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Experimental investigations on the flow instability due to buoyancy and its application to film-deposition by CVD

Research Project

Project/Area Number 24560228
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Thermal engineering
Research InstitutionToyohashi University of Technology

Principal Investigator

KITAMURA Kenzo  豊橋技術科学大学, 工学(系)研究科(研究院), 教授 (20126931)

Project Period (FY) 2012-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2014: ¥520,000 (Direct Cost: ¥400,000、Indirect Cost: ¥120,000)
Fiscal Year 2013: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2012: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Keywords対流 / 伝熱 / 共存対流 / 強制対流 / 自然対流 / 流れの安定性 / 流れの可視化 / CVD / 流れの不安定 / 縦渦 / はく離
Outline of Final Research Achievements

It is known that the unstable flow due to buoyancy causes a non-uniform film-deposition over heated silicon substrate in a barrel or pedestal CVD reactor. In the present study, the flow instability due to buoyancy was exploited experimentally through the flow visualizations. Heat transfer measurements were also carried out to investigate the influence of the flow instability on the local heat transfer from the plate. The experiments were conducted with the upward-facing, heated wedges placed in a uniform vertical downward flow of air, which simulates the aforementioned reactors. The wedge-angle was varied systematically from vertical to horizontal. The results showed that the flow is most stable when the wedge-angles from 135 to 110°, besides that the heat transfer coefficients from the wedge become uniform at the identical angles.

Report

(4 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • 2012 Research-status Report
  • Research Products

    (5 results)

All 2015 2014 2013 2012

All Journal Article (2 results) (of which Peer Reviewed: 1 results) Presentation (3 results)

  • [Journal Article] 強制・自然共存対流の流動・伝熱問題2015

    • Author(s)
      北村健三
    • Journal Title

      機械の研究

      Volume: 67 Pages: 18-25

    • NAID

      40020309148

    • Related Report
      2014 Annual Research Report
  • [Journal Article] 一様な鉛直下降流中に設置された水平上向き加熱くさびまわりの強制―自然共存対流の流動と伝熱2013

    • Author(s)
      北村健三、光石暁彦、大畑亮祐、山崎慎司
    • Journal Title

      日本機械学会論文集

      Volume: 79 Pages: 199-213

    • NAID

      130003374739

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Presentation] 水平上向き加熱平板まわりの自然対流の流動・伝熱に及ぼす平板アスペクト比の影響2014

    • Author(s)
      北村健三
    • Organizer
      第51回日本伝熱シンポジウム
    • Place of Presentation
      浜松市
    • Year and Date
      2014-05-21 – 2014-05-23
    • Related Report
      2014 Annual Research Report
  • [Presentation] 45°傾斜した水平加熱正方形角柱まわりの強制―自然並行流共存対流の流動と伝熱2013

    • Author(s)
      木村文義、寺田卓正、北村健三
    • Organizer
      第50回日本伝熱シンポジウム
    • Place of Presentation
      仙台市
    • Related Report
      2013 Research-status Report
  • [Presentation] 一様な鉛直下降流中に設置された水平上向き加熱くさびまわりの強制―自然共存対流の流動と伝熱2012

    • Author(s)
      北村健三、山崎慎司、光石暁彦、木村文義
    • Organizer
      第49回日本伝熱シンポジウム講演論文集
    • Place of Presentation
      富山市
    • Related Report
      2012 Research-status Report

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Published: 2013-05-31   Modified: 2019-07-29  

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