What should we do for fabrication of silicon nano structures using soft lithography techniques ?

• Project/Area Number: 24560861
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Structural/Functional materials
• Research Institution: Toyo University
• Principal Investigator: HANAJIRI TATSURO 東洋大学, 理工学部, 教授 (30266994)
• Co-Investigator(Kenkyū-buntansha): MAEKAWA Toru 東洋大学, 理工学部, 教授 (40165634) ; NAKAJIMA Yoshikata 東洋大学, 学際・融合科学研究科, 准教授 (40408993) ; MIZUKI Toru 東洋大学, 学際・融合科学研究科, 准教授 (80408997) ; HIGASHI Toshiaki 東洋大学, バイオ・ナノエレクトロニクス研究センター, 研究助手 (90624742)
• Project Period (FY): 2012-04-01 – 2015-03-31
• Project Status: Completed (Fiscal Year 2014)
• Budget Amount: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000); Fiscal Year 2014: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000); Fiscal Year 2013: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000); Fiscal Year 2012: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
• Keywords: SPM / μ-TAS / SOQ / SOI / GO / rGO / ECM / ＭＰＣ / PCR / ＧＯ / シリコンナノ粒子 / MPC / μ‐TAS

Outline of Final Research Achievements

We established some techniques critical for design and fabrication bio-nano fusion systems by using soft lithography. We succeeded in developing a high-performance SPM for soft lithography. This SPM has atomic spatial resolution, and it has advantages for next-generation ultra fine patterning. We proposed that PDMS, grapheme and related materials should be helpful for ultra fine patterning of Si wires to develop novel devices for bio-nano fusion systems. We characterized fundamental properties of the advanced materials, and optimized their coating conditions for soft lithography. Finally, we proposed that SOI(Silicon On Insulator) wafers or SOQ (Silicon On Quartz) wafers should be favorable for platforms of bio-nano fusion systems, and we succeeded in analyzing the behaviors of electric fields in quarts layers of SOI wafers or SOQ wafers by formulating models using conformal transformation technique.

Research Products

• [Journal Article] Patterning: N2-Plasma-Assisted One-Step Alignment and Patterning of Graphene Oxide on a SiO2/Si Substrate Via the Langmuir-Blodgett Technique (2015)
  • Author(s): N. Chauhan,, V, Palaninathan, S. Raveendran, AC Poulose, Y .Nakajima, T. Hasumura, T. Uchida, T. Hanajiri, T .Maekawa and DS.Kumar
  • Journal Title: ADVANCED MATERIALS INTERFACES Volume: 2 Issue: 5
  • DOI: 10.1002/admi.201400515
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Synthesis of an Ultradense Forest of Vertically Aligned Triple-Walled Carbon Nanotubes of Uniform Diameter and Length Using Hollow Catalytic Nanoparticles (2014)
  • Author(s): A. Baliyan, Y. Nakajima, T. Fukuda, T. Uchida, T. Hanajiri, and T. Maekawa
  • Journal Title: JOURNAL OF THE AMERICAN CHEMICAL SOCIETY Volume: 136 Issue: 3 Pages: 1047-1053
  • DOI: 10.1021/ja410794p
  • Peer Reviewed
• [Journal Article] Modeling of Drain Electric Flux Passing Through the BOX Layer in SOI MOSFETs-Part I: Preparation for Modeling Based on Conformal Mapping (2014)
  • Author(s): T. Yamada. T. Hanajiri, and T. Toyabe
  • Journal Title: IEEE Transactions on Electron Devices Volume: 61 Issue: 9 Pages: 3023-3029
  • DOI: 10.1109/ted.2014.2325595
  • Peer Reviewed
• [Journal Article] Modeling of Drain Electric Flux Passing Through the BOX Layer in SOI MOSFETs-Part II: Model Derivation and Validity Confirmation (2014)
  • Author(s): T. Yamada. T. Hanajiri, and T. Toyabe
  • Journal Title: IEEE Transactions on Electron Devices Volume: 61 Issue: 9 Pages: 3030-3035
  • DOI: 10.1109/ted.2014.2340900
  • Peer Reviewed
• [Journal Article] Improvement of electrical characterisutics of local BOX MOSFETs by heavily doped structures and eludiation of the related mechanism (2013)
  • Author(s): T.Yamada, Y.Nakajima,T.Hanajiri,T.Toyabe and T.Sugano
  • Journal Title: Journal of Computational Electronics Volume: 12 Issue: 2 Pages: 1-8
  • DOI: 10.1007/s10825-013-0549-5
  • Peer Reviewed
• [Journal Article] Quantitative Extraction of Electric Flux in the Buried-Oxide Layer and Investigation of Its Effects on MOSFET Characteristics (2013)
  • Author(s): Yamada, Tatsuya, Abe, Shumpei, Nakajima, Yoshikata, Hanajiri, Tatsuro, Toyabe, Toru, Sugano, Takuo
  • Journal Title: IEEE TRANSACTIONS ON ELECTRON DEVICES Volume: 60 Issue: 12 Pages: 3996-4001
  • DOI: 10.1109/ted.2013.2284792
  • Peer Reviewed
• [Journal Article] Suppression of Drain-Induced Barrier Lowering in Silicon-on-Insulator MOSFETs Through Source/Drain Engineering for Low-Operating-Power System-on-Chip Applications (Erratum to vol 60, pg 260, 2013) (2013)
  • Author(s): Yamada, Tatsuya, Nakajima, Yoshikata, Hanajiri, Tatsuro, Sugano, Takuo
  • Journal Title: IEEE TRANSACTIONS ON ELECTRON DEVICES Volume: 60 Issue: 12 Pages: 4281-4283
  • DOI: 10.1109/ted.2013.2286957
  • Peer Reviewed
• [Journal Article] Ecofriendly Route for the Synthesis of Highly Conductive Graphene Using Extremophiles for Green Electronics and Bioscience (2013)
  • Author(s): S. Raveendran, N. Chauhan, Y. Nakajima, H. Toshiaki, S. Kurosu, Y. Tanizawa, R. Tero, Y. Yoshida, T. Hanajiri, T. Maekawa, P. M. Ajayan, A. Sandhu and D. S. Kumar
  • Journal Title: Part. Part. Syst. Charact Volume: 30 Issue: 7 Pages: 573-578
  • DOI: 10.1002/ppsc.201200126
  • Peer Reviewed
• [Journal Article] CoFe2O4 nanoparticles as a catalyst: synthesis of a forest of vertically aligned CNTs of uniform diameters by plasma-enhanced CVD (2013)
  • Author(s): Baliyan Ankur, Fukuda Takahiro, Hayasaki Yasuhiro, Uchida Takashi, Nakajima Yoshikata, Hanajiri Tatsuro, Maekawa, Toru
  • Journal Title: JOURNAL OF NANOPARTICLE RESEARCH Volume: 15 Issue: 6 Pages: 1693-1693
  • DOI: 10.1007/s11051-013-1693-3
  • Peer Reviewed
• [Journal Article] Precise Control of the Number of Walls of Carbon Nanotubes of a Uniform Internal Diameter (2013)
  • Author(s): A. Baliyan, Y. Hayasaki, T. Fukuda, T. Uchida, Y. Nakajima, T. Hanajiri, T. Maekawa,
  • Journal Title: JOURNAL OF PHYSICAL CHEMISTRY C Volume: 117 Issue: 1 Pages: 683-686
  • DOI: 10.1021/jp309894s
  • Peer Reviewed
• [Journal Article] Suppression of Drain-Induced Barrier Lowering in Silicon-on-Insulator MOSFETs Through Source/Drain Engineering for Low-Operating-Power System-on-Chip Applications (2013)
  • Author(s): T. Yamada,Y. Nakajima,T.Hanajiri,T.Sugano
  • Journal Title: IEEE Transactions on Electron Devices Volume: 60 Issue: 1 Pages: 260-207
  • DOI: 10.1109/ted.2012.2225063
  • Peer Reviewed
• [Journal Article] Intracellular trafficking of superparamagnetic iron oxide nanoparticles conjugated with TAT peptide: 3-dimensional electron tomography analysis (2012)
  • Author(s): BG, Nair, T. Fukuda, T. Mizuki, T. Hanajiri, T. Maekawa,
  • Journal Title: BIOCHEMICAL AND BIOPHYSICAL RESEARCH COMMUNICATIONS Volume: 421 Issue: 4 Pages: 763-767
  • DOI: 10.1016/j.bbrc.2012.04.080
  • Peer Reviewed
• [Presentation] 電気泳動コールター法における精度向上 (2015)
  • Author(s): 清水 俊彰、水木 徹、鵜飼 智文、東 利晃、中島 義賢、花尻 達郎
  • Organizer: 2015年第62回応用物理学会春季学術講演会
  • Place of Presentation: 東海大学（湘南キャンパス）
  • Year and Date: 2015-03-14
• [Presentation] SOQ MOSFET特性の照射光波長依存性 (2015)
  • Author(s): 西澤 悠佑、山田 辰哉、東 利晃、中島 義賢、花尻 達郎
  • Organizer: 2015年第62回応用物理学会春季学術講演会
  • Place of Presentation: 東海大学（湘南キャンパス）
  • Year and Date: 2015-03-11
• [Presentation] Portable PCR devices based on thermal generation of magnetic nanoparticles under AC magnetic fields for rapid DNA examination (2014)
  • Author(s): T.Higashi, N.Minegishi,S.Suzukki,D.Sato,T.Ukai,A.Echigo,Y.Nagaoka,R.Usami,T.Hanajiri and T.Maekawa
  • Organizer: The 12th International Symposium on Bioscience and Nanotechnology
  • Place of Presentation: 東洋大学川越キャンパス内バイオ・ナノエレクトロニクス研究センター
  • Year and Date: 2014-11-14 – 2014-11-15
• [Presentation] The improvement of accuracy and precesion of zeta potentials in electrophesis Coulter method (2014)
  • Author(s): T.Shimizu, T.Ukai, T.Higashi, Y.Nakajima and T.Hanajiri
  • Organizer: The 12th International Symposium on Bioscience and Nanotechnology
  • Place of Presentation: 東洋大学川越キャンパス内バイオ・ナノエレクトロニクス研究センター
  • Year and Date: 2014-11-14 – 2014-11-15
• [Presentation] Green, simple synthesisi of biocompatible, SERS active silver nanoparticles (2014)
  • Author(s): V.A.Kumar, Y.Katsube,Y.Nagaoka, T.Uchida,T.Mizuki,Y.Nakajima,T.Hanajiri and T.Maekawa
  • Organizer: The 12th International Symposium on Bioscience and Nanotechnology
  • Place of Presentation: 東洋大学川越キャンパス内バイオ・ナノエレクトロニクス研究センター
  • Year and Date: 2014-11-14 – 2014-11-15
• [Presentation] 霧化塗布法PEDOT:PSSのテクスチャーSi上へのミスト輸送,基板付着過程の診断 (2014)
  • Author(s): 大木達也，菅原広充，市川浩気，古佩儒，藤山和彦，花尻達郎，石川良，上野啓司，孫建文，白井肇
  • Organizer: 2014年第75回応用物理学会秋季学術講演会
  • Place of Presentation: 北海道大学（札幌キャンパス）
  • Year and Date: 2014-09-18
• [Presentation] Interfacial Defects Peculiar to Silicon on Insulator (SOI) Wafers (2012)
  • Author(s): Q.Zhao, H. Miyazawa, Y. Nakajima, T. Hanajiri, and T. Sugano
  • Organizer: 1st International Conference of Young Researchers on Advanced Materials
  • Place of Presentation: Singapore
• [Presentation] Novel PCR models using hysteresisi loss heating of magnetic nanoparticles for development of portabile DNA testing micro-devices (2012)
  • Author(s): T.Higashi,H.Minegishi,Y.Nagaoka,A.Echigo,R.Usami,T.Maekawa,T.Hanajiri
  • Organizer: BNERC and IJAA international symposium on advanced science and technology
  • Place of Presentation: Toyo Univ.,Tokyo
• [Presentation] Compatibility of graphene sheets with blodd components (2012)
  • Author(s): Y.Yoshihara,H.Uchida,T.Shimizu,T.Mizuki,Y.Nakajima, T.Hanajiri
  • Organizer: BNERC and IJAA international symposium on advanced science and technology
  • Place of Presentation: Toyo Univ.,Tokyo
• [Presentation] In-depth profiling of inteefacial defects peculiar to silicon on insulator (SOI) wafers (2012)
  • Author(s): Q.Zhao, Y. Nishizawa, Y. Nakajima, T. Hanajiri, and T. Sugano
  • Organizer: BNERC and IJAA international symposium on advanced science and technology
  • Place of Presentation: Toyo Univ.,Tokyo
• [Presentation] Proposal of silicon optical devices on quartz wafers and experimental demonstration of their advantages
  • Author(s): Yusuke Nishizawa, Yoshikata Nakajima, Tatsuro Hanajiri
  • Organizer: The 11th International Symposium on Bioscience and Nanotechnology
  • Place of Presentation: 東洋大学 白山キャンパス円了ホール
• [Presentation] The influence of the coating of channel surfaces with MPC on ζpotential causing electroosmotic flow in ECM
  • Author(s): Yuusuke Yoshihara, Toshiaki Shimizu, Tsuneyuki Arakawa, Yuusuke Ito,Syougo Shimazaki, Yuusuke Shigemori, Yoshikata Nakajima, Tatsuro Hanajiri
  • Organizer: The 11th International Symposium on Bioscience and Nanotechnology
  • Place of Presentation: 東洋大学 白山キャンパス円了ホール
• [Presentation] Continuous flow PCR devices using hysteresis loss heating of magnetic nanoparticles under AC magnetic fields for rapid PCR examination
  • Author(s): Toshiaki Higashi, Hiroaki Minegishi, Yutaka Nagaoka, Akinobu Echigo, Yusuke Nishizawa, Yoshikata Nakajima, Tatsuro Hanajiri
  • Organizer: The 11th International Symposium on Bioscience and Nanotechnology
  • Place of Presentation: 東洋大学 白山キャンパス円了ホール
• [Presentation] The influence of channel surface coating on z potential causing electroosmotic flow
  • Author(s): Yusuke Yoshihara, Toshiaki Shimizu, Yoshikata Nakajima, Tatsuro Hanajiri
  • Organizer: 2013 International Semiconductor Device Research Symposium
  • Place of Presentation: Hyatt Regency Bethesda, One Bethesda Metro Center (7400 Wisconsin Ave), Maryland, USA 20814
• [Remarks] 花尻 達郎 (電気電子情報工学科) | 東洋大学研究者情報データベース
  • URL: http://ris.toyo.ac.jp/profile/ja.E9ubqpa7sXFL5l2KBlAmXQ==.html
• [Remarks] 東洋大学 量子デバイス工学研究室 発表論文
  • URL: http://quantum.eng.toyo.ac.jp/journals/index.html
• [Remarks] 東洋大学 バイオ・ナノエレクトロニクス研究センター 研究成果：論文リスト
  • URL: http://www.toyo.ac.jp/site/bnel/publications.html