Flexible beam profile laser system and its application for improvement of dielectric constant of electric ceramics thin layer

• Project/Area Number: 24560881
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Material processing/treatments
• Research Institution: Osaka University
• Principal Investigator: ABE NOBUYUKI 大阪大学, 接合科学研究所, 特任教授 (90127176)
• Project Period (FY): 2012-04-01 – 2015-03-31
• Project Status: Completed (Fiscal Year 2014)
• Budget Amount: ¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000); Fiscal Year 2014: ¥130,000 (Direct Cost: ¥100,000、Indirect Cost: ¥30,000); Fiscal Year 2013: ¥520,000 (Direct Cost: ¥400,000、Indirect Cost: ¥120,000); Fiscal Year 2012: ¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
• Keywords: 高速度表面熱処理 / 半導体レーザ / アニーリング / 薄膜 / 高精度表面熱処理 / コーティング / プラズマ処理・レーザー加工

Outline of Final Research Achievements

Purpose of this research is to develop a new annealing technology to increase dielectric constant of electro-ceramics without heat affection on base material. A flexible beam system using fiber coupled diode lasers was developed and the beam parameters are found for improvement on dielectric constant of electro-ceramics thin layer.
A 600W class flexible beam system was developed by combining 25W pig tail type diode laser units having a flat-top beam of 0.3mm x 2.6mm. Dielectric constant of 5micron-thick BaTiO3 layer formed by AD (Aerozol Deposition) method was increased to the same level of 30minites electric furnace treatment by high speed scanning of 300mm/s, with less heat damage of base material of 0.2mm-thick Cu plate.

Research Products

• [Journal Article] レーザクラッディングにおけるビームプロファイルが皮膜特性に及ぼす影響 (2014)
  • Author(s): 谷川 大地, 阿部 信行, 塚本 雅裕, 林 良彦, 山﨑 裕之, 辰巳 佳宏, 米山 三樹男
  • Journal Title: レーザ加工学会誌 Volume: 21,2 Pages: 41-53
  • NAID: 40020209095
  • Peer Reviewed
• [Presentation] 粉末粒径が成膜条件に及ぼす影響 (2014)
  • Author(s): 谷川 大地, 阿部 信行, 塚本 雅裕, 山崎 裕之, 林 良彦, 辰巳 佳宏, 米山 三樹男
  • Organizer: 溶接学会 平成26年度秋季全国大会
  • Place of Presentation: 黒部市宇奈月国際会館
  • Year and Date: 2014-09-10 – 2014-09-12
• [Presentation] ビームパラメータが皮膜特性に及ぼす影響 (2014)
  • Author(s): 谷川大地、阿部信行、塚本雅裕、林良彦、山崎裕之、辰巳佳宏、米山三樹男
  • Organizer: 溶接学会 平成26年度春季全国大会
  • Place of Presentation: 東京ビッグサイト
  • Year and Date: 2014-04-24 – 2014-04-26
• [Presentation] 半導体レーザーによる微細アニーリング
  • Author(s): 谷川大地、阿部信行、塚本雅裕、舟田義則、森正和
  • Organizer: レーザー学会学術講演会第３４回年次大会
  • Place of Presentation: 北九州国際会議場