Flexible beam profile laser system and its application for improvement of dielectric constant of electric ceramics thin layer
| Project/Area Number |
24560881
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Material processing/treatments
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| Research Institution | Osaka University |
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Principal Investigator |
ABE NOBUYUKI 大阪大学, 接合科学研究所, 特任教授 (90127176)
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| Project Period (FY) |
2012-04-01 – 2015-03-31
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| Project Status |
Completed (Fiscal Year 2014)
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| Budget Amount *help |
¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000)
Fiscal Year 2014: ¥130,000 (Direct Cost: ¥100,000、Indirect Cost: ¥30,000)
Fiscal Year 2013: ¥520,000 (Direct Cost: ¥400,000、Indirect Cost: ¥120,000)
Fiscal Year 2012: ¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
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| Keywords | 高速度表面熱処理 / 半導体レーザ / アニーリング / 薄膜 / 高精度表面熱処理 / コーティング / プラズマ処理・レーザー加工 |
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| Outline of Final Research Achievements |
Purpose of this research is to develop a new annealing technology to increase dielectric constant of electro-ceramics without heat affection on base material. A flexible beam system using fiber coupled diode lasers was developed and the beam parameters are found for improvement on dielectric constant of electro-ceramics thin layer.
A 600W class flexible beam system was developed by combining 25W pig tail type diode laser units having a flat-top beam of 0.3mm x 2.6mm. Dielectric constant of 5micron-thick BaTiO3 layer formed by AD (Aerozol Deposition) method was increased to the same level of 30minites electric furnace treatment by high speed scanning of 300mm/s, with less heat damage of base material of 0.2mm-thick Cu plate.
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Report
(4 results)
Research Products
(4 results)
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[Presentation] 粉末粒径が成膜条件に及ぼす影響2014
Author(s)
谷川 大地, 阿部 信行, 塚本 雅裕, 山崎 裕之, 林 良彦, 辰巳 佳宏, 米山 三樹男
Organizer
溶接学会 平成26年度秋季全国大会
Place of Presentation
黒部市宇奈月国際会館
Year and Date
2014-09-10 – 2014-09-12
Related Report
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