| Budget Amount *help |
¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2014: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2013: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
Fiscal Year 2012: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
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| Outline of Final Research Achievements |
The purpose of this research is the monolithic implementation of photodiode with silicon-on-insulator (SOI) circuits. SOI-CMOS technology is one of the promising techniques for LSI to perform high speed operation.
To improve the sensitivity of SOI photodiode, we developed SOI-PIN photodiode attached with gold (Au) nano particles. The diameter and the density of Au nano particles were optimized by simulation. Furthermore, we clarified the enhancement mechanism. During this research, we fabricated SOI photodiode with Au nano particles and measured the sensitivity. It has been demonstrated that two-fold enhancement was achieved in visible wavelength region by the attachment of Au nano particles.
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