation in Two-Dimensional Non-Contact Transfer Method by Near-Field Ultrasonic Levitation (2012)
  • Author(s): Katsushi Furutani
  • Organizer: 27th Annual Meeting of American Society for Precision Engineering
  • Place of Presentation: San Diego, CA, USA
• [Presentation] アザラシ型機構による電極送り機構を用いた複数の微細穴の同時放電加工 (2012)
  • Author(s): 古谷克司
  • Organizer: 電気加工学会全国大会(2012)
  • Place of Presentation: 北九州市小倉北区