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Elucidation of mechanisms of function development of novel silicon/nitrogen-doped diamond-like carbon

Research Project

Project/Area Number 24560812
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Inorganic materials/Physical properties
Research InstitutionHirosaki University

Principal Investigator

NAKAZAWA Hideki  弘前大学, 理工学研究科, 准教授 (90344613)

Project Period (FY) 2012-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2014: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2013: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2012: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywordsカーボン材料
Outline of Final Research Achievements

Diamond-like carbon (DLC) films have attracted considerable attention because they have unique properties such as high hardness, high wear resistance, low friction, chemical inertness, biocompatibility, and optical transparency. Therefore, DLC films are used for a wide range of industrial applications such as protective and solid lubricant coatings. In this study, we have developed silicon/nitrogen-codoped DLC films that were superior to conventional DLC films in tribological and mechanical properties and these thermal stabilities. In addition, we investigated correlations between the structure and the tribological and mechanical properties of the DLC films to obtain new knowledge for the further improvement of their properties.

Report

(4 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • 2012 Research-status Report
  • Research Products

    (21 results)

All 2015 2014 2013 2012

All Journal Article (5 results) (of which Peer Reviewed: 5 results,  Acknowledgement Compliant: 2 results) Presentation (16 results) (of which Invited: 1 results)

  • [Journal Article] Deposition of silicon-doped diamond-like carbon films by plasma-enhanced chemical vapor deposition using an intermittent supply of organosilane2015

    • Author(s)
      H. Nakazawa, R. Kamata, S. Okuno
    • Journal Title

      Diamond and Related Materials

      Volume: 51 Pages: 7-13

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Effects of frequency of pulsed substrate bias on structure and properties of silicon-doped diamond-like carbon films by plasma deposition2015

    • Author(s)
      H. Nakazawa, R. Kamata, S. Miura, S. Okuno
    • Journal Title

      Thin Solid Films

      Volume: 547 Pages: 93-98

    • DOI

      10.1016/j.tsf.2014.11.078

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Influence of duty ratio of pulsed bias on structure and properties of silicon-doped diamond-like carbon films by plasma deposition2013

    • Author(s)
      H. Nakazawa, R. Kamata, S. Miura, S. Okuno
    • Journal Title

      Thin Solid Films

      Volume: 539 Pages: 134-138

    • DOI

      10.1016/j.tsf.2013.05.089

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Effects of pulse bias on structure and properties of silicon/nitrogen-incorporated diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition2013

    • Author(s)
      H. Nakazawa, S. Miura, R. Kamata, S. Okuno, M. Suemitsu, T. Abe
    • Journal Title

      Applied Surface Science

      Volume: 264 Pages: 625-632

    • DOI

      10.1016/j.apsusc.2012.10.082

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Hydrogen Effects of the Prop-erties of Silicon/Nitrogen-Coincorporated Diamond-Like Carbon Films Prepared by Plasma-Enhanced Chemical Vapor Deposition2012

    • Author(s)
      H. Nakazawa, S. Okuno, S. Miura, R. Kamata
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51 Issue: 7R Pages: 075801-075801

    • DOI

      10.1143/jjap.51.075801

    • NAID

      40019351216

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Presentation] Deposition and Characterization of Silicon/Nitrogen-Doped Diamond-Like Carbon Films2015

    • Author(s)
      H. Nakazawa
    • Organizer
      Energy Materials Nanotechnology Cancun Meeting 2015
    • Place of Presentation
      Cancun, Mexico
    • Year and Date
      2015-06-08 – 2015-06-11
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Electrical and optical properties of nitrogen-doped DLC films prepared by plasma-enhanced chemical vapor deposition2015

    • Author(s)
      M.Tsuchiya, K.Magara, K.Tokuda, Y.Enta, Y.Suzuki, T.Takami, H.Ogasawara, H.Nakazawa
    • Organizer
      9th International Conference on New Diamond and Nano Carbons 2015
    • Place of Presentation
      Shizuoka Granship
    • Year and Date
      2015-05-24 – 2015-05-28
    • Related Report
      2014 Annual Research Report
  • [Presentation] 高周波プラズマ化学気相成長法による窒素添加DLC薄膜の電気的特性および光学的特性2014

    • Author(s)
      土屋政人、真柄晃平、徳田健吾、遠田義晴、高見貴弘、中澤日出樹
    • Organizer
      応用物理学会第69回東北支部学術講演会
    • Place of Presentation
      東北大学
    • Year and Date
      2014-12-04 – 2014-12-05
    • Related Report
      2014 Annual Research Report
  • [Presentation] 土屋 政人、真柄 晃平、徳田 健吾、中澤 日出樹2014

    • Author(s)
      中澤日出樹、真柄晃平、土屋政人、徳田健吾
    • Organizer
      第28回ダイヤモンドシンポジウム
    • Place of Presentation
      東京電機大学
    • Year and Date
      2014-11-19 – 2014-11-21
    • Related Report
      2014 Annual Research Report
  • [Presentation] プラズマ化学気相成長法による窒素添加DLC薄膜の膜特性評価2014

    • Author(s)
      土屋 政人、真柄 晃平、徳田 健吾、中澤 日出樹
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Annual Research Report
  • [Presentation] Influence of source gases on properties of silicon/nitrogen codoped diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition2014

    • Author(s)
      H. Nakazawa, K. Magara, M. Tsuchiya, K. Tokuda
    • Organizer
      Diamond and Carbon Materials 2015
    • Place of Presentation
      Madrid, Spain
    • Year and Date
      2014-09-07 – 2014-09-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] 高周波プラズマ化学気相成長法による窒素添加DLC薄膜の特性評価2014

    • Author(s)
      土屋政人、真柄晃平、徳田健吾、中澤日出樹
    • Organizer
      電子部品・材料研究会
    • Place of Presentation
      山形大学
    • Year and Date
      2014-09-04 – 2014-09-05
    • Related Report
      2014 Annual Research Report
  • [Presentation] Mechanical and Tribological Properties of Boron, Nitrogen-Incorporated Diamond-Like Carbon Films Prepared by Pulsed Laser Deposition2014

    • Author(s)
      H. Nakazawa, R. Osozawa
    • Organizer
      The 15th IUMRS-International Conference in Asia
    • Place of Presentation
      Fukuoka University
    • Related Report
      2013 Research-status Report
  • [Presentation] Deposition of silicon-doped diamond-like carbon films by plasma-enhanced chemical vapor deposition using an intermittent supply of organosilane2013

    • Author(s)
      H. Nakazawa, R. Kamata, S. Okuno
    • Organizer
      International Conference on Diamond and Carbon Materials 2013
    • Place of Presentation
      Riva del Garda, Italy
    • Related Report
      2013 Research-status Report
  • [Presentation] 基板バイアスがSiおよびN共添加DLC膜特性に及ぼす影響2013

    • Author(s)
      真柄晃平,奥野さおり,大西悠介,中澤日出樹
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学
    • Related Report
      2013 Research-status Report
  • [Presentation] SiおよびN共添加DLC膜の熱的安定性2013

    • Author(s)
      中澤日出樹、奥野さおり、真柄晃平
    • Organizer
      第27回ダイヤモンドシンポジウム
    • Place of Presentation
      日本工業大学
    • Related Report
      2013 Research-status Report
  • [Presentation] レーザーアブレーション法によるダイヤモンドライクカーボン薄膜へのホウ素および窒素の添加効果2012

    • Author(s)
      毛内裕介、遲澤遼一、中澤日出樹
    • Organizer
      電気学会 電子・情報・システム部門大会
    • Place of Presentation
      弘前大学
    • Related Report
      2012 Research-status Report
  • [Presentation] マグネトロンスパッタ法によるDLC薄膜の窒素添加効果2012

    • Author(s)
      河端聡、川上裕也、中澤日出樹
    • Organizer
      電気学会 電子・情報・システム部門大会
    • Place of Presentation
      弘前大学
    • Related Report
      2012 Research-status Report
  • [Presentation] 有機シランの間欠供給を用いた高周波プラズマCVD法によるSi添加DLC薄膜の作製2012

    • Author(s)
      中澤日出樹、鎌田亮輔、奥野さおり
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学
    • Related Report
      2012 Research-status Report
  • [Presentation] Influence of parameter of pulsed substrate bias on structure and properties of silicon-doped diamond-like carbon films deposited by plasma-enhanced chemical vapor deposition2012

    • Author(s)
      S. Okuno, R. Kamata, H. Nakazawa
    • Organizer
      11th Asia-Pacific Conference on Plasma Science and Technology and 25th Symposiumu on Plasma Science for Materials
    • Place of Presentation
      京都大学
    • Related Report
      2012 Research-status Report
  • [Presentation] モノメチルシランの間欠供給を用いた高周波プラズマCVD法によるSi添加ダイヤモンドライクカーボンの膜特性評価2012

    • Author(s)
      中澤日出樹、鎌田亮輔、奥野さおり
    • Organizer
      第32回表面科学学術講演会
    • Place of Presentation
      東北大学
    • Related Report
      2012 Research-status Report

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Published: 2013-05-31   Modified: 2019-07-29  

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