| Project/Area Number |
24560874
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Material processing/treatments
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| Research Institution | The University of Tokyo |
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Principal Investigator |
KAMIKO MASAO 東京大学, 生産技術研究所, 助教 (80334366)
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| Research Collaborator |
HA Jae-Geun
KYUNO Kentaro
SUENAGA Ryo
KOO Jung-Woo
NOSE Kenji
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| Project Period (FY) |
2012-04-01 – 2015-03-31
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| Project Status |
Completed (Fiscal Year 2014)
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| Budget Amount *help |
¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2014: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2013: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2012: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
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| Keywords | ナノ材料 / 自己組織化 / 微細加工 / 脱濡れ / 熱凝集 / 結晶成長 / マイクロ・ナノデバイス / ナノデバイス / 局在表面プラズモン共鳴 |
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| Outline of Final Research Achievements |
We have fabricated self-organized nano-structured metallic films using bilayer (or seed layer assisted) agglomeration (BLA or SLAA) phenomena by sputtering. We demonstrated that the insertion of a thin seed layer (Ti, Fe, etc.) between a substrate and a Au or Ag layer promoted agglomeration and generated good-quality nanostructured films, such as nanodot or nanorod. A summary of this studies reveals that applying the BLA to the fabrication of nanodots resulted in (1) a manufactured film that has strong adhesion to the substrate, (2) a decrease in the agglomeration temperature, (3) enhancement of the epitaxial growth, and (4) formation of a nanostructure that reflects the surface symmetry of the substrate.
Based on the studies, we concluded that the mechanism of the BLA is based on the reduction in the surface energy in the film system and the enhancement of the thermal stress generated in the film. Typical optical absorbance spectra of the nanodots fabricated by BLA were also obtained.
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