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Lab-on-a-chip using compound semiconductor nanowires and a CMOS substrate

Research Project

Project/Area Number 24560414
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionSophia University

Principal Investigator

WAHO Takao  上智大学, 理工学部, 教授 (90317511)

Research Collaborator SHIMOMURA Kazuhiko  上智大学, 理工学部, 教授
PROST Werner  Duisburg-Essen大学
MICHIMATA Kenji  元上智大学大学院
MATSUSHIBA Ryo  元上智大学大学院
OHARA Kazuma  上智大学大学院
SHIMAMOTO Issei  上智大学大学院
YAMAZAKI Yuusuke  上智大学大学院
Project Period (FY) 2012-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2014: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2013: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2012: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Keywordsナノワイヤ / ΔΣ変調器 / A/D変換器 / ラボオンチップ / センサ / 逐次比較A/D変換器 / CMOS / 化合物半導体 / 異種技術集積 / 国際情報交換 / ドイツ / 誘電泳動 / 弱反転 / 逐次比較
Outline of Final Research Achievements

A 2nd-order delta-sigma modulator based on novel dynamic common-source integrators was designed by using 0.35-micron CMOS technology. The low-power operation was demonstrated with a bandwidth of 20 kHz and an effective-number-of-bit (ENOB) of 11.5 bits. A lab-on-a-chip was then fabricated by integrating InAs nanowires with a delta-sigma modulator on the same Si chip. The field-assisted self-assembly was used in the integration process. The nanowire resistance was measured digitally by the modulator. Characteristic responses against acetone, methanol, and water were obtained, indicating a high potential as a low-power and high-sensitive chemical sensor.

Report

(4 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • 2012 Research-status Report
  • Research Products

    (47 results)

All 2015 2014 2013 2012 Other

All Journal Article (18 results) (of which Peer Reviewed: 11 results) Presentation (26 results) (of which Invited: 3 results) Book (1 results) Remarks (2 results)

  • [Journal Article] Preheating temperature and growth temperature dependence of InP nanowires grown by self-catalytic VLS mode on InP substrate2015

    • Author(s)
      T. Ogino, M.Yamauchi, Y.Yamamoto, K.Shimomura, and T.Waho
    • Journal Title

      J. Crystal Growth

      Volume: 414 Pages: 161-166

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 粘菌ニューラルネット回路を用いたA/D変換器2015

    • Author(s)
      石田宇一, 山﨑雄介, 和保孝夫
    • Journal Title

      多値論理とその応用研究会研究技術報告

      Volume: MVL-15 Pages: 39-44

    • Related Report
      2014 Annual Research Report
  • [Journal Article] Non-binary Successive Approximation Analog-to-Digital Converters: A Survey2014

    • Author(s)
      T.Waho
    • Journal Title

      Proc. 2014 IEEE 44th International Symposium on Multiple-Valued Logic (ISMVL)

      Volume: 44 Pages: 73-78

    • DOI

      10.1109/ismvl.2014.21

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] An energy-efficient dynamic-integrator-based ΔΣ modulator2014

    • Author(s)
      R. Matsushiba, K. Ohara, T. Waho
    • Journal Title

      Proc. 2014 21st IEEE International Conference on Electronics, Circuits and Systems (ICECS)

      Volume: 21 Pages: 467-470

    • DOI

      10.1109/icecs.2014.7050023

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] キャパシタアレイ回路を用いた粘菌コンピューティングの基礎検討2014

    • Author(s)
      石田宇一, 和保孝夫
    • Journal Title

      多値論理研究ノート

      Volume: 37

    • Related Report
      2014 Annual Research Report
  • [Journal Article] An Energy-Efficient ΔΣ Modulator Using Dynamic-Common-Source Integrators2014

    • Author(s)
      Ryo MATSUSHIBA, Hiroaki KOTANI, Takao WAHO
    • Journal Title

      IEICE Trans. Electronics

      Volume: E97-C, No. 05

    • NAID

      130004519113

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] 低消費電力ΔΣ変調器のノイズ解析2014

    • Author(s)
      山口 友里,松芝 亮,和保 孝夫
    • Journal Title

      電子情報通信学会第27回多値論理とその応用研究会技術報告

      Volume: MVL14, No.1 Pages: 100-105

    • Related Report
      2013 Research-status Report
  • [Journal Article] InAsナノワイヤ/CMOS異種技術融合集積回路の試作2014

    • Author(s)
      道又賢司・島本一成・和保孝夫・荻野雄大・下村和彦
    • Journal Title

      電子情報通信学会信学技報

      Volume: 113, no. 449 (ED2013-141) Pages: 51-54

    • Related Report
      2013 Research-status Report
  • [Journal Article] A Successive Approximation A/D Converter Using Generalized Non-Binary Algorithm2013

    • Author(s)
      Yuki Kurisu, Tatsuya Sasaki, Takao Waho
    • Journal Title

      Proc. 43rd IEEE Int. Symp. Multiple-Valued Logic

      Volume: - Pages: 152-157

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Au-assisted growth of InAs nanowires on GaAs(111)B, GaAs(100), InP(111)B, InP(100) by MOVPE2013

    • Author(s)
      S. Murakami, H. Funayama, K. Shimomura, T. Waho
    • Journal Title

      Phys. Status Solidi

      Volume: C 10, No. 5

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Heterogeneous Integration of an InAs Nanowire with Energy-Efficient CMOS Delta-Sigma Modulator2013

    • Author(s)
      Kenji Michimata, Hiroaki Kotani, Tatsuro Watanabe, Hiroaki Funayama, Shin Murakami, Kazuhiko Shimomura, Takao Waho
    • Journal Title

      Proc. 2013 IEEE Sensors

      Volume: - Pages: 1-4

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] InAsナノワイヤの電界アシスト自己整合堆積プロセス2013

    • Author(s)
      船山裕晃・渡邉龍郎・道又賢司・村上 新・下村和彦・和保孝夫
    • Journal Title

      信学技報

      Volume: 112, no. 445, ED2012-136 Pages: 43-46

    • Related Report
      2012 Research-status Report
  • [Journal Article] InAs nanowire circuits fabricated by field-assisted self-assembly on a host substrate2012

    • Author(s)
      Kai BLEKKER, Rene RICHTER, Ryosuke ODA, Satoshi TANIYAMA, Oliver BENNER, Gregor KELLER, B. MUENSTERMANN, Andrey LYSOV, Ingo REGOLIN, Takao WAHO, Werner PROST
    • Journal Title

      IEICE Trans. on Electronics

      Volume: E95-C, No. 8 Pages: 1369-1375

    • NAID

      10031126701

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Energy Efficiency of Multi-bit delta-sigma Modulators Using Inverter-based Integrators2012

    • Author(s)
      Hiroaki Kotani, Ryoto Yaguchi, Takao Waho
    • Journal Title

      Proc. 42th IEEE Int. Symp. Multiple-Valued Logic

      Volume: - Pages: 203-207

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] A Low-Distortion Switched-Source-Follower Track-and-Hold Circuit2012

    • Author(s)
      Akinori Moriyama, Satoshi Taniyama, Takao Waho
    • Journal Title

      Proc. 19th IEEE International Conference on Electronics, Circuits, and Systems

      Volume: - Pages: 105-108

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] 冗長性を持つ逐次近似A/D変換器の設計2012

    • Author(s)
      栗栖裕樹,和保孝夫
    • Journal Title

      多値論理研究ノート

      Volume: 35

    • Related Report
      2012 Research-status Report
  • [Journal Article] 弱反転インバータ積分器を用いた低消費電力Δ∑変調器の試作評価2012

    • Author(s)
      小谷博亮、矢口僚人、和保孝夫
    • Journal Title

      第26回多値論理とその応用研究会秘術報告

      Volume: MVL13 Pages: 51-55

    • Related Report
      2012 Research-status Report
  • [Journal Article] ナノワイヤの堆積プロセスと回路応用2012

    • Author(s)
      和保 孝夫
    • Journal Title

      応用物理

      Volume: 第81巻 第12号 Pages: 1015-1019

    • NAID

      10031131312

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Presentation] ダイナミック積分器を用いた2次Δ∑変調器2015

    • Author(s)
      小原一馬・松芝 亮・和保孝夫
    • Organizer
      2015年電子情報通信学会総合大会
    • Place of Presentation
      草津市、滋賀県
    • Year and Date
      2015-03-13
    • Related Report
      2014 Annual Research Report
  • [Presentation] 自己触媒VLS法によるInPナノワイヤのTMI供給量依存性2015

    • Author(s)
      朝倉 啓太, 荻野 雄大, 下村 和彦 , 和保 孝夫
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      平塚市、神奈川県
    • Year and Date
      2015-03-13
    • Related Report
      2014 Annual Research Report
  • [Presentation] 自己触媒VLS法によるInP/GaInAs/InPコアシェルナノワイヤの成長2015

    • Author(s)
      荻野 雄大, 朝倉 啓太, 下村 和彦, 和保 孝夫
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      平塚市、神奈川県
    • Year and Date
      2015-03-12
    • Related Report
      2014 Annual Research Report
  • [Presentation] チャージシェア型非2進SAR ADCの設計2015

    • Author(s)
      山﨑雄介・和保孝夫
    • Organizer
      2015年電子情報通信学会総合大会
    • Place of Presentation
      草津市、滋賀県
    • Year and Date
      2015-03-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] InAsナノワイヤ/CMOS異種技術集積化とセンサ応用の可能性2015

    • Author(s)
      島本一成・細野 優・小原一馬・和保孝夫・荻野雄大・下村和彦
    • Organizer
      2015年電子情報通信学会総合大会
    • Place of Presentation
      草津市、滋賀県
    • Year and Date
      2015-03-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] レベルシフト型ダイナミック共通ソース積分器を用いた低消費電力2次ΔΣ変調器2014

    • Author(s)
      小原一馬・松芝 亮・和保孝夫
    • Organizer
      2014年電子情報通信学会ソサエティ大会
    • Place of Presentation
      徳島市、徳島県
    • Year and Date
      2014-09-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] 自己触媒VLS法によるInPナノワイヤの成長前基板加熱温度依存性2014

    • Author(s)
      荻野雄大,朝倉啓太,下村和彦,和保孝夫
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      札幌市、北海道
    • Year and Date
      2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] Growth temperature and pre-heating temperature dependence of InP nanowires grown by self-catalytic VLS mode2014

    • Author(s)
      T. Ogino, M.Yamauchi, Y.Yamamoto, K.Shimomura, and T.Waho
    • Organizer
      17th International Conference on Metalorganic Vapour Phase Epitaxy (ICMOVPE XVII)
    • Place of Presentation
      Lausanne, Switzerland
    • Year and Date
      2014-07-16
    • Related Report
      2014 Annual Research Report
  • [Presentation] Design of a Power-Efficient Delta-Sigma Modulator Using Dynamic Integrators2013

    • Author(s)
      Ryo Matsushiba, Yuri Yamaguchi, Hiroaki Kotani, Takao Waho
    • Organizer
      2013 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices
    • Place of Presentation
      Seoul, Korea
    • Related Report
      2013 Research-status Report
  • [Presentation] InAs and GaAs nanowires for electronics and optoelectronics2013

    • Author(s)
      W. Prost, F.-J. Tegude, and T. Waho
    • Organizer
      10th Topical Workshop on Heterostructure Microelectronics (TWHM)
    • Place of Presentation
      Hakodate, Japan
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] InAs-Nanowire CMOS Heterogeneous Integration Using Field-Assisted Self-Assembly2013

    • Author(s)
      K. Michimata, H. Kotani, T. Watanabe, H. Funayama, S. Murakami, K. Shimomura, T. Waho
    • Organizer
      10th Topical Workshop on Heterostructure Microelectronics (TWHM)
    • Place of Presentation
      Hakodate, Japan
    • Related Report
      2013 Research-status Report
  • [Presentation] An Energy-Efficient Delta-Sigma Modulator Using Dynamic-Common-Source Integrators2013

    • Author(s)
      Ryo Matsushiba, Hiroaki Kotani, Takao Waho
    • Organizer
      21st European Conference on Circuit Theory and Design (ECCTD)
    • Place of Presentation
      Dresden, Germany
    • Related Report
      2013 Research-status Report
  • [Presentation] ダイナミック積分器を用いた低消費電力2次ΔΣ変調器2013

    • Author(s)
      松芝 亮・矢口僚人・和保孝夫
    • Organizer
      2013年電子情報通信学会総合大会
    • Place of Presentation
      岐阜
    • Related Report
      2012 Research-status Report
  • [Presentation] 弱反転インバータ積分器を用いた低消費電力ΔΣ変調器2013

    • Author(s)
      小谷博亮・松芝 亮・和保孝夫
    • Organizer
      2013年電子情報通信学会総合大会
    • Place of Presentation
      岐阜
    • Related Report
      2012 Research-status Report
  • [Presentation] MOVPEによる低テーパを目指したInAsナノワイヤのVLS成長2013

    • Author(s)
      山内雅之,村上新,松本恵一,船山裕晃,下村和彦,和保孝夫
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      厚木
    • Related Report
      2012 Research-status Report
  • [Presentation] Au-Assisted Growth of InAs Nanowires on GaAs(111)B, GaAs(100), InP(111)B, InP(100) by MOVPE2012

    • Author(s)
      Shin Murakami, Akihiro Funayama, Kazuhiko Shimomura, Takao Waho
    • Organizer
      39th International Symposium on Compound Semiconductors
    • Place of Presentation
      Santa Barbara, CA, USA
    • Related Report
      2012 Research-status Report
  • [Presentation] InAs Nanowire Circuit Applications2012

    • Author(s)
      Takao Waho
    • Organizer
      Nano Science & Technology 2012
    • Place of Presentation
      青島、中国
    • Related Report
      2012 Research-status Report
    • Invited
  • [Presentation] 利得調整可能なダイナミック・ソースフォロワ積分器2012

    • Author(s)
      松芝 亮・矢口僚人・和保孝夫
    • Organizer
      電子情報通信学会2012年ソサエティ大会
    • Place of Presentation
      富山
    • Related Report
      2012 Research-status Report
  • [Presentation] 冗長Junction-Splitting容量アレイを用いたSAR ADC2012

    • Author(s)
      佐々木達也・和保孝夫
    • Organizer
      電子情報通信学会2012年ソサエティ大会
    • Place of Presentation
      富山
    • Related Report
      2012 Research-status Report
  • [Presentation] InAsナノワイヤのSi基板上への電界アシスト自己整合堆積2012

    • Author(s)
      道又賢司・船山裕晃・渡邉龍郎・村上 新・下村和彦・和保孝夫
    • Organizer
      電子情報通信学会2012年ソサエティ大会
    • Place of Presentation
      富山
    • Related Report
      2012 Research-status Report
  • [Presentation] Au微粒子を用いたGaAs(111)B基板上InAsナノワイヤのV/III比依存性2012

    • Author(s)
      村上 新,船山裕晃,下村和彦,和保孝夫
    • Organizer
      2012年 秋季 第73回応用物理学会学術講演会
    • Place of Presentation
      松山
    • Related Report
      2012 Research-status Report
  • [Presentation] A 2nd -Order Delta-Sigma Modulator Using Dynamic-Source-Follower Integrator

    • Author(s)
      Ryo Matsushiba, Hiroto Kotani, Ryoto Yaguchi, and Takao Waho
    • Organizer
      22th International Workshop on Post-Binary ULSI Systems
    • Place of Presentation
      Toyama, Japan
    • Related Report
      2013 Research-status Report
  • [Presentation] 2つのコンパレータを用いた非同期冗長SAR ADC

    • Author(s)
      栗栖裕樹・佐々木達也・和保孝夫
    • Organizer
      電子情報通信学会 2014年総合大会
    • Place of Presentation
      新潟
    • Related Report
      2013 Research-status Report
  • [Presentation] ダイナミック共通ソース積分器を用いた2次ΔΣ変調器の性能評価

    • Author(s)
      松芝 亮・小谷博亮・和保孝夫
    • Organizer
      電子情報通信学会 2014年総合大会
    • Place of Presentation
      新潟
    • Related Report
      2013 Research-status Report
  • [Presentation] 異種技術集積:ナノワイヤ、ΔΣ、非2進

    • Author(s)
      和保孝夫
    • Organizer
      日本学術振興会、光ネットワークシステム技術第171委員会、第50回研究会
    • Place of Presentation
      東京
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] MOVPE による低テーパを目指したInAs ナノワイヤのVLS 成長

    • Author(s)
      山内雅之, 村上新, 松本恵一, 船山裕晃, 下村和彦, 和保孝夫
    • Organizer
      第60回応用物理学関係連合講演会
    • Place of Presentation
      神奈川
    • Related Report
      2013 Research-status Report
  • [Book] ナノワイヤ最新技術の基礎と応用展開2013

    • Author(s)
      和保 孝夫
    • Publisher
      シーエムシー出版
    • Related Report
      2012 Research-status Report
  • [Remarks] 研究発表

    • URL

      http://pweb.sophia.ac.jp/sscd/Publication/index.htm

    • Related Report
      2014 Annual Research Report
  • [Remarks] 和保研究室紹介

    • URL

      http://pweb.cc.sophia.ac.jp/sscd/

    • Related Report
      2013 Research-status Report

URL: 

Published: 2013-05-31   Modified: 2019-07-29  

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