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Development of red-color emission based on nitride semiconductor for white lighing

Research Project

Project/Area Number 24560362
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionTohoku University

Principal Investigator

MATSUOKA Takashi  東北大学, 金属材料研究所, 教授 (40393730)

Co-Investigator(Kenkyū-buntansha) HANADA Takashi  東北大学, 金属材料研究所, 助教 (80211481)
Project Period (FY) 2012-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2014: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2013: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2012: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Keywords窒化物半導体 / 発光ダイオード / 有機金属気相成長 / InGaN / MOVPE
Outline of Final Research Achievements

In this study, the realization of III-nitrides-based light-emitting diodes (LEDs) with the whole visible emission wavelength was demonstrated. N-polar crystal plane was adopted for the crystal growth for promoting indium incorporation into an InGaN layer, in order to achieve the long-wavelength emission. In the growth of N-polar InGaN/GaN multiple quantum wells (MQWs), the metastable zincblende (ZB) structure was unintentionally incorporated. Several growth conditions such as growth temperature and V/III source ratio were effective to suppress the inclusion of the ZB structure. By optimizing the growth conditions, the InGaN/GaN MQWs LED structures were grown. Clear emission was clearly observed under the operation of the current injection. As growth temperature for MQWs growth decreased, the emission color was successfully controlled from blue to red. These results will expand the high-efficient lighting based on LEDs.

Report

(4 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • 2012 Research-status Report
  • Research Products

    (42 results)

All 2015 2014 2013 2012

All Journal Article (10 results) (of which Peer Reviewed: 10 results) Presentation (32 results) (of which Invited: 7 results)

  • [Journal Article] Improvement of surface morphology of nitrogen-polar GaN by introducing indium surfactant during MOVPE growth2014

    • Author(s)
      T. Aisaka, T. Tanikawa, T. Kimura, K. Shojiki, T. Hanada, R. Katayama, and T. Matsuoka
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 53 Issue: 8 Pages: 085501-085501

    • DOI

      10.7567/jjap.53.085501

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of c-plane sapphire substrate miscut angle on indium content of MOVPE-grown N-polar InGaN2014

    • Author(s)
      K. Shojiki and R. Katayama(他6名)
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 53(5S1) Issue: 5S1 Pages: 05FL07-05FL07

    • DOI

      10.7567/jjap.53.05fl07

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Enhancement of surface migration by Mg doping in the metalorganic vapor phase epitaxy of N-polar (0001) GaN/sapphire2014

    • Author(s)
      T. Tanikawa, K. Shojiki, T. Aisaka, T. Kimura, S. Kuboya, T. Hanada, R. Katayama, T. Matsuoka
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 53 Issue: 5S1 Pages: 05FL05-05FL05

    • DOI

      10.7567/jjap.53.05fl05

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Effect of Sapphire Nitridation and Group-III Source Flow Rate Ratio on In-Incorporation into InGaN Grown by MOVPE2014

    • Author(s)
      J. H. Choi, K. Shojiki, T. Tanikawa, T. Hanada, R. Katayama, T. Matsuoka
    • Journal Title

      Joumal of Nanoscience and Nanotechynology

      Volume: 14 Issue: 8 Pages: 6112-6115

    • DOI

      10.1166/jnn.2014.8306

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Investigation of indium incorporation into InGaN by nitridation of sapphire substrate in MOVPE2013

    • Author(s)
      J. H. Choi and R. Katayama(他4名)
    • Journal Title

      phys. stat. sol. (c)

      Volume: 10(3) Issue: 3 Pages: 417-420

    • DOI

      10.1002/pssc.201200667

    • Related Report
      2013 Research-status Report 2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Optical properties of InN films grown by pressurized-reactor metalorganic vapor phase epitaxy2013

    • Author(s)
      Yuantao Zhang, Takeshi Kimura, Kiattiwut Prasertusk, Takuya Iwabuchi, Suresh Kumar, Yuhuai Liu, Ryuji Katayama, Takashi Matsuoka
    • Journal Title

      Thin Solid Films

      Volume: 536 Pages: 152-155

    • DOI

      10.1016/j.tsf.2013.04.004

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Phase diagram on phase purity of InN grown pressurized-reactor MOVPE2012

    • Author(s)
      Takeshi Kimura, Kiattiwut Prasertsuk, Yuantao Zhang, Yuhuai Liu, Takashi Hanada, Ryuji Katayama, Takashi Matsuoka
    • Journal Title

      physica status solidi (c)

      Volume: 9(3-4) Issue: 3-4 Pages: 654-657

    • DOI

      10.1002/pssc.201100390

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Relationship between residual carrier density and phase purity in InN grown by pressurized-reactor MOVPE2012

    • Author(s)
      Kiattiwut Prasertsuk, Masaki Hirata, Yuhuai Liu, Takeshi Kimura, Yuantao Zhang, Takuya Iwabuchi, Ryuji Katayama, Takashi Matsuoka
    • Journal Title

      physica status solidi (c)

      Volume: 9(3-4) Issue: 3-4 Pages: 681-684

    • DOI

      10.1002/pssc.201100404

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Effect of Nitridation on Indium-composition of InGaN Films2012

    • Author(s)
      J. H. Choi, S. Kumar, S. Y. Ji, K. Shojiki, T. Hanada, R. Katayama and T. Matsuoka
    • Journal Title

      Key. Eng. Mater.

      Volume: 508 Pages: 193-198

    • DOI

      10.4028/www.scientific.net/kem.508.193

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Tilted domain and indium content of MOVPE-grown InGaN layer on m-plane GaN substrate2012

    • Author(s)
      K. Shojiki and R. Katayama(他4名)
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: 51 Issue: 4S Pages: 04DH01-04DH01

    • DOI

      10.1143/jjap.51.04dh01

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Presentation] MOVPE成長N極性(0001)InGaN多重量子井戸構造と発光ダイオードの構造・光学特性2015

    • Author(s)
      正直 花奈子,崔 正焄,谷川 智之,窪谷 茂幸,花田 貴,片山 竜二,松岡 隆志
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学(神奈川県平塚市)
    • Year and Date
      2015-03-11 – 2015-03-14
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Crystallographic Polarity in Nitride Semicondcutors2014

    • Author(s)
      T. Matsuoka, T. Tanikawa, T. Kimura, K. Shojiki, T. Iwabuchi, and R. Katayama
    • Organizer
      2014 Intern.Symp. Crystal Growth and Crystal Technol.
    • Place of Presentation
      Wonju, Korea
    • Year and Date
      2014-11-12 – 2014-11-14
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Control of GaN growth orientation by MOVPE2014

    • Author(s)
      T. Tanikawa, K. Shojiki, T. Aisaka, T. Kimura, S. Kuboya, T. Hanada, T. Matsuoka, Y. Honda, H. Amano
    • Organizer
      2nd Intensive Discussion on Growth of Nitride Semiconductors (IDGN-2)
    • Place of Presentation
      東北大学片平キャンパス(宮城県仙台市)
    • Year and Date
      2014-10-29 – 2014-10-31
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Overview on Crystallographic Polarization2014

    • Author(s)
      T. Matsuoka, T. Tanikawa, T. Kimura, K. Shojiki, T. Iwabuchi, R. Katayama
    • Organizer
      2nd Intensive Discussion on Growth of Nitride Semiconductors (IDGN-2)
    • Place of Presentation
      東北大学片平キャンパス(宮城県仙台市)
    • Year and Date
      2014-10-29 – 2014-10-31
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] サファイア基板上MOVPE成長N極性面(000-1)InGaNを用いた赤・緑・青色発光ダイオードの作製2014

    • Author(s)
      正直 花奈子,崔 正焄,谷川 智之,窪谷 茂幸,花田 貴,片山 竜二,松岡 隆志
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学(北海道札幌市)
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Annual Research Report
  • [Presentation] Emission Wavelength Extension of Light Emitting Diode Using MOVPE-Grown N-Polar (000-1) InGaN2014

    • Author(s)
      K. Shojiki, J.H. Choi, T. Tanikawa, S. Kuboya, T. Hanada, R. Katayama, and T. Matsuoka
    • Organizer
      International Workshop on Nitride Semiconductors (IWN2014)
    • Place of Presentation
      Wroclaw, Poland
    • Year and Date
      2014-08-24 – 2014-08-29
    • Related Report
      2014 Annual Research Report
  • [Presentation] Suppression of metastable-phase inclusion in MOVPE-grown N-polar (000-1) InGaN/GaN multiple quantum wells2014

    • Author(s)
      K. Shojiki, J. H. Choi, T. Iwabuchi, N. Usami, T. Tanikawa, S. Kuboya, T. Hanada, R. Katayama and T. Matsuoka
    • Organizer
      第33回電子材料シンポジウム
    • Place of Presentation
      ラフォーレ修善寺(静岡県伊豆市)
    • Year and Date
      2014-07-09 – 2014-07-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] Realization of p-Type Conduction in Mg-Doped N-Polar (000-1) GaN Grown by Metalorganic Vapor Phase Epitaxy2014

    • Author(s)
      T. Tanikawa, J. H. Choi, K. Shojiki, S. Kuboya, R. Katayama, and T. Matsuoka
    • Organizer
      Conference on LED and Its Industrial Application (LEDIA '14)
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Year and Date
      2014-04-22 – 2014-04-24
    • Related Report
      2014 Annual Research Report
  • [Presentation] Suppression of Metastable-Phase Inclusion in MOVPE-Grown N-Polar (000-1) InGaN/GaN Multiple Quantum Wells2014

    • Author(s)
      K. Shojiki, J. H. Choi, T. Iwabuchi, N. Usami, T. Tanikawa, S. Kuboya, T. Hanada, R. Katayama, and T. Matsuoka
    • Organizer
      Conference on LED and Its Industrial Application (LEDIA '14)
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Year and Date
      2014-04-22 – 2014-04-24
    • Related Report
      2014 Annual Research Report
  • [Presentation] Effect of indium surfactant on MOVPE growth of N-polar GaN2014

    • Author(s)
      T. Aisaka, T. Tanikawa, T. Kimura, K. Shojiki, T. Iwabuchi, T. Hanada, R. Katayama, and T. Matsuoka
    • Organizer
      8th Intern. Symp. Medical, Bio- and Nano-Electronics
    • Place of Presentation
      Sendai, Japan
    • Related Report
      2013 Research-status Report
  • [Presentation] Crystallographic Polarity Dependence of Surface Morphology Evolution during MOVPE Growth of GaN/Sapphire2014

    • Author(s)
      N. Yoshinogawa, T. Iwabuchi, K. Shojiki, T. Kimura, T. Tanikawa, R. Katayama, and T. Matsuoka
    • Organizer
      8th Intern. Symp. Medical, Bio- and Nano-Electronics
    • Place of Presentation
      Sendai, Japan
    • Related Report
      2013 Research-status Report
  • [Presentation] Recent Trends in Wide-Gap LEDs and LDs from Epitaxial Growth to Devices Structures2014

    • Author(s)
      T. Matsuoka
    • Organizer
      Thailand National Science and Technology Development Agency (NSTDA)
    • Place of Presentation
      Bangok, Thailand
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] Improvement of surface morphology in (000-1) GaN/Sapphire grown by MOVPE with indium surfactant2013

    • Author(s)
      T. Tanikawa, T. Aisaka, T. Kimura, T. Iwabuchi, K. Shojiki, R. Katayama, T. Hanada, and T. Matsuoka
    • Organizer
      Conference on LED and its industrial application '13 (LEDIA '13)
    • Place of Presentation
      Yokohama, Japan
    • Related Report
      2013 Research-status Report
  • [Presentation] Improvement of Surface Morphology in (000-1) GaN/Sapphire Grown by MOVPE with Indium Surfactant2013

    • Author(s)
      T. Aisaka, T. Tanikawa, T. Kimura, T. Iwabuchi, K. Shojiki, R. Katayama, T. Hanada, and T. Matsuoka
    • Organizer
      Intern. Symp. Comp. Semcond. (ISCS2013)
    • Place of Presentation
      Kobe, Japan
    • Related Report
      2013 Research-status Report
  • [Presentation] Lattice-matching Substrates to InGaAlN and its Epitaxial Growth2013

    • Author(s)
      T. Matsuoka, T. Tanikawa, T. Iwabuchi, and K. Shojiki
    • Organizer
      2nd International Symposium on Single Crystals and Wafers
    • Place of Presentation
      Wonju, Korea
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] Evaluation and Solution of Metastable-Phase Inclusion in MOVPE-grown -c-plane InGaN/GaN Multiple Quantum Wells2013

    • Author(s)
      K. Shojiki, J. H. Choi, T. Iwabuchi, N. Usami, T. Tanikawa, S. Kuboya, T. Hanada, R. Katayama, T. Matsuoka
    • Organizer
      10th International Conference on Nitride Semiconductors(ICNS-10)
    • Place of Presentation
      Washington DC, USA
    • Related Report
      2013 Research-status Report
  • [Presentation] Influence of Mg-Doping on the Surface Morphology of (000-1) GaN/Sapphire Grown by Metalorganic Vapor Phase Epitaxy2013

    • Author(s)
      T. Tanikawa, T. Aisaka, S. Kuboya, T. Hanada, R. Katayama, and T. Matsuoka
    • Organizer
      10th International Conference on Nitride Semiconductors(ICNS-10)
    • Place of Presentation
      Washington DC, USA
    • Related Report
      2013 Research-status Report
  • [Presentation] Effect of c-plane Sapphire Substrate Miscut-angle on Indium Content of MOVPE-grown N-polar InGaN2013

    • Author(s)
      K. Shojiki, J. H. Choi, H. Shindo, T. Kimura, T. Tanikawa, T. Hanada, R. Katayama, and T. Matsuoka
    • Organizer
      2013 JSAP-MRS Joint Symposia
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2013 Research-status Report
  • [Presentation] Improvement of Surface Morphology of N-polar GaN by Introducing Indium Surfactant during MOVPE Growth2013

    • Author(s)
      T. Aisaka, T. Tanikawa, T. Kimura, K. Shojiki, T. Hanada, R. Katayama, and T. Matsuoka
    • Organizer
      2013 JSAP-MRS Joint Symposia
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2013 Research-status Report
  • [Presentation] In situ X-ray Diffraction during Reactive Deposition Epitaxy of FeSi2 on Si(001)2013

    • Author(s)
      T. Hanada, H. Tajiri, O. Sakata, and T. Matsuoka
    • Organizer
      2013 JSAP-MRS Joint Symposia
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2013 Research-status Report
  • [Presentation] Effect of Reactor Pressure on Rate-determining Process in InN Growth2013

    • Author(s)
      T. Kimura, K. Prasertsuk, Y. Zhang, T. Iwabuchi, Y. Liu, R. Katayama, and T. Matsuoka
    • Organizer
      2013 JSAP-MRS Joint Symposia
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2013 Research-status Report
  • [Presentation] Overview of Nitride Semiconductors2013

    • Author(s)
      T. Matsuoka
    • Organizer
      13 International Symposium on Optomechatronic Technologies
    • Place of Presentation
      Jeju, Korea
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] Investigation and Suppression of Metastable-phase Inclusion in MOVPE-grown -c-plane InGaN/GaN Multiple Quantum Wells2013

    • Author(s)
      K. Shojiki, J. H. Choi, T. Iwabuchi1, N. Usami, T. Tanikawa, S. Kuboya, T. Hanada, R. Katayama, and T. Matsuoka
    • Organizer
      KINKEN-WAKATE 2013 10th Materials Science School for Young Scientists
    • Place of Presentation
      Sendai Japan
    • Related Report
      2013 Research-status Report
  • [Presentation] MOVPE 成長N 極性InGaN におけるIn 組成のc 面サファイア基板微傾斜角依存性2013

    • Author(s)
      正直 花奈子,崔 正焄,進藤 裕文,木村 健司, 谷川 智之, 花田 貴,片山 竜二,松岡 隆志
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川
    • Related Report
      2012 Research-status Report
  • [Presentation] Comparison of growth behavior in thick InGaN on (000-1) and (0001) GaN /Sapphire by metalorganic vapor phase epitaxy2013

    • Author(s)
      T. Tanikawa, K. Shojiki, J.-H. Choi, R. Katayama, and T. Matsuoka
    • Organizer
      5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
    • Place of Presentation
      Nagoya, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] (0001)および(000-1)面GaN上へMOVPE成長したInGaNの結晶品質比較2012

    • Author(s)
      谷川智之, 片山竜二, 松岡隆志
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      松山
    • Related Report
      2012 Research-status Report
  • [Presentation] (0001)面、(000-1)面GaN上へMOVPE成長したInGaNの表面モフォロジーとIn取り込み2012

    • Author(s)
      谷川智之, 正直花奈子, 崔正焄, 片山竜二, 松岡隆志
    • Organizer
      第67回応用物理学会東北支部学術講演会
    • Place of Presentation
      仙台
    • Related Report
      2012 Research-status Report
  • [Presentation] MOVPE成長N極性InGaNにおけるIn組成のc面サファイア基板微傾斜角依存性2012

    • Author(s)
      正直花奈子, 崔正焄, 進藤裕文, 木村健司, 谷川智之, 花田貴, 片山竜ニ, 松岡隆志
    • Organizer
      第67回応用物理学会東北支部学術講演会
    • Place of Presentation
      仙台
    • Related Report
      2012 Research-status Report
  • [Presentation] MOVPE成長(000-1) GaNのステップフロー成長の促進2012

    • Author(s)
      逢坂崇, 正直花奈子, 岩渕拓也, 木村健司, 谷川智之, 花田貴, 片山竜二, 松岡隆志
    • Organizer
      第67回応用物理学会東北支部学術講演会
    • Place of Presentation
      仙台
    • Related Report
      2012 Research-status Report
  • [Presentation] Study of In-composition of faceted InGaN on m-plane GaN substrate using high-resolution microbeam XRD2012

    • Author(s)
      J-H Choi, K. Shojiki, T. Shimada, T. Tanikawa, T. Hanada, R. Katayama, Y. Imai, S. Kimura, and T. Matsuoka
    • Organizer
      International Workshop on Nitride Semiconductors 2012
    • Place of Presentation
      Sapporo, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] Comparison of crystalline quality in InGaN grown on (000-1) and (0001)GaN/Sapphire by metalorganic vapor phase epitaxy2012

    • Author(s)
      T. Tanikawa, R. Katayama, and T. Matsuoka
    • Organizer
      International Workshop on Nitride Semiconductors 2012
    • Place of Presentation
      Sapporo, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] Effect of Sapphire Nitridation and Group-III Source Flow Rate Ratio on In-incorporation into InGaN Grown by MOVPE2012

    • Author(s)
      J.H. Choi, K. Shojiki, T. Tanikawa, T. Hanada, R. Katayama, and T. Matsuoka
    • Organizer
      International Conference on Nano Science and Nano Technology
    • Place of Presentation
      Gwangju, Korea
    • Related Report
      2012 Research-status Report

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Published: 2013-05-31   Modified: 2019-07-29  

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